FC6500 TOKYOKEISO | Alldatasheet

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The FC6500 series is a separate-type flow control system that captures flow signals from various sensors in analog form and controls valves to stabilize the flow rate at the target value. It consists of a control valve, of which the wetted parts are made of fluorocarbon resin, and a flow controller.  Flow control valve : FCV series  Flow controller : FCA6500 series The FC6500 series can control a wide range of flow rates with an extensive lineup of control valves. Its design with physically sepa- rated control valve and control unit enhances safety and layout flexibility. The FC6500 series is ideal for process management of chemical liquids and deionized water in semiconductor and other manufac- turing processes. Besides flow rate, the FC6500 series can also be used as a tem- perature or pressure control system by regulating the flow control valve.

FEATURES

❏ Enhanced safety and layout flexibility The flow detector and the control valve in the process fluid part are separated from the measurement and control part, ensuring enhanced protection against liquid leakage as well as greater layout flexibility. ❏ Support for a wide flow range The FCV series control valves can cover a wide range of flow rates, from a minimum of 10 to 100 mL/min up to 1 to 10 L/min. ❏ CE marking Complies with EU EMC, RoHS2, and low voltage requirements (EMC standards: EN61326-1:2013, EN61326-2-3:2013) Flow Controller with All Wetted Parts Made of Fluorocarbon Resin Separate-type Flow Control System MAIN APPLICATIONS ❏ Flow rate setting for chemical liquids and DIW By installing the FCA6500 series in the supply line for various chemical liquids and DIW, which was previously controlled by a metering pump or pressure feed tank, highly accurate and stable supply control is possible. ❏ Concentration control The control units installed in both chemical liquids and DIW lines enable stable concentration control when diluting the chemical liquids with DIW to keep the concentration at a certain level. ❏ Flow rate and pressure control of branch lines The control units installed in each line branched from the main line enable the flow rate to be kept stable without mutual inter - ference between the lines. Also, pressure control of the main line can be achieved by in- stalling control valves in bypass lines. TG-F2306-E00 1st edition Mar 2023 K

FC6500 Series Separate-type Flow Control System TG-F2306-E00 2 TOKYO KEISO CO., LTD. SPECIFICATIONS Control Valve Model FCV-1000S FCV-3000 Actuator High-resolution stepping motor Coupling cable Multi-core cable, PVC cover, 5 m (standard) Wetted part material PTFE, PFA End connection (tube OD size) Ø3/8", Ø1/2" Ø1/4" Controllable differential pressure 0.05 to 0.2 MPa Maximum operating pressure 0.3 MPa Fluid temperature 5 to 50ºC Ambient temperature 5 to 50ºC Controller Model FCA6510 FCA6520 FCA6530 Power supply 24 V DC ± 10% Consumption current 200 mA At startup: 1 A Analog input (Current flow rate) 4 to 20 mA DC 0 to 10 V DC 4 to 20 mA DC Input impedance: 250 Ω Input impedance: 730 kΩ Input impedance: 250 Ω Digital input (Change of control) Non-voltage contact input Close ON: Start control, Open OFF: Stop control Analog output (Flow rate re-output) 1 to 5 V DC 0 to 10 V DC 4 to 20 mA DC Allowable load resistance: 500 kΩ or higher Allowable load resistance: 500 kΩ or higher Allowable load resistance: 500 Ω or lower Digital output (Alarm) Open collector output (rated value: 30 V DC, 50 mA) Logic: A (NO)/B (NC) set at the factory Display 2 lines, 16 alphanumeric letters LCD with a backlight Alarm: red (LED), status: green (LED) Display digits, unit X.XXX to XXXX (4 significant digits) mL/min, L/min, L/h, %, kPa, ºC, etc. Construction/ Installation Indoor use (IP 20 equivalent), panel mount Wiring Power supply line (grounding line), valve cable, signal lines Connector Divided-type tension spring connection 3P , 5P , 6P , 10P Housing mate- rial and color ABS, black Ambient temperature 0 to 50ºC (except LCD) Control accuracy Flow rate (PV) > 30%FS: ±3% of the target value (SP) Flow rate (PV) ≤ 30%FS: ±5% of the target value (SP) Response Response time within 3 seconds * Analog inputs from detectors must be updated without delay. MODEL CODE FC65  –  /  Specification Remarks Electrical specifica- tions 4 to 20 mA/1 to 5 V FCA6510 2 0 to 10 V/0 to 10 V FCA6520 3 4 to 20 mA/ 4 to 20 mA FCA6530 * Others Valve model

0 FCV-3000 5 types, 10 mL/min

1 FCV-1000S 6 types, 200 mL/min

3 FCV-3000D Double seal (chemi-

cally resistant) * Others Flow range 02 10 to 100 mL/min FCV-3200 03 20 to 200 mL/min FCV-3300 04 50 to 500 mL/min FCV-3400 05 100 to 1000 mL/min FCV-3500 06 200 to 2000 mL/min FCV-3600/1100S 07 300 to 3000 mL/min FCV-1200S 08 400 to 4000 mL/min FCV-1300S 09 600 to 6000 mL/min FCV-1400S 10 800 to 8000 mL/min FCV-1500S 11 1 to 10 L/min FCV-1600S * Others Valve connection size (OD) 2 1/4 tube connection FCV-3000 series 3 3/8 tube connection FCV-1000S (4 L/min or lower) 4 1/2 tube connection FCV-1000S only (6 L/min or higher) * Others Special specification (2) Blank Standard * Others * The code will be named according to the specification.

FC6500 Series Separate-type Flow Control System TG-F2306-E00 TOKYO KEISO CO., LTD. 3 EXTERNAL DIMENSIONS FCV1000S (3/8") FCV1000S (1/2") FCV-3000 FCV-3000D 2-M5 Depth 6 For /f_ixing 2-M3 Depth 5 For /f_ixing 2-M3 Depth 5 For /f_ixing 2-M5 Depth 6 For /f_ixing

FC6500 Series Separate-type Flow Control System TG-F2306-E00 4 TOKYO KEISO CO., LTD. FCA6500 Panel cut (Thickness 0.8 to 5 mm) 112.8 ( 139.5 ) Controller terminal diagram

FC6500 Series Separate-type Flow Control System TG-F2306-E00 TOKYO KEISO CO., LTD. 5 Head Of/f_ice :Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558 Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922 * Speci/f_ication is subject to change without notice. Wiring CN No. Polarity Description CN No. Polarity Description Motor drive connector Power connector

1 FG Motor ground 1 +24 V Power2 Green Motor A phase + 2 0 V

3 Black Motor A phase − 3 FG Frame ground

4 White Motor B phase +

5 Red Motor B phase − 1 Unused

1 + Control start/stop input *1 3 + Flow rate alarm 12 – 4 – 3 + Valve abnormal alarm output 5 + Flow rate alarm 24 – 6 –

5 Unused

Serial communication connector 6 1 For maintenance use7 + Flow output 2 8 – 3 9 + Flow input10 – *1 CN2 1, 2 Non-voltage input Close: Start control, Open: Stop CONTROL PERFORMANCE AND ACCURACY The FCA6500 is a feedback type controller that captures the current flow rate (PV values) in analog form and automatically adjusts the control valve opening to stabilize the flow rate at the target flow rate (SP value) set on the indicator. Although it controls flow rate within ±3% of the set point within 3 seconds, the performance depends on the data update cycle and time constant of sensors. Be careful when selecting detectors, because sensors with a sampling period or time constant of 100 ms or longer cause delays in the controller response. CAUTIONS 1) The control valve should be installed on the downstream side of the flowmeter. 2) The control valve and flowmeter (detector) should be piped within 500 mm of each other. 3) Do not use this control valve for piping with large pulsation (e.g. fluid supply by a diaphragm pump, etc.). 4) For combining with ultrasonic flowmeters (UCUF series), select the FC6000 series for the flow controller. 5) Cascade (RSP) control by analog input of the target flow rate can be achieved by using a signal conversion unit. Contact us.