CLFC300 TOKYOKEISO | Alldatasheet
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Technical content
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2 TOKYO KEISO CO., LTD. TG-F1086-2E CLFC
300 Series Closed Loop Flow Controller
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TOKYO KEISO CO., LTD. 35('& $PEF $-'$ ᶃ$POOFD UJPOTJ[F ᶄ'JUUJOH ᶅ'MPXSBOHF ᶆ"OBMPHJOQVUPVUQVU 4FUQPJOU'MPXPVU ᶇ7BMWFUZQF ᶈ.PVOUJOH ᶉ&MFDUSJDBMDPOOFDUJPO &YBNQMF "DPOUSPMMFSXJUIBDPOOFDUJPOTJ[FPG qPXSBUFPGN-NJO BOBMPHJOQVUBOEPVUQVUPGUPN" BUUBDIFEXJUIBOFFEMFUZQFWBMWFBOEDPOOFDUPST UPCFJOTUBMMFEIPSJ[POUBMMZ XJMMCFTQFDJpFEBTGPMMPXT /PUFT $IPPTFUIFQJODIUZQFGPSTMVSSZUPBWPJEEFQPTJUJPO5IFqPXSBOHFPGQJODIUZQFqPXDPOUSPMMFSTJTMJNJUFEUPUPN-NJOPOMZ 5IFQPTUVSFPGUIFJOOFSqPXNFUFSEJ⒎FSTJOIPSJ[POUBMBOEWFSUJDBMNPVOUJOH4FMFDUBOBQQSPQSJBUFNPVOUJOHGPSNFBTVSFNFOU 5IFIFBUGSPNUIFJOUFHSBUFEFMFDUSPOJDDJSDVJUNBZSBJTFUIFUFNQFSBUVSFPGUIFqVJESFUBJOFEJOUIFDPOUSPMMFSQJQJOH $POTVMUVTGPSPUIFSPQUJPOBMSFRVJSFNFOUT ᶃ ˎˎ ᶄ ᶅ ˎˎˎ ᶆ ˎˎ ᶇ ᶈ ᶉ ʵʵʵ ʵ 3FNBSLT ɹ $-'$BOBMPHUZQF 0UIFST PQUJPOBM 'MBSF 1JMMBS4 4UBOEBSE UPN-NJO UPN-NJO UPN-NJO UPN-NJO UPN-NJO UPN-NJO UPN-NJO UPN-NJO UPN-NJO 0UIFST PQUJPOBM UP7UP7 UPN"UPN" 0UIFST PQUJPOBM /FFEMFUZQFGPSDIFNJDBMTBOEQVSFXBUFS 1JODIUZQFGPSTMVSSZ 45"163& )PSJ[POUBM 7FSUJDBM )JSPTF)3DPOOFDUPS $-'$ʵ5ʵʵ%ʵ/) ᶃ ᶄ ᶅ ᶆ ᶇᶈᶉ .0%&-$0%&
4 TOKYO KEISO CO., LTD. TG-F1086-2E CLFC 2UZ 3FNBSLT.BUFSJBM '$74 6$6'&; 4VQFSʢПʣ 4VQFSʢПʣ 8IJUF 8IJUF ʵ (SFFOʷ )331$ )331$ ʵ 1'" 1'" 1'" 17%' 17%' &1%. ʵ ʵ ʵ $POUSPMWBMWF 'MPXTFOTPS */TJEFpUUJOH 065TJEFpUUJOH 4JEFDPWFS $BTJOH $BTFTFBMJOH -&%JOEJDBUPS *0DPOOFDUPS $POOFDUPSGPSNBJOUFOBODF $PNQPOFOUT7FSUJDBMNPVOUJOHUZQF )PSJ[POUBMNPVOUJOHUZQF 7BMWFUZQF /FFEMF 1JODI 'JUUJOH 'MBSF 4VQFS 'MBSF 4VQFS $-'$ 1PXFS 4FOTPS 7BMWF %*.&/4*0/4
TOKYO KEISO CO., LTD. 55('& ❏ %FEJDBUFEDBCMFT 0VUQVU *OQVU 'MPXPVU 'MPXPVU 4FOTPSBMBSN 4FOTPSBMBSN 7BMWFBMBSN 7BMWFBMBSN ;FSPBEKVTU 1PXFS 1PXFS 4FUQPJOU 4FUQPJOU %$%$ 7%$ $POWFSUFS ᶅᶄᶃ ᶉᶈᶇᶆ ᶌᶋᶊ ᶎᶍ 1JO/P 4FSWJDFT 1PXFS 7%$ 4FUQPJOU UPN" 'MPXPVU UPN" 4FOTPSBMBSN 7BMWFBMBSN ;FSPBEKVTU ʴ ʵ ʴ ʵ ʴ ʵ ʴ ʵ ʴ ʵ *0DPOOFDUPS )331$ 8JSFDPMPS%PU 0SBOHFSFE 0SBOHFCMBDL :FMMPXSFE :FMMPXCMBDL (SBZSFE (SBZCMBDL 8IJUFSFE 8IJUFCMBDL 1JOLSFE 1JOLCMBDL 0SBOHFSFE 0SBOHFCMBDL 4J[F "8( "8( ❏ *0DJSDVJUT .VMUJDPSFTIJFMEDBCMF )FBUTISJOLUVCF П ʢ)*304&ʣ ʶ ʶ ʶ )314$ ❏ 5FSNJOBMT $POTVNBCMFQBSUT 5IF5)7UVCFVTFEJOQJODIUZQFJTPOFPGDPOTVNBCMFQBSUT5IF UJNJOHPGJUTSFQMBDFNFOUEFQFOETPOUIFPQFSBUJOHDPOEJUJPOT*UJTSFD PNNFOEFEUPSFQMBDFUIF5)7UVCFXJUIBOFXPOFBGUFSBCPVU UJNFTPGDPOUSPMNPUJPOTPSBGUFSBCPVUPOFZFBSʟTPQFSBUJPOGSPN UIFTUBSUVQ 5IFIJHIMZEVSBCMF45"163&UVCFOFFETOPQFSJPEJDBMSFQMBDFNFOU Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558 Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922 * Specification is subject to change without notice.