FC6000

FC6000 TOKYOKEISO | Alldatasheet

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5('& +BOTUFEJUJPO , Controller with an Ultrasonic Flow Converter for Compact System Design FC6000 Series Flow Control System OUTLINE The FC6000 series is a separate-type flow controller system which enables a compact system design. It consists of control valve, flow detector, and flow controller. The FCA6000 series flow rate controller integrates highly accurate ultrasonic flowmeter.

• Control valve: FCV series
• Flow detector: UCUF series
• Flow rate controller: FCA6000 series The FC6000 series can control a wide range of flow rates with an extensive lineup of flow rate detectors and control valves. Also, higher safety and greater freedom in layout can be realized by separating the measurement and control part from the process fluid part, such as the flow detector and the control valve. The reliable FC6000 series is best suited for handling chemical liquids such as in semiconductor processes which require highly accurate flow rate control.

FEATURES

❏ Improved bubble resistance and flow measurement The conventional ultrasonic flowmeters used to have difficulties in measuring fluids containing bubbles because the bubbles disturb the propagation of ultrasound waves. The FCA6000 series uses our unique, proven signal processing technology, which makes it possible to measure the flow even when the bubbles contain. Furthermore, by detecting and removing abnormal outputs based on our extensive field experience, bubble resistance has been greatly improved, as well as measurement stability of the flowmeter. ❏ Enhanced safety and freedom in layout The flow detector and the control valve in the process fluid part are separated from the measurement and control part, ensuring enhanced protection against liquid leakage as well as greater freedom in layout. ❏ Support for a wide flow range The FCA6000 series covers a wide range of flow rate, from a minimum of 2.5 to 25 mL/min up to 1 to 10 L/min. ❏ Low power consumption The FCA6000 series consumes less current than existing converters. ❏ CE marking Complies with EU EMC, RoHS2, and low voltage requirements (EMC standards: EN61326-1:2013, EN61326-2-3:2013) ❏ High corrosion resistance The UCUF series uses highly corrosion resistant PFA and PTFE for the wetted parts and can be used to handle chemical liquids in the semiconductor and other industries. MAIN APPLICATIONS ❏ Flow rate setting for chemical liquids and DIW By installing the FCA6000 series in the supply line for various chemical liquids, which was previously controlled by a metering pump or pressure feed tank, high accurate and stable supply control is possible. ❏ Concentration control The control units installed in chemical liquid and pure water lines enable stable concentration management when diluting the chemical liquids with pure water to keep the concentration at a certain level. ❏ Flow control of branch lines The control units installed in each line branched from the main line enable a stable flow rate to be maintained without mutual interference between the lines.

FC6000 Series Flow Control System 2 TOKYO KEISO CO., LTD. SPECIFICATIONS Control Valve Model FCV-1000S FCV-3000 FCV-3000T Actuator High resolution stepping motor Coupling cable Multi-core cable, PVC cover, 5 m (standard) Wetted part material PTFE, PFA End connection (tube OD size) П3/8”, П1/2” П1/4” П4mm Controllable differential pressure 0.05 to 0.2 MPa Maximum operating pressure 0.3 MPa Fluid temperature 5 to 50°C 10 to 50°C Ambient temperature 5 to 50°C 10 to 50°C Ultrasonic Flowmeter (Detector) Model UCUF- 04K 06K 10K 04E 06E 04M 06M Nominal size 4 mm 6 mm 10 mm 4 mm 6 mm 4 mm 6 mm Wetted part material New PFA PFA End connection (tube OD size) П3/8” П1/2” П3/8” П1/4” П3/8” Coupling cable Coaxial cable ×2, PVC cover, 5 m (standard) Construction Jet-proof (IP65) Ambient temperature Fluid temperature: 10 to 60°C Fluid temperature : 10 to 90°C Accuracy Velocity 1m/s or larger: ±1% of the reading Velocity less than 1m/s: less than ±0.01 m/s Note: The accuracy of UCUF-04K/C with full scale less than 50 mL/min is ±2 mL/min Controller Model FCA6100 FCA6200 FCA6300 Power supply 24 V DC ±10% Consumption current 200 mA At starting time: 1A Output signal Flow rate signal 4-20 mA DC (load resistance : 0 to 500Ω) 0–10 V DC (output Impedance : 500Ωʣ 4-20 mA DC (load resistance : 0 to 500Ω) Flow rate alarm Open collector output (rated value: 30 V DC, 50 mA) Action mode Logic: A (NO)/B (NC) set at the factory Pulse output Open collector output (rated value: 30 V DC, 50 mA) Pulse width: 0.5 ms, 50 ms, 100 ms Input signal Flow set point 1–5 V DC 0–10 V DC rN"%$ Control start/ stop Relay contact (on: start, off: stop) Totalizer reset Relay contact (one shot) Sensor Exclusive cable (SMB connecter) Display 2 lines, 16 alphanumeric letters LCD with a backlight Alarm: red (LED), status: green (LED) Construction/ Installation Indoor use (IP 20 equivalent), panel mount Wiring Power supply line, grounding line, signal lines, sensor cable (×2), valve cable Connector Divided-type tension spring connection, 5P , 10P , 3P , 6P Housing material and color ABS, black Ambient temperature 0 to 50°C (except LCD) Control accuracy Flow rate > 30%FS: ±3% of the target value, flow rate ≤ 30%FS : 5% of the target value, response time within 3 seconds Conversion Cable Model Specification CONC-76-301 SMB connector with a lock between the SMB connector (plug) CONC-56-151 BNC connector (jack) between the SMB connector (plug) MODEL CODE Electrical specifications (output/input) 1 4-20 mA/1-5 V FCA6100 2 0-10 V/0-10 V FCA6200 3 4-20 mA/ 4-20 mA FCA6300 ✽ Others Valve model

0 FCV-3000

7 types, 2.5 mL/min up to

2 L/min

1 FCV-1000S

6 types, 200 mL/min up to

10 L/min

2 FCV-3000T Pinch tube, 50 to

3 FCV-3000D

(chemical resistant) ✽ Others Special specification (1)

0 Standard

✽ Others Flow range – 00 2.5 to 25 mL/min FCV-3000 01 5 to 50 mL/min FCV-3100 02 10 to 100 mL/min FCV-3200 03 20 to 200 mL/min FCV-3300 04 50 to 500 mL/min FCV-3400/ 3000T 05 100 to 1000 mL/min FCV-3500 06 200 to 2000 mL/min FCV-3600/ 1100S 07 300 to 3000 mL/min FCV-1200S 08 400 to 4000 mL/min FCV-1300S 09 600 to 6000 mL/min FCV-1400S 10 800 to 8000 mL/min FCV-1500S 11 1 to 10 L/min FCV-1600S ✽ Others Valve connection size (OD) 1 П4 tube connection FCV-3000T 2 1/4 tube connection FCV-3000 Series 3 3/8 tube connection FCV-1000S ʢLess than

4 L/minʣ

ʢ6 L/min or largerʣ ✽ Others Flowmeter model – 4M UCUF-04M MAX. 2 L/min 4K UCUF-04K MAX. 3 L/min4E UCUF-04E 6M UCUF-06M MAX. 8 L/min6K UCUF-06K 6E UCUF-06E 10K UCUF-10K MAX. 10 L/min ✽ Others Flowmeter shape (1) (tube direction) U U shape Standard Z Z shape ✽ Others Flowmeter shape (2) (cable direction) N Standard The same direction with the tube W Opposite side UCUF-04M only Special specification (2) / Blank Standard ✽ Others ✽ The code will be named according to the specification.

FC6000 Series Flow Control System TOKYO KEISO CO., LTD. 3 EXTERNAL DIMENSION (mm) '$74ʢʡʣ '$74 ʢʡʣ '$7 '$75 '$7% Տ՞Ւ%FQUIՓ DG;>M6I>DC Տ՞Ր%FQUIՒ DG;>M6I>DC Տ՞Ր%FQUIՒ DG;>M6I>DC Տ՞Ր%FQUIՒ DG;>M6I>DC Տ՞Ւ%FQUIՓ DG;>M6I>DC

FC6000 Series Flow Control System 4 TOKYO KEISO CO., LTD. 6$6', 6$6', 6$6',; Օ՞Ց%FQUIՎՍ 6$6',; 6$6', 6$6',; Ց՞Ց%FQUIՎՍ Օ՞Ց%FQUIՎՍ Օ՞Ց %FQUIՎՍ Օ՞Ց %FQUIՎՍ Օ՞Ց%FQUIՎՍ Ց՞Ց%FQUIՎՍ Օ՞Ց%FQUIՎՍ

FC6000 Series Flow Control System TOKYO KEISO CO., LTD. 5 6$6'&6 6$6'&6 6$6'&; 6$6'&; ʢAAH8G:Lʣ 6$6'.6 6$6'.6 6$6'.; 6$6'.; ʢAAH8G:Lʣ ʢAAH8G:Lʣ 'JYJOHIPMF ʢ3FWPMWBCMFʣ 'JYJOHIPMF ʢ3FWPMWBCMFʣ 'JYJOHIPMF ʢ3FWPMWBCMFʣ 'JYJOHIPMF ʢ3FWPMWBCMFʣ ʢAAH8G:Lʣ

FC6000 Series Flow Control System 6 TOKYO KEISO CO., LTD. '$" 6C:A8JIʢI=>8@C:HHՍ՚ՕIDՒBB Ր Վ Ց Ւ Տ ՎՏՐ ՎՏ ՐՑՒ ՎՏՐՑՒՓ ՐՏՎ ՎՐՒՔՖ ՏՑՓՕՎՍ Controller terminal diagram Wiring CN No. Polarity Description CN No. Polarity Description Motor drive connecter Power connecter

1 FG Motor ground 1 +24 V Power2 Green Motor A phase + 2 0 V

3 Black Motor A phase – 3 FG Frame ground

4 White Motor B phase +

5 Red Motor B phase – 1 + Scaled pulse output

Controller connector 2 – 1+ Control start/stop input * 3+ Flow rate alarm 12– 4– 3+ Valve abnormal alarm output 5+ Flow rate alarm 24– 6– 5+ Reset signal input for the totalizer ** Serial communication connector 6– 1 For maintenance use 7+ Flow output 2 8– 3 9+ Target flow input SMB connector 10 – IN Sensor I/O signal on the upstream OUT Sensor I/O signal on the downstream *Control start/stop input CN2 1, 2 Close: Controlling Open: Stop ** Reset signal input for the totalizer CN2 5, 6 Close: Reset (one shot) Open: Totalizing

FC6000 Series Flow Control System TOKYO KEISO CO., LTD. 7 Conversion cable $POWFSTJPODBCMFCFUXFFOUIF4.#DPOOFDUPSXJUIBMPDLBOEUIF4.#DPOOFDUPS 'PSSFQMBDJOHGSPN'$" $POWFSTJPODBCMFCFUXFFOUIF#/$DPOOFDUPSBOEUIF4.#DPOOFDUPS 'PSSFQMBDJOHGSPN'$"PSVTJOHUIFFYJTUJOH6$6' 8DCC:8IDG ʢ1MVHʣ 8DCC:8IDGL>I=6AD8@ 8DCC:8IDG ʢ1MVHʣ 8DCC:8IDG ʢ+BDLʣ A conversion cable between the SMB connector with a lock and the SMB connector is available, enabling the detector used for the FCA-7000 to be used for the FCA6000. A conversion cable between the BNC connector and the SMB connector is available for adding controller to the line that is used for measuring the flow rate only by UCUF , or for replacing from the FCA-5000. CONTROL PERFORMANCE AND ACCURACY The FC6000 series is a feedback type control unit, which measures current flow and outputs a signal to actuate the control valv e unit until the current flow goes to the set point. It is possible to control with ±3% of the set point within about 3 seconds.

FC6000 Series Flow Control System TG-F1170-E008 EXAMPLE When combining FCA6000, FCV-3000, and UCUF04E CAUTIONS 1) The control valve should be installed on the downstream side of the flowmeter. 2) The control valve and flowmeter (detector) should be piped within 500 mm. 3) Do not use this control valve for piping with large pulsation (e.g., fluid supply by a diaphragm pump etc.). ՓՍՍՍ ՍՑ ՞ՐՍՍՍ Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558 Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922 * Specification is subject to change without notice.