PZ2110A KEYSIGHT | Alldatasheet

Document overview

  • Manufacturer or author: Provided By alldatasheet.com(free datasheet download site)
  • PDF pages: 39

Technical content

High Channel Density Precision Source/Measure Unit Solution PZ2100A Precision SMU Mainframe PZ2110A High Resolution SMU PZ2120/21A High -Speed SMU PZ2130/31A High Channel Density SMU

significantly reducing your test costs and saving valuable rack space.

  • 5 SMU module options flexibly configurable and upgradable in 1U, 4 slot mainframe at lower cost/ch
  • Scalable up to 20 ch, 20x higher density than conventional SMU
  • SMU integrating pulser/digitizer eliminates needs of additional instruments Wide application coverage from DC to dynamic measurements
  • Wide output range of up to 210 V / 3.5 A DC / 10.5 A pulse
  • Low current measurement supported by min. 10 fA high resolution
  • Dynamic/pulsed measurement with 15 MSa/s sampling rate and 10 μs narrow pulse
  • Wide dynamic range with auto ranging and seamless ranging Simple integration and time efficiency
  • Single box solution simplifies synchronization with multiple SMUs at < 50 ns accuracy
  • User-friendly GUI accelerates the test prototyping, debugging, and troubleshooting
  • SCPI programming via LAN/USB/GPIB for easy adoption to various environment
  • PathWave IV Curve Software enables quick measurements without programming

Figure 1. PZ2100A Precision Source/Measure Unit Mainframe, 4 slots, 1U

Save cost and valuable rack space Keysight PZ2100A Precision SMU Mainframe The Keysight PZ2100A is the precision source/measure unit (SMU) mainframe that uncompromisingly and densely integrates 20 SMU channels at maximum into valuable 1U height, full width, rack space with flexible module options at their best performance. It supports a variety of resources such as the Keysight PZ2110A High Resolution SMU, PZ2120/21A High-Speed SMUs, and PZ2130/31A High Channel Density SMUs with multiple functions such as pulser and digitizer, as well as precise voltage/current sourcing and measuring to adapt to a wide range of application requirements. Type Model Description & Key Features Mainframe PZ2100A Precision SMU Mainframe, 4 slots, 1U

  • Scalable up to 20 channels
  • 5 SMU module options flexibly configurable and upgradable
  • Simplified synchronization at <50 ns accuracy
  • User-friendly GUI collectively managing 20 channels at max. High Resolution SMU PZ2110A Precision SMU, 1.25 MSa/s, 10 fA, 210 V, 315 mA DC/pulse
  • 10 fA resolution with 30 fArms measurement noise (1 PLC)
  • Narrow pulse down to 20 μs pulse width
  • Fast Digitizer Mode with sampling rate up to 1.25 MSa/s
  • Fast transient with 1.4 V/μs slew rate at max. High-Speed SMU PZ2120A Precision SMU, 1 MSa/s, 100 fA, 60 V, 3.5 A DC/10.5 A pulse
  • Narrow pulse down to 50 μs pulse width
  • Fast Digitizer Mode with 1 MSa/s sampling rate
  • Wide output range up to 60V/3.5 A DC/10.5 A pulse
  • Wide dynamic range with seamless measurement ranging PZ2121A Precision SMU, 15 MSa/s, 100 fA, 60 V, 3.5 A DC/10.5 A pulse
  • Best-in-class narrow pulse down to 10 μs pulse width
  • Best-in-class fast Digitizer Mode with 15 MSa/s sampling rate
  • Wide output range up to 60V/3.5 A DC/10.5 A pulse
  • Wide dynamic range with seamless measurement ranging High Channel Density SMU PZ2130A 5-ch Precision SMU, 100 pA, 30 V, 500 mA DC 1
  • High density (20 Ch in 1U rack height, full width at max.)
  • Low cost/ch for multi-ch applications
  • Fast sampling measurement with sampling rate at 250 kSa/s
  • Low voltage source noise down to 25 μVrms with PX0107A PZ2131A 5-ch Precision SMU, 500 kSa/s, 10 pA, 30 V, 500 mA DC/pulse 1
  • High density (20 Ch in 1U rack height, full width at max.)
  • Narrow pulse down to 100 μs pulse width
  • Fast Digitizer Mode with sampling rate at 500 kSa/s
  • Low voltage source noise down to 25 μVrms with PX0107A 1. Ch1 and Ch2 expand the m aximum current to +750 mA by over range capability .

meter and a voltage meter (along with the capability to switch easily between these various functions). independent instruments to make the same measurement. and stable even if the load conditions change unexpectedly. Figure 5. SMU simplified block diagram to protect devices from damage caused by excessive voltage or current. with sweep, pulse capabilities. high speed sampling capability.

Wide application coverage from DC to dynamic measurements The Keysight PZ2100 series provides all-in-one SMU that integrates pulser/digitizer functions into conventional SMU capability. Its pulser enables narrow pulsed measurements down to 10 μs width and its Digitizer Mode enables fast dynamic measurements with a sampling rate up to 15 MSa/s. Their auto measurement range capability enables wide dynamic range in DC measurements and seamless current measurement ranging function enables wide dynamic range as well in dynamic measurements . These capabilities allow the PZ2100 series to cover a wide range of applications from conventional static DC measurements with high resolution down to 10 fA to emerging dynamic/pulsed measurements without need of any additional instrument. Typical applications

  • Optical devices (laser diodes, photo diodes, LED, etc.)
  • Optoelectronic components (ITLA, CDM, ICR, IC-TROSA, etc.)
  • Vertical cavity surface emitting laser (VCSEL) sensors/modules
  • Silicon photonics
  • Integrated circuit (IC) design verification tests/function tests (RF PA/FEM, analog ICs, RFICs, MMICs, etc.)
  • Quantum computing (superconducting, trapped ions, silicon based, etc.)
  • Semiconductor devices (FET, diodes, transistors, etc.)
  • Passive component devices (resistors, varistors, capacitors, etc.)

integrated sweep measurement capability improves efficiency and reduces measurement setup time. Figure 6. Built-in functions provide flexible waveform generation capabilities

up to 60 V/3.5 A DC/10.5 A pulse, and high resolution up to 6 μV/100 fA. applications such as vertical-cavity surface-emitting laser (VCSEL) optical devices. Figure 9. 10 μs narrow pulse output with measuring at 15 MSa/s sampling rate

current or voltage waveform. You can operate multiple channels in synchronization or independently. PZ2100 series to meet the requirements from a variety of the applications. Figure 12. Internal trigger lines enabling channel synchronization at less than 50 ns accuracy and

review test results immediately after measurement using various analysis function s on graphs and tables. Export functions of graphs with markers and tables support efficient reporting. Figure 15. PathWave IV Curve Software

PZ2110A PZ2120A PZ2121A PZ2130A PZ2131A Number of channels 1 1 5 Number of slots 2 1 1 Output range Max. voltage 210 V 60 V 30 V Max. current (DC) 315 mA 3.5 A 500 mA Max. current (Pulse) 315 mA 10.5 A N/A 500 mA Resolution Min. voltage 500 nV 6 μV 6 μV Min. current 10 fA 100 fA 100 pA 10 pA Current measurement noise RMS (1 PLC) 30 fArms 400 fArms 75 pArms 35 pArms Voltage source noise Peak-to-peak (0.1 - 10 Hz) < 4 μV < 12 μV < 20 μV Peak-to-peak (20 MHz) < 25 mV < 30 mV < 12 mV RMS (20 MHz) < 3 mVrms < 2.5 mVrms < 1 mVrms (< 25 μVrms with PX0107A) RMS (200 MHz) < 5 mVrms < 4.5 mVrms < 3.3 mVrms Min. pulse width 20 μs 50 μs 10 μs N/A 100 μs Max. slew rate 1.4 V/μs 3.5 V/μs 0.15 V/μs Digitizer mode Yes Yes No Yes Max. sampling rate 1.25 MSa/s 1 MSa/s 15 MSa/s 250 kSa/s 500 kSa/s Auto measurement ranging Yes Yes Yes Seamless current measurement ranging No Yes Yes Remote sense (4-wire connection) Yes Yes Yes Guard shield port for low current measurement Yes Yes Yes Operation mode Standard mode Yes Yes Yes PS mode Yes Yes Yes High capacitance mode No Yes No Laser diode mode No Yes No

Self-calibration Performed within the last 24 hours. Ambient temperature changes less than ± 5 °C after self-calibration execution.

1 PLC 5 (100 nA to 300 mA ranges,

10 PLC (1 nA and 10 nA ranges)

1 PLC

  1. Double for 0 °C to 18 °C, and 28 °C to 40 °C unless noted otherwise .
  2. Relative Humidity, non -condensing .
  3. double for 60% to 70% unless noted otherwise .
  4. The maximum % Relative Humidity is up to 40°C and decreases linearly to 4 8% RH at 50 °C. From 40°C to 50°C, it follows the

Figure 16. PZ2110A DC voltage and current output capability

  1. Over range (150% of 500 mA range) for positive

Figure 19. PZ2130/31A voltage and current output capability per

6 V range 30 V range 6 V and 30 V ranges mixed

specified voltage range. Where +Icomp / –Icomp are the positive / negative current compliance values.

Figure 20. PZ2130/31A voltage and total current output capability per module

PZ2110A Source/measurement specifications and characteristics Voltage source/measurement specifications Range Programming and measurement Source noise (peak to peak)

0.1 Hz to 10 Hz 2 Max current

Resolution Accuracy (% of reading + offset) 23 °C ± 5 °C 1 ± 0.5 V 0.5 μV ± (0.015% + 120 μV) < 4 μV ± 315 mA ± 2 V 2 μV ± (0.015% + 140 μV) < 5 μV ± 315 mA ± 6 V 6 μV ± (0.015% + 250 μV) < 5 μV ± 315 mA ± 20 V 20 μV ± (0.015% + 900 μV) < 15 μV ± 315 mA ± 40 V 40 μV ± (0.015% + 1 mV) < 30 μV 3 ± 100 V 100 μV ± (0.015% + 2.5 mV) < 60 μV 3 ± 200 V 200 μV ± (0.015% + 2.8 mV) < 100 μV ± 50 mA (100 mA or less ranges) 1. Double for 0 °C to 18 °C, and 28 °C to 40 °C unless noted otherwise . 2. Supplemental characteristics, 0 V sourced, 10 mA or less ranges. 3. ± 315 mA ( -21 V ≤ V o ≤ 21V), ± 105 mA (Vo < -21 V, V o > 21 V). Current source/measurement specifications Range Programming and measurement Source noise (peak to peak) Resolution Accuracy (% of reading + offset) 23 °C ± 5 °C 1 ± 1 nA 10 fA ± (0.1% + 1.5 pA + 1 fA x Vo) 3 < 200 fA ± 210 V ± 10 nA 10 fA ± (0.1% + 3 pA + 10 fA x Vo) 3 < 200 fA ± 210 V ± 100 nA 100 fA ± (0.05% + 20 pA) < 2 pA ± 210 V ± 1 μA 1 pA ± (0.05% + 100 pA) < 2 pA ± 210 V ± 10 μA 10 pA ± (0.04% + 2 nA) < 80 pA ± 210 V ± 100 μA 100 pA ± (0.03% + 3 nA) < 90 pA ± 210 V ± 1 mA 1 nA ± (0.03% + 60 nA) < 8 nA ± 210 V ± 10 mA 10 nA ± (0.03% + 200 nA) < 10 nA ± 210 V ± 100 mA 100 nA ± (0.04% + 6 μA) < 200 nA 4 ± 300 mA 300 nA ± (0.04% + 20 μA) < 1 μA ± 21 V (100 V or less ranges) 1. Double for 0 °C to 18 °C, and 28 °C to 40 °C unless noted otherwise . 2. Supplemental characteristics, 0 A sourced. 3. Aperture time: 10 PLC. 4. ± 210 V ( -50 mA ≤ I o ≤ 50 mA), ± 105 V (I o < -50 mA, I o > 50 mA).

Standard mode Default mode. PS mode Only V source mode is available. Source supplemental characteristics Source supplemental characteristics Max output power and source/sink limits 11 W (± 21 V at ± 315 mA, ± 105 V at ± 105 mA, ± 210 V at ± 50 mA, four quadrant source or sink operation) Current compliance setting accuracy Accuracy is same as current source; minimum value is 1% of range (100 nA to 300 mA ranges) 1 nA (1 nA, 10 nA ranges) Voltage compliance setting accuracy Accuracy is same as voltage source; minimum value is 1% of range (6 V to 200 V ranges) 50 mV (500 mV, 2 V ranges) Over range Voltage All ranges 105% of range Current 300 mA range 105% of range Other ranges 115% of range Over-temperature protection Output turns off then resets at over temperature sensed internally. Voltage output settling time Time required to reach within 0.1% of final value at described load condition; step is 10% to 90% range with 10 mA compliance, filter auto settings < 45 μs (500 mV to 40 V ranges, open load) < 100 μs (100 V range, 100 kΩ load) < 200 μs (200 V range, 100 kΩ load) Slew rate Step is 0 V to + 200 V at open load condition

1.4 V/μs (PS mode with 50 mA compliance)

1 V/μs (Standard mode with 10 mA compliance)

Current output settling time Time required to reach within 0.1% 1 of final value at described load condition; step is 10% to 90% range with 6 V compliance, filter auto settings < 18 ms (1 nA, 10 nA ranges, 50 MΩ load) < 1.2 ms (100 nA, 1 μA ranges, 500 kΩ load) < 400 μs (10 μA, 100 μA ranges, 5 kΩ load) < 70 μs (1 mA range, 50 Ω load) < 40 μs (10 mA range, 50 Ω load) < 40 μs (100 mA range, 500 mΩ load) < 40 μs (300 mA range, 100 mΩ load) V source noise (BW = 20 MHz) < 3 mVrms, < 25 mVp-p, 20 V range, 0 V sourced (10 mA or less ranges) < 6 mVrms, < 40 mVp-p, 20 V range, 0 V sourced (100 mA, 300 mA ranges) V source noise (BW = 200 MHz) < 5 mVrms, < 50 mVp-p, 20 V range, 0 V sourced Voltage range switching transient noise < 250 mV, 100 kΩ load, 20 MHz bandwidth Current range switching transient noise < 70 mV, 100 kΩ load, 20 MHz bandwidth, V source mode, 20 V range Load transient response time in voltage source mode Time to recover to within the settling band With 2.2 μF cap (ESR = 50 mΩ) at load, remote sensing at cap

6 V range with 5 V source, 300 mA compliance in Normal/PS mode

Rise time (10% to 90%) 1 μs Settling band (with a step from 30 mA to 270 mA) ± 20 mV Recovery time < 70 μs Voltage load regulation Load regulation error is included in voltage accuracy specification (typical) Current load regulation Load regulation error is included in current accuracy specification (typical) 1. 0.3% for 100 mA, 300 mA ranges.

200 V range 105% of range

Figure 21. Current measurement noise feature allows you to specify a particular output resistance. ≥ 1 kΩ at 10 μA and 100 μA range, or ≥ 200Ω at other ranges.

  1. Programmable output resistance is only available for DC output.

PZ2120/21A Source/measurement specifications and characteristics Voltage source/measurement specifications Range Programming and measurement Source noise (peak to peak)

0.1 Hz to 10 Hz 2

Resolution Accuracy (% of reading + offset), Tcal 1 ± 5 °C Tempco (% of reading + offset) / °C, 0 °C to 50 °C ± 6 V 6 μV ± (0.02% + 300 μV) ± (0.0005%+1 μV) < 12 μV Varies 3 ± 20 V 60 μV ± (0.02% + 3 mV) ± (0.0005%+1 μV) < 75 μV Varies 3 ± 60 V 60 μV ± (0.02% + 3 mV) ± (0.0005%+1 μV) < 75 μV Varies 3 1. Tcal: Ambient temperature when self -calibration was performed. 2. Supplemental characteristics, 0 V sourced, 10 mA range. 3. See Figure X and Y. Current source/measurement specifications Range Programming and measurement Source noise (peak to peak) Resolution Accuracy (% of reading + offset), Tcal 1 ± 5 °C Tempco (% of reading + offset) / °C, 0 °C to 50 °C ± 100 nA 3 100 fA ± (0.07% + 100 pA) ± (0.0006% + 2 pA) < 1.5 pA ± 60 V ± 1 μA 1 pA ± (0.07% + 100 pA) ± (0.0006% + 4 pA) < 2.5 pA ± 60 V ± 10 μA 10 pA ± (0.05% + 700 pA) ± (0.0006% + 135 pA) < 30 pA ± 60 V ± 100 μA 100 pA ± (0.05% + 6 nA) ± (0.0006% + 200 pA) < 200 pA ± 60 V ± 1 mA 1 nA ± (0.05% + 60 nA) ± (0.0006% + 2 nA) < 3 nA ± 60 V ± 10 mA 10 nA ± (0.05% + 600 nA) ± (0.0006% + 20 nA) < 20 nA ± 60 V ± 500 mA 500 nA ± (0.13% + 30 μA) ± (0.0006% + 1 μA) < 1.5 μA Varies 4 ± 1 A 1 μA ± (0.13% + 60 μA) ± (0.0006% + 2 μA) < 2.5 μA Varies 4 ± 3 A 3.5 μA ± (0.3% + 1 mA) ± (0.0025% + 33 μA) < 25 μA Varies 4 ± 3.5 A 3.5 μA ± (0.3% + 1 mA) ± (0.0025% + 33 μA) < 25 μA Varies 4 ± 5 A 5 μA ± 10 A 5 10 μA ± (0.13% + 1 mA) 6 ± (0.002% + 33 μA) 6 N/A -3 V, + 6.3 V 1. Tcal: Ambient temperature when self -calibration was performed. 2. Supplemental characteristics, 0 A sourced, 6 V range. 3. 100 nA range is available only with the M9603A. 4. See Figure X and Y . 5. Typical. Only current source mode is available. 6. Aperture time: 0.002 PLC (40 μs). Repeat measurements 10 times and average them.

Remote transient voltage measurement specifications Range Programming and measurement Resolution Accuracy (% of reading + offset), Tcal 1 ± 5 °C Tempco (% of reading + offset) / °C, 0 °C to 50 °C 1. Tcal: Ambient temperature when self -calibration was performed. Seamless current measurement ranging specifications The seamless current measurement ranging function enables the SMU channels to make a wide dynamic range measurement without range changing. It automatically detects which current measurement range will return the most precise measurement. Range Programming and measurement Resolution Accuracy (% of reading + offset), Tcal 1 ± 5 °C Tempco (% of reading + offset) / °C, 0 °C to 50 °C 1. Tcal: Ambient temperature when self -calibration was performed. Example of calculating accuracy with temperature coefficient Calculate the accuracy of a 500 μA output in the 1 mA range. Assume the ambient temperature is 15 °C within the last 24 hours after self-calibration was performed at 19 °C. The ambient temperature changes less than ± 5 °C after self-calibration execution but falls outside of 23 °C ± 5 °C. Temperature Variation = (23℃ − 5℃) − 15℃ = 3℃ Accuracy = (500 μA ∗ 0.03% + 60 nA) + 500 μA ∗ 0.0006% + 2 nA 1℃ ∗ 3℃ = 210 nA + 15 nA = 225 nA Therefore, the actual output will fall within 225 nA of 500 μA. Operation mode Operation mode Standard mode Default mode. PS mode Only V source mode is available. High capacitance mode Only V source mode is available. Current ranges from 10 μA to 3.5 A are available. Laser diode mode Both V and I source modes are available in applying pulse with the fast rise time.

Source supplemental characteristics Source supplemental characteristics Max output power and source/sink limits 30 W (+ 20V at + 1.5 A), + 3.5 A at + 5.5 V in 1st quadrant 10 W (- 20 V at +0.5 A), + 3.5 A at - 0.6 V in 2nd quadrant

7.8 W (- 60 V at - 130 mA), - 130 mA at - 60 V in 3rd quadrant

6.5 W (50 V at - 130 mA), - 130 mA at + 50 V in 4th quadrant)

Current compliance setting accuracy Accuracy is same as current source; minimum value is 1% of range (100 nA to 3.5 A ranges) Voltage compliance setting accuracy Accuracy is same as voltage source; minimum value is 1% of range (6 V to 60 V ranges) Over range Voltage

6 V range 105% of range

Other ranges 100% of range Current

10 A range 105% of range for positive current

10% of range for negative current

5 A range 100% of range for positive current

20% of range for negative current (6% when Pulse Range Priority is set to Power) 3 A, 3.5 A ranges 100% of range for positive current (Negative current is limited to -130 mA) 500 mA, 1 A ranges 105% of range for positive current (Negative current is limited to -130 mA) Other ranges 105% of range Over-temperature protection SMU shutdowns at over temperature sensed internally Voltage output settling time Time required to reach within 0.1% of final value at described load condition; step is 10% to 90% range with 10 mA compliance, filter auto settings < 10 μs (6 V range, open load) < 13 μs (20 V range, 50 kΩ load) < 26 μs (60 V range, 200 kΩ load) Slew rate Step is 0 V to 60 V at open load condition

3.5 V/μs (PS mode with 500 mA range 130 mA compliance)

2.3 V/μs (Standard mode with 10 mA range 10.5 mA compliance) Current output settling time (DC) Time required to reach within 0.1% of final value at described load condition; step is 10% to 90% range; with 6 V or 5.5 V compliance, filter auto settings < 3.2 ms (100 nA, 1 μA ranges, 500 kΩ load) < 600 μs (10 uA, 100 μA ranges, 5 kΩ load) < 80 μs (1 mA, 10 mA ranges, 50 Ω load) < 20 μs (500 mA, 1 A ranges, 100 mΩ load) < 70 μs (3 A, 3.5 A ranges, 100 mΩ load) Current output settling time (Pulse) Time required to reach within 1% of final value at described load condition; step is 100 mA to 90% range for transient priority mode and is 10% to 90% range for power priority mode; with 6 V compliance; load is connected through 1.5 m low inductance BNC cable (PX0105A-001) < 50 μs (Power priority mode, 5 A range, 100 mΩ load) < 4.5 μs (transient priority mode, 5 A range, 100 mΩ load) < 6 μs (transient priority mode, 10 A range, 100 mΩ load) V source noise (BW = 20 MHz) ≤10 mA ranges < 2.5 mVrms, < 30 mVp-p, 0 V sourced >10 mA ranges < 3.5 mVrms, < 40 mVp-p, 0 V sourced V source noise (BW = 200 MHz) ≤10 mA ranges < 4.5 mVrms, < 60 mVp-p, 0 V sourced >10 mA ranges < 6 mVrms, < 70 mVp-p, 0 V sourced Load transient response time in voltage source mode Time to recover to within the settling band With 4.7 μF cap (ESR = 50 mΩ) at load, remote sensing at cap 6 V range with 4 V source, + 3.5 A/- 130 mA compliance in Normal mode Rise time (10% to 90%) 1 μs Settling band (with a step from 0.3 A/1.5 A to 1.5 A/0.3 A) ± 20 mV Recovery time < 20 μs Voltage load regulation Load regulation error is included in voltage accuracy specification (typical) Current load regulation 1 Load regulation error is included in current accuracy specification as specification for |Vo| ≤ 40 V, as typical for 40 V < |Vo| 1. Vo is the output voltage.

Measurement supplemental characteristics Measurement supplemental characteristics Over range Voltage Other ranges 100% of range Current 10% of range for negative current 20% of range for negative current (6% when Pulse Range Priority is set to Power) 3 A, 3.5 A ranges 100% of range for positive current (Negative current is limited to -130 mA) 500 mA, 1 A ranges 105% of range for positive current (Negative current is limited to -130 mA) Other ranges 105% of range Current measurement noise (1 PLC) 400 fArms (100 nA range), 600 fArms (1 μA range)

PZ2130/31A Source/measurement specifications and characteristics Voltage source/measurement specifications Range Programming and measurement Source noise (peak to peak) Resolution Accuracy (% of reading + offset), Tcal 1 ± 5 °C Tempco (% of reading + offset) / °C, 0 °C to 50 °C ± 6 V 6 μV ± (0.015% + 600 μV) ± (0.0005%+1 μV) < 20 μV Varies 3 ± 30 V 30 μV ± (0.015% + 1.2 mV) ± (0.0005%+1 μV) < 85 μV ± 150 mA 1. Tcal: Ambient temperature when self -calibration was performed. 2. Supplemental characteristics, 0 V sourced, 500 mA range. 3. 750 mA and -500 mA for channels 1 and 2; ± 500 mA for channels 3, 4, and 5. Current source/measurement specifications Range Programming and measurement Source noise (peak to peak) Resolution Accuracy (% of reading + offset), Tcal 1 ± 5 °C Tempco (% of reading + offset) / °C, 0 °C to 50 °C ± 10 μA 3 10 pA ± (0.03% + 1.6 nA) ± (0.002% + 10 pA) < 170 pA Varies 4 ± 100 μA 100 pA ± (0.03% + 16 nA) ± (0.002% + 100 pA) < 440 pA Varies 4 ± 1 mA 1 nA ± (0.03% + 160 nA) ± (0.002% + 1 nA) < 30 nA Varies 4 ± 10 mA 10 nA ± (0.03% + 1.6 μA) ± (0.002% + 10 nA) < 35 nA Varies 4 ± 100 mA 100 nA ± (0.03% + 24 μA) ± (0.002% + 150 nA) < 2.5 μA Varies 4 ± 500 mA 500 nA ± (0.05% + 125 μA) ± (0.004% + 1 μA) < 3.5 μA ± 6.3 V 1. Tcal: Ambient temperature when self -calibration was performed. 2. Supplemental characteristics, 0 A sourced, 6 V range. 3. 10 μA range is available only with the M9615A. 4. ± 30 V for voltage source, ± 31.5 V for voltage measurement. Example of calculating accuracy with temperature coefficient Calculate the accuracy of 500 μA output in the 1 mA range. Assume the ambient temperature is 15 °C within the last 24 hours after self-calibration was performed at 19 °C. The ambient temperature changes less than ± 5 °C after self-calibration execution but falls outside of 23 °C ± 5 °C. Temperature Variation = (23℃ − 5℃) − 15℃ = 3℃ Accuracy = (500 μA ∗ 0.03% + 160 nA) + 500 μA ∗ 0.002% + 1 nA 1℃ ∗ 3℃ = 310 nA + 33 nA = 343 nA Therefore, the actual output will be within 343 nA of 500 μA.

Standard mode Default mode. PS mode Only V source mode is available. Seamless current measurement ranging The seamless current measurement ranging function enables the SMU channels to make a wide dynamic range measurement without range changing. It automatically detects which current measurement range will return the most precise measurement. Range group Available ranges High group 500 mA, 100 mA, 10 mA, 1 mA ranges Low group 10 mA, 1 mA, 10 μA ranges Note:

  • The range group is selected automatically by the compliance setting value. When it is set to more than 10 mA, the range group is set to 'High'. Otherwise, it is set to 'Low'.
  • When the range group is set to ‘Low’, 5% (typical) error is added to its compliance setting accuracy.

Source supplemental characteristics Source supplemental characteristics Max output power and source/sink limits 17.6 W, 3 A in 1st quadrant, 12.6 W, 2 A in the other quadrants (6 V range) 22.5 W, 0.75 A (30 V range) Current compliance setting accuracy Accuracy is same as current source; minimum value is 1% of range (10 μA to 500 mA ranges) Voltage compliance setting accuracy Accuracy is same as voltage source; minimum value is 1% of range (6 V to 30 V ranges) Over range Voltage

30 V range 100% of range

150% of range with positive current for Ch 1, 2 100% of range with negative current for Ch 1, 2 100% of range for Ch 3, 4, 5 Other ranges 105% of range 100% of range for 1 mA, 10 mA ranges if used with seamless measurement ranging function enabled with low group Over-temperature protection SMU shutdowns at over temperature sensed internally Voltage output settling time Time required to reach within 0.1% of final value at described load condition; step is 10% to 90% range with compliance set to 100% of the range, filter auto settings < 85 μs (PS mode with 6 V range, 1 mA or more ranges, open load) Slew rate Step is 0 V to 30 V at open load condition

0.15 V/μs (PS mode with 10 mA compliance)

0.1 V/μs (Standard mode with 10 mA compliance)

Current output settling time Time required to reach within 0.1% of final value at described load condition; step is 10% to 90% range with 6 V compliance, filter auto settings < 2.0 ms (10 μA range, 1 kΩ load) < 1.4 ms (100 μA range, 1 kΩ load) < 200 μs (1 mA range, 10 Ω load) < 140 μs (10 mA range, 10 Ω load) < 110 μs (100 mA range, 100 mΩ load) < 90 μs (500 mA range, 100 mΩ load) V source noise (BW = 20 MHz) < 1 mVrms, < 12 mVp-p, 6 V range (100 mA range, 30 mA compliance) V source noise (BW = 200 MHz) < 3.3 mVrms, < 40 mVp-p, 6 V range (100 mA range, 30 mA compliance) Load transient response time in voltage source mode Time to recover to within the settling band With 2.2 μF cap (ESR = 50 mΩ) at load, remote sensing at cap

6 V range with 500 mA compliance in PS mode

Rise time (10% to 90%) 1 μs Settling band (with a step from 50 mA to 450 mA) ± 20 mV Recovery time < 70 μs Remote sense maximum lead drop Up to 1 V drop per lead 6 V range Hi-Lo: ± 6.5 V maximum

30 V range

Hi-Lo: ± 25.5 V maximum (Seamless current measurement ranging function enabled with Low Group) Hi-Lo: ± 30.5 V maximum (For the other conditions) Voltage load regulation Load regulation error is included in voltage accuracy specification (typical) Current load regulation 1 1 mA, 100 mA ranges |Vo| ≤ 10 V 0 ppm

10 V < |Vo| ≤ 20 V (|Vo| -10 V) * 5 ppm of range

20 V < |Vo| ((|Vo| -20 V) * 10 ppm + 50 ppm) of range

  1. V o is the output voltage.

Measurement supplemental characteristics Measurement supplemental characteristics Over range Voltage

30 V range 105% of range for measurement

150% of range with positive current for Ch 1, 2 100% of range with negative current for Ch 1, 2 100% of range for Ch 3, 4, 5 Other ranges 105% of range 100% of range for 1 mA, 10 mA ranges if used with seamless measurement ranging function enabled with low group Current measurement noise (1 PLC) 35 pArms for 10 μA range, and 75 pArms for 100 μA range

accessory. It connects to the Dsub-25 outputs of PZ2130A and PZ2131A output channels.

10 Hz to 20 MHz 25 μVrms (6 V range), 110 μVrms (30 V range)

  1. Time required to reach within 0.1 % of final value at open load condition. Step is 10 % to 90 % range. At 6 V / 30 V range s, 100

Figure 22. Voltage source noise density of the PZ2130/31A with the PX0107A external low noise filter (Observed

6 V Range

Figure 23. Definition of the pulse parameters and the transition time

  1. Transition time is defined as the time from “Source settling band” to “100% - Source settling band” leading edges (Figure 23).

Max voltage Max peak current Max base current Programmable pulse width 1 Max duty cycle DC ranges + 60 V +130 mA +130 mA 5 μs to 1 s 99.9999% + 20 V + 1.5 A + 1.5 A 5 μs to 1 s 99.9999% + 14 V + 2 A + 2 A 5 μs to 1 s 99.9999% + 6.3 V + 3 A + 3 A 5 μs to 1 s 99.9999% + 5.5 V + 3.5 A + 3.5 A 5 μs to 1 s 99.9999% Pulse ranges + 6.3 V +10.5 A 105 mA 5 μs to 120 μs 1% + 6.3 V + 5 A 105 mA 5 μs to 500 μs 3% + 17 V + 5 A 105 mA 5 μs to 120 μs 1% + 20 V + 3.5 A 105 mA 5 μs to 500 μs 5% + 20 V + 1 A 105 mA 5 μs to 500 μs 3% + 10.5 V 2 + 5 A 2 1.05 A 2 5 μs to 3 ms 2 10% 2 + 17 V 2 + 3.5 A 2 1.05 A 2 5 μs to 5 ms 2 15% 2 1. Minimum programmable pulse width is 50 μs for the PX2120A . 2. When Pulse Range Priority is set to Power with 5 A range. Transition time at the given voltage, current and settling conditions (observed d ata) Source value Limit value Operation mode Load Source settling band (% of range) Transition time 1 60 V 130 mA Standard 200 kΩ 0.1% 1.1 ms 60 V 130 mA PS 200 kΩ 0.1% 30 μs

3.5 A 6 V Standard 100 mΩ 1% 40 μs

5 A 6 V Standard 100 mΩ 5% 30 μs

  1. Transition time is defined as the time from “Source settling band” to “100% - Source settling band” leading edges (Figure X) PZ2131A Transition time at the given voltage, current and settling conditions (observed data) Source value Limit value Operation mode Load Source settling band (% of range) Transition time 1 6.3 V 500 mA Standard 15 Ω 0.1% 270 μs 6.3 V 500 mA PS 15 Ω 0.1% 75 μs 30 V 150 mA Standard 220 Ω 0.1% 4.9 ms 30 V 150 mA PS 220 Ω 0.1% 230 μs 500 mA 6 V Standard 100 mΩ 0.1% 85 μs 1. Transition time is defined as the time from “Source settling band” to “100% - Source settling band” leading edges (Figure X)

Timer and triggering supplemental characteristics Timer Timestamp Timer value automatically saved when each measurement is triggered Trigger timing resolution 4 μs to 100 ms Accuracy ± 100 ppm Arm/trigger delay 0 μs to 100,000 s Arm/trigger interval 4 μs to 100,000 s Arm/trigger event PZ2110A 1 to 1,000,000 (count) PZ2120/21A PZ2130/31A 1 to 100,000 (count) Model Available sampling rates 1 PZ2110A (1.25 MSa/s)/N where N=1, 2, 3, …, 224 PZ2120A (1 MSa/s)/N where N=1, 2, 3, …, 221 PZ2121A (15 MSa/s)/N where N=1, 2, 3, …, 225 PZ2130A (250 kSa/s)/N where N=1, 2, 3, …, 219 PZ2131A (500 kSa/s)/N where N=1, 2, 3, …, 220 1. Specification . Triggering parameter PZ2110A PZ2120A PZ2121A PZ2130A PZ2131A DIO Trigger Input trigger to Source/sense trigger delay ≤ 5 μs Source/sense trigger jitter ≤ 4.5 μs SMU External Trigger Input trigger to Source/sense trigger delay ≤ 5 μs Source/sense trigger jitter ≤ 4 μs SMU External Trigger 1,2 (Input Triggers) Polarity Configurable Minimum pulse width 200 ns, nominal Level 3.3 V CMOS SMU External Trigger 1,2 (Output Triggers) Polarity Configurable Minimum pulse width Configurable between 200 ns and 12.8 μs, nominal Level 3.3 V CMOS Synchronization by internal trigger line < 50 ns Minimum trigger interval Digitizer Mode ON 800 ns 1 μs 67 ns N/A 2 μs Digitizer Mode OFF 4 μs

Other supplemental characteristics Input/output characteristics PZ2110A PZ2120/21A PZ2130/31A Sensing modes 2-wire or 4-wire (remote-sensing) connections Low terminal connection Chassis grounded or floating Output connectors Triaxial jack for high force and high sense SMB jack for low sense Dsub 25 pin jack External I/O Phoenix Contact COMBICON Compact PTSM (TRIG1, TRIG2, Int Lock, Frame GND)

6 Position Terminal Block

5 Position Terminal Block

Maximum guard offset voltage < 2 mV Remote sense operation range (Maximum voltage between force and sense) High 1 V Low 1 V 0.3 V 1 V Voltage source output resistance < 0.3 Ω (non-kelvin) < 0.02 Ω (≥ 10 μA range) < 300 Ω (< 10 μA range) < 0.2 Ω (≥ 1 mA range) < 1.3 Ω 1 (< 1 mA range) Current source output resistance > 10 TΩ (1 nA range) > 0.6 TΩ (100 nA range) > 10 GΩ (10 μA range) Maximum allowable cable resistance Sense 10 Ω 1 Ω 1 Ω Force 10 Ω (Io ≤ 100 mA), 3 Ω (Io > 100 mA) 3 Ω (Io ≤ 100 mA)

0.3 V/Io Ω (Io > 100 mA)

10 Ω (Io ≤ 100 mA)

1 V/Io Ω (Io > 100 mA)

Maximum load capacitance 100 μF (ESR ≥ 25 mΩ) 2 100 μF (ESR ≥ 25 mΩ) 3 10 μF (ESR ≥ 50 mΩ) Guard output impedance 610 Ω (nominal) 3.1 kΩ (nominal) 6.8 kΩ (nominal) Maximum DC floating voltage ± 40 V between low force and chassis 1. Valid for Low group when seamless current measurement ranging function is enabled as well. 2. 100 mA to 300 mA ranges. 3. 1 mA or more ranges in Normal Mode. 10 μA or more ran ges in High capacitance mode. Measurement Speed (TBD)

Environmental specifications Environment for use in indoor facilities PZ2100A PZ2110A PZ2120/21A PZ2130/31A Operating Temperature 0 °C to 55 °C 0 °C to 40 °C 0 °C to 50 °C Humidity 1 10% to 80% 2 15% to 70% 10% to 80% 3 Storage Temperature -30 °C to 70 °C -20 °C to 60 °C -30 °C to 70 °C Humidity 1 5% to 90% Altitude Operating: 0 m to 2,000 m; storage: 0 to 4,600 m Power supply 50/60 Hz (frequency tolerance +/-5%) 100-240V (voltage tolerance +/-10%), 400Hz (frequency tolerance +/-10%) 100-120V (voltage tolerance +/-10%) EMC IEC61326-1/EN61326-1, CISPR11/EN55011 Group 1 Class A, ICES-001 Group 1 Class A, AS/NZS CISPR11 Group 1 Class A, KN61000-6-1, KN11 Group 1 Class A Safety IEC61010-1/EN61010-1, UL 61010-1, CAN/CSA-C22.2 No. 61010-1 Overvoltage category II (for AC mains only) Pollution degree 2 Compliance and certifications CE, UKCA, cCSAus 4, RCM, ICES/NMB-001, KC Warm-up 40 minutes 1. Relative Humidity, non -con densing . 2. The maximum % Relative Humidity is up to 40°C and decreases linearly to 3 8% RH at 55 °C. From 40°C to 55°C, it follows the line of constant dew point. 3. The maximum % Relative Humidity is up to 40°C and decreases linearly to 4 8% RH at 5 0 °C. F rom 40°C to 50°C, it follows the line of constant dew point. 4. Valid for PZ21 00/ 10/20/21A . Model Dimensions Weight Slot PZ2100A Height 44.2 mm x depth 443.3 mm x width 446.8 mm 7.2 kg 4 PZ2110A Height 40.1 mm x depth 210 mm x width 131 mm, 2-slot module 0.55 kg 2 PZ2120/21A Height 20.1 mm x depth 210 mm x width 131 mm, 1-slot module 0.28 kg 1 PZ2130/31A Height 20.1 mm x depth 210 mm x width 131 mm, 1-slot module 0.28 kg 1 Acoustical emissions 1 Idle mode Operating mode Worst case mode Sound pressure level 2 (referenced to 20 μPa) 45 dBA 56 dBA 60 dBA Sound power (referenced to 1 pW) 56 dBA 65 dBA 69 dBA 1. Supplemental characteristics. Fan speed is controlled automatically for reduced acoustic noise when the ambient temperature and SMU load do not require full cooling capability. 2. At operator position . Front panel operation Front panel interface LCD 256x64 dots with keypad View mode Meter view (Single-channel, 2-channel, 4-channel, Slot summary, Channel summary), Menu view Hard keys Meter, Channel, Help, Menu, Back, Erase, Channel On/Off, Voltage, Current, 10-key, Enter Front Panel LED Single LED besides On/Off switch. Green or amber.

Source/measurement capabilities PZ2110A PZ2120A PZ2121A PZ2130A PZ2131A Sweep measurement Number of steps 1 to 1,000,000 1 to 2,000 Sweep mode Linear, logarithmic (log) or list Sweep direction Single or double Type DC or pulse DC DC or pulse Min programmable value to create list sweep waveform 4 µs Digitizing/sampling measurement Digitizer Mode Yes Yes Yes N/A Yes Max sampling rate 1.25 MSa/s 1 MSa/s 15 MSa/s 250 kSa/s 500 kSa/s Max buffer size 1,000,000 points 100,000 points 1, 2, 3 100,000 points 1. Limited to 100,000 points when measuring with the rate at 15 MSa/s . 2. Limited to 100,000 points when enabling Remote Transient Voltage Measurement function and setting Trigger Count to >1 . 3. Limited to 30,000 points when enabling Remote Transient Voltage Measurement function and measuring with the rate at 15 MSa/s . PZ2100A Input/output connectivity GPIB Micro Dsub connector. IEEE-488.1 compliant. Supports IEEE-488.2 common commands and status model topology. Ethernet LAN RJ-45 connector, supports 10Base-T, 100Base-T, and 1000Base-T USB USB 2.0 Type-A Host Controller x1 USB 3.0 Type-C Device Interface x1 Digital I/O 1 Maximum voltage ratings +16.5 VDC / -5 VDC between pins (pin 8 is internally connected to chassis ground.) Pins 1 and 2 as FLT output Maximum low-level output voltage = 0.5 V @ 4 mA Maximum low-level sink current = 4 mA Typical high-level leakage current = 1 mA @ 16.5 VDC Pins 1 - 7 as digital/trigger outputs Maximum low-level output voltage = 0.5 V @ 4 mA; 1 V @ 50 mA; 1.75 V @ 100 mA Maximum low-level sink current = 100 mA Typical high-level leakage current = 0.8 mA @ 16.5 VDC Pins 1-7 as digital/trigger inputs and pin 3 as INH input(pin 8 = common) Maximum low-level input voltage = 0.8 V Minimum high-level input voltage = 2 V Typical low-level current = 2 mA @ 0 V (internal 2.2k pull-up) Typical high-level leakage current = 0.12 mA @ 16.5 VDC Ground Chassis ground binding post 1. Supplemental characteristics. Program, software, and drivers Programming SCPI Program memory Program code. Up to 256 byte per execution. Sum of all program size in the program memory must be up to 100 KB. Maximum of 100 programs can be memorized. LXI compliance 1.5 LXI Device Specification 2016 Software available PathWave IV Curve, PathWave BenchVue Standard-compliant drivers IVI-C, IVI.NET, LabVIEW

Operating system Windows 10 32-bit and 64-bit (Professional, Enterprise, Education, Home versions) Windows 8, 8.1 32-bit and 64-bit (Professional, Enterprise, Core) CPU 1 GHz or faster (2 GHz or greater recommended), Intel Core i5 (or equivalent) RAM 1 GB (32-bit) or 2 GB (64-bit) (3 GB or greater recommended), Intel Core i5 (or equivalent) Display resolution 1280x1024 minimum recommended for single instrument view (higher resolution recommended for multiple instrument view) Interfaces USB, GPIB, LAN PathWave IV Curve Operating system Windows 10 32-bit and 64-bit (Professional, Enterprise, Education, Home versions) Windows 8, 8.1 32-bit and 64-bit (Professional, Enterprise, Core) CPU 1 GHz or faster (2 GHz or greater recommended), Intel Core i5 (or equivalent) RAM 1 GB (32-bit) or 2 GB (64-bit) (3 GB or greater recommended), Intel Core i5 (or equivalent) Display resolution 1280x1024 minimum recommended for single instrument view (higher resolution recommended for multiple instrument view) Interfaces USB, GPIB, LAN Furnished Accessories Model number Furnished accessories PZ2100A Power cable, Connector-terminal block (3.5mm 8-terminal), Filler panels (4 ea.), Slot blockers (2 ea.), Quick Reference PZ2110A Connector-terminal block (2.5mm 6-terminal), Short bar, Quick Reference PZ2120A Connector-terminal block (2.5mm 6-terminal), Short bar, Quick Reference PZ2121A Connector-terminal block (2.5mm 6-terminal), Short bar, Quick Reference PZ2130A Connector-terminal block (2.5mm 5-terminal), Short bar, Quick Reference PZ2131A Connector-terminal block (2.5mm 5-terminal), Short bar, Quick Reference

Ordering information

PZ2100A Precision Source/Measure Unit Mainframe, 4 slots, 1U PZ2110A Precision Source/Measure Unit, 1.25 MSa/s, 10 fA, 210 V, 315 mA DC/pulse PZ2120A Precision Source/Measure Unit, 1 MSa/s, 100 fA, 60 V, 3.5 A DC/10.5 A pulse PZ2121A Precision Source/Measure Unit, 15 MSa/s, 100 fA, 60 V, 3.5 A DC/10.5 A pulse PZ2130A 5ch Precision Source/Measure Unit, 100 pA, 30 V, 500 mA DC PZ2131A 5ch Precision Source/Measure Unit, 500 kSa/s, 10 pA, 30 V, 500 mA DC/pulse Option Description 1A7 Calibration + uncertainties + guardbanding (not accredited) A6J ANSI Z540-1-1994 calibration UK6 Commercial calibration certificate with test data

Learn more at : www.keysight.com For more information on Keysight Technologies’ products, applications , or services, please contact your local Keysight office. The complete list is available at: www.keysight.com/find/contactus This information is subjec t to c hange without notice.© Keys ight Technologies , 2022 , Published in USA, Month XX, 20 22, 3122 -XXXX .EN Model number Description PX0101A-001 BNC to Ferrule Terminal Cable, 1.5m, VOLT:DC 3.3V PX0101A-002 BNC to Ferrule Terminal Cable, 3m, VOLT:DC 3.3V PX0102A-001 Low Noise Triaxial Cable, 1.5m PX0102A-002 Low Noise Triaxial Cable, 3m PX0103A-001 Triaxial to SMB Cable, 1.5m, VOLT:DC 210V PX0103A-002 Triaxial to SMB Cable, 3m, VOLT:DC 210V PX0104A-001 High Current Triaxial Cable, 4 A, 1.5m, VOLT:DC 60V PX0104A-002 High Current Triaxial Cable, 4 A, 3m, VOLT:DC 60V PX0105A-001 Low Inductance BNC Cable, 1.5m, VOLT:DC 60V PX0105A-002 Low Inductance BNC Cable, 3m, VOLT:DC 60V PX0106A Dsub25 to 5 SMB Adapter PX0107A Low Noise Filter Adapter PX0108A-001 BNC to SMB Cable, 1.5m, VOLT:DC 60V PX0108A-002 BNC to SMB Cable, 3m, VOLT:DC 60V PX0110A Micro Dsub GPIB Cable Adapter For PZ2100A, 0.25m PX0111A Slot Blocker For PZ2100A, Qty 2 PX0112A Filler Panel Kit For PZ2100A, Qty 4 PX0113A Rack Mount Kit For PZ2100A PX0114A Micro Dsub GPIB Cable For PZ2100A, 1m