L1314 HAMAMATSU | Alldatasheet
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High Intensity, 150 W Type, Vacuum UV (from 115 nm) Light Source - L1835 GSpectrophotometer, Fluorescence Spectrophotometer GRemoval of static electricity from the semiconductor wafer GPID (Photo Ionization Detector) GSolar Simulator GOptical CVD GOptical Chemical Reaction GExcitation Light Source WATER-COOLED TYPE DEUTERIUM LAMPS L1314, L1835 RECOMMENDED OPERATING CONDITION / CHARACTERISTICS (at 25 °C) Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2006 Hamamatsu Photonics K.K. Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office. SPECIFICATIONS
APPLICATIONS
The L1314 and L1835 are water-cooled 150 W deuterium lamps that deliver a radiant intensity 3 to 4 times higher than standard 30 W deu- terium lamps. The lamp bulb is enclosed in a cylindrical metal jacket specially designed for water cooling. The L1314 has a synthetic silica window for an efficient emission of UV radiation, and the L1835 em- ploys a MgF 2 (magnesium fluoride) window which even allows emit- ting vacuum UV radiation. Select the lamp that matches wavelengths required by your application. Vacuum flanges are also available as op- tions in the L1835 for easy mounting to a vacuum chamber. TLSOF0140LLeft: L1835 Right: L1314 Figure 1: Spectral Distribution TLSOB0054EB TLSOB0055EB L1835: Vacuum UV range L1314: UV range Parameter L1835 L1314 Unit Spectral Distribution Window Material Aperture Size Cooling Method Weight (Approx.) Installation to Vacuum Port nm mm dia. g 160 to 400 Synthetic silica 720 No 2.5 Water cooling A Parameter Value Unit Warm-up Operation Discharge Starting Voltage (DC) Anode Current Tube Drop Voltage (DC) Output Stability Water Flow Rate Estimated Life Heater Voltage (DC, AC) Heater Current (DC, AC) Warm-up Time Heater Voltage (DC) Heater Current (DC) Drift (Max.) Fluctuation (Max.) V A Typ. s V A Typ. V Min. A V %/h % p-p L/min h 10 ± 1 1.2 500 1.2 120 ± 10 ±1.0 0.5 1.5 300 115 to 400 MgF 950 Ye s TLSOC0016EC NOTE: ATypes L1314 and L1835 cannot be operated without cooling water passing through them. Care should be taken that the lamp is positioned properly so that the two nozzles are aligned vertically, with the water flowing into the jacket at the bottom nozzle and leaving the jacket at the top nozzle. If this arrangement is not observed, there is a danger of damaging the lamp due to overheating. Flow of cooling water GENERAL INLET OUTLET UP 1.2 1.0 0.5 0.1 0.05 0.01 160 200 240 280 320 360 400 RADIANT INTENSITY (µW/cm2.nm) at 30cm WAVELENGTH (nm) L1314
30 W TYPE
110 120 130 140 150 160 170 RELATIVE OUTPUT INTENSITY (%) WAVELENGTH (nm) 121.6 125.4 160.8
JUL. 2006 IP WATER-COOLED TYPE DEUTERIUM LAMPS L1314, L1835 Figure 2: Dimensional Outline Dimensional Outline E3444-02 (Unit: mm) Attachment Reference TLSOA0027EC TLSOA0028EC TLSOA0053EA TLSOC0017EB Since the L1835 vacuum UV deuterium lamp is often used while instal- led onto a vacuum chamber, Hamamatsu provides the E3444 series vacuum flanges specially designed for this purpose. Among these, the E3444-02 has a flange conforming to ICF114 specifications, allowing easy installation onto most vacuum chamber ports. The E3444 series also includes a general-purpose "N" flange and JIS (Japanese Indus- trial Standards) specification flange. Select the desired type depending on the vacuum equipment to be used. The C3150 power supply is specifically designed for water-cooled 150 W lamps. Various devices to provide stable light output are built into this power supply. Protective functions such as a water flow rate moni- tor and lamp lighting monitor also ensure safe and correct operation. It is designed to be simply inserted over the lamp housing. GPOWER SUPPLY C3150 CHARACTERISTICS GVACUUM FLANGE E3444 SERIES (for L1835) SPECIFICATIONS L1314 L1835 OPTION (sold separately) 8- 8.4 70 ± 0.3 114 P.C.D. 92.2 O-RING Filament (heater) output Anode output 50.8 885 11 150 8040 25.4 ARC POINT CATHODE IC ANODE HEATER PIN CONNECTION ( Connector : Miyama Elec . MC-032 ) * L1314 cannot be used with the vacuum chamber. The main body might be damaged when using it by mistake. 50.8 ARC POINT 895 25.4 192 110 CATHODE IC ANODE HEATER PIN CONNECTION ( Connector : Miyama Elec . MC-032 ) VACUUM FLANGE HAMAMATSU PHOTONICS K.K., Electron Tube Division 314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 E-mail: info@hamamatsu.de United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road Welwyn Garden City Hertfordshire AL7 1BW, United Kingdom, Telephone: 44-(0)1707-294888, Fax: 44(0)1707-325777 E-mail: info@hamamatsu.co.uk North Europe: Hamamatsu Photonics Norden AB: Smidesvä gen 12, SE-171-41 SOLNA, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: info@hamamatsu.se Italy: Hamamatsu Photonics Italia: S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39)02-935 81 733, Fax: (39)02-935 81 741 E-mail: info@hamamatsu.it WEB SITE www.hamamatsu.com Type No. FlangeSealing Method Mount Flange Sealing Force Retention E3444 E3444-01 E3444-02 O-Ring Regular JIS VF50 ICF114 JIS VG50 ICF114 1.33 × 10-4 Pa L/s or less (1 × 10-6 Torr L/s) Parameter Description/Value Output Current (DC) Output Voltage Trigger Voltage Output Fluctuation Over-load Protection Normal Operation (DC) No Load (DC) Input Fluctuation (±10 %) Load Fluctuation (normal operation range) Drift Ripple 1.2 A
120 V ± 25 V
250 V Typ.
600 V peek
±0.1 % Max. ±0.1 % Max. ±0.1 %/h Max. 0.1 % p-p Max.
1.5 A Fuse
Parameter Description/Value Output Voltage for Warm-up (DC) Warm-up Time Output Voltage for Operation (DC) Input Fluctuation (±10 %) Over-load Protection Input Source Voltage (AC) Apparent Power Operating Ambient temperature Performance Guaranteed Temperature Cooling Method Cooling Water Detection Method Protective Functions (LED on when malfunction) External Dimensions (mm) Weight 10 V, 1.2 A Approx. 30 s 5 V ± 0.5 V, 1.0 A ±1.0 % or less
2 A slow-blow or by electronic circuit
100 V / 118 V / 230 V (±10 %)
Approx. 330 VA 0 °C to 40 °C +5 °C to +35 °C Forced air cooling Flow rate switch (1.5 L/min) Less cooling water, excessive temperature in the C3150, short circuit, disconnection Approx. 10 kg