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Left: Light source, Right: Power supply The L12542 is a newly developed electrostatic charge re- mover that makes use of VUV (vacuum ultraviolet) light. Due to its wide irradiation angle about 3 times larger than our current VUV light source, the L12542 efficiently re- moves electrostatic charges over large areas in depressu- rized or vacuum environments. Up until now two or more VUV light sources were needed to neutralize electrostatic charges in large areas due to their limited irradiation angle. The L12542 solves this prob- lem and efficiently neutralizes large areas in a vacuum. Ideal for eliminating electrostatic charges in a vacuum ELECTROSTATIC CHARGE REMOVER TLSZC0015EB

FEATURES

GLarge irradiation (neutralizing) area GHighly efficient ion generation in a vacuum GNo air flow needed GNo overshoot (generates no opposite-polari- ty static charges) GNo dust and electromagnetic noise emissions GLong life

APPLICATIONS

GDechucking of electrostatic chucks GSemiconductor manufacturing equipment (vacuum process) GLCD manufacturing equipment GOrganic EL manufacturing equipment GHard disk manufacturing equipment GFilm manufacturing equipment Irradiating area about 9 times larger VACUUM FLANGE VACUUM CHAMBER VACUUM FLANGE VACUUM CHAMBER WAFER WAFER ELECTROSTATIC CHUCK ELECTROSTATIC CHUCK CONVENTIONAL TYPE L12542 Irradiating area about 9 times larger ELECTROSTATIC REMOVER

Neutralization time vs. distance Neutralization time vs. vacuum level TLSZB0113EA TLSZB0114EA 0 200 400 600 800 1000 1200 14000 0.5 1.5 2.5 3.5 4.5 DISTANCE BETWEEN LIGHT SOURCE OUTPUT WINDOW AND CHARGED PLATE (mm) NEUTRALIZATION TIME (s) Positive charged Negative charged Measurement conditions Charged plate: 25 mm Charged voltage: 1 kV / 100 V Vacuum level: 1 × 10 -2 Pa 0.0001 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.001 0.01 VACUUM LEVEL (Pa) NEUTRALIZATION TIME (s) 0.1 1 10 Measurement conditions Charged plate: 25 mm Charged voltage: 1 kV / 100 V Distance between light source output window and charged plate: 300 mm Positive charged Negative charged SPECIFICATIONS SPECTRAL DISTRIBUTION DIRECTIVITY (LIGHT DISTRIBUTION) TLSOB0079EB 115 to 400 MgF2 Air cooling by cooling fan +10 to +40 0 to +60 Below 80 % (no condensation) Below 85 % (no condensation) Description / Value 25 ± 5 2000 (guaranteed) 500 (expected)

100 V to 240 V (100 V/200 V auto switching), single phase 50 Hz / 60 Hz

s h VA Unit Spectral distribution Window material Cooling method Operating temperature range Storage temperature range Operating humidity range Storage humidity range GGENERAL RATINGS Parameter Warm-up time Light source service life 2 Input voltage (AC) Power consumption (Max.) 230 nm 160 nm GRECOMMENDED OPERATING CONDITIONS AND CHARACTERISTICS (at 25 °C) Parameter TLSZB0105EB ELECTROSTATIC CHARGE REMOVAL EFFECT 2The life end is defined as the time when light output falls to 50% of its initial intensity value while operated under our measurement conditions. Note that the light output attenuation depends greatly on the environment of the vacuum equipment. * When ordering a replacement light source, please specify the type number "L12565". 1The ionizer internal lamp emits intense ultraviolet rays harmful to the eyes and skin. Do not look directly at the emitted light and do not expose skin to light emission. 240 400220200180160 WAVELENGTH (nm) 140120100 100 RELATIVE IRRADIANCE (%) 10° -10° 20° -20° -30° 30° ANGLE -20 -40 -60 -80 -100 100 RELATIVE IRRADIANCE (%) VUV IONIZER L12542 CONVENTIONAL TYPE

42 ± 4 160 ± 4 78 ± 2 ( 26) 48.0 ± 0.1 CONNECTOR (CONNECTION TO POWER SUPPLY) VACUUM FLANGE MOUNT COOLING FAN ARC POINT CONT LINE INPUT F1 : T 2A. 250V OUTPUT POWER POWER LAMP DEUTERIUM LAMP POWER SUPPLY DEUTERIUM LAMP STATUS SIGNAL DEUTERIUM LAMP ON/OFF CONTROL EXTERNAL CONTROL TERMINALS 200 117 REAR VIEWSIDE VIEW TOP VIEW FRONT VIEW CONNECTOR (CONNECTION TO LIGHT SOURCE) POWER SWITCH COOLING FAN LIGHT SOURCE TO POWER SUPPLY CONNECTION CABLE LENGTH: 1800 ± 50 GLIGHT SOURCE (Weight: Approx. 530 g) GPOWER SUPPLY (Weight: Approx. 1.8 kg) TLSZA0031EB TLSZA0032EB DIMENSIONAL OUTLINES (Unit: mm)

NOV. 2014 IP Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2014 Hamamatsu Photonics K.K. Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office. HAMAMATSU PHOTONICS K.K. HAMAMATSU PHOTONICS K.K., Electron Tube Division 314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205 www.hamamatsu.com Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 E-mail: info@hamamatsu.de United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44)1707-294888, Fax: (44)1707-325777 E-mail: info@hamamatsu.co.uk North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 SE-164 40 Kista, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: info@hamamatsu.se O-ring JIS VF50 JIS VG50 1.33 × 10-4 Pa L/s or less (1 × 10-6 Torr L/s) E3444-01 Regular E3444 ICF114 ICF114 E3444-02 Sealing method Flange Mount flange Seeling force retention Parameter IVACUUM FLANGE E3444 GOVERVIEW GSPECIFICATIONS GDIMENSIONAL OUTLINE (Unit: mm) TLSOA0097EB E3444-01 TLSOA0098EB E3444-02 TLSOA0053EC Various vacuum flanges are available for the L12542 VUV ionizer. The E3444-02 mount flange meets ICF114 flange specifications and so easily attaches to ports of most vacuum equipment. We also provide other vacuum flanges including flanges made to JIS (Japanese Industrial Standards) specifications, so users can select the best flange that matches their vacuum vessel.

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