E5260A

E5260A KEYSIGHT | Alldatasheet

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Precision Current-Voltage Analyzer Series Technical Overview

Accurate and Efficient Current-Voltage Measurement Solutions Provide Rich Insights into Material and Device Characteristics Keysight’s precision current-voltage analyzer solutions provide comprehensive graphical current-voltage characterization capabilities Current versus voltage (IV) characterization is fundamental to understa nding the properties of any material or electrical device. IV analysis provides more than just basi c quantities such as resistivity or resistance; it also allows the extraction of parameters that can yield i nsights into fundamental material properties. For these reasons, the ability to accurately and qui ckly measure IV characteristics is extremely important for new material and device researchers. Keysight Technologies, Inc. series of current-voltage analyzers provi de a complete IV characterization solution by combining precision sourcing and measurement capabilit ies with intuitive graphical analysis. Source/measure units (SMUs) supply the core technology for thi s powerful solution. SMUs integrate 4-quadrant voltage and current sourcing with the ability to also sim ultaneously measure voltage and current. In addition, SMUs can provide much more than just DC sourcin g; they also have the ability to do linear and logarithmic sweeps and pulsed measurement s. For every solution the number of SMUs can be tailored and expanded to meet dynamic measurement need s, and all solutions provide integrated control and synchronization that does n ot require any programming. EasyEXPERT group+, a powerful GUI-based control software, supports all of t he tasks necessary for IV characterization. It facilitates measurement setup, data analysi s and both manual and automated test execution. The seamless integration of all of these features gives Key sight’s IV analyzers unique capabilities that can greatly improve engineering productivity. Key sight has IV analyzer solutions at a wide range of price performance points, from low-cost single-channel S MU models up to modular mainframe solutions capable of performing advanced capacitance an d pulsed IV measurements. Keysight’s IV solutions accelerate electronic material and devic e characterization. Analysis Setup Measurement Characterization

03 | Keysight | Precision Current-Voltage Analyzer Series - Technical Overview Choosing which lV Analyzer in the Series Best Meets Your Needs Economic IV Analyzer The entry IV analyzer is available for a range of IV characterizations. – An SMU provides versatility of 4-quadrant precision voltage/current source and voltage/current measurement. – A combination of multiple SMUs (up to 8) quickly enables IV curve measurement and analysis without programming. – EasyEXPERT group+ is available on your PC. Precision IV Analyzer The high performance IV analyzer with current measurement capability as l ow as 0.1 fA along with SMU scalability is available for advanced IV character ization. – Integration of multiple SMUs quickly enables IV curve measurement down to 0.1 fA and analysis without programming. – Scalability and flexibility of configurable SMU modules up to 8 slots. – EasyEXPERT group+ is available on your PC. Advanced Device Analyzer The all in one analyzer supporting IV, CV, pulse/dynamic IV and more. Designe d for all-round characterization from basic to cutting-edge applic ations. – Integration of SMUs, C meter (CMU), pulse/dynamic IV module (WGFMU) and so on quickly enables a range of characterizations from IV to CV, pulse/dynamic IV and more on single box. – Scalability and flexibility of configurable modules up to 10 slots. – EasyEXPERT group+ is available either on a mainframe built-in PC with 15 inch touch screen or on your PC. Economic IV Analyzer Precision IV Analyzer Advanced Device Analyzer IV Measurement

Features

Max. Output coverage 210 V / 3 A (10.5 A pulse) 200 V / 1 A 200 V / 1 A 10 kV / 1500 A Min. Current Measurement Resolution 10 fA 0.1 fA 0.1 fA 10 fA IV Spot/Sweep DC/Pulse DC/Pulse DC/Pulse DC/Pulse Max. SMU channels Up to 8ch (Stacking up to 4 units) Up to 8ch (Addition of Module) Up to 10ch (Addition of Module) Up to 10ch (Addition of Module) Connector Type Banana (Triax adapter is available) Active Guard Triaxial Active Guard Triaxial Active Guard Triaxial Advanced Measurement (C-V, C-t, C-f, 1 kHz- 5 MHz) YES YES Ultra fast pulsed/transient IV (from 100 ns, 200 MSa/s, 10 V) YES Software Intuitive GUI YES YES YES YES Powerful graph capabilities YES YES YES YES Built-in database to store the measurement related data YES YES YES YES Personal analyzer on your PC YES YES YES YES

04 | Keysight | Precision Current-Voltage Analyzer Series - Technical Overview Cost-effective Application Coverage for Tasks Ranging from Nanomaterial Characterization to Advanced Electrical Device Test IV characterization is necessary to fully understand the electrical beh avior of devices and materials. This is true not only for semiconductor devices, but also for oth er devices such as nano-components, photovoltaic cells, optical devices, organic d evices, sensors, passive/ active discrete components and automotive devices. There is much on-go ing research into improving these devices to decrease power consumption and lower costs so as to i mprove the overall performance of the consumer devices in which the devices ultima tely reside. To meet the need for reduced development times, better IV characterization solutions than are provided by conventional IV measurement instruments are required. The combination of SMU technology with intuitive graphical analysis capabilities makes Keysight’s IV analyzers the ideal solution for both basic and advanced IV analysis. SMU based hardware is easier to use and more accurate than conventional instrumentation, and Keysight’s EasyEXPERT group+ software (which works will all Keysight IV analyzer products) has many features that facilitate IV characterization. EasyEXPERT group+ comes with numerous furnished application tests that e ncompass the most common IV characterization tasks, and it also makes it easy to create cus tomized tests using the SMU hardware. Either option allows you to display and analy ze data graphically or numerically, thereby dramatically improving IV charac terization productivity. While IV analyzers have long been used to characterize conventional semiconductor devices, their cost has kept them from being widely used in other component and material characteri- zation applications. However, Keysight’s IV analyzer series now offers a wide range of choices and price/performance points, making it cost-effective for a wide range of uses and industries. Semiconduc- tors, discrete and passive components Diodes, laser diodes, LEDs Photodetectors, sensors Field Effect Transistors (FETs), Bipolar Junction Transistors (BJTs) ICs (Analog ICs, RFICs, MMICs, etc) Resistors, varistors, thermistors, switches Electronics and green energy devices Photovoltaic cells Power transistors, power devices Automotive Medical instruments Circuit tests needing DC bias Research and education Novel new materials Nano devices characterization (e.g. CNT) GMR (Giant Magnetic Resistance) Organic devices Discrete devices Id-Vg, Id-Vd, Ic-Vc, diode, etc. Bipolar Ic-Vc, diode, Gummel plot, breakdown, hfe, capacitance, CMOS Id-Vg, Id-Vd, Vth, breakdown, capacitance, QSCV, etc. Memory Vth, capacitance, endurance test, etc. Power MOSFET Id-Vds, Rds-Id, Id-Vgs, Capacitance, etc. IGBT Ic-Vce, Ic-Vge, Vce(sat), Vth Vge(off), breakdown Solar Cell I-V, Cp-V, Nyquist Plot, DLCP, etc. Nano devices Resistance, Id-Vg, Id-Vd, Ic-Vc, etc. GaN FET Current Collapse, Id-Vds Current Collapse, Diode Current Discrete devices Id-Vg, Id-Vd, Ic-Vc, diode, etc. Examples of devices and materials requiring characterization Examples of furnished application tests

05 | Keysight | Precision Current-Voltage Analyzer Series - Technical Overview SMU Technology Provides Many Features that Simplify Dificult IV Measurement Tasks Why use an SMU (Source/Measure Unit)? The SMU integrates many sourcing and measurement capabilities into a compact form. SMUs can function as a 4-quadrant precision voltage or current source, a precision voltage or current meter, and an electric load. They are also capable of outputting both DC and pulsed signals. The adjacent block diagram illustrates these capabilities. As this shows, the tight i ntegra- tion of these various resources eliminates the cabling and timing complex ities associated with discrete instruments. Keysight’s IV analyzers can in tegrate multiple SMUs to support applications requiring numerous source and measurement terminals. Feedback mechanisms stabilize voltage and current sourcing The close integration of the SMU’s resources provides beneits not possib le when using collections of conventional instruments. For example, SMUs c an monitor their own current and voltage output via internal feedback, allowi ng them to maintain accurate and stable output levels even if load conditions change dynamically. SMUs also support remote 4-wire (Kelvin) sensing , which enables the accurate measurement of extremely small resistances at dist ances far from the actual instrument. Compliance feature prevents device damage SMUs have a compliance feature that allows the user to set a limit on the quantity not being forced by the SMU (i.e. current in voltage force mode and voltage in current force mode). The SMU will never force a voltage or current value on a DUT that causes it to exceed the speciied compliance value. The ability to set a compliance limit helps prevent accidental device damage. A V Feedback Multiple sourcing and measurement capabilities Precision current source/voltage meter Source block Precision 4-quadrant voltage or current sourcing with DC, pulse and sweep capabilities. Measurement point(s) Measurement block Precision voltage/ current measurement with auto-ranging capability. Precision current source/voltage source SMUs provide many versatile sourcing and measurement capabilities DC Pulse Sweep Pulsed Sweep Voltage Range Actual load characteristic 1 pA 1 nA 1 mA 1 µA Example: compliance = 1 µA Functions as a voltage source for currents below compliance Functions as a current source (set at compliance value) for voltages above compliance setting How compliance protects devices from accidental damage

06 | Keysight | Precision Current-Voltage Analyzer Series - Technical Overview The Most Accurate and Unparalleled Measurement Range on the Market, from 0.1 fA to 1500 A/10 kV A broad dynamic range is covered by the auto-ranging and sweep capabilities The IV characteristic can curve across multiple levels in most cases. Becau se the SMU in IV analyzer supports the built-in sweep operation in either DC step o r pulsed step, it is extremely useful in performing IV measurements and drawing the IV curve in a single operation. In addition, SMU supports the auto-ranging capability that can change the measurement ranges automatically acco rding to the measured value. These capabilities allow you to quickly obtain the full lV curve with the best accuracy. Wide range to cover from 0.1 fA ultra low current to high voltage/current up to 1500 A/10 kV The SMU’s close integration of source and measurement circuitry reduces ca ble connections, and lowers measurement errors such as noise. The SMU’s intri nsic low noise level, active guard technology and triaxial connection enable l ow current measurement down to 0.1 fA. In conjunction with the sweep and auto-ranging capabilities, the IV analyzer enable accurate IV characterization fo r a wide dynamic range from sub- ρA to A level across multiple levels. The precision IV analyzer series offers a wide selection of SMU different iated by the output coverage, low current performance and price range for low to mid power range. In addition, the advanced device analzyer offers more speci ic measurement capabilities and a greater output range for high power appli cations. The wide line-up allows to choose the best IV characterizatin solution to me et your needs from the application, performance, and cost view points. Voltage Range Fixed range (1µA) Auto range Sweep capability with auto-ranging enables accurate measurement in the wide band. Auto-ranging in sweep measurement 1 pA 1 nA 1mA 1µA On wafer MOS FET measurement example by different SMUs Economic IV Analyzer MPSMU of Precision IV and Advanced Analyzer SMU with ASU of Precision IV and Advanced Analyzer HRSMU of Precision IV and Advanced Analyzer (*) Measurement results after the zero offset cancel function for the Precision IV and Advanced Analyzers, and offset subtraction by user for Economic IV Analyzer.

07 | Keysight | Precision Current-Voltage Analyzer Series - Technical Overview GUI Based Intuitive User Interfaces for Quick Measurement Setup Application test mode provides extensive libraries of pre-defined tests Application test mode provides convenient task oriented point and cli ck test setup and execution. An application test can be selected from the furnished libraries by device type and/or desired measurement, and then executed after modifying the default input parameters as needed. Modiied test setups can be stored in a “My Favorite” list for quick future execution. The application tests are also completely user-modiiable u sing EasyEXPERT’s built-in graphical programming environment. Classic test mode provides full hardware control by mouse point and click operation When you perform measurements other than the ready-to-use applications in the library, the classic test mode provides dir ect access to the analyzers hardware capabilities. By taking full advantage of windows-based features, you can set the various parameters such as output voltage/current, number of sweep steps, range, and so on for the hardware available features. It has a similar look and feel to the front-panel interface of the 4155/56 parameter analyzer that has been t he de-facto standard analyzer for a long time. The 4155/56 setup ile can be converted to the classic test setup by using the furnished 4155/56 setup ile converter. Tracer test mode provides real-time curve tracing Tracer test mode offers intuitive and interactive sweep control simil ar to that of an analog curve tracer by using a rotary knob or mouse operation. It allows sweep measurements to be modiied in real-time just like on a curve tracer, and both voltage and current can be swept bidirectionally (expanding in both the positive and negative directions simultaneous ly). This is useful for failure analysis and when characterizing unknown devices. Moreover, once you have determined the ideal test conditions using the tracer test you can easily transfer the settings into a classic test mode setup for further reinement or for automated testing. Step 1. Select a measurement from one of the furnished libraries. Application Test mode Step 2. Modify the measurement parameters as needed. Step 3. Press the measure button to start the measurement. Voltage, current, sweep points, range, etc. can be fully controlled.Various measurement options Classic Test mode Tracer Test mode

08 | Keysight | Precision Current-Voltage Analyzer Series - Technical Overview Accelerated Graphical Analysis and Data Exporting to Your PC for Further Data Processing Auto-analysis and graphical display features accelerate your analysis The data display window accelerates the analysis of the measurement resul ts without using the external analysis utilities. It provides the powerful graphi cal display and analysis features for front-end analysis. This can pop-up automatically when the m easurement is complete. It is also available to analyze the measurement results in the data st ore. It provides many powerful analysis tools such as auto-scaling, marker an d line operation, multiple Y axes capabilities and so on. For example, the data display and intuit ive GUI operation allow for the extraction of the threshold voltage quickly through t he process of inding the max position on the gm curve in Y2, drawing the tangent line on the Id curve in Y1, and reading out the intercept to the X axis, as illustrated in the followi ng igure. In conjunction with the auto-analysis capability of the measurement setup, you can perform the operation automatically after taking measurements without ma nual operation. Direct Excel export for quick further analysis on your PC The data display allows you to export data directly to an Excel spreadsheet wi thout saving as a CSV ile, thereby accelerating post-analysis on any computer. If neces sary, the graph in this window can also be exported as an image ile for reporting. The preferenc e menu provides various options for the appearance such as color and informati on placed in the graph pane. List data pane. The data at market position is highlighted. Powerful analysis tool creates lV measurement data that gives an insight into characteristics by providing auto scaling, marker, line operations, and so on. Parameters pane displays the parameters extracted by user functions. They can be displayed in the graph pain for graph image export Marker Tangent Line Graph pane is available for powerful graphical analysis. Direct data link to Excel spreadsheet.

09 | Keysight | Precision Current-Voltage Analyzer Series - Technical Overview Simple Management and Access to all Data Without Cumbersome File Handling Built-in database allows you to store and rapidly recall the data that you need The IV characteriztion performs repeatedly for various materials/d evices, generating numerous iles such as a measurement setup ile, and so on. This can make it dificult to manage all th e different iiles and accurately record the information. EasyEXPERT group+ has a built-in database to resolve this issue. Every tim e the measurement is performed, the combination of measurement setup and result can be stored auto matically into the built-in database known as a “workspace”. This unique “workspace” all ows you to manage and access all the relevant data without the need for accessing numerous ile s. The data stored in the “workspace” can be accessed for analysis or measurement reproductio n at any time, and the data can automatically be exported in various ile formats such as Excel, imag es, CSV, and so on. Built-in database (workspace) Ready to use application test Ready to use measurement setup Open the data display for analysis Recall the measurement setup Data can be exported to various file formats automatically Setup and result are stored together. Main screen provides easy access to the data in the workspace and measurement ca pabilities TXT/CSV Image Excel EasyEXPERT data

10 | Keysight | Precision Current-Voltage Analyzer Series - Technical Overview Quickly Perform Automated Multiple Measurements with Optional Switching Matrix and Prober Control Intuitive GUI is used to control an optional switching matrix The EasyEXPERT group+ also supports a switching matrix control. This allows you to create a switching matrix setup on GUI using mouse point and click operations. You can also use the EasyEXPERT group+ for the test system by integrating the analyzer and switching matrix to test multiple points with limited resources. Make a quick automated test sequence without the need for programming The EasyEXPERT group+ has a GUI-based quick test mode that supports automated test sequencing. Quick test mode provides a convenient means to execute a sequ ence of tests created in application test, classic test, or tracer test mode wit hout the need for any programming. It allows you to select, copy, and rearrange any of these tes ts with a few simple mouse clicks. If you are using a switching matrix, you can also autom atically call switching patterns created interactively using EasyEXPERT gr oup+. You can also combine wafer prober control with quick test mode to perform multiple tests au tomat- ically across a wafer. In addition to supporting popular semiautomatic waf er probers, EasyEXPERT also allows you to create your own wafer prober drivers. Automated testing is important to eficiently gather multiple paramete rs on the device. In many cases, instruments do not have automated test capability, and manua lly created test setups cannot be reused for automated testing. Therefore, th e ability to reuse interactively created tests in automated testing is a highly usef ul with obvious productivity beneits. Test sequence

11 | Keysight | Precision Current-Voltage Analyzer Series - Technical Overview Take full advantage of the analyzer’s powerful measurement and analysis capabilities from the lab to the office EasyEXPERT group+ can be installed on your PC, and used as your personal analyzer. Because it can be connected to the instrument via USB-GPIB interface, it is portable and can be used seamlessly either for ofline tasks in the ofice or online measurement execution in the lab. It does not need to be within range of the instrument to operate correctly, and most of tasks can be operated in the ofice with the PC peripherals such as wide display, USB, HDD and software such as Excel to improve the productivity. EasyEXPERT group+ can be installed on multiple PCs at no additional cost EasyEXPERT group+ can be installed on multiple PCs at no additional cost so that every team member can have their own personal analyzer environment. This ensures speed, accuracy, and eficiency within any group work. EasyEXPERT group+ also provides options to protect important data when sharing it with multiple users. Offering support across the Keysight analyzer series for more flexibility and scalability according to your needs The EasyEXPERT group+ provides a uniied characterization platform across the Keysight precision IV analyzer series. Interoperability across the analyzers provides more lexibility in measurement operations and scalability of measurement capacity in the lab. Available applications can be adapted to conigured resources. EasyEXPERT group+ Allows Flexible Characterization Tasks to be Performed that Signiicantly Improve Productivity Your PC becomes your portable personal characterization environment Free personal analyzer accelerates inter-departmental cooperatio n

12 | Keysight | Precision Current-Voltage Analyzer Series - Technical Overview Compare and Select the Best Analyzer for your Needs Economic IV Analyzer Precision IV Analyzer Advanced Device Analyzer Model number B2901A/ B2902A B2911A/ B2912A E5262A E5263A E5260A E5270B B1500A B1505A Maximum output 210 V / 3 A 210 V / 3 A 100 V / 200 mA 200 V / 1 A 200 V / 1 A 200 V / 1 A 200 V / 1 A 10 kV / 1500 A Numbers of SMU channels 1 to 8 1 to 8 2 2 1 to 8 1 to 8 1 to 10 1 to 10 SMU channel upgradability Instrument stacking up to 4 units Instrument stacking up to 4 units Not available Not available Add SMU module to the mainframe Add SMU module to the mainframe Add SMU module to the mainframe Add SMU module to the mainframe Output connector type Banana 1 Banana 1 Active Guard Triaxial Active Guard Triaxial Active Guard Triaxial Active Guard Triaxial Active Guard Triaxial Active Guard Triaxial SMU features Source operation Voltage or current source with 4-quadrant operation (source & sink) Voltage or current source with 4-quadrant operation (source & sink) Voltage or current source with 4-quadrant operation (source & sink) Voltage or current source with 4-quadrant operation (source & sink) Voltage or current source with 4-quadrant operation (source & sink) Voltage or current source with 4-quadrant operation (source & sink) Voltage or current source with 4-quadrant operation (source & sink) Voltage or current source with 4-quadrant operation (source & sink) Auto-ranging Yes Yes Yes Yes Yes Yes Yes Yes Compliance (limit) Yes Yes Yes Yes Yes Yes Yes Yes Current-voltage measurement capability Spot Yes Yes Yes Yes Yes Yes Yes Yes Sweep Yes Yes Yes Yes Yes Yes Yes Yes Time sampling Yes Yes No No No No Yes Yes Advanced measurement capability Capacitance No No No No No No Yes Yes Ultra-fast pulsed IV/ transient IV No No No No No No Yes No Measurement setup and control Mouse & keyboard operation Yes Yes Yes Yes Yes Yes Yes Yes Classic test Yes Yes Yes Yes Yes Yes Yes Yes Application test Yes Yes Yes Yes Yes Yes Yes Yes Tracer test Yes Yes Yes Yes Yes Yes Yes Yes Test sequence Yes Yes Yes Yes Yes Yes Yes Yes Switch and prober control Yes Yes Yes Yes Yes Yes Yes Yes Data analysis and management Data management by workspace Yes Yes Yes Yes Yes Yes Yes Yes Graphical display with auto analysis Yes Yes Yes Yes Yes Yes Yes Yes Automated data store Yes2 Yes2 Yes2 Yes2 Yes2 Yes2 Yes2 Yes2 Automated data export Yes3 Yes3 Yes3 Yes3 Yes3 Yes3 Yes3 Yes3 EasyEXPERT and analyzer controller Built-in PC No No No No No No YES (15 inch touch screen) YES (15 inch touch screen) External PC Yes Yes Yes Yes Yes Yes Yes Yes Group usage support Personal analyzer environment Yes Yes Yes Yes Yes Yes Yes Yes Interoperability across the Keysight analyzer series Yes Yes Yes Yes Yes Yes Yes Yes Data protection Yes4 Yes4 Yes4 Yes4 Yes4 Yes4 Yes4 Yes4 1. Banana to Triaxial adapter is available. 2. Measurement setup and result 3. Excel dynamic data link, Excel iles, CSV iles, images, text, EasyEXPERT i le 4. Password protection and user level access control Precision Current-Voltage Analyzer Series

13 | Keysight | Precision Current-Voltage Analyzer Series - Technical Overview

Ordering Information

Economic IV Analyzer Configuration Precision IV Analyzer Configuration The GNDU (ground unit) is situated within the mainframe of any model. It can forc e 0 V and sink current up to 4 A for E5260A/E5270B and 2.2 A for E5262A/E5263A. Every mode l contains triax cables for GNDU and SMU, the GNDU to Kelvin adapter, USB-GPI B interface and the EasyEXPERT group+ software install media. Precision IV Analyzer (2ch ixed coniguration) Model E5262A E5263A Pre-conigured SMU Two MPSMU One MPSMU and one HPSMU Cable Length options 015 1.5m cable length Available Available 030 3.0m cable length Available Available Precision IV Analyzer (Conigurable up to 8ch) Model E5260A E5270B Pre-conigured SMU None None Cable Length options 015 1.5m cable length Available Available 030 3.0m cable length Available Available Quick coniguration options A01 Four MPSMU package Available Available A02 Two MPSMU and two HRSMU package HRSMU is not supported Available A03 Four HRSMU package HRSMU is not supported Available Add-on module options A10 Add one HPSMU Available Available A11 Add one MPSMU Available Available A17 Add one HRSMU HRSMU is not supported Available A28 Add atto sense and switch unit (ASU) ASU is not supported Available Economic IV Analyzer Model B2901A B2902A B2911A B2912A Number of SMU channels 1 2 1 2 Accessories and cables N1294A B2900A Series Precision Source/Measure Unit Accessories N1294A-001 Banana - Triax Adapter for 2-wire (non Kelvin) connection N1294A-002 Banana - Triax Adapter for 4-wire (Kelvin) connection N1294A-032 Digital I/O Trigger Cable for Multiple Unit Control 16494A Triaxial Cable 16494A-001 Triaxial Cable (1.5m) 16494A-002 Triaxial Cable (3m) 82357B USB-GPIB interface Note: EasyEXPERT supports instrument control via GPIB only

14 | Keysight | Precision Current-Voltage Analyzer Series - Technical Overview Ordering Information (continued) Advanced Device Analyzer Configuration The GNDU (ground unit) is situated within the mainframe of any model. It can forc e 0 V and sink current up to 4.2 A. The B1500A contains a keyboard, mouse, and triax cable s for GNDU and SMU, the GNDU to Kelvin adapter and the EasyEXPERT group+ software in stall media. The following table provides details of the ordering informati on for the B1500A. Contact a Keysight sales representative for a quotation and the conigurat ions for the B1505A (10 kV/1500 A model). Mainframe B1500A Semiconductor/Device Analyzer Cable length options B1500A-015 1.5m cable length B1500A-030 3.0m cable length Quick coniguration options B1500A-A00 Empty for custom coniguration B1500A-A01 Four MPSMU package B1500A-A02 Four HRSMU package B1500A-A03 Two MPSMU and two HPSMU package B1500A-A04 Basic lash memory cell package (two MPSMU, two HRSMU, pulse generator module and accessories) Add-on module options B1500A-A10 Add one HPSMU B1500A-A11 Add one MPSMU B1500A-A17 Add one HRSMU B1500A-A1A Add one Medium Current SMU (MCSMU) and connection box B1500A-A1B Add two Medium Current SMU (MCSMU) and connection box B1500A-A20 Add one Multi-Frequency Capacitance Measurement Unit (CMU) B1500A-A25 Add one High Voltage Semiconductor Pulse Generator (HV-SPGU) B1500A-A28 Add ASU for HRSMU B1500A-A29 Add ASU for MPSMU B1500A-A30 Add Waveform Generator/Fast Measurement Unit (WGFMU) B1500A-A31 Add Waveform Generator/Fast Measurement Unit (WGFMU) with connector adapter Other Accessories N1301A CMU accessories for B1500 N1301A-100 SMU CMU unify unit (SCUU) N1301A-102 SMU CMU unify unit cable (3m) N1301A-110 SMU CMU unify unit magnetic stand N1301A-200 Guard switch unit (GSWU) N1301A-201 Guard switch unit cable (1 m) N1301A-202 Guard switch unit cable (3 m) B1542A Pulse IV Package for B1500 / EasyEXPERT

15 | Keysight | Precision Current-Voltage Analyzer Series - Technical Overview Ordering Information (continued) Key specifications of configurable SMUs The precision IV analyzer and advanced device analyzer provides sever al SMU selections for coniguration. The following table indicates the key speciication d ifferences between each of the SMUs. Precision IV Analyzer Advanced Device Analyzer E5262A E5263A E5260A E5270B B1500A B1505A MPSMU (Medium Power SMU) Max. output 100 V / 200 mA 100 V / 100 mA 100 V / 100 mA 100 V / 100 mA Min. resolution 5 pA / 100 μV 10 fA / 0.5 μV 10 fA / 0.5 μV (0.1 fA with optional ASU) 10 fA / 0.5 μV HPSMU (High Power SMU) Max. output 200 V / 1 A 200 V / 1 A 200 V / 1 A 200 V / 1 A Min. resolution 5 pA / 100 μV 10 fA / 2 μV 10 fA / 2 μV 10 fA / 2 μV HRSMU (High Resolution SMU) Max. output Not supported 100 V / 100 mA 100 V / 100 mA Not supported Min. resolution Not supported 1 fA / 0.5 μV (0.1 fA with optional ASU) 1 fA / 0.5 μV (0.1 fA with optional ASU) Not supported MCSMU (Medium Current SMU) Max. output Not supported Not supported 30 V / 100 mA (1 A pulse)

30 V / 100 mA

(1 A pulse) Min. resolution Not supported Not supported 10 pA / 0.2 μV 10 pA / 0.2 μV HCSMU (High Current SMU) Max. output Not supported Not supported Not supported 40 V / 1 A (20 A pulse) Min. resolution Not supported Not supported Not supported 10 pA / 0.2 μV HVSMU (High Voltage SMU) Max. output Not supported Not supported Not supported 3000 V / 8 mA Min. resolution Not supported Not supported Not supported 10 pA / 200 μV Ultra high voltage/high current accessories Not supported Not supported Not supported Other accessories are available for 10 kV / 1500 A measurement

16 | Keysight | Precision Current-Voltage Analyzer Series - Technical Overview This information is subject to change without notice. © Keysight Technologies, 2015, 2016 Published in USA, February 5, 2016 5992-0730EN www.keysight.com myKeysight www.keysight.com/find/mykeysight A personalized view into the information most relevant to you. Three-Year Warranty www.keysight.com/find/ThreeYearWarranty Keysight’s committed to superior product quality and lower total cost of ownership. Keysight is the only test and measurement company with three- year warranty standard on all instruments, worldwide. And, we provide a full one-year warranty on many accessories, calibration devices, systems and custom products. Keysight Assurance Plans www.keysight.com/find/AssurancePlans Up to ten years of protection and no budgetary surprises to ensure your instruments are operating to specification, so you can rely on accurate measurements. www.keysight.com/find/b1500a From Hewlett-Packard through Agilent to Keysight For more than 75 years, we‘ve been helping you unlock measurement insights. O ur unique combination of hardware, software and people can help you reach your nex t breakthrough. Unlocking measurement insights since 1939.

1939 THE FUTURE

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