C8000-20 HAMAMATSU | Alldatasheet
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Technical content
FEATURES
G Quantum Efficiency of CCD chip G Extremely high UV, DUV and VUV sensitivity
APPLICATIONS
G Beam Diagnostics of Stepper Excimer Lasers: F2(157 nm), ArF (193 nm), KrF (248 nm) G Development of UV optics Spectral Response Characteristic of CCD chip* The C8000 camera series employs an ultra high sensitive back-thinned CCD sensor made by Hamamatsu. Espe- cially in the UV, DUV and VUV wavelength ranges, the C8000 series offers extremely high sensitivity never be- fore realized by other scientific CCDs. BT(Back-thinned)-CCD DATA SHEET 100 200 300 400 500 600 700 800 900 1000 1100 1200 100 Wavelength (nm) Quantum Efficiency (%) Excimer Laser F2 ArF KrF Wavelength (nm) 157 193 248 Quantum 84 57 69 * Without sapphire window. The spectral response with sapphire window is decrease by the transmittance. (This is typical, not guaranteed. ) Efficiency(%) (This is typical, not guaranteed. ) Without sapphire window With sapphire C8000-20 Video Camera **Calclated value
DIMENSIONAL OUTLINES (UNIT: mm) Camera controller (approx. 5.0 kg) SPECIFICA TIONS Imaging device Back-thinned frame transfer CCD Effective number of pixels 640 (H) × 480 (V) Cell size 14 µm (H) × 14 µm (V) Effective area Full well capacity typ. 65,000 electrons Readout noise (r.m.s.) 100 to 150 electrons (Note: The following functions are not effective with RS-644 digital output) Frame rate RS-644 digital out and RS-170A out RS-232C Data output 8.96 mm(H) × 6.72mm (V) C-mount Dynamic range* 30 frame/s 430 : 1 Cooling method Non-cooling Cooling temperature Dark current - A/D converter 10bit Exposure time 1/30 s External control Lens mount Functions ±2285 ±223 ±174±27 ±2200 ±1262 ±1333 MIN MAX - 0 POWER C8000CCD CAMERA CONTROLLER REMOTE GAIN OFFSET CONTRAST ENHANCEMENT SETUP OVER NORM VIDEO LEVEL SET UP BG RECUR ,D=84-M 3 ±2160±0.54 ±166 ±0.58 ±0.518 ±0.532 ±140±140 ±190 ±175 ±0.537.5 ±36.3 C8000CCD CAMERA D=6 1-32UN C-mount 1/4-20UNC,D=8 Camera head (approx. 1.3 kg) C8000-20 *Calculated from the ratio of the full well capacity and the readout noise. Ambient storage/operating temperature Power consumption Ambient storage/operating humidity 70VA 70% max. (no condensation) Typ number Contrast enhancement Homepage Address http://www.hamamatsu.com # Product and software package names noted in this documentation are trademarks or registered trademarks of their respective manufacturers. G Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office.. G Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications and external appearance are subject to change without notice.. © 2003 Hamamatsu Photonics K.K. ISO 9001 Certificate: 09 105 79045 HAMAMATSU PHOTONICS K.K., Systems Division 812 Joko-cho, Hamamatsu City, 431-3196, Japan, Telephone: (81)53-431-0124, Fax: (81)53-435-1574, E-mail:export@sys.hpk.co.jp Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658, E-mail: info@hamamatsu.de, United Kingdom:Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire, AL7 1BW, U.K., Telephone: (44) 1707-294888, Fax: (44) 1707-325777, E-mail: info@hamamatsu.co.uk North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171-41 Solna, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01, E-mail: info@hamamatsu.se - JUL/2003 HPK Created in Japan (PDF) Real time background subtruction Recursive filter (2, 4, 8, 16, 32, 64 frame selectable) G G -10 to +50˚C / 0 to +40˚C G G G