C8000-10 HAMAMATSU | Alldatasheet
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Technical content
FEATURES
G Quantum Efficiency of CCD chip G Extremely high UV, DUV and VUV sensitivity
APPLICATIONS
G Beam Diagnostics of Stepper Excimer Lasers: F2 (157 nm), ArF (193 nm), KrF(248 nm) G Development of UV optics Spectral Response Characteristic of CCD chip* BT(Back-thinned)-CCD DATA SHEET 100 200 300 400 500 600 700 800 900 1000 1100 1200 100 Wavelength (nm) Quantum Efficiency (%) Excimer Laser F2 ArF KrF Wavelength (nm) 157 193 248 Quantum 84 57 69 * Without sapphire window. The spectral response with sapphire window is decrease by the transmittance. (This is typical, not guaranteed. ) Efficiency(%) (This is typical, not guaranteed. ) Without sapphire window With sapphire C8000-10 Digital Camera **Calclated value G Low dark noise with peltier cooling G Binning function / Sub-array function The C8000 camera series employs an ultra high sensitive back-thinned CCD sensor made by Hamamatsu. Espe- cially in the UV, DUV and VUV wavelength ranges, the C8000 series offers extremely high sensitivity never be- fore realized by other scientific CCDs.
DIMENSIONAL OUTLINES (UNIT : mm) Camera controller (approx. 5.0 kg) SPECIFICA TIONS Imaging device Back-thinned frame transfer CCD Effective number of pixels 640 (H) × 480 (V) Cell size 14 µm (H) × 14 µm (V) Effective area Full well capacity 50,000 electrons (typical value) Frame rate 16 bit RS-644 LVDS RS-232C Output signal (digital output) 8.96 mm(H) × 6.72mm (V) / 2/3 inch format C-mount Dynamic range* 500 : 1 Cooling method Peltier cooling /natural air cooling Cooling temperature Dark current A/D converter 12 bit Exposure time 1 sec max. (On chip integration) External control Camera head (approx. 1.1 kg) C8000-10 *Calculated from the ratio of the full well capacity and the readout noise. Ambient operating temperature Power consumption Ambient storage/operating humidity 70VA 70% max. (with no condensation) -10 to +50˚C 0 to +40˚C Model +5 ˚C (Cools the CCD element to 20˚C less than the ambient temperature) ,D=84-M 3 4±0.5 50±1 8±0.5 132±2 18±0.5 32±0.5 40±1±140 90±1 ±175 37.5±0.5 6.3±3D=6 1-32UN C-mount 1/4-20UNC,D=8 C8000CCD CAMERA 285±2 23±2 74±17±2200±2 262±1 333±1 POWER C8000CCD CAMERA CONTROLLER Line voltage Ambient storage temperature 100 / 117 / 220 / 240 VAC 50/60Hz External trigger input Super-pixel readout (Binning) 2 × 2, 4 × 4, 8 × 8, Sub-array readout 1/1, 1/2, 1/4, 1/8 (H) × 8 pixel unit (V) Contrast enhancement gain Approx. 1 to 5 times Lens mount 30.9Hz, 55.0Hz(2 × 2 binning), 91.7Hz(4 × 4 binning), 131.6Hz(8 × 8binning) Yes G approx. 135 electrons/pixels/ sec High scan mode Middle scan mode Slow scan mode 15.4Hz, 29.5Hz(2 × 2 binning), 51.5Hz(4 × 4 binning), 80.6Hz(8 × 8binning) 7.7Hz, 14.7Hz(2 × 2 binning), 25.8Hz(4 × 4 binning), 40.0Hz(8 × 8binning) Homepage Address http://www.hamamatsu.com # Product and software package names noted in this documentation are trademarks or registered trademarks of their respective manufacturers. G Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office. G Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications and external appearance are subject to change without notice.. © 2000 Hamamatsu Photonics K.K. ISO 9001 Certificate: 09 105 79045 HAMAMATSU PHOTONICS K.K., Systems Division 812 Joko-cho, Hamamatsu City, 431-3196, Japan, Telephone: (81)53-431-0124, Fax: (81)53-435-1574, E-mail:export@sys.hpk.co.jp Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658, E-mail: info@hamamatsu.de, United Kingdom:Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire, AL7 1BW, U.K., Telephone: (44) 1707-294888, Fax: (44) 1707-325777, E-mail: info@hamamatsu.co.uk North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171-41 Solna, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01, E-mail: info@hamamatsu.se - JUL/2001 HPK Created in Japan (PDF) G