B2980A

B2980A KEYSIGHT | Alldatasheet

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Electrometer/High Resistance Meter Data Sheet The world’s only graphical Picoammeter/Electrometer that can confidently measure down to 0.01 fA and up to 10 PΩ

02 | Keysight | B2980A Series Femto/Picoammeter and Electrometer/High Resistance Meter - Data Sheet Product Overview Unique capabilities and features maximize confidence for sensitive measurements Keysight B2980A Series of Femto/Picoammeters and Electrometers/High Resistance Meters not only offer best-in-class measurement performance, but also provide unprecedented features to maximize your measurement confidence. The Femto/Picoammeters and Electrometers both offer 0.01 fA (10 -17 A) minimum current resolution, which meets virtually all existing and future low-level current measurement needs. The electrometers feature a 1,000 V voltage sourcing capability that supports up to 10 PΩ (10 16 Ω) resistance measurements. The electrometers also work with Keysight’s well-proven high resistance meter accessories. Both the Femto/Picoammeter and Electrometer have battery powered versions to eliminate AC power line noise. This available capability provides an unmatched level of noise reduction, enabling low-level measurements that were previously impossible. Unlike conventional picoammeters and electrometers, the B2980A series possesses a 4.3” color LCD-based graphical user interface (GUI) that provides multiple options for viewing data. In addition to numeric format, data can also be viewed as a graph, as a histogram and as a trend chart. These unique front-panel capa - bilities facilitate the capture of transient behavior and provide the ability to make quick statistical analyses without the need for a PC. The B2980A series also has features to help you maintain measurement integrity on the external cabling and fixturing. The available Setup Integrity Checker software permits the comparison of noise levels for different cabling and fixturing arrangements, allowing you to identify and isolate the noise-sensitive areas in your measurement system. In addition to these impressive measurement capabilities, the B2980A series has easy-to-use and convenient measurement assist functions that permit users with limited or no electrical engineering training to perform complicated electrical characterization operations with ease. To provide flexibility and enable you to purchase an instrument with the exact amount of testing capability for your needs, the Keysight B2980A series offers four product versions. Key specifications Model Femto/Picoammeter Electrometer/High Resistance Meter B2981A B2983A B2985A B2987A Measurement resolution 6½ digits 6½ digits 6½ digits 6½ digits Current measurement 0.01 fA - 20 mA 0.01 fA - 20 mA 0.01 fA - 20 mA 0.01 fA - 20 mA Minimum range 2 pA 2 pA 2 pA 2 pA Resistance measurement Up to 10 PΩ Up to 10 PΩ Voltage measurement 1 μV - 20 V 1 μV - 20 V Input resistance > 200 TΩ > 200 TΩ Charge measurement 1 fC - 2 μC 1 fC - 2 μC Temperature measurement √ √ Humidity measurement √ √ Voltage source Up to ±1,000 V Up to ±1,000 V Minimum resolution 700 μV 700 μV Maximum reading rate 20,000 rdg/s 20,000 rdg/s 20,000 rdg/s 20,000 rdg/s Battery operation √ √ Other key features Graphical capability (Meter View, Graph View, Histogram View, Roll View), Auto navigation, 100,000 points sample buffer, Interface (USB, LAN, GPIB, LXI Core), Free PC control software, etc.

03 | Keysight | B2980A Series Femto/Picoammeter and Electrometer/High Resistance Meter - Data Sheet B2980A Series Key Features – 0.01 fA (10-17 A) minimum measurement resolution and 2 pA to 20 mA current – measurement ranges with 6.5 digits resolution – < 20 μV burden voltage in its lowest current range – High speed reading rate up to 20,000 rdg/s – Battery operation models for line noise free measurements 1 – Built-in ± 1,000 V voltage source 2 – Measurement resistances up to 10 PΩ (10 16 Ω)2 – > 200 TΩ input impedance for up to 20 V voltage measurement 2 – Independent current and voltage measurement 2 – Charge measurement down to 2 nC range with 6.5 digits resolution 2 – Temperature and humidity measurements 2 – Graphical viewing modes (Meter, Graph, Histogram and Roll View) – Easy-to-use auto navigation to select optimal range and aperture – Optional Test Setup Integrity Checker function for noise source isolation – Versatile interface (USB 2.0: LAN, GPIB, LXI Core) – USB (front): store data, save/recall setup information – Free PC control software 1. B2983A and B2987A 2. B2985A and B2987A 0.01 fA digit Real-time histogram provides quick statistical analysis of measurement data Battery operation eliminates AC power line noise from measurements Battery Best-in-class 2 pA to 20 mA current measurement ranges and internal 1,000 V sourcing capability ensure accurate 0.01 fA and 10 PΩ measurements Test Setup Integrity Checking function and dedicated accessories ensure maximum measurement accuracy Time domain view (roll view) enables capture of transient signal effects and selection of desired measurement data Why is 0.01 fA resolution important? Many materials science and device characterization applications require the ability to measure very small currents that conventional DMMs (digital multi-meters) cannot handle. Since the B2980A series provides a best-in-class 0.01 fA current measurement resolution in both its Femto/Picoammeter and Electro-meter versions, it can perform precise and detailed measurements that were previously impossible using conventional picoamme ters and electrometers. Therefore, you are assured that your current measurement requirements will be met well into the future. 10 A 1 A 1 mA 1 μA 1 nA 1 pA 1 fA DMM Conventional picoammeter B2981A / B2983A Femto/picoammeter Conventional electrometer B2985A / B2987A electrometer Typical current measurement ranges Application Examples – Material science (Biomaterials, ceramics, elastomers, films, dielectric materials, electrochemical, ferroelectric materials, graphene, metals, organic materials, nano- materials, polymers, semiconductors, etc.) – Devices & electronic components (capacitors, resistors, diodes, sensors, transistors including TFT and CNT, optoelectronics, solar cells, etc.) – Electronic/non-electronic systems (ion beam, electron beam, sensing systems, particle measurements, embedded precision instruments, etc.) The World’s Only Graphical Picoammeter/Electrometer that can Confidently Measure Down to 0.01 fA and Up to 10 PΩ

04 | Keysight | B2980A Series Femto/Picoammeter and Electrometer/High Resistance Meter - Data Sheet Solution 1. The B2980A series’ time domain view (Roll View) lets you visually choose when to capture data. The B2980A series’ GUI provides a Roll View that can graphically display data as it is taken and that also can store up to 100,000 of these data points for later retrieval. With a sampling rate of up to 100 kHz, the Roll View can reveal real-time measurement trends and provide valuable insights into the dynamics of your DUT’s behavior. To facilitate this data analysis, the B2980A series provides flexible graphing capabilities. In Graph View the electrometers can plot I-V curves on their displays using values from either the internal voltage source or voltage measurement data. In addition, it is easy to generate a variety of other X-Y plots such as I-t, V-t, R-t, Q-t, I-R, etc. (specific graphical display capabilities depend on product model). These powerful and versatile graphical capabilities allow you to gain valuable insights when making sensitive measurements. How fast can the B2980A series capture data? Measurement speed is usually determined by the aperture time of the integration setting, which is typi - cally proportional to some number of power line cycles (PLCs). Smaller aperture times are obviously more desirable as long as they provide sufficient averaging to prevent power line noise from affecting the measurement. However, conventional instruments often cannot capture fast transients due to their relatively slow reading rates that require long overhead after the aperture closes. In contrast, the B2980A series’ fast reading rate (20,000 rdg/s) and streamlined system architecture greatly reduce overhead time. As a result the B2980A series does not lose data sampling capability even in its minimum PLC setting, allowing it to capture more detailed DUT responses. The example below compares the data sampling capability of a conventional instrument with that of the B2980A series. As this example shows, the B2980A series can capture data with x4 better timing resolution due to its low measurement overhead. Overhead Aperture Measured level Measured levelMeasured level Aperture Aperture Aperture Aperture Aperture Aperture Aperture Aperture Aperture Aperture Aperture Aperture Overhead Original waveform Conventional instrument Keysight B2980A series Overhead Time domain view (Roll View) Data recorded up to 100,000 points The B2980A series’ unmatched 0.01 fA resolution combines with other unique features to solve previously intractable measurement challenges Solution 2. You can instantly view and evaluate data distributions using the real-time histogram feature All low-level measurements carry with them a degree of statistical uncertainty due to inherent fluctuations in the measurement environment. The conventional method to deal with this issue involves post-measurement evaluation of the data (usually on a PC) using a histogram. However, this process can become tedious if you need to perform several measurement and test setup debug cycles. Challenge 2: Instruments with only numeric displays often exhibit instability in their least significant digits and offer no information about the measurement’s mean and standard deviation. How does the measurement result distribute? Challenge 1: Instruments that only have numeric displays do not give you any control over when to take data during a transient response. RUN RUN RUN RUN When should I take the measurement data? When should I take the measurement data?

05 | Keysight | B2980A Series Femto/Picoammeter and Electrometer/High Resistance Meter - Data Sheet How much lower is the B2980A series’ noise floor? Even when operating in AC mode with

0.1 PLC integration time, the B2980A

series’ advanced design provides current measurement performance that is much better than conventional picoammeters and electrometers. The graph shown below compares current measurement noise levels under identical measurement conditions. As can be seen the B2980A series can make both lower noise and faster measurements, which reduces the trade-offs that normally need to be made between these two goals. Normalized RMS noise Normalized 2 nA range RMS noise

0.1 PLC, 3 m triaxial cable

A: High-end electrometer B: Picoammeter with V source C: Digital electrometer (3 nA range) B2980A A B C What makes Keysight triaxial cables superior? Triaxial cables, which are available from a variety of sources, are required for low-current measurement applica - tions. Keysight triaxial cables employ a semiconductor layer between the insulator and inner jacket, which minimizes the triboelectricity gener - ated by friction at these boundaries. The net result is that Keysight triaxial cables are largely unaffected by cable vibration, which enables more accurate and stable measurements. All B2980A products come with a 1.5 meter version of this triaxial cable. Off-the-shelf triaxial cable Keysight standard triaxial cable Conductor Inner jacket Outer jacket Insulation Inner shield Outer shield Insulation Inner shield Outer shield Conductor Inner jacket Outer jacketSemiconductor layer Challenge 3: Eliminating noise from low-level measurements is difficult and often requires extensive measurement expertise. In contrast the B2980A’s real-time and auto-scalable histogram display capability continuously updates the mean and sigma, enabling you to debug your measurement setup instantly without the need for any post-measurement data crunching. The histogram can be displayed in the Meter View, allowing you to compare accumulated data on the histogram with real-time numeric data. Note: The maximum number of data points supported by the histogram is 100,000. Battery charge staus indicator Battery operation indicator The battery is automatically charged when connected to AC power Solution 3. The B2980A series’ battery operated models eliminate power line noise and enhance low noise measurement performance. AC power line noise strongly impacts sensitive measurements. While integrating over one or more PLCs can minimize AC power line noise effects, even the B2980A’s excellent noise performance cannot eliminate 100% of this noise unless the instrument is completely isolated. Therefore, both the Femto/Picoammeter and Electrometer have available battery operated versions that enable you to make power-line-noise-free measurements. The two battery models can function for 7 hours (B2983A) or 5 hours (B2987A) under normal operating conditions, and they also automatically save your measured data and measurement setup information if the battery level goes below 5%. Of course, besides eliminating noise the battery models provide the added benefit of portability allowing you to use them anywhere you want. Histogram View On Meter View Available BINS: 10, 20, 40 and 100

100 BINS

40 BINS 20 BINS 10 BINS

06 | Keysight | B2980A Series Femto/Picoammeter and Electrometer/High Resistance Meter - Data Sheet Solution 4. Optional software and dedicated accessories help mitigate cabling complexities When performing sensitive measurements making appropriate cabling connections is often one of the more difficult challenges. Many factors can contribute to measurement noise or instability, including incorrect cabling, poor cable quality and improper guarding; however, determining the root cause of a measurement fixturing issue from among all of these factors is not easy. Conventional instruments do not provide any help to solve these types of issues and they typically only offer written guidance on best practices. In contrast, the B2980A series has an available Setup Integrity Checker function that can identify noise caused by external elements (cables, adapters, shields, chambers, etc.) and display the information in tabular format on the front-panel GUI. As shown below, the setup integrity checker function allows you to compare the noise level of the instrument with no cables connected against the noise level with different setup elements connected. By comparing the noise level standard deviation of different setup elements side by side, you can easily determine the quality of cables and other setup elements necessary for your measurements. The B2980A series also has specialized accessories available to facilitate certain types of measurements. For example, the N1413A High Resistance Meter Fixture Adapter allows you to use the B2980A series with Keysight’s accessories for high resistance measurement (such as the 16008B Resistivity Cell). A High Resistance Measurement Universal Adapter (N1414A) is also available to simplify the cabling for high resistance measurements. How much faster is the B2980A series’ settling time? When comparing instrument settling times, you need to understand how each instrument defines this specification. Most conventional instruments define settling time as the time it takes to reach 10% of the final value, whereas the B2980A series uses a value of 0.1%. By reducing dielectric absorption (DA), the B2980A achieves a faster settling time using the 0.1% limit even in its lower measurement ranges as shown below. ± 0.1 % of final value Final value Conventional electrometer’s settling to 0.1 % B2980A settling to 0.1% Time Measured data 10% of final value 0.1% of final value Settling time [s] 20 pA range settling time

2 V step, 100 GΩ, 1 PLC

B2980A Conventional electrometer A The B2980A series is optimized for fast 0.1 % settling time. Case, Shield Cable A Cable B Connector A Connector B Take out DUT/sample before start checking Cable A Cable A Cable B NOISE Noise source finally isolated Original setup Example showing how to use the Setup Integrity Checker Expected noise level with Cable A Unexpected noise level with Cable B Challenge 4: Verifying the integrity of measurement cabling is essential for accurate measurements, but conventional instruments do not offer any means to validate cable performance.

07 | Keysight | B2980A Series Femto/Picoammeter and Electrometer/High Resistance Meter - Data Sheet Innovative measurement functions enable both novice and experienced users to utilize all of the B2980A series’ powerful measurement capabilities How does the Navigation feature work? The B2980A series possesses an innovative measurement navigation capability that helps users optimize both aperture time and measure - ment range. As shown below, it has three pre-programmed range vs. aperture curves that cover most logical combinations. By default measurements start using the “Normal” curve and an appropriate measurement range. However, if the measured data seems noisy then pressing the “Fine Res” key switches the settings over to the “Stable” curve. This will automatically adjust the settings to a longer aperture time and reduce the noise. In addition, if you need to make a rough measurement quickly then switching over to the “Quick” curve will save measurement time. The Navigation feature’s pre-defined curves enable even novice engineers and researchers to make low-level measurements quickly without any need to struggle over selecting the appropriate aperture time and range settings. Of course, experienced users can override these curves and use the instrument in purely manual mode if a particular measurement requires customized settings. Aperture time (Integration time) Long  Measurement range High  Normal StableQuick Pressing the Home key automatically sets the most appropriate range and speed at any time 20 mA 2 mA 200 μA 20 μA 2 μA 200 nA 20 nA 2 nA 200 pA 20 pA 2 pA 20 V 2 V 1 PΩ 100 TΩ 10 TΩ 1 TΩ 100 GΩ 10 GΩ 10 GΩ 100 MΩ 10 MΩ 1 MΩ 2 μC 200 nC 20 nC 2 nC Current measurement Voltage measurement Resistance measurement Charge measurement Normal StableQuick Coarse Coarse Fine Fine Aperture time (Integration time) Long  Measurement range High  Measured valueNoise level Current aperture time =

1 PLC (20 ms @ 50 Hz)

Measurement assist functions reduce low-level measurement challenges Selecting the appropriate range and aperture time for low-level measurements is not always straightforward, since these settings are affected by both target device or sample characteristics and measurement conditions (noise, temperature, humidity, etc.). For these reasons, selecting the optimal test settings can be challenging for even experienced users. However, the B2980A series has a variety of assist functions to improve your measurement productivity. The navigation keys enable you to easily find the optimal measurement range and aperture time (speed) parameters. The column at the right shows how the navigation keys work. The “Real-time Noise Monitor” helps you to select the appropriate measurement settings by showing you the level of noise in your measurement. With this information you immediately know whether or not your measurement result is above or below the noise level. In addition, you can use this feature to select the appropriate aperture time (integration time) for your measurement environment.

08 | Keysight | B2980A Series Femto/Picoammeter and Electrometer/High Resistance Meter - Data Sheet Free PC-based software and multiple interface options provide flexible remote control choices Keysight provides two PC-based software control options for the B2980A series: B2900A Quick I/V Measurement Software and a B2900A Graphical Web Interface. Quick I/V software can communicate with the B2980A series via several popular interfaces: LAN, GPIB (up to four B2980A series units) and USB (one B2980A series unit). It provides almost the same functionalities of your B2980A series’ front panel. In addition, it supports a function that can automatically export measurement data into Microsoft Excel on your PC for further analysis. The Web Interface is embedded in each instrument and is only accessible via the LAN interface using a PC. The Quick I/V Measurement Software also supports other B2900A precision instrument products (B2900A series of Source / Measure Units and B2960A series of Low Noise Power Sources). What are the B2980A series’ temperature and humidity measurement capabilities? Temperature and humidity are critical parameters for high resistance measurements. The B2985A and B2987A electrometers contain both temperature and humidity sensor interfaces, and a dedicated thermocouple (N1423A) is furnished with these models. The EE07 Digital Humidity/Temperature Probe from E+E Electronik can be used for humidity and temperature sensing, which provides more accurate temperature data than a thermocouple For more information Please visit the product web pages containing demo videos, application information, sample programs, etc. from: www.keysight.com/find/b2980a B2980A series Femto/Picoammeter Electrometer PC connected via GPIB, LAN or USB Keysight B2900A Quick I/V measurement software Keysight B2980A Graphical web interface Ready-to-use instrument drivers simplify programming For users that want to create their own customized software, IVI-C and IVI-COM drivers for the B2980A series are available. In addition, National Instrument’s LabVIEW drivers are also available at NI.COM. Keysight B2900A family The B2980A series is a member of B2900 Precision Instrument Family, which provide a variety of precision measurement solutions with both sourcing and measurement capabilities. The B2900A series of Source Measure Units (SMUs) have 6.5-digit resolution, enabling 100 nV/10 fA sourcing and measurement. The B2960A series of Low Noise Power Sources have up to 6.5-digit voltage/current sourcing resolution and a 10 μVrms noise floor. Both the B2900A series SMUs and B2960A series Power Sources have an output range of ± 210 V and ± 3 A (DC) or ± 10.5 A (pulsed), and they both utilize the same color LCD-based GUI. Further information on the B2900 Precision Instrument Family is available at http://www.keysight.com/find/b2900a . B2900A Source Measure Unit B2960A Low Noise Power Source

09 | Keysight | B2980A Series Femto/Picoammeter and Electrometer/High Resistance Meter - Data Sheet Voltage source output Voltmeter input Interlock Humidity sensor I/F (digital) Thermocouple I/F Navigation keys Rotary knob and instant save & recall 4.3” color LCD Current input ON/OFF switch Voltage source ON/OFF switch Battery indicator (B2987A) USB 2.0 for memory I/O Power switch Ammeter input Analog out Trigger IN/OUT LAN USB 2.0 GPIB Digital I/O Navigation keys Rotary knob and instant save & recall 4.3” color LCD Current input ON/OFF switch Battery indicator (B2983A) USB 2.0 for memory I/O Ammeter input Analog out Trigger IN/OUT LAN USB 2.0 GPIB Digital I/O Power switch Compatibility table for optional high performance accessories and productivity tools Product Femto/Picoammeter Electrometer/High Resistance Meter B2981A B2983A B2985A B2987A 16494A Triaxial cable (1.5 m furnished) (1.5 m furnished) (1.5 m furnished) (1.5 m furnished) N1413A High resistance meter fixture adapter √ √ N1414A High resistance measurement universal adapter √ √ 16008B Resistivity cell (Obsoleted) √ √ N1418A Lithium-ion battery pack √ (furnished) (furnished) N1420A Setup integrity checker for B2980 series (software license) √ √ √ √ B2981A, B2983A Femto/Picoammeter B2985A, B2987A Electrometer/High Resistance Meter B2980A accessories for high measurement performance and convenience 16494A, N1412A/B/C N1413A 16008B (Obsoleted) N1414A

10 | Keysight | B2980A Series Femto/Picoammeter and Electrometer/High Resistance Meter - Data Sheet Technical Specifications and Characteristics Specification conditions Temperature: 23°C ± 5°C Humidity: 30% to 80% RH After 1 hour warm-up Ambient temperature change: less than ± 3°C after self-calibration Calibration period: 1 year Resistance measurement Measurement range Display resolution Accuracy ± (% + offset) 1, 2 Auto voltage source Current measure range 1 MΩ 1 Ω 0.135 + 1 Ω 20 V 200 μA 10 MΩ 10 Ω 0.135 + 10 Ω 20 V 20 μA 100 MΩ 100 Ω 0.185 + 100 Ω 20 V 2 μA 1 GΩ 1 kΩ 0.285 + 1 kΩ 20 V 200 nA 10 GΩ 10 kΩ 0.285 + 10 kΩ 20 V 20 nA 100 GΩ 100 kΩ 0.41 + 100 kΩ 20 V 2 nA 1 TΩ 1 MΩ 0.45 + 1 MΩ 200 V 2 nA 10 TΩ 10 MΩ 0.625 + 10 MΩ 200 V 200 pA 100 TΩ 100 MΩ 0.75 + 100 MΩ 200 V 20 pA 1 PΩ 1 GΩ 2.6 + 1 GΩ 200 V 2 pA Temperature coefficient 0 to 18°C and 28 to 45°C ± (0.1 x Accuracy)/°C Notes Conditions: Auto V-source ohms, properly zeroed, 6½-Digit, 1 PLC, median filter on, digital filter = 10 readings. 1. In the manual mode resistance can be calculated from specific source voltage and measured current. The measurement accuracy in the manual mode is determined by voltage source accuracy and ammeter accuracy as follows: Measurement Error = R reading x (Voltage% error + Voltage offset error/ Voltage + Current measurement% error + 10 x Current measurement offset error / Current measurement range) 2. Current measurement range for both Auto and Manual modes: 10% of current range ≤ measured current ≤ 100% of current range Current measurement Measurement range Display resolution Accuracy ± (% + offset) Input burden voltage at SelfCal ± 3°C 1 Measurement settling time1, 2 2 pA 1 aA 1 + 3 fA 20 μV 16 s 20 pA 10 aA 0.5 + 3 fA 20 μV 1.4 s 200 pA 100 aA 0.5 + 5 fA 20 μV 1.4 s 2 nA 1 fA 0.2 + 300 fA 20 μV 13 ms 20 nA 10 fA 0.2 + 500 fA 20 μV 13 ms 200 nA 100 fA 0.2 + 5 pA 20 μV 1.2 ms 2 μA 1 pA 0.1 + 50 pA 20 μV 550 μs 20 μA 10 pA 0.05 + 500 pA 20 μV 600 μs 200 μA 100 pA 0.05 + 5 nA 100 μV 600 μs 2 mA 1 nA 0.05 + 50 nA 1 mV 100 μs 20 mA 10 nA 0.05 + 500 nA 6 mV 100 μs Temperature coefficient 0 to 18°C and 28 to 45°C ± (0.05 x Accuracy)/°C Supplemental characteristics Temperature coefficient of input voltage burden < 10 μV/°C on pA, nA and μA ranges RMS noise 140 aA for 2 pA range, 10 s duration, no cable, open cap NMRR3 > 60 dB Maximum input capacitance 10 nF on less than 20 μA ranges, 1 μF on other ranges Notes Conditions: properly zeroed, 6½-digit, 1 PLC, median filter on, moving average 10 points 1. Supplemental characteristics 2. 0.1% of final value, step size 0% to 100% of range 3. Normal mode rejection ratio, integration time = 1, 2, …, 100 PLC; power line frequency ± 0.1%

11 | Keysight | B2980A Series Femto/Picoammeter and Electrometer/High Resistance Meter - Data Sheet Voltage measurement Measurement range Display resolution Accuracy ± (% + offset) 2 V 1 μV 0.025 + 40 μV 20 V 10 μV 0.025 + 400 μV Temperature coefficient 0 to 18°C and 28 to 45°C ± (0.05 x Accuracy)/°C Supplemental characteristics Input bias current < 20 fA Input impedance > 200 TΩ, parallel with < 20 pF (non-guarded) or < 2 pF (guarded) RMS noise 1.4 μV for 2 V range, 10 s duration, shorted input NMRR1 > 60 dB CMRR2 > 140 dB at DC; > 70 dB at 50 Hz or 60 Hz Notes Conditions: properly zeroed, 6½-digit, 1 PLC 2. Common mode rejection ratio: 1 kΩ LO lead unbalance. Add the NMRR for PLC integration time. Charge measurement Measurement range Display resolution Accuracy 1 ± (% + offset) 2 nC 1 fC 0.4 + 50 fC 20 nC 10 fC 0.4 + 500 fC 200 nC 0.1 pC 0.4 + 5 pC 2 μC 1 pC 0.4 + 50 pC Temperature coefficient 0 to 18°C and 28 to 45°C ± (0.1 x Accuracy)/°C Notes Conditions: Properly zeroed, 6½-digit, 1 ms aperture, specifications apply at 1 to 10 ms after charge acquisition. 1. Add 6 fC/s to the accuracy specification for the time span between NULL and measurement Voltage source Sourcing range Display resolution Accuracy ± (% + offset) Output current 1 Output noise 2 Settling time to rated accuracy 1,3 20 V 700 μV 0.05 + 2 mV ± 20 mA 55 μVp-p (0.1 Hz to 10 Hz) 1.6 mVrms (10 Hz to 20 MHz) 200 μs 1000 V 35 mV 0.05 + 100 mV ± 1 mA 2.6 mVp-p (0.1 Hz to 10 Hz) 3.0 mVrms (10 Hz to 20 MHz) 5 ms Temperature coefficient 0 to 18°C and 28 to 45°C ± (0.05 x Accuracy)/°C Source function DC, sweep (linear single, linear double, list), ARB (square) Notes 1. Supplemental characteristics 2. 10 Hz to 20 MHz: Supplemental characteristics 3. Open load Temperature measurement (Thermocouple) Temperature sensor Range Accuracy ± (% + offset) 1 Unit Type-K thermocouple –25°C to 150°C 0.2% + 2°C °C, °F and K Temperature probe in humidity sensor 2 –40°C to 80°C 0.5°C °C, °F and K Notes 1. Thermocouple accuracy excluded for thermocouple, temperature probe accuracy included for humidity sensor 2. Supported humidity sensor: EE07 Digital Humidity / Temperature Probe from E+E Electronik

12 | Keysight | B2980A Series Femto/Picoammeter and Electrometer/High Resistance Meter - Data Sheet Humidity measurement Range Accuracy 1 0% to 100% 2% RH (0% to 90% RH) 3% RH (90% to 100% RH) Connector 2.5 mm pluggable terminal block, 5 pins (mating with Phoenix Contact 1881354) Supported sensor EE07 Digital Humidity / Temperature Probe from E+E Electronik Notes 1. Sensor accuracy included Measurement buffer and speed Reading buffer 100,000 Supplemental characteristics Measurement speed and performance Reading rates Additional noise error Integration time 1 To buffer To GPIB Current measurement Voltage measurement 100 PLC / 2 s 0.5 Readings/s 0.5 Readings/s 0% of range 0% of range

10 PLC / 200 ms 5 Readings/s 5 Readings/s 0% of range 0% of range

1 PLC / 20 ms 49 Readings/s 49 Readings/s 0.01% of range 0% of range 0.1 PLC / 2 ms 500 Readings/s 490 Readings/s 0.03% of range 0.0005% of range 0.01 PLC / 200 μs 4,500 Readings/s 3,950 Readings/s 0.06% of range 0.001% of range 0.001 PLC / 20 μs 20,000 Readings/s 12,500 Readings/s 0.1% of range 0.004% of range Notes 1. 50 Hz, fixed range Timer and trigger functions Timer Time stamp TIMER value automatically saved when each measurement is triggered Resolution 10 μs, 100 μs, 1 ms, 10 ms, 100 ms Min. Measurement Interval 10 μs, independent from Source Min. Source Interval 100 μs, independent from Measure Accuracy ± 50 ppm Arm/trigger delay 0 μs to 100,000 s Arm/trigger interval 10 μs (Measure), 100 μs (Source) to 100,000 s Arm/trigger count 1 to 100,000 counts or infinity Triggering1 Trigger in to trigger out ≤ 5 μs Trigger in to source change ≤ 200 μs Trigger in to measure ≤ ± 20 μs Internal event to external LXI trigger Minimum 100 µs, Typical 200 µs, Maximum unknown LXI event send/receive latency Unknown Notes 1. Supplemental characteristics Battery operation (B2983A, B2987A) Technology Li-ion battery with integrated smart battery monitor and charger Capacity 14.40 V / 6,600 mAh / 95.0 Wh Battery exchange Customer exchangeable Supplemental characteristics Typical operating time1 7 hours (B2983A), 5 hours (B2987A), 5% to shutdown, auto data save Recharging time 7 hours to 100% capacity (AC in, Power On), 3.5 hours to 100% capacity (AC in, power Off) Battery life > 300 cycles with minimum 75% of initial capacity @25°C Notes 1. Standalone, LCD on, input on, output off, auto triggered 2 µA fixed range

13 | Keysight | B2980A Series Femto/Picoammeter and Electrometer/High Resistance Meter - Data Sheet Measurement control/navigation Ranging Automatic or manual Aperture time (integration time) 10 μs to 100 PLC Offset cancelling Null, Zero correct Digital filter Median filter (2R + 1, R = 1 to 15), moving average (1 to 100, step 1) Math Preset and user definable expressions Statistics Histogram View mode: mean, sigma, # of bins and # of samples Line frequency detection Auto detect: 50 Hz or 60 Hz Measurement indicators "---" is displayed at no data captured, "OVERFLOW" is displayed over 105% of the range, "0 Ω" is displayed at current measurement overflow in Resistance measurement. Front panel operation Front panel interface 4.3" TFT color display (16,000,000 colors, 480 x 272 pixels) with keypads and rotary knob View mode Meter view, Graph view, Histogram view and Roll view Hardkeys Single Trigger and Run/Stop control, measurement navigation keys (Null, Filter, Math, Save and Recall), Rotary Knob and Cursors, Ammeter Input and V Source Output control, Cancel/Local Softkeys Function, System and Input Assist Keys Indicators Channel (measurement) status, System status LEDs Power (color changes when charging), Input and Output (color changes when high voltage sourcing), Battery status (B2983A, B2987A) Application softkey Setup Integrity Checker (optional), Data logger, Demo Slide Show, About B2987A Meter view Histogram view Graph view Roll view Input/Output specifications Meter input connector Three lug triaxial for ammeter on rear panel (B2981A, B2983A) Three lug triaxial for ammeter, and three lug triaxial for voltmeter on rear panel (B2985A, B2987A) Guard Switchable voltmeter guard available (B2985A, B2987A) Maximum input Ammeter: 30 mA, Voltmeter: 40 V Source output connector Two banana jacks on rear panel Maximum common mode voltage Meter common: 500 V peak: V Source 1,000 V peak Isolation (Meter common to chassis) > 10 GΩ, < 500 pF Analog output 2 V for full range input, non-inverting in voltage and current measurement modes, 1 kΩ output impedance Interlock 2.5 mm pluggable terminal block, 4 pin (mating with Phoenix Contact 1881341) External trigger Trigger input BNC Logic Programmable edge triggered Min pulse width 10 μs Trigger output BNC Logic Programmable edge triggered Min pulse width 10 μs

14 | Keysight | B2980A Series Femto/Picoammeter and Electrometer/High Resistance Meter - Data Sheet Input/output specifications Digital I/O Connector type DSUB female 9 pins Input/output pins DIO 7 pins, +5V, GND Absolute max input voltage 5.25 V Absolute min input voltage –0.25 V Max logic L input voltage 0.8 V, Pull-up to 5 V by 5 kΩ Min logic H input voltage 2.0 V, Pull-up to 5 V by 5 kΩ Max source current 1 mA @ Vo = 0 V Max sink current 50 mA @ Vo = 5 V

5 V power supply pin Limited to 500 mA, resettable fuse protected

LXI (Rev. 1.4) 10/100Base-T Ethernet (Sockets, VXI-11 protocol, HiSLIP, and Web user interface) USB USB 2.0 (USB-TMC488 and MTP) USB host controller on the front, USB device interface on the rear Easy File Access GP-IB IEEE-488.2 Program, software and drivers Programming SCPI Program memory 100 kB (1000 lines with 100 characters/line) LXI compliance LXI Core 2011 Software available Quick I/V Measurement Software, Graphical Web Interface Drivers available IVI-C, IVI-COM drivers, LabVIEW drivers Environmental specifications Environment For use in indoor facilities without air conditioning Operating 0°C to 45°C (0°C to 35°C when charging battery), 30% to 80% non-condensing Storage –20°C to 60°C, 10% to 90% non-condensing Altitude Operating: 0 m to 2000 m, Storage: 0 m to 4600 m Power supply 90 V to 264 V, 47 Hz to 63 Hz, 80 VA maximum EMC IEC61326-1/EN61326-1, AS/NZS CISPR 11, KC: RRA Notification amending Radio Waves Act Article 58-2 Safety IEC61010-1/EN61010-1, CAN/CSA-C22.2 No. 61010-1-12, C/US Certifications CE, cCSAus, RCM, KC Warm-up 1 hour Dimensions Case 88 mm (2U) x 213 mm (half width) x 348 mm Working 104 mm x 261 mm x 374 mm (with bumper) Weight Net 4.3 kg (B2981A), 4.9 kg (B2983A), 4.5 kg (B2985A), 5.1 kg (B2987A) Shipping 8.5 kg (B2981A), 9.0 kg (B2983A), 8.7 kg (B2985A), 9.2 kg (B2987A)

15 | Keysight | B2980A Series Femto/Picoammeter and Electrometer/High Resistance Meter - Data Sheet

Ordering Information

B2981A Femto/Picoammeter. 0.01 fA B2983A Femto/Picoammeter. 0.01 fA, battery B2985A Electrometer/High Resistance Meter, 0.01 fA, 1000 V B2987A Electrometer/High Resistance Meter, 0.01 fA, 1000 V, battery Options A6J ANSI Z540-1-1994 Calibration UK6 Commercial calibration certificate with test data B2980A-1CM Rack Mount Kit Manuals N1403A-ABA User Guide English for B2980 Series N1403A-ABJ User Guide Japanese for B2980 Series Accessories N1411A /B Interlock cable, 4 pin terminal plug to 6 pin circular plug, (1.5 m/3 m) N1413A High resistance meter fixture adapter N1414A High resistance measurement universal adapter N1415A Triax to alligator cable, 200 V, 1.5 m N1416A /B Triax bulkhead connector (200 V/500 V) N1417A Open cap for triaxial connector N1418A Lithium-ion battery pack for B2983/B2987 N1419A Benchtop battery charger for N1418A N1423A Thermocouple for B2985/B2987 16494A-001/002/005 Low leakage triax cable (1.5 m/3 m/4 m) N1412/A /B/C Low leakage triax cable (500 V, 1.5 m/3 m/6 m) N1254A-102 Triax (female) to BNC (male) adaptor: For current measurement, floating DUT/sample N1254A-104 Triax (female) to BNC (male) adaptor: For current measurement, grounded DUT/sample N1254A-105 Triax (female) to BNC (male) adaptor: For voltage measurement Productivity tools N1410A Starter kit for B2985/B2987 N1420A Setup integrity checker for B2980 series, fixed perpetual license N1422A High value resistor box for N1299A-301 evaluation kit N1299A-301 Evaluation kit for B2981/83/85/87A Furnished accessories Power cable, USB cable, Triax cable (1.5m), Ground connection cable, Banana to screw-lug, Earthing wire(2m), Open cap for Triax. Connector, Quick Reference (English), CD-ROMs (including PDF manuals, Quick I/V Measurement Software and drivers, Keysight I/O Library Suite In addition to the above, B2985A/B2987A includes the followings: High voltage test leads, alligator clips, thermocouple, Interlock connector head, humidity probe connector head.

16 | Keysight | B2980A Series Femto/Picoammeter and Electrometer/High Resistance Meter - Data Sheet This information is subject to change without notice. © Keysight Technologies, 2014 - 2017 Published in USA, November 14, 2017 5991-4878EN www.keysight.com For more information on Keysight Technologies’ products, applications or services, please contact your local Keysight office. The complete list is available at: www.keysight.com/find/contactus Americas Canada (877) 894 4414 Brazil 55 11 3351 7010 Mexico 001 800 254 2440 United States (800) 829 4444 Asia Pacific Australia 1 800 629 485 China 800 810 0189 Hong Kong 800 938 693 India 1 800 11 2626 Japan 0120 (421) 345 Korea 080 769 0800 Malaysia 1 800 888 848 Singapore 1 800 375 8100 Taiwan 0800 047 866 Other AP Countries (65) 6375 8100 Europe & Middle East Austria 0800 001122 Belgium 0800 58580 Finland 0800 523252 France 0805 980333 Germany 0800 6270999 Ireland 1800 832700 Israel 1 809 343051 Italy 800 599100 Luxembourg +32 800 58580 Netherlands 0800 0233200 Russia 8800 5009286 Spain 800 000154 Sweden 0200 882255 Switzerland 0800 805353 Opt. 1 (DE) Opt. 2 (FR) Opt. 3 (IT) United Kingdom 0800 0260637 For other unlisted countries: www.keysight.com/find/contactus (BP-9-7-17) DEKRA Certified ISO9001 Quality Management System www.keysight.com/go/quality Keysight Technologies, Inc. DEKRA Certified ISO 9001:2015 Quality Management System www.keysight.com/find/ b2980a Evolving Since 1939 Our unique combination of hardware, software, services, and people can help you reach your next breakthrough. We are unlocking the future of technology. From Hewlett-Packard to Agilent to Keysight. myKeysight www.keysight.com/find/mykeysight A personalized view into the information most relevant to you. http://www.keysight.com/find/emt_product_registration Register your products to get up-to-date product information and find warranty information. Keysight Services www.keysight.com/find/service Keysight Services can help from acquisition to renewal across your instrument’s lifecycle. Our comprehensive service offerings—one- stop calibration, repair, asset management, technology refresh, consulting, training and more—helps you improve product quality and lower costs. Keysight Assurance Plans www.keysight.com/find/AssurancePlans Up to ten years of protection and no budgetary surprises to ensure your instruments are operating to specification, so you can rely on accurate measurements. Keysight Channel Partners www.keysight.com/find/channelpartners Get the best of both worlds: Keysight’s measurement expertise and product breadth, combined with channel partner convenience.