B1506A

B1506A KEYSIGHT | Alldatasheet

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B1506A Power Device Analyzer for Circuit Design

Evaluate all device parameters under a wide range of operating conditions to improve power electronics circuit design performance – Measures all IV parameters (Ron, BV, Leakage, Vth, Vsat, etc.) – Measure transistor input, output and reverse transfer capacitances (Ciss, Coss, Crss, Cies, Coes, Cres, Rg) at high bias voltages – Qg curve measurement for Nch MOSFETs and IGBTs – Power loss (conduction, driving and switching) evaluation – Menu driven user interface specially designed for circuit designers (Easy Test Navigator - ETN) – Quick and automatic device datasheet generation – Data sheet characterization mode supports quick and easy evaluations of data sheet parameters – Wide operation I/V (1500A, 3kV)Thermal test (−50 to +250 °C) – Oscilloscope View provides visual verification of pulsed measurement waveforms – Covers typical semiconductor devices and electronic components used in high power circuits The B1506A Power Device Analyzer for Circuit Design is a complete solution that can help power electronic circuit designers maximize the value of their power electronics products by enabling them to select the correct power semiconductor devices and components for their applications. It can evaluate all relevant device parameters under a wide range of operating conditions, including IV parameters such as breakdown voltage and on-resistance, as well as three terminal FET capacitances, gate charge and power loss. The B1506A has a wide range of capabilities that help it identify substandard semiconductor devices and components under actual circuit operating conditions, including a wide voltage and current range (3 kV and 1500 A), a wide temperature measurement range (-50 to +250 °C), fast pulsing capability, and sub-nA level current measurement capability. Its unique software interface , Easy Test Navigator, presents the user with a familiar device data sheet format that makes it easy to characterize semi- conductor devices and components without going through any formal training. Integrated switching circuitry within the test fixture supports fully automated testing, with the ability to automatically change between both high voltage and high current testing as well as between IV and CV measurements. In addition, a unique plug-in style device test fixture socket adapter eliminates cable connection and other human-related errors. The B1506A also supports the complete automation of thermal characterization. This can be accomplished through the integrated Thermostream control. Since the DUT is in close proximity to the B1506A’s measurement resources, the large parasitics caused by cable extensions leading to a temperature chamber do not exist. For this reason, oscillation free ultra-high currents of up to 1500 A can be accurately evaluated at both low and high temperature. The B1506A’s capabilities revolutionize power electronics circuit design by both helping to maximize end product value and accelerating product development cycles.

The measurement and output accuracy are specified under the conditions listed below. Note: The SMU measurement and output accuracy are specified at the output terminals in the test fixture except for capacitance measurement that is specified at the output terminals of the MFCMU. 1. Temperature: 23 ±5 °C 2. Humidity: 20 to 70%, No condensation 3. Self-calibration after a 40 minute warm-up is required. 4. Ambient temperature change less than ±1 °C after self-calibration execution. (Note: This does not apply to the MFCMU). 5. Measurement made within one hour after self-calibration execution. (Note: This does not apply to the MFCMU). 6. Calibration period: 1 year 7. SMU integration time setting: 10 PLC (1 nA to 1 A range, voltage range), 200 μs (20 A range) Averaging of high-speed ADC: 128 samples per 1 PLC 8. SMU filter: ON for MPSMU 9. The accuracy of the drain output current measurement specification is not guaranteed until 20 seconds after a voltage change. The B1506A has to be used under the conditions listed below. Temperature: +5 to +40 °C Humidity: 20 to 70%, No condensation When used with Thermostream and the air temperature is more than +20 °C Temperature: +20 to +30 °C Humidity: 20% to 70%, No condensation When used with Thermostream and the air temperature is less than +20 °C Temperature: +20 to +30 °C Humidity: 20 to 50%, No condensation When used with Thermal plate Temperature: +5 to +30 °C Humidity: 20 to 70%, No condensation Specification Conditions Operating Conditions 03 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

B1506A-H20/H21 B1506A-H50/H51 B1506A-H70/H71 Collector/Drain channel Maximum output Voltage ±3000 V ±3000 V ±3000 V Current Pulsed ±20 A ±500 A ±1500 A DC ±1 A ±100 mA Minimum Resolution (Source) Voltage 200 nV 25 μV Current 100 fA 100 fA Minimum Resolution (Measurement) Voltage 200 nV 500 nV Current 10 fA 10 fA Gate channel Maxium output Voltage ±100 V Current Pulsed ±1 A DC ±100 mA Minimum Resolution (Source) Voltage 200 nV Current 500 fA Minimum Resolution (Measurement) Voltage 200 nV Current 10 fA Capacitance measurement (H21/H51/H71 only) Max bias Gate ±100 V Collector/Drain ±3000 V Frequency range 1 kHz to 1 MHz Capacitance range 100 fF to 1μF Key Specifications of B1506A Characteristics Category Parameters Static characteristics Threshold voltage Vgs(th),Vge(th) Transfer Characteristics Id-Vgs, Ic-Vge, gfs On resistance Rds-on. Vce(sat) Gate leakage current Igss, Iges Output leakage current Idss, Ices Output Characteristics Id-Vds, Ic-Vce Breakdown voltage BVds, BVces Gate charge characteristics3 Gate Charge Qg, Qg(th), Qgs, Qgd, Qsw, Qsync, Qoss for Nch MOSFETs and IGBTs Capacitance characteristics3 Gate Resistance Rg Device Capacitance Ciss, Coss, Crss, Cgs, Cgd, Cies, Coes, Cres Power loss3 Driving loss/Switching loss1 Conduction loss at specified duty cycle2 Measurement Parameters 1. Driving loss and switching loss are calculated by measured Qg characteristics, Vth and Rg at specified frequency. 2. Conduction loss are calculated from measured Rds-on and peak current. 3. B1506A-H21/H51/H71 only Supported Power Devices and Electronics Components MOSFETs, IGBTs, Diodes, Inductors, Capacitors, Shunt R, Resistors, Connectors, Cable, Relays, Photo couplers, Solid state relays 04 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

IV functionality Operation range Collector/drain voltage ±3000 V Collector/drain current ±1500 A (B1506A-H70/H71) ±500 A (B1506A-H50/H51) ±20 A (B1506A-H20/H21) Gate ±30 V/±1 A (pulse): MCSMU ±100 V/±100 mA: MPSMU CV functionality 1 Operation range Gate DC bias voltage ±100 V Collector/drain DC bias voltage ±3000 V Frequency 1 kHz to 1 MHz Capacitance 100 fF to 1 μF Gate charge functionality 1 Operation range Qg, Qgd, Qd 1 nC to 100 μC VDD 0 to +3000 V ID 0 to 1500 A Gate drive -30 to 30 V 1. B1506A-H21/H51/H71 only 05 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

Gate/Base step generator IV Operating range is defined as the combination of MCSMU and MPSMU modules. The following graph shows entire IV operating range of gate/base step generator for B1506A. Refer to the section for each module later in this document for detailed specification of each module. Drain/collector supply specification B1506A-H20/H21 Drain/Collector Supply IV Operating range for B1506A-H21 is defined as the combina - tion of HCSMU, MPSMU and HVSMU modules. The following graph shows entire IV operating range of drain/collector supply for B1506A-H20/H21. Refer to the section for each module later in this document for detailed specification of each module. log Voltage (V) log Current (A) MPSMU MCSMU 20 30 100 40 10 -20 -30 -100 -40 -10 20 m 40 m 100 m -20 m -40 m -100 m log Voltage (V) log Current (A) MPSMU HVSMU 20 40 100 1.5 k3 k-20 -40 -100 -1.5 k-3 k 20 m 100 m 8 m 1 m -20 -20 m -100 m -8 m -4 m -1 m HCSMU Gate/Base step generator measurement and output range IV operating range for B1506A-H20/H21 Current/Voltage Measurement Specifications 06 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

Drain/Collector Supply IV Operating range for B1506A-H71 is defined as the combina - tion of UHCU, MPSMU and HVSMU modules. The following graph shows entire IV operating range of drain/collector supply for B1506A-H70/H71. Refer to the section for each module later in this document for detailed specification of each module. log Voltage (V) log Current (A) 20 40 100 1.5 k3 k-20 -40 -100 -1.5 k-3 k -1500 -20 m -40 m -8 m -4 m -1 m -100 m 1500 20 m 40 m 8 m 4 m 1 m 100 m MPSMU HVSMU UHC IV operating range for B1506A-H70/H71 B1506A-H50/H51 Drain/Collector Supply IV Operating range for B1506A-H51 is defined as the combina - tion of UHCU, MPSMU and HVSMU modules. The following graph shows entire IV operating range of drain/collector supply for B1506A-H50/H51. Refer to the section for each module later in this document for detailed specification of each module. log Voltage (V) log Current (A) MPSMU HVSMU UHC 20 40 100 1.5 k3 k-20 -40 -100 -1.5 k-3 k -500 -20 m -40 m -8 m -4 m -1 m -100 m 500 20 m 40 m 8 m 4 m 1 m 100 m IV operating range for B1506A-H50/H51 Drain/collector supply specification (continued) 07 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

Capacitance Measurement Specifications Capacitance measurement of B1506A-H21/H51/H71 is provided with the combination of MFCMU module in the B1506A mainframe and built-in device capacitance selector in the B1506A test fixture. DC bias characteristics 100 kΩ at SMU bias output resistance Voltage drop compensation function is available. Bypass capacitance in the capacitance selector Capacitance Withstand voltage Drain to Source Terminal 1 μF ±3000V Gate to Source Terminal 1 μF ±100V Measurement accuracy for 2-terminal device (Supplemental characteristics) 1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 C measuremet value (F) frequency (Hz) Measurement accuracy for 2-terminal device Error 3% Error 5% Error 10% Error 20% Condition AC level: 30 mV rms Dx < = 0.1 (Dx: Measurement value of D) The noise level depends on setting parameters and the device under test. Long integration times and/or large signal levels can reduce the noise level. Output terminals for 2-terminal device Collector/drain Force Open Open Open Sense High High Open Emitter/source Force Open Open Open Sense Low Open Low Base/gate High Open Low High Low Open Open Open 08 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

Measurement accuracy for 3-terminal device (Supplemental characteristics) Condition AC level: 30 mV rms, Dx < = 0.1 (Dx: Measurement value of D) Cgs measurement accuracy 3-terminal Cgs:Cds:Cgd= 1:1:1 1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 Cgs measuremet value (F) 1000 10000 100000 1000000 Frequency (Hz) Error 3% Error 5% Error 10% Error 20% 1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 Cgs measuremet value (F) 1000 10000 100000 1000000 Frequency (Hz) Cgs measurement accuracy 3-terminal Cgs:Cds:Cgd= 1:0.1:0.01 Error 3% Error 5% Error 10% Error 20% 09 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

Measurement accuracy for 3-terminal device (Supplemental characteristics) (continued) Cds measurement accuracy 3-terminal Cgs:Cds:Cgd = 1:1:1 1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 Cds measuremet value (F) Frequency (Hz) Error 3% Error 5% Error 10% Error 20% 1000 10000 100000 1000000 1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 Cds measuremet value (F) Frequency (Hz) Cds measurement accuracy 3-terminal Cgs:Cds:Cgd = 1:0.1:0.01 Error 3% Error 5% Error 10% Error 20% 1000 10000 100000 1000000 10 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

Measurement accuracy for 3-terminal device (Supplemental characteristics) (continued) Cgd measurement accuracy 3-terminal Cgs:Cds:Cgd = 1:1:1 1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 Cgd measuremet value (F) Frequency (Hz) Error 3% Error 5% Error 10% Error 20% 1000 10000 100000 1000000 1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 Cgd measuremet value (F) Frequency (Hz) Cgd measurement accuracy 3-terminal Cgs:Cds:Cgd = 1:0.1:0.01 Error 3% Error 5% Error 10% Error 20% 1000 10000 100000 1000000 11 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

Measurement accuracy for 3-terminal device (Supplemental characteristics) (continued) Ciss measurement accuracy 3-terminal Cgs:Cds:Cgd = 1:1:1 1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 Ciss measuremet value (F) Frequency (Hz) Error 3% Error 5% Error 10% Error 20% 1000 10000 100000 1000000 1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 Ciss measuremet value (F) Frequency (Hz) Ciss measurement accuracy 3-terminal Cgs:Cds:Cgd = 1:0.1:0.01 Error 3% Error 5% Error 10% Error 20% 1000 10000 100000 1000000 12 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

Measurement accuracy for 3-terminal device (Supplemental characteristics) (continued) Coss measurement accuracy 3-terminal Cgs:Cds:Cgd = 1:1:1 1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 Coss measuremet value (F) Frequency (Hz) Error 3% Error 5% Error 10% Error 20% 1000 10000 100000 1000000 1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 Coss measuremet value (F) Frequency (Hz) Coss measurement accuracy 3-terminal Cgs:Cds:Cgd = 1:0.1:0.01 Error 3% Error 5% Error 10% Error 20% 1000 10000 100000 1000000 13 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

Parameter name Coss Cds Crss Cgs Ciss /Rg Collector/drain Force Open Open Open Open Open Sense High High High ACG Low Emitter/source Force Open Open Open Open Open Sense Low Low ACG Low Low Base/gate High Low ACG Low High High Low Open Open Open Open Open Output terminals for 3-terminal device Definition of 3-terminal device capacitances Symbol Description Cgs Capacitace between Base/Gate terminal and Emitter/Source terminal Cds Capacitace between Collector/Drain terminal and Emitter/Source terminal Cgd Capacitace between Base/Gate terminal and Collector/Drain terminal Crss Capacitace between Base/Gate terminal and Collector/Drain terminal Ciss Capacitace between Base/Gate terminal and Emitter/Source terminal and capacitance between Base/Gate terminal and Collector/Drain terminal Coss Capacitace between Collector/Drain terminal and Emitter/Source terminal and capacitance between Base/Gate terminal and Emitter/Source terminal 14 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

Gate Charge Measurement Specifications Qgate(C) QgdQgs Qgs1 Qg Qgs2 Vth Vgs pleteau Vgs Vgs(V) B1506A-H21/H51/H71 can perform gate charge characteristics for Nch MOSFETs and IGBTs by using gate charge socket adapter, that is included in B1506A as an accessory. Both resistor and transistor are supported as drain/collector current control device. Temperature dependency measurement using Thermostream or Thermal plate is not supported. Qg: Gate charge Qgs: Gate-source charge Qgs1: Gate charge at threshold Qgs2: Gate charge from threshold to onset of plateau Qgd: Gate-drain charge B1506A-H21 B1506A-H51 B1506A-H71 Measurement parameter Measurable range Qg 1 nC to 100 µC Min resolution 10 pC Vds (Vce) @ high voltage 0 V to +3000 V Resolution 3 mV / 6 µs Vds(Vce) @ high current Not support −60 V to 60 V Resolution 100 µV/2 µs Vgs (Vge) −30V to +30V V/T resolution 40 uV/2 us Id (Ic) 0 to 20 A 0 to 500 A 0 to 1500 A I/T resolution 2 mA/2 µs Ig 10 nA to 1 A I/T resolution 10 pA/2 µs Measurement parameters 15 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

B1506A-H21 B1506A-H51 B1506A-H71 Setting parameter Setting range Vds (Vce) @ high voltage 0 V to +3000 V Resolution 3 mV/6 us Vds(Vce) @ high current −20 to 20 V −60 to 60 V Resolution 20 μV/2 μs 100 µV/2 µs Id max 20 A 450 A 1100 A Gate drive Vgs(Vge) −30 to +30 V Resolution 40 µV Gate control current Ig 1 µA to 1 A Resolution 0.1 µA Current regulator control voltage −30 to +30 V Resolution 40 µV On time 50 to 950 µs 50 to 450 µs Resolution 2 µs Target device Nch MOSFET and IGBT TO packeged device Nch MOSFET and IGBT module device Setting parameters 16 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

±500 A 7.5 k W ±1500 A 22.5 kW Voltage range, resolution, and accuracy Voltage range Setting resolution Measure resolution Setting accuracy 1.2,3 ±(% + mV) Measure accuracy 1,3 ±(% + mV) 1. ±(% of reading value + fixed offset in mV) 2. Setting accuracy is defined at open load. 3. Accuracy is defined 1ms pulse width at 500A range and 500 μs pulse width at 1500A range. Current range, resolution, and accuracy 1 Current range Setting resolution Measure resolution Setting accuracy 2,3 ±(% + A + A) Measure accuracy 2,3 ±(% + A + A) 1. Maximum voltage compliance in current pulse mode is 63 V. Over 400 A at 500 A range and over 1200 A at 1500 A range are supplemental characteristics. 2. Accuracy is defined with 1ms pulse width at 500 A range and with 500 μs pulse width at 1500 A range. 3. ±(% of reading value + fixed offset in A + proportional offset in A), Vo is the Output Voltage. UHCU Pulse width and resolution Current range Voltage pulse width Current pulse width Resolution Pulse period 1 500 A 10 μsec – 1 msec 10 μsec – 1 msec 2 μsec Duty ≤ 0.4% 1500 A 10 μsec – 500 μsec 10 μsec – 500 μsec 2 μsec Duty ≤ 0.1% 1. At continuous maximum current output, the output current may be reduced due to insufficient charging time. UHC (Ultra High Current) Specifications Other functionality Fiilter Filter can be used for UHC output in current mode at 500 A range. UHCU output resistance Output range Nominal value

500 A 120 mΩ

1500 A 40 mΩ

Supplemental characteristics UHC measurement and output range The UHCU output is only available in pulsed mode. In the equations in the above diagram, ‘I’ stands for current, ‘V’ for Voltage. The maximum current is defined when the output terminals are shorted. Also, the maximum current is limited by the residual resistance of the test leads and by the DUT impedance. 60-60 500 -500 1500 -1500 Current (A) Voltage (V) I = (60 -V)/ 0.04 I = (60 -V)/ 0.12 I = (-60 -V)/ 0.04 I = (-60 -V)/ 0.12 Measurement and output range for 1500 A range Measurement and output range for 500 A range 17 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

HCSMU Drain Output Specifications Voltage range, resolution, and accuracy Voltage range Force resolution Measure resolution Force accuracy 1 ±(% + mV + mV) Measure accuracy 1 (% + mV + mV) Maximum current ±20 V 20 µV 20 µV ±(0.06 + 3 + Io x 5) ±(0.06 + 3 + Io x 5) 20 A ±40 V 40 µV 40 µV ±(0.06 + 3 + Io x 10) ±(0.06 + 3 + Io x 10) 1 A 1. ±(% of reading value + fixed offset in mV + proportional offset in mV). Note: Io is the output current in A. Current range, resolution, and accuracy Current range Force resolution Measure resolution Force accuracy 1 (% + A + A) Measure accuracy 1 (% + A + A) Maximum voltage ±10 µA 10 pA 10 pA ±(0.06 + 1E-8 + Vo x 3E-9) ±(0.06 + 1E-8 + Vo x 3E-9) 40 V ±100 µA 100 pA 100 pA ±(0.06 + 2E-8 + Vo x 3E-9) ±(0.06 + 2E-8 + Vo x 3E-9) 40 V ±1 mA 1 nA 1 nA ±(0.06 + 2E-7 + Vo x 1E-8) ±(0.06 + 2E-7 + Vo x 1E-8) 40 V ±10 mA 10 nA 10 nA ±(0.06 + 2E-6 + Vo x 1E-7) ±(0.06 + 2E-6 + Vo x 1E-7) 40 V ±100 mA 100 nA 100 nA ±(0.06 + 2E-5 + Vo x 1E-6) ±(0.06 + 2E-5 + Vo x 1E-6) 40 V ±1 A 1 µA 1 µA ±(0.4 + 2E-4 + Vo x 1E-5) ±(0.4 + 2E-4 + Vo x 1E-5) 40 V ±20 A 2 20 µA 20 µA ±(0.4 + 2E-3 + Vo x 1E-4) ±(0.4 + 2E-3 + Vo x 1E-4) 20 V 1. ±(% of reading value + fixed offset in A + proportional offset in A), Vo is the output voltage in V. 2. Pulse mode only. The maximum value of the base current during pulsing is ±100 mA. Power consumption Voltage source mode: Voltage range Power

0.2 V 40 x Ic (W)

2 V 40 x Ic (W)

40 V 40 x Ic (W)

Where Ic is the current compliance setting. For pulse current, Ic = (duty) x Ipulse Current source mode: Voltage compliance Power Vc ≤ 0.2 40 x Io (W) 0.2 < Vc ≤ 2 40 x Io (W) 2 < Vc ≤ 40 40 x Io (W) Where Vc is the voltage compliance setting and Io is output current. For pulse current, Io = (duty) x Ipulse HCSMU measurement and output range Pulse only DC and pulse 20-40 -20 Current (A) Voltage (V) -20 40 18 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

HVSMU Drain Output Specifications Voltage range, resolution, and accuracy Voltage range Force resolution Measure resolution Force accuracy 1 ±(% + mV) Measure accuracy 1 ±(% + mV) Maximum current ±200 V 200 µV 200 µV ±(0.03 + 40) ±(0.03 + 40) 8 mA ±500 V 500 µV 500 µV ±(0.03 + 100) ±(0.03 + 100) 8 mA ±1500 V 1.5 mV 1.5 mV ±(0.03 + 300) ±(0.03 + 300) 8 mA ±3000 V 3 mV 3 mV ±(0.03 + 600) ±(0.03 + 600) 4 mA 1. 1. ±(% of reading value + offset voltage V) Current range, resolution, and accuracy Current range Force resolution Measure resolution Force accuracy 1 ±(% + A + A) Measure accuracy 1 ±(% + A + A) Maximum voltage Minimum set current 2 ±10 nA 3 100 fA 100 fA ±(0.1 + 1E-9 + Vo x 3E-11)4 ±(0.1 + 1E-9 + Vo x 3E-11)4 3000 V 1pA ±100 nA 3 100 fA 100 fA ±(0.05 + 1E-9 + Vo x 3E-11)4 ±(0.05 + 1E-9 + Vo x 3E-11)4 3000 V 100 pA ±1 µA 3 1 pA 1 pA ±(0.05 + 1E-9 + Vo x 3E-11) 4 ±(0.05 + 1E-9 + Vo x 3E-11)4 3000 V 100 pA ±10 µA 3 10 pA 10 pA ±(0.04 + 2E-9 + Vo x 3E-11)4 ±(0.04 + 2E-9 + Vo x 3E-11)4 3000 V 10 nA ±100 µA 100 pA 100 pA ±(0.03 + 3E-9 + Vo x 3E-9) ±(0.03 + 3E-9 + Vo x 3E-9) 3000 V 10 nA ±1 mA 1 nA 1 nA ±(0.03 + 6E-8 + Vo x 3E-9) ±(0.03 + 6E-8 + Vo x 3E-9) 3000 V 100 nA ±10 mA 10 nA 10 nA ±(0.03 + 2E-7 + Vo x 3E-9) ±(0.03 + 2E-7 + Vo x 3E-9) 1500 V 1 µA 1. ±(%of reading value + fixed offset in A + proportional offset in A), Vo is the output voltage in V.) 2. Output current needs to be set more than current shown in the table. 3. Supplemental characteristics 4. If only the sense line is connected to the DUT and the force line is left open, then the third term of the accuracy equation is Vo x 2E-12. Power consumption Voltage source mode: Current compliance Power Ic ≤ 4m 3000 x Ic (W) 4m < Ic ≤ 8m 1500 x Ic (W) Where Ic is the current compliance setting. Current source mode: Voltage compliance Power Vc ≤ 1500 1500 x Io (W) 1500 < Vc ≤ 3000 3000 x Io (W) Where Vc is the voltage compliance setting and Io is output current. HVSMU measurement and output range 3000 -3000 Current (mA) Voltage (V) -1500 1500 19 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

MPSMU Drain Output / Gate Output Specifications Voltage range, resolution, and accuracy (high resolution ADC) Voltage range Force resolution Measure resolution Force accuracy 1 ±(% + mV) Measure accuracy 1 ±(% + mV) Maximum current ±2 V 100 µV 2 µV ±(0.018 + 0.5) ±(0.01 + 0.5) 100 mA ±5 V 250 μV 5 μV ±(0.018 + 1) ±(0.009 + 1) 100 mA ±20 V 1 mV 20 µV ±(0.018 + 3) ±(0.009 + 1) 100 mA ±100 V 5 mV 100 µV ±(0.018 + 15) ±(0.012 + 2.5) 2 1. ± (% of reading value + offset value in mV) 2. 100 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), 20 mA (40 V < Vo ≤ 100 V), Vo is the output voltage in Volts. Current range, resolution, and accuracy (high resolution ADC) Current range Force resolution Measure resolution Force accuracy 1 ±(% + A + A) Measure accuracy 1 ±(% + A + A) Maximum voltage ±10 nA 3 500 fA 10 fA ±(0.1 + 1E-9 + Vo x 3E-11) ±(0.1 + 1E-9 + Vo x 3E-11) 100 V ±100 nA 3 5 pA 100 fA ±(0.05 + 1E-9 + Vo x 3E-11) ±(0.05 + 1E-9 + Vo x 3E-11) 100 V ±1 µA 3 50 pA 1 pA ±(0.05 + 1E-9 + Vo x 3E-11) ±(0.05 + 1E-9 + Vo x 3E-11) 100 V ±10 µA 500 pA 10 pA ±(0.05 + 3E-9 + Vo x 3E-11)4 100 V ±100 µA 5 nA 100 pA ±(0.035 + 15E-9 + Vo x 1E-10) 4 100 V ±1 mA 50 nA 1 nA ±(0.04 + 15E-8 + Vo x 1E-9) 4 100 V ±10 mA 500 nA 10 nA ±(0.04 + 15E-7 + Vo x 1E-8) ±(0.03 + 2E-7 + Vo x 1E-8) 100 V ±100 mA 5 µA 100 nA ±(0.045 + 15E-6 + Vo x 1E-7) ±(0.04 + 6E-6 + Vo x 1E-7) 2 1. ± (% of reading value + fixed offset in A + proportional offset in A), Vo is the output voltage in V.) 2. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 100 mA), Io is the output current in Amps. 3. Supplemental characteristics 4. For Gate Output 5. For Drain Output Voltage range, resolution, and accuracy (high speed ADC) Voltage range Force resolution Measure resolution Force accuracy 1 ±(% + mV) Measure accuracy 1 ±(% + mV) Maximum current ±2 V 100 µV 100 µV ±(0.018 + 0.5) ±(0.01 + 0.7) 100 mA ±5 V 250 μV 250 μV ±(0.018 + 1) ±(0.01 + 2) 100 mA ±20 V 1 mV 1 mV ±(0.018 + 3) ±(0.01 + 4) 100 mA ±100 V 5 mV 5 mV ±(0.018 + 15) ±(0.02 + 20) 2 1. ±(% of reading value + offset value in mV). Averaging is 128 samples in 1 PLC. 2. 100 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), 20 mA (40 V < Vo ≤ 100 V), Vo is the output voltage in Volts. 20 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

Voltage source mode: Voltage range Power

0.5 V 20 x Ic (W)

2 V 20 x Ic (W)

5 V 20 x Ic (W)

20 V 20 x Ic (W)

100 V 100 x Ic (W)

Where Ic is the current compliance setting. Current source mode: Voltage compliance Power Vc ≤ 20 20 x Io (W) 20 < Vc ≤ 40 40 x Io (W) 40 < Vc ≤ 100 100 x Io (W) Where Vc is the voltage compliance setting and Io is output current. MPSMU measurement and output range Current (m A) Voltage (V) -100 100 -100 20 40 -20 -50 -20-40 100 MPSMU Drain Output / Gate Output Specifications Current range, resolution, and accuracy (high speed ADC) Current range Force resolution Measure resolution Force accuracy 1 ±(% + A + A) Measure accuracy 1 ±(% + A + A) Maximum voltage ±10 nA 3 500 fA 500 fA ±(0.1 + 1E-9 + Vo x 3E-11) ±(0.25 + 1E-9 + Vo x 3E-11) 100 V ±100 nA 3 5 pA 5 pA ±(0.05 + 1E-9 + Vo x 3E-11) ±(0.1 + 1E-9 + Vo x 3E-11) 100 V ±1 µA 3 50 pA 50 pA ±(0.05 + 1E-9 + Vo x 3E-11) ±(0.1 + 1E-9 + Vo x 3E-11) 100 V ±10 µA 500 pA 500 pA ±(0.05 + 3E-9 + Vo x 3E-11) 4 100 V ±100 µA 5 nA 5 nA ±(0.035 + 15E-9 + Vo x 1E-10) 4 100 V ±1 mA 50 nA 50 nA ±(0.04 + 15E-8 + Vo x 1E-9) 4 100 V ±10 mA 500 nA 500 nA ±(0.04 + 15E-7 + Vo x 1E-8) ±(0.04 + 2E-6 + Vo x 1E-8) 100 V ±100 mA 5 µA 5 µA ±(0.045 + 15E-6 + Vo x 1E-7) ±(0.1 + 2E-5 + Vo x 1E-7) 2 1. ±(%of reading value + fixed offset in A + proportional offset in A), Vo is the output voltage in V.) 2. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 100 mA), Io is the output current in Amps. 3. Supplemental characteristics 4. For Gate Output 5. For Drain Output 21 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

MCSMU Gate Output/AUX Output Specifications Voltage range, resolution, and accuracy Voltage range Force resolution Measure resolution Force accuracy 1 ±(% + mV) Measure accuracy 1 (% + mV) Maximum current ±20 V 20 µV 20 µV ±(0.06 + 3) ±(0.06 + 3) 1 A ±40 V2 40 µV 40 µV ±(0.06 + 3) ±(0.06 + 3) 1 A 1. ±(% of reading value + fixed offset in mV). 2. Maximum output voltage is 30 V Current range, resolution, and accuracy Current range Force resolution Measure resolution Force accuracy 1 (% + A + A) Measure accuracy 1 (% + A + A) Maximum voltage ±10 µA 10 pA 10 pA ±(0.06 + 1E-8 + Vo x 1E-10) ±(0.06 + 1E-8 + Vo x 1E-10) 30 V ±100 µA 100 pA 100 pA ±(0.06 + 2E-8 + Vo x 1E-9) ±(0.06 + 2E-8 + Vo x 1E-9) 30 V ±1 mA 1 nA 1 nA ±(0.06 + 2E-7 + Vo x 1E-8) ±(0.06 + 2E-7 + Vo x 1E-8) 30 V ±10 mA 10 nA 10 nA ±(0.06 + 2E-6 + Vo x 1E-7) ±(0.06 + 2E-6 + Vo x 1E-7) 30 V ±100 mA 100 nA 100 nA ±(0.06 + 2E-5 + Vo x 1E-6) ±(0.06 + 2E-5 + Vo x 1E-6) 30 V ±1 A2 1 µA 1 µA ±(0.4 + 2E-4 + Vo x 1E-5) ±(0.4 + 2E-4 + Vo x 1E-5) 30 V 1. ±(% of reading value + fixed offset in A + proportional offset in A), Vo is the output voltage in V. 2. Pulse mode only. The maximum value of the base current during pulsing is ±50 mA. Power consumption Voltage source mode: Voltage range Power Where Ic is the current compliance setting. Current source mode: Voltage compliance Power Vc ≤ 0.2 40 x Io (W) 0.2 < Vc ≤ 2 40 x Io (W) 2 < Vc ≤ 40 40 x Io (W) Where Vc is the voltage compliance setting and Io is output current. MCSMU measurement and output range Pulse only DC and pulse 30-30 0.1 -0.1 Current (A) Voltage (V) 22 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

SMU source measurement mode For MPSMU: VFIM, IFVM For HCSMU, MCSMU and HVSMU: VFIM, VFVM, IFVM, IFIM Voltage/current compliance (limiting) The SMU can limit output voltage or cur- rent to prevent damaging the device under test. Voltage:

0 V to ±100 V (MPSMU)

0 V to ±40 V (HCSMU)

0 V to ±30 V (MCSMU)

0 V to ±3000 V (HVSMU)

Current: ±10 pA to ±100 mA (MPSMU) ±10 nA to ±20 A (HCSMU) ±10 nA to ±1 A (MCSMU) ±10 pA to ±8 mA (HVSMU) Compliance accuracy: Same as the current or voltage set accuracy. Power compliance For MPSMU: Power: 0.001 W to 2 W Resolution: 0.001 W For HCSMU: Power: 0.001 W to 40 W (DC)

0.001 W to 400 W (Pulse)

Resolution: 0.001 W For MCSMU: Power: 0.001 W to 3 W (DC)

0.001 W to 30 W (Pulse)

Resolution: 0.001 W” For HVSMU: No power compliance SMU pulse measurement Pulse width, period, and delay: For MPSMU: Pulse width: 500 µs to 2 s Pulse width resolution: 100 µs Pulse period: 5 ms to 5 s Period ≥ delay + width + 2 ms (when delay + width ≤ 100 ms) Period ≥ delay + width + 10 ms (when delay + width > 100 ms) Pulse period resolution: 100 µs Pulse delay: 0 s For HCSMU: Pulse width: 50 µs to 1 ms (20 A range) 50 µs to 2 s (10 µA to 1 A range) Pulse width resolution: 2 µs Pulse period: 5 ms to 5 s Pulse period resolution: 100 µs Pulse duty: For 20 A range: ≤ 1% For 10 µA to 1 A range Period ≥ delay + width + 2 ms (when delay + width ≤ 100 ms) Period ≥ delay + width + 10 ms (when delay + width > 100 ms) Pulse delay: 0 to (Period–width) For MCSMU: Pulse width: 10 μs to 100 ms (1 A range) 10 μs to 2 s (10 μA to 100 mA range) Pulse width resolution: 2 μs Pulse period: 5 ms to 5 s Pulse period resolution: 100 μs Pulse duty: For 1 A range: ≤ 5% For 10 μA to 100m A range Period ≥ delay + width + 2 ms (when delay + width ≤ 100 ms) Period ≥ delay + width + 10 ms (when delay + width > 100 ms) Pulse delay: 0 to (Period–width) For HVSMU: Pulse width: 500 µs to 2 s Pulse width resolution: 6 µs Pulse period: 5 ms to 5 s Period ≥ delay + width + 2 ms (when delay + width ≤ 100 ms) Period ≥ delay + width + 10 ms (when delay + width > 100 ms) Pulse period resolution: 100 µs Pulse delay: 0 to (Period – width) Pulse output limitation: When the pulse voltage is more than 1500 volts, the peak and base of pulse should be same polarities. Pulse measurement delay: 6 µs to (Period – pulse measurement time – 2 m) s, 6 µs resolution SMU Other Specifications 23 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

Supplemental Characteristics Current compliance setting accuracy (for opposite polarity): For MPSMU: For 1 pA to 10 nA ranges: V/I setting accuracy ±12% of range For 100 nA to 100 mA ranges: V/I setting accuracy ±2.5% of range For HCSMU and MCSMU: For 10 µA to 1 A ranges: V/I setting accuracy ±2.5% of range For 20 A range (HCSMU): V/I setting accuracy ±0.6% of range For HVSMU: For 10 nA to 10 nA ranges: V/I setting accuracy ±12% of range For 100 nA to 10 mA ranges: V/I setting accuracy ±2.5% of range SMU pulse setting accuracy (fixed measurement range): For MPSMU: Width: ±0.5% ± 50 µs Period: ±0.5% ± 100 µs For HCSMU and MCSMU: Width: ±0.1% ± 2 µs Period: ±0.1% ± 100 µs For HVSMU: Width: ±0.1% ± 6 µs Period: ±0.5% ± 100 µs Minimum pulse measurement time: 16 µs (MPSMU) 2 µs (HCSMU and MCSMU) 6 µs (HVSMU) 24 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

MFCMU (multi frequency capacitance measurement unit) module specifications Measurement functions Measurement parameters: Cp-G, Cp-D, Cp-Q, Cp-Rp, Cs-Rs, Cs-D, Cs-Q, Lp-G, Lp-D, Lp-Q, Lp-Rp, Ls-Rs, Ls-D, Ls-Q, R-X, G-B, Z-θ, Y-θ Ranging: Auto and fixed Measurement terminal: Four-terminal pair configuration, four BNC (female) connectors Test signal Frequency: Range: 1 kHz to 5 MHz Resolution: 1 mHz (minimum) Accuracy: ±0.008% Output signal level: Range: 10 mVrms to 250 mVrms Resolution: 1 mVrms Accuracy: ±(10.0% + 1 mVrms) at the measurement port of the MFCMU ±(15.0% + 1 mVrms) Output impedance: 50 Ω, typical Signal level monitor: Range: 10 mVrms to 250 mVrms Accuracy: ±(10.0% of reading + 1 mVrms) at the measurement port of the MFCMU ±(15.0% + 1 mVrms) DC bias function DC bias: Range: 0 to ±25 V Resolution: 1 mV Accuracy: ±(0.5% + 5.0 mV) at the measurement port Maximum DC bias current (supplemental characteristics): Impedance measurement range Maximum DC bias current 50 Ω 10 mA 100 Ω 10 mA 300 Ω 10 mA 1 kΩ 1 mA 3 kΩ 1 mA 10 kΩ 100 µA 30 kΩ 100 µA 100 kΩ 10 µA 300 kΩ 10 µA Output impedance: 50 Ω, typical Sweep characteristics Available sweep parameters: Oscillator level, DC bias voltage, frequency Sweep type: linear, log Sweep mode: single, double Sweep direction: up, down Number of measurement points: Maximum 1001 points Measurement accuracy The following parameters are used to express the impedance measurement accuracy at the measurement port of the MFCMU. ZX: Impedance measurement value (Ω) DX: Measurement value of D E = EP’ + (ZS’/|ZX| + YO’|ZX|) x 100 (%) EP’ = EPOSC + EP (%) YO’ = YOSC + YO (S) ZS’ = ZOSC + ZS (Ω) |Z| accuracy ±E (%) θ accuracy ±E/100 (rad) C accuracy at DX ≤ 0.1 ±E (%) at DX > 0.1 ±E x √(1+DX 2)(%) D accuracy at DX ≤ 0.1 ±E/100 at DX > 0.1 ±E x (1 + DX)/100 G accuracy at DX ≤ 0.1 ±E/ DX (%) at DX > 0.1 ±E x √(1+DX 2)/DX (%) Note: measurement accuracy is specified under the following conditions: Temperature: 23 ±5 °C Integration time: 1 PLC 25 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

Oscillator level EPOSC (%) ZOSC (mΩ) 125 mV < VOSC ≤ 250 mV 0.03 x (250/ VOSC – 1) 5 x (250/VOSC – 1) 64 mV < VOSC ≤ 125 mV 0.03 x (125/ VOSC – 1) 5 x (125/VOSC – 1) 32 mV < VOSC ≤ 64 mV 0.03 x (64/ VOSC – 1) 5 x (64/VOSC – 1) VOSC ≤ 32 mV 0.03 x (32/ VOSC – 1) 5 x (64/VOSC – 1) VOSC is oscillator level in mV. Parameters Y OSC YO EP ZS Frequency YOSC (nS) YO (nS) EP (%) ZS (mΩ) 1 kHz ≤ f ≤ 200 kHz 1 x (125/ VOSC – 0.5) 1.5 0.095 5.0 200 kHz < f ≤ 1 MHz 2 x (125/ VOSC – 0.5) 3.0 0.095 5.0 1 MHz < f ≤ 2 MHz 2 x (125/ VOSC – 0.5) 3.0 0.28 5.0 2 MHz < f 20 x (125/ VOSC – 0.5) 30.0 0.28 5.0 f is frequency in Hz. VOSC is oscillator level in mV. Example of calculated C/G measurement accuracy Frequency Measured capacitance C accuracy 1 Measured conductance G accuracy 1 5 MHz 1 pF ±0.61% ≤ 3 µS ±192 nS 10 pF ±0.32% ≤ 31 µS ±990 nS 100 pF ±0.29% ≤ 314 µS ±9 µS 1 nF ±0.32% ≤ 3 mS ±99 µS 1 MHz 1 pF ±0.26% ≤ 628 nS ±16 nS 10 pF ±0.11% ≤ 6 µS ±71 nS 100 pF ±0.10% ≤ 63 µS ±624 nS 1 nF ±0.10% ≤ 628 µS ±7 µS 100 kHz 10 pF ±0.18% ≤ 628 nS ±11 nS 100 pF ±0.11% ≤ 6 µS ±66 nS 1 nF ±0.10% ≤ 63 µS ±619 nS 10 nF ±0.10% ≤ 628 µS ±7 µS 10 kHz 100 pF ±0.18% ≤ 628 nS ±11 nS 1 nF ±0.11% ≤ 6 µS ±66 nS 10 nF ±0.10% ≤ 63 µS ±619 nS 100 nF ±0.10% ≤ 628 µS ±7 µS 1 kHz 100 pF ±0.92% ≤ 63 nS ±6 nS 1 nF ±0.18% ≤ 628 nS ±11 nS 10 nF ±0.11% ≤ 6 µS ±66 nS 100 nF ±0.10% ≤ 63 µS ±619 nS 1. The capacitance and conductance measurement accuracy is specified under the following conditions: DX ≤ 0.1 Integration time: 1 PLC Test signal level: 30 mV rms At four-terminal pair port of MFCMU MFCMU (multi frequency capacitance measurement unit) module specifications (continued) 26 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

Test Fixture Specification There are 3 types of test fixtures available for B1506A depending on the selected option. Functionality Fixture capability Current expander capability (H51/H71) Selector capability This allows the user to switch the output between the HVSMU, MPSMU and UHCU or HCSMU. Thermocouple input: 2ea Two K-type thermocouple inputs Temperature range: −50 to 300 °C. Other terminals/indicators Power indicator: 1ea. High voltage indicator: 1ea. Measurement mode indicator: IV mode: 1ea. CV mode: 1ea. Interlock terminal: 1ea. Earth terminal: 1ea. Wrist strap terminal: 1ea. Thermocouple reading accuracy Temperature range Accuracy T>= 100° C +/-5°C T< 0° C +/-5°C Software Interfaces The B1506A is equipped with Easy Test Navigator, a soft ware suite for power device charac terization (hereafter referred to as Easy Test Navigator). It supports vari- ous types of measurements and provides with easy-to-use and simple operation. The Easy Test Navigator GUI can be accessed via its front panel 15-inch touch screen, softkeys and rotary knob, as well as through an optional USB keyboard and mouse. Measurement setups and data can be stored on the B1506A’s HDD, and they can be exported to external stor- age. The B1506A also supports Keysight Technologies, Inc. EasyEXPERT software, a well-proven software interface for the B1500A and B1505A. B1506A Easy Test Navigator Key features: – Dedicate software for; – Datasheet characterization – I/V characteristics measurement – Three-terminal device capacitance measurement – Gate charge measurement – Thermal monitor/control – Device power loss calculation – Ready-to-use measurement templates for typical power device characteris - tics measurements – Ability to automatically accumulate measurement data on the HDD in exportable formats Easy Test Navigator palette: The Easy Test Navigator Palette provides a complete list of the B1506A’s measurement software and also allows this software to be launched. The Easy Test Navigator Palette is displayed in full-screen mode after powering up the B1506A. The Easy Test Navigator Palette can be minimized to access the Windows desktop. Datasheet characterization software: The datasheet characterization software provides: – A simple operating environment that can measure a range of device parameters and characteristics using a familiar datasheet-like format – The ability to input measurement conditions in a datasheet-like format – The ability to specify graphical limits on sweep measurements – Display measured parameters and characteristics in a datasheet-like format – The ability to compare measure - ment results with expected values – Minimal software learning curve for device characterization using the pre-defined measurement templates – The ability to effectively generate new datasheet specifications for operat - ing conditions not covered on the manufacturer’s datasheet IV measurement software: I/V Measurement Software provides: – Voltage/current sweep/spot measurements – DC/pulse outputs – Linear/log sweep with both single (one-way) and double (round-trip) capability for the primary sweep source (similar to the collector supply of a conventional curve tracer) – Linear/list sweep capability for the secondary sweep source (cor - responding to the step generator of a conventional curve tracer) – The ability to assign the primary sweep source or the secondary sweep source to either the collector/drain terminal or to the base/gate terminal. – Intuitive and interactive sweep/spot measurement operation using rotary knob. – Pre-defined templates for typical MOSFET, IGBT and Diode I/V measurements. 27 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

Oscilloscope view: I/V Measurement Software supports the pulse mode Oscilloscope View function for the HCSMU, MCSMU, HVSMU and UHCU modules. Oscilloscope View provides: – Voltage and current waveform monitoring for the measurement channels of all supported modules Capacitance measurement software: Capacitance measurement software provides: – Automated measurement circuit configuration for three-terminal device capacitance measurement (e.g. Ciss, Coss and Crss), with no need to manually modify any device connections – With DC bias (sweep) control up to 3kV for Collector/Drain terminal – With DC bias (sweep) control up to 100V for Base/Collector terminal – Automated correction for every measurement path – Stable measurements even if the low-side load capacitance changes due to a bias change (load adaptive gain-phase compensation) – Cancellation of the residual induc - tance measurement error on the AC guard path of three-terminal device capacitance measurements – Pre-defined templates for typical capacitance measurements of both enhancement and depletion type MOSFETs, IGBTs and Diodes Gate charge measurement software: Gate charge measurement Software provides; – Support for both constant current load mode and resistive load mode – Correction of for parasitic capacitance and residual resistance for in the gate path – Monitoring of gate and drain/collector voltage/ and current waveforms dur - ing the device turn-on periodphase – JESD24-2 compliant Qg curve, line fitting and parameter extraction Keysight EasyEXPERT software Key features: – Ready-to-use application test library – Multiple measurement modes (ap - plication test, classic test, tracer test, oscilloscope view and quick test) – Multiple measurement functions (spot, sweep, time sampling, C-V, C-f, C-t, etc.) – Data display, analysis and arithmetic functions – Workspace and data management – External instrument control – Multiple programming methods (EasyEXPERT remote control and FLEX GPIB control) – Multiple interface (USB, LAN, GPIB and digital I/O) Key features: EasyEXPERT comes with over 40 applica - tion tests conveniently organized by device type, application, and technology. Operation mode: – Application test mode – Classic test mode – Tracer test mode – Quick test mode Measurement mode: – V measurement – Spot – Staircase sweep – Pulsed spot – Pulsed sweep – Staircase sweep with pulsed bias – Sampling – Multi-channel sweep – Multi-channel pulsed sweep – List sweep – Linear search1 – Binary search1 – C measurement – Spot C – CV (DC bias) sweep – Pulsed spot C – Pulsed sweep CV – C-t sampling – C-f sweep – CV (AC level) sweep – Quasi-Static CV (QSCV) 1. Supported only by FLEX commands. Thermal monitor/control software: Thermal monitor/control software provides; – Thermometer indication – Thermal profile with measurement triggers – Optional control of Thermal Plate Power loss calculation software: Power loss calculation software provides: – Calculation of power loss at a switch - ing device for: – Hard switching mode – Soft switching mode – Device characteristics parameter input for: – Gate resistance – On resistance – Gate charge – Gate switching charge – Equivalent output capacitance energy related – Equivalent output capacitance time related – Parameter input assist from related measurement data with; – Display of source measurement data – Switching condition parameter input – Support of parameter sweep for one parameter – Power loss calculation results of; – Total power loss – Conductive power loss – Driving power loss – Switching power loss (inductive load, resistive load) – Graph representation of loss components for optional param - eter sweep Software Interfaces (continued) 28 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

Number of steps: 1 to 10001 (SMU), 1 to 1001 (CMU) Sweep mode: Linear or logarithmic (log) Sweep direction: Single or double sweep Hold time: 0 to 655.35 s, 10 ms resolution Delay time: 0 to 65.535 s, 100 μs resolution 0 to 655.35 s, 100 μs resolution (CV (AC level) sweep, C-f sweep) Step delay time: 0 to 1 s, 100 μs resolution Step output trigger delay time: 0 to (delay time) s, 100 μs resolution Step measurement trigger delay time: 0 to 65.535 s, 100 μs resolution Sampling (time domain) measurement 1 Displays the time sampled voltage/current data (by SMU) versus time. Sampling channels: Up to 10 Sampling mode: Linear, logarithmic (log) Sampling points: For linear sampling: 1 to 100,001/(number of channels) For log sampling: 1 to 1+ (number of data for 11 decades) Sampling interval range: 100 μs to 2ms, 10μs resolution 2 ms to 65.535 s, 1 ms resolution For < 2ms, the interval is ≥ 100 μs +20 μs x (num. of channels – 1) Hold time, initial wait time: -90 ms to -100 μs, 100 μs resolution 0 to 655.35 s, 10 ms resolution Measurement time resolution: 100 μs 1. Supported only by EasyEXPERT and FLEX commands. Other measurement characteristics Measurement control Single, repeat, append, and stop SMU setting capabilities Limited auto ranging, voltage/current compliance, power compliance, automatic sweep abort functions, self-test, and self- calibration Standby mode1 SMUs in “Standby” remain programmed to their specified output value even as other units are reset for the next measurement. Bias hold function1 This function allows you to keep a source active between measurements. The source module will apply the specified bias between measurements when running classic tests inside an application test, in quick test mode, or during a repeated measurement. The function ceases as soon as these conditions end or when a mea- surement that does not use this function is started. Current offset cancel This function subtracts the offset current from the current measurement raw data, and returns the result as the measurement data. This function is used to compensate the error factor (offset current) caused by the measurement path such as the mea- surement cables, manipulators, or probe card. Time stamp1 The B1506A supports a time stamp func- tion utilizing an internal quartz clock. Resolution: 100 μs 1. Supported only by EasyEXPERT and FLEX commands. Data display, analysis and arithmetic functions Data Display X-Y graph plot X-axis and up to eight Y-axes, linear and log scale, real time graph plotting. X-Y graph plot can be printed or stored as image data to clip board or mass storage device. (File type: bmp, gif, png, emf) Scale: Auto scale and zoom Marker: Marker to min/max, interpolation, direct marker, and marker skip Cursor: Direct cursor Line: Two lines, normal mode, grad mode, tangent mode, and regression mode Overlay graph comparison: Graphical plots can be overlaid. List display Measurement data and calculated user function data are listed in conjunction with sweep step number or time domain sampling step number. Up to 20 data sets can be displayed. Data variable display Up to 20 user-defined parameters can be displayed on the graphics screen. Software Interfaces (continued) 29 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

Automatic analysis function On a graphics plot, the markers and lines can be automatically located using the auto analysis setup. Parameters can be automatically determined using automatic analysis, user function, and read out func- tions. Analysis functions Up to 20 user-defined analysis functions can be defined using arithmetic expres- sions. Measured data, pre-defined variables, and read out functions can be used in the computation. The results can be displayed on the LCD. Read out functions The read out functions are built-in functions for reading various values related to the marker, cursor, or line. Arithmetic functions User functions Up to 20 user-defined functions can be defined using arithmetic expressions. Measured data and pre-defined variables can be used in the computation. The results can be displayed on the LCD. Arithmetic operators +, -, *, /, ^, abs (absolute value), at (arc tangent), avg (averaging), cond (conditional evaluation), delta, diff (differ- ential), exp (exponent), integ (integration), lgt (logarithm, base 10), log (logarithm, base e), mavg (moving average), max, min, sqrt, trigonometric function, inverse trigonometric function, and so on. Physical constants Keyboard constants are stored in memory as follows: q: Electron charge, 1.602177E-19 C k: Boltzmann’s constant, 1.380658E-23 ε (e): Dielectric constant of vacuum, 8.854188E-12 Engineering units The following unit symbols are also avail- able on the keyboard: Recommended GPIB I/F 1. In case of some supplemental characteristics, humidity range is defined as 20 to 50% RH Software Interfaces (continued) Interface B1506A Keysight 82350B 82357A 82357A PCI USB USB National Instrument GPIB-USB-HS USB √2 1. An 82350B card is highly recommended because of stability and speed. 2. USB GPIB interfaces might cause serial poll error intermittently due to the intrinsic communication scheme differences. It is reported that using an even GPIB address sometimes significantly decreases the chance of the error. The NI GPIB-USB-HS is recommended for stability, and the Keysight 82357B is recommended for speed. 30 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

Operating: 0 m to 2,000 m (6,561 ft) Storage: 0 m to 4,600 m (15,092 ft) Power requirement ac Voltage: 90 V to 264 V Line Frequency: 47 Hz to 63 Hz Maximum volt-amps (VA) B1506A mainframe: 900 VA B1506A tesf fixture: 130VA (H21), 470 VA (H51/H71), Acoustic Noise Emission Lpa < 55dB Lwa:55dB (Operating mode) Lwa:73dB (Worst Case mode) About measurement accuracy RF electromagnetic field and SMU measurement accuracy: SMU voltage and current measurement accuracy can be affected by RF electromagnetic field strengths greater than 3 V/m in the frequency range of 80 MHz to 1 GHz. The extent of this effect depends upon how the instrument is positioned and shielded. Induced RF field noise and SMU measurement accuracy: SMU voltage and current measurement accuracy can be affected by induced RF field noise strengths greater than 3 Vrms in the frequency range of 150 kHz to 80 MHz. The extent of this effect depends upon how the instrument is positioned and shielded. Regulatory compliance EMC: IEC 61326-1 / EN 61326-1 Canada: ICES/NMB-001 AS/NZS CISPR 11 Safety: IEC61010-1 / EN 61010-1 CAN/CSA-C22.2 No. 61010-1 Certification CE, cCSAus, RCM, KC Dimensions B1506A mainframe: 420 mm W x 330 mm H x 575 mm D B1506A test fixture: 420 mm W x 360 mm H x 575 mm D B1506A-T01 Thermal Test Enclosure: Outer dimension: 370 mm W x 340 mm H x 315 mm D Inner dimension: 280 mm W x 130 mm H x 180 mm D Weight B1506A mainframe H21: 34.5 kg H51/H71: 35 kg B1506A test fixture H21: 22 kg H51/H71: 33.5 kg Furnished accessories Measurement cables and adapter System cable, 1 ea. CMU cable, 1 ea Digital I/O cable, 1 ea. Blank Silicon Plate, 1 ea. 3-pin Inline Package Socket Module, 1 ea Curve Tracer Test Adapter Socket Module, 1ea Thermocouple (high temperature resistant, 75 cm), 2 ea. 200 mm high current cable, 2 ea. 300 mm high current cable, 2 ea. 200 mm normal cable, 8 ea. 300 mm normal cable, 6 ea. Banana pin adapter, 18 ea. Mini alligator clip, 14 ea. Large clip, 4 ea. For B1506A-H21/51/71 only Universal Socket Module, 1 ea. Gate Charge Socket Adapter, 1 ea. Keyboard, 1 ea. Mouse, 1 ea. Stylus pen, 1 ea. Power cable, 2 ea. Manual & Software CD-ROM, 1 ea. Disk set for Keysight 4155B/4155C/4156B/4156C firmware update, 1 set 31 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

Ordering Information

Model number Option Description B1506A Power Device Analyzer for Circuit Design H20 Option H20 - 20 A/3 kV/Thermal Fixture Package H21 Option H21 - 20 A/3 kV/C-V/Gate Charge/Thermal Fixture Package H50 Option H50 - 500 A/3 kV/Thermal Fixture Package H51 Option H51 - 500 A/3 kV/C-V/Gate Charge/Thermal Fixture Package H70 Option H70 - 1500 A/3 kV/Thermal Fixture Package H71 Option H71 - 1500 A/3 kV/C-V/Gate Charge/Thermal Fixture Package Thermal Test Option T01 Thermal Test Enclosure (Thermostream Compatible) Documentation 0B0 Download the Product Manual from the Keysight website ABA English User’s Guide ABJ Japanese User’s Guide Calibration Documentation UK6 Commercial calibration certification with test data A6J ANSI Z540-1-1994 Calibration Drive Option DR1 Replace a build-in DVD-R with a read-only DVD drive B1506AU Upgrade kit for B1506A Current Upgrade 005 20 A to 500 A Current Upgrade Option 015 500 A to 1500 A Current Upgrade Option 105 20A to 500A Current Upgrade for B1506A-H20 115 500A to 1500A Current Upgrade for B1506A-H50 CV and Qg Upgrade

021 Add CV and Qg to B1506A-H20

051 Add CV and Qg to B1506A-H50

071 Add CV and Qg to B1506A-H70

T01 Thermal Test Enclosure (Thermostream Compatible) F02 Blank Silicon Plate F10 3-pin Inline Package Socket Module F11 Universal Socket Module F13 Curve Tracer Test Adapter Socket Module F14 Gate Charge Socket Adapter Note: Both Thermostream and Thermal plate (HP289 with GP-IB control) are sold and supported by inTEST corporation. * B1506AU Opt F11 Universal Socket Module contains a universal socket module, test wire for thermal test (2m), ultra-high current test wire for thermal test (2m), lag connector x 20, lag connector for ultra-high current test wire x 6, and screws. 32 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet

33 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet Keysight B1500A Semiconductor Device Analyzer www.keysight.com/find/B1500A Keysight B1505A Power Device Analyzer/Curve Tracer (1500 A/10 kV) www.keysight.com/find/B1505A Keysight B2900 Precision Instrument Family www.keysight.com/find/b2900a If you need more measurement capabilities, the best choice is Keysight precision SMU products.

34 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet This information is subject to change without notice. © Keysight Technologies, 2014 - 2016 Published in USA, June 23, 2016 5991-4441EN www.keysight.com myKeysight www.keysight.com/find/mykeysight A personalized view into the information most relevant to you. Keysight Infoline www.keysight.com/find/Infoline Keysight’s insight to best in class information management. Free access to your Keysight equipment company reports and e-library. KEYSIGHT SERVICES Keysight Services www.keysight.com/find/services Our deep offering in design, test, and measurement services deploys an industry-leading array of people, processes, and tools. The result? We help you implement new technologies and engineer improved processes that lower costs. Three-Year Warranty www.keysight.com/find/ThreeYearWarranty Keysight’s committed to superior product quality and lower total cost of ownership. Keysight is the only test and measurement company with three-year warranty standard on all instruments, worldwide. And, we provide a one-year warranty on many accessories, calibration devices, systems and custom products. Keysight Assurance Plans www.keysight.com/find/AssurancePlans Up to ten years of protection and no budgetary surprises to ensure your instruments are operating to specification, so you can rely on accurate measurements. Keysight Channel Partners www.keysight.com/find/channelpartners Get the best of both worlds: Keysight’s measurement expertise and product breadth, combined with channel partner convenience. www.keysight.com/find/b1506a For more information on Keysight Technologies’ products, applications or services, please contact your local Keysight office. The complete list is available at: www.keysight.com/find/contactus Americas Canada (877) 894 4414 Brazil 55 11 3351 7010 Mexico 001 800 254 2440 United States (800) 829 4444 Asia Pacific Australia 1 800 629 485 China 800 810 0189 Hong Kong 800 938 693 India 1 800 11 2626 Japan 0120 (421) 345 Korea 080 769 0800 Malaysia 1 800 888 848 Singapore 1 800 375 8100 Taiwan 0800 047 866 Other AP Countries (65) 6375 8100 Europe & Middle East Austria 0800 001122 Belgium 0800 58580 Finland 0800 523252 France 0805 980333 Germany 0800 6270999 Ireland 1800 832700 Israel 1 809 343051 Italy 800 599100 Luxembourg +32 800 58580 Netherlands 0800 0233200 Russia 8800 5009286 Spain 800 000154 Sweden 0200 882255 Switzerland 0800 805353 Opt. 1 (DE) Opt. 2 (FR) Opt. 3 (IT) United Kingdom 0800 0260637 For other unlisted countries: www.keysight.com/find/contactus (BP-06-08-16) DEKRA Certified ISO9001 Quality Management System www.keysight.com/go/quality Keysight Technologies, Inc. DEKRA Certified ISO 9001:2015 Quality Management System Evolving Our unique combination of hardware, software, support, and people can help you reach your next breakthrough. We are unlocking the future of technology. From Hewlett-Packard to Agilent to Keysight