B1505A

Keysight Technologies

Power Device Analyzer/Curve Tracer

Manufacturer: Keysight Technologies

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B1505A Power Device Analyzer/Curve Tracer Data Sheet

The Keysight Technologies, Inc. B1505A Power Device Analyzer/Curve Tracer is a single-box solution with next-generation curve tracer functionality that can ac - curately evaluate and characterize power devices at up to 10 kV and 1500 A. The B1505A is capable of handling all types of power device evaluation, with features that include a wide voltage and current range, fast pulsing capability (10 µs), µΩ level on-resistance measurement resolution and sub-pA level current measure - ment capability. In addition, an oscilloscope view permits visual verification of both current and voltage pulsed waveforms. Two independent analog-to-digital (A/D) converters on each channel support a 2 µs sampling rate for accurate monitoring of the critical timings that can affect device behavior. It can also perform fully automated capacitance measurements (such as Ciss, Coss and Crss) at high voltage biases (up to 3 kV). Moreover, it can evaluate gate charge (which is an important parameter for high frequency switching converter efficiency) at up to 3 kV as well. The B1505A with EasyEXPERT group+ software includes a curve tracer mode that combines familiar curve tracer functionality with the convenience of a PC-based instrument; this makes it easy for traditional curve-tracer users to become productive quickly. Module selector, device capaci - tance selector and Quick Test feature enable fully automated measurement on multiple parameters without the need to recable. Keysight EasyEXPERT group+ GUI based characterization software is available either on the B1505A’s embed - ded Windows 7 platform with 15-inch touch screen or on your PC to accelerate the characterization tasks. It supports efficient and repeatable device charac - terization in the entire characterization process from measurement setup and execution to analysis and data management either interactive manual operation or automation across a wafer in conjunction with a semiautomatic wafer prober. EasyEXPERT group+ makes it easy to perform complex device characterization immediately with hundreds of ready-to-use measurements (application tests) furnished, and allows you the option of storing test condition and measurement data automatically after each measurement in a unique built-in database (work - space), ensuring that valuable information is not lost and that measurements can be repeated at a later date. The net result is improved ease of use, better data analysis and simplified data management for the measurement of power devices and power circuitry. Introduction

Precision measurement across a wide range of operating conditions – All-in-one solution for power device characterization up to 1500 A/10 kV – Medium current measurement with high voltage bias (e.g. 500 mA at 1200 V). – μΩ resistance measurement capability – Accurate sub-picoamp level current measurement at high voltage bias – Fully automated thermal test from -50 to +250 °C Extensive device evaluation capabilities – Fully automated Capacitance (Ciss, Coss, Crss, etc.) measurement at up to 3000 V of DC bias – High power pulsed measurements down to 10 μs – Gate charge measurement cover - ing Nch MOSFETs and IGBTs both in package and on wafer – High voltage/high current fast switch option to characterize GaN current collapse effect – Up to 5 high voltage (3 kV) source/ measure unit channels for reliability

applications

– Perform both hot and cold tempera - ture dependency testing in an inter - lock equipped test fixture Improved measurement efficiency – Switch between high-voltage and high-current measurements without the need to recable – Automated reconfiguration of test circuitry for transistor capacitance measurement (Ciss, Coss, Crss, Cgs, Cgd, Cds, etc.) for both packaged and on-wafer devices – Standard test fixtures with interlock for safe packaged power device test - ing – Supported and secure on-wafer high- power testing over 200 A and up to 10 kV – Oscilloscope view allows verifica - tion of applied voltage and current waveforms – MS Windows-based EasyEXPERT group+ software facilitates data man - agement and simplifies data analysis Upgradable and scalable hardware architecture – A wide selection of measurement modules – Support for high power devices with up to 6 pins GPIB, USB, LAN interfaces and VGA video output port Self-test, self-calibration, diagnostics Specification conditions The measurement and output accuracy are specified under the conditions listed below. Note: The SMU measurement and output accuracies are specified at the SMU connector terminals, using the Zero Check terminal as a reference. 1. Temperature: 23 ± 5 °C 2. Humidity: 20 to 70% 3. Self-calibration after a 40 minute warm-up is required. 4. Ambient temperature change less than ±1 °C after self-calibration execution. (Note: This does not apply to the MFCMU). 5. Measurement made within one hour after self-calibration execution.(Note: This does not apply to the MFCMU). 6. Calibration period: 1 year 7. SMU integration time setting:

1 PLC (1 nA to 1 A range, voltage

range), 200 µs (20 A range) Averaging of high-speed ADC: 128 samples per 1 PLC 8. SMU filter: ON (for HPSMU and MPSMU) 9. SMU measurement terminal connection: Kelvin connection (for HPSMU, MPSMU, HCSMU and MCSMU), non-Kelvin (for HVSMU) Note: This document lists specifica- tions and supplemental characteris- tics for the B1505A and its associated modules. The specifications are the standards against which the B1505A and its associated modules are tested. When the B1505A or any of its associated modules are shipped from the factory, they meet the specifica - tions. The “supplemental” charac - teristics described in the following specifications are not guaranteed, but provide useful information about the functions and performance of the instrument. Note: Module upgrades to existing B1505A systems must be carried out at a Keysight Technologies, Inc. ser- vice centre. In order to ensure system specifications the new modules need to be installed and the complete unit calibrated. Contact your nearest Key - sight Technologies office to arrange the installation and calibration of new B1505A modules. 03 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

The total power consumption of all modules cannot exceed 84 W. Under this rule, the B1505A can contain any combination of the following SMUs: – Up to 4 dual-slot HPSMUs – Up to 10 single-slot MPSMUs – Up to 2 dual-slot HCSMUs1 – Up to 6 single-slot MCSMUs – Up to 5 dual-slot HVSMU In addition, up to 1 single-slot MFCMU can be installed per B1505A mainframe for any of the above listed SMU configurations. The installation order of the modules is: HPSMU, MPSMU, MFCMU, MCSMU, HCSMU and HVSMU starting from the bottom of the B1505A mainframe. Maximum voltage between Common and Ground ≤ ± 42 V Ground unit (GNDU) specifications The GNDU is furnished with the B1505A mainframe. Output voltage: 0 V ± 100 µV B1505A Specifications Maximum sink current: ± 4.2 A Output terminal/connection: Triaxial connector, Kelvin (remote sensing) GNDU supplemental characteristics Load capacitance: 1 µF Cable resistance: For IS ≤ 1.6 A: Force line R < 1 Ω For 1.6 A < IS ≤ 2.0 A: Force line R < 0.7 Ω For 2.0 A < IS ≤ 4.2 A: Force line R < 0.35 Ω For all cases: Sense line R ≤ 10 Ω Where IS is the current being sunk by the GNDU. Peripherals and interface Data storage Hard disk drive, DVD-R drive Interfaces GPIB, interlock, USB (USB 2.0, front 2, rear 2), LAN (1000BASE-T/100BASE- TX/10BASE-T), trigger in/out, digital I/O, VGA video output Remote control capabilities – FLEX commands (GPIB) – EasyEXPERT group+ remote control function (LAN) Trigger I/O Only available using GPIB FLEX commands. Supported plug-In modules The B1505A supports ten slots for plug-in modules. Part number Description Slots occupied Range of operation Measure resolution B1510A High Power Source Monitor Unit (HPSMU) 2 -200 V to 200 V, -1 A to 1 A 2 µV, 10 fA B1511B Medium Power Source Monitor Unit (MPSMU) 1 -100 V to 100 V, -100 mA to 100 mA 0.5 μV, 10 fA B1512A High Current Source Monitor Unit (HCSMU) 2 -40 V to 40 V, -1 A to 1 A -20 V to 20 V, -20 A to 20 A (Pulse only) 200 nV, 10 pA B1513C High Voltage Source Monitor Unit (HVSMU) 2 -3000 V to 3000 V, -4 mA to 4 mA -1500 V to 1500 V, -8 mA to 8 mA 200 µV, 10 fA B1514A Medium Current Source Monitor Unit (MCSMU) 1 -30 V to 30 V, -100 mA to 100 mA -30 V to 30 V, -1 A to 1 A (Pulse only) 200 nV, 10 pA B1520A

1 Multi Frequency Capacitance Measurement Unit (MFCMU) 1 1 kHz to 5 MHz

N1300A-100 SMU CMU Unify Unit (SCUU) is not supported for the B1505A. 1. The total number of installed HPSMU and HCSMU modules cannot exceed 4. Trigger in/out synchronization pulses before and after setting and measuring DC voltage and current. Arbitrary trig - ger events can be masked or activated independently. Furnished software – EasyEXPERT group+ – VXI plug & play driver for the B1500A – MDM file converter This tool can convert the EasyEXPERT group+ file (XTR/ZTR) to Keysight IC-CAP MDM file format. The EasyEXPERT file of the following mea - surements performed in the classic mode is only supported: – IV Sweep – Multi channel IV Sweep – CV Sweep – 4155/56 setup file converter tool This tool can convert 4155 and 4156 mea- surement setup files (file extensions MES or DAT) into equivalent EXPERT group+ classic test mode setup files Supported operating systems: Microsoft Windows XP Professional (Service Pack 3 or later), Windows Vista Business (Service Pack 2 or later (32bit only)), and Windows 7 Professional (Service Pack 1 or later (32bit and 64bit)) Supported language: English (US)) Supported .NET Framework Microsoft .NET Framework 3.5 SP1 04 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

HPSMU Module Specifications Voltage range, resolution, and accuracy (high resolution ADC) Voltage range Force resolution Measure resolution Force accuracy 1 ±(% + mV) Measure accuracy 1 ±(% + mV) Maximum current ±20 V 1 mV 20 µV ±(0.018 + 3) ±(0.009 + 0.9) 1 A ±40 V 2 mV 40 µV ±(0.018 + 6) ±(0.01 + 1) 500 mA ±100 V 5 mV 100 µV ±(0.018 + 15) ±(0.012 + 2.5) 125 mA ±200 V 10 mV 200 µV ±(0.018 + 30) ±(0.014 + 2.8) 50 mA 1. ± (% of reading value + offset value in mV) Current range, resolution, and accuracy (high resolution ADC) Current range Force resolution Measure resolution Force accuracy 1 ±(% + A + A) Measure accuracy 1 ±(% + A + A) Maximum voltage ±1 nA 50 fA 10 fA ±(0.1 + 3E-13 + Vo x 1E-15) ±(0.1 + 2E-13 + Vo x 1E-15) 200 V ±10 nA 500 fA 10 fA ±(0.1 + 3E-12 + Vo x 1E-14) ±(0.1 + 1E-12 + Vo x 1E-14) 200 V ±100 nA 5 pA 100 fA ±(0.05 + 3E-11 + Vo x 1E-13) ±(0.05 + 2E-11 + Vo x 1E-13) 200 V ±1 µA 50 pA 1 pA ±(0.05 + 3E-10 + Vo x 1E-12) ±(0.05 + 1E-10 + Vo x 1E-12) 200 V ±10 µA 500 pA 10 pA ±(0.05 + 3E-9 + Vo x 1E-11) ±(0.04 + 2E-9 + Vo x 1E-11) 200 V ±100 µA 5 nA 100 pA ±(0.035 + 15E-9 + Vo x 1E-10) ±(0.03 + 3E-9 + Vo x 1E-10) 200 V ±1 mA 50 nA 1 nA ±(0.04 + 15E-8 + Vo x 1E-9) ±(0.03 + 6E-8 + Vo x 1E-9) 200 V ±10 mA 500 nA 10 nA ±(0.04 + 15E-7 + Vo x 1E-8) ±(0.03 + 2E-7 + Vo x 1E-8) 200 V ±100 mA 5 µA 100 nA ±(0.045 + 15E-6 + Vo x 1E-7) ±(0.04 + 6E-6 + Vo x 1E-7) 200 V 2 ±1 A 50 µA 1 µA ±(0.4 + 3E-4 + Vo x 1E-6) ±(0.4 + 15E-5 + Vo x 1E-6) 200 V 2 1. ± (% of reading value + fixed offset in A + proportional offset in A), Vo is the output voltage in V.) 2. 200 V (Io ≤ 50 mA), 100 V (50 mA < Io ≤ 125 mA), 40 V (125 mA < Io ≤ 500 mA), 20 V (500 mA < Io ≤ 1 A), Io is the output current in A. Voltage range, resolution, and accuracy (high speed ADC) Voltage range Force resolution Measure resolution Force accuracy 1 ±(% + mV) Measure accuracy 1 ±(% + mV) Maximum current ±20 V 1 mV 1 mV ±(0.018 + 3) ±(0.01 + 4) 1 A ±40 V 2 mV 2 mV ±(0.018 + 6) ±(0.015 + 8) 500 mA ±100 V 5 mV 5 mV ±(0.018 + 15) ±(0.02 + 20) 125 mA ±200 V 10 mV 10 mV ±(0.018 + 30) ±(0.035 + 40) 50 mA 1. ±(% of reading value + offset value in mV). Averaging is 128 samples in 1 PLC. Current range, resolution, and accuracy (high speed ADC) Current range Force resolution Measure resolution Force accuracy 1 ±(% + A + A) Measure accuracy 1 ±(% + A + A) Maximum voltage ±1 nA 50 fA 50 fA ±(0.1 + 3E-13 + Vo x 1E-15) ±(0.25 + 3E-13 + Vo x 1E-15) 200 V ±10 nA 500 fA 500 fA ±(0.1 + 3E-12 + Vo x 1E-14) ±(0.25 + 2E-12 + Vo x 1E-14) 200 V ±100 nA 5 pA 5 pA ±(0.05 + 3E-11 + Vo x 1E-13) ±(0.1 + 2E-11 + Vo x 1E-13) 200 V ±1 µA 50 pA 50 pA ±(0.05 + 3E-10 + Vo x 1E-12) ±(0.1 + 2E-10 + Vo x 1E-12) 200 V ±10 µA 500 pA 500 pA ±(0.05 + 3E-9 + Vo x 1E-11) ±(0.05 + 2E-9 + Vo x 1E-11) 200 V ±100 µA 5 nA 5 nA ±(0.035 + 15E-9 + Vo x 1E-10) ±(0.05 + 2E-8 + Vo x 1E-10) 200 V ±1 mA 50 nA 50 nA ±(0.04 + 15E-8 + Vo x 1E-9) ±(0.04 + 2E-7 + Vo x 1E-9) 200 V ±10 mA 500 nA 500 nA ±(0.04 + 15E-7 + Vo x 1E-8) ±(0.04 + 2E-6 + Vo x 1E-8) 200 V ±100 mA 5 µA 5 µA ±(0.045 + 15E-6 + Vo x 1E-7) ±(0.1 + 2E-5 + Vo x 1E-7) 200 V ±1 A 50 µA 50 µA ±(0.4 + 3E-4 + Vo x 1E-6) ±(0.5 + 3E-4 + Vo x 1E-6) 200 V 2 1. ±(% of reading value + fixed offset in A + proportional offset in A), Vo is the output voltage in V.) 2. 200 V (Io ≤ 50 mA), 100 V (50 mA < Io ≤ 125 mA), 40 V (125 mA < Io ≤ 500 mA), 20 V (500 mA < Io ≤ 1 A), Io is the output current in A. 05 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

Voltage source mode: Voltage range Power

2 V 20 x Ic (W)

20 V 20 x Ic (W)

40 V 40 x Ic (W)

100 V 100 x Ic (W)

200 V 200 x Ic (W)

Where Ic is the current compliance setting. Current source mode: Voltage compliance Power Vc ≤ 20 20 x Io (W) 20 < Vc ≤ 40 40 x Io (W) 40 < Vc ≤ 100 100 x Io (W) 100 < Vc ≤ 200 200 x Io (W) Where Vc is the voltage compliance set - ting and lo is output current. HPSMU measurement and output range Current (mA) Voltage (V) -200 200 -1000 20 40 125 -50 -500 -40-100 500 -20 1000 100 -125 Power consumption 06 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

MPSMU Module Specifications Voltage range, resolution, and accuracy (high resolution ADC) Voltage range Force resolution Measure resolution Force accuracy 1 ±(% + mV) Measure accuracy 1 ±(% + mV) Maximum current ±2 V 100 µV 2 µV ±(0.018 + 0.4) ±(0.01 + 0.14) 100 mA ±5 V 250 μV 5 μV ±(0.018 + 0.75) ±(0.009 + 0.25) 100 mA ±20 V 1 mV 20 µV ±(0.018 + 3) ±(0.009 + 0.9) 100 mA ±100 V 5 mV 100 µV ±(0.018 + 15) ±(0.012 + 2.5) 2 1. ± (% of reading value + offset value in mV) 2. 100 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), 20 mA (40 V < Vo ≤ 100 V), Vo is the output voltage in V. Current range, resolution, and accuracy (high resolution ADC) Current range Force resolution Measure resolution Force accuracy 1 ±(% + A + A) Measure accuracy 1 ±(% + A + A) Maximum voltage ±1 nA 50 fA 10 fA ±(0.1 + 3E-13 + Vo x 1E-15) ±(0.1 + 2E-13 + Vo x 1E-15) 100 V ±10 nA 500 fA 10 fA ±(0.1 + 3E-12 + Vo x 1E-14) ±(0.1 + 1E-12 + Vo x 1E-14) 100 V ±100 nA 5 pA 100 fA ±(0.05 + 3E-11 + Vo x 1E-13) ±(0.05 + 2E-11 + Vo x 1E-13) 100 V ±1 µA 50 pA 1 pA ±(0.05 + 3E-10 + Vo x 1E-12) ±(0.05 + 1E-10 + Vo x 1E-12) 100 V ±10 µA 500 pA 10 pA ±(0.05 + 3E-9 + Vo x 1E-11) ±(0.04 + 2E-9 + Vo x 1E-11) 100 V ±100 µA 5 nA 100 pA ±(0.035 + 15E-9 + Vo x 1E-10) ±(0.03 + 3E-9 + Vo x 1E-10) 100 V ±1 mA 50 nA 1 nA ±(0.04 + 15E-8 + Vo x 1E-9) ±(0.03 + 6E-8 + Vo x 1E-9) 100 V ±10 mA 500 nA 10 nA ±(0.04 + 15E-7 + Vo x 1E-8) ±(0.03 + 2E-7 + Vo x 1E-8) 100 V ±100 mA 5 µA 100 nA ±(0.045 + 15E-6 + Vo x 1E-7) ±(0.04 + 6E-6 + Vo x 1E-7) 2 1. ± (% of reading value + fixed offset in A + proportional offset in A), Vo is the output voltage in V.) 2. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 100 mA), Io is the output current in A. Voltage range, resolution, and accuracy (high speed ADC) Voltage range Force resolution Measure resolution Force accuracy 1 ±(% + mV) Measure accuracy 1 ±(% + mV) Maximum current ±2 V 100 µV 100 µV ±(0.018 + 0.4) ±(0.01 + 0.7) 100 mA ±5 V 250 μV 250 μV ±(0.018 + 0.75) ±(0.01 + 2) 100 mA ±20 V 1 mV 1 mV ±(0.018 + 3) ±(0.01 + 4) 100 mA ±100 V 5 mV 5 mV ±(0.018 + 15) ±(0.02 + 20) 2 1. ±(% of reading value + offset value in mV). Averaging is 128 samples in 1 PLC. 2. 100 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), 20 mA (40 V < Vo ≤ 100 V), Vo is the output voltage in V. Current range, resolution, and accuracy (high speed ADC) Current range Force resolution Measure resolution Force accuracy 1 ±(% + A + A) Measure accuracy 1 ±(% + A + A) Maximum voltage ±1 nA 50 fA 50 fA ±(0.1 + 3E-13 + Vo x 1E-15) ±(0.25 + 3E-13 + Vo x 1E-15) 100 V ±10 nA 500 fA 500 fA ±(0.1 + 3E-12 + Vo x 1E-14) ±(0.25 + 2E-12 + Vo x 1E-14) 100 V ±100 nA 5 pA 5 pA ±(0.05 + 3E-11 + Vo x 1E-13) ±(0.1 + 2E-11 + Vo x 1E-13) 100 V ±1 µA 50 pA 50 pA ±(0.05 + 3E-10 + Vo x 1E-12) ±(0.1 + 2E-10 + Vo x 1E-12) 100 V ±10 µA 500 pA 500 pA ±(0.05 + 3E-9 + Vo x 1E-11) ±(0.05 + 2E-9 + Vo x 1E-11) 100 V ±100 µA 5 nA 5 nA ±(0.035 + 15E-9 + Vo x 1E-10) ±(0.05 + 2E-8 + Vo x 1E-10) 100 V ±1 mA 50 nA 50 nA ±(0.04 + 15E-8 + Vo x 1E-9) ±(0.04 + 2E-7 + Vo x 1E-9) 100 V ±10 mA 500 nA 500 nA ±(0.04 + 15E-7 + Vo x 1E-8) ±(0.04 + 2E-6 + Vo x 1E-8) 100 V ±100 mA 5 µA 5 µA ±(0.045 + 15E-6 + Vo x 1E-7) ±(0.1 + 2E-5 + Vo x 1E-7) 1. ±(% of reading value + fixed offset in A + proportional offset in A), Vo is the output voltage in V.) 2. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 100 mA), Io is the output current in A. 07 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

Voltage source mode: Voltage range Power

0.5 V 20 x Ic (W)

5 V 20 x Ic (W)

Where Ic is the current compliance setting. Current source mode: Voltage compliance Power Vc ≤ 20 20 x Io (W) 20 < Vc ≤ 40 40 x Io (W) 40 < Vc ≤ 100 100 x Io (W) Where Vc is the voltage compliance set - ting and Io is output current. MPSMU measurement and output range Current (mA) Voltage (V) -100 100 -100 20 40 -20 -50 -20-40 100 Power consumption 08 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

Voltage range, resolution, and accuracy Voltage range Force resolution Measure resolution Force accuracy 1 ±(% + mV + mV) Measure accuracy 1 (% + mV + mV) Maximum current ±20 V 20 µV 20 µV ±(0.06 + 3 + Io x 5) ±(0.06 + 3 + Io x 5) 20 A ±40 V 40 µV 40 µV ±(0.06 + 3 + Io x 10) ±(0.06 + 3 + Io x 10) 1 A 1. ±(% of reading value + fixed offset in mV + proportional offset in mV). Note: Io is the output current in A. Current range, resolution, and accuracy Current range Force resolution Measure resolution Force accuracy 1 (% + A + A) Measure accuracy 1 (% + A + A) Maximum voltage ±10 µA 10 pA 10 pA ±(0.06 + 2E-9 + Vo x 1E-10) ±(0.06 + 2E-9 + Vo x 1E-10) 40 V ±100 µA 100 pA 100 pA ±(0.06 + 2E-8 + Vo x 1E-9) ±(0.06 + 2E-8 + Vo x 1E-9) 40 V ±1 mA 1 nA 1 nA ±(0.06 + 2E-7 + Vo x 1E-8) ±(0.06 + 2E-7 + Vo x 1E-8) 40 V ±10 mA 10 nA 10 nA ±(0.06 + 2E-6 + Vo x 1E-7) ±(0.06 + 2E-6 + Vo x 1E-7) 40 V ±100 mA 100 nA 100 nA ±(0.06 + 2E-5 + Vo x 1E-6) ±(0.06 + 2E-5 + Vo x 1E-6) 40 V ±1 A 1 µA 1 µA ±(0.4 + 2E-4 + Vo x 1E-5) ±(0.4 + 2E-4 + Vo x 1E-5) 40 V ±20 A 2 20 µA 20 µA ±(0.4 + 2E-3 + Vo x 1E-4) ±(0.4 + 2E-3 + Vo x 1E-4) 20 V 1. ±(% of reading value + fixed offset in A + proportional offset in A), Vo is the output voltage in V. 2. Pulse mode only. The maximum value of the base current during pulsing is ±100 mA. Voltage source mode: Voltage range Power

0.2 V 40 x Ic (W)

2 V 40 x Ic (W)

Where Ic is the current compliance setting. For pulse current, Ic = (duty) x Ipulse Current source mode: Voltage compliance Power Vc ≤ 0.2 40 x Io (W) 0.2 < Vc ≤ 2 40 x Io (W) 2 < Vc ≤ 40 40 x Io (W) Where Vc is the voltage compliance setting and Io is output current. For pulse current, Io = (duty) x Ipulse Current range expansion If two HCSMUs are combined using the Dual HCSMU combination adapter or the Dual HCSMU Kelvin combination adapter, then the maximum current ranges are 40 A (Pulsed) and 2 A (DC). HCSMU measurement and output range Pulse only DC and pulse 20-40 -20 Current (A) Voltage (V) -20 40 Pulse only DC and pulse Power consumption Pulse only DC and pulse HCSMU Module Specifications 09 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

HVSMU Module Specifications Voltage range, resolution, and accuracy Voltage range Force resolution Measure resolution Force accuracy 1 ±(% + mV) Measure accuracy 1 ±(% + mV) Maximum current ±200 V 200 µV 200 µV ±(0.03 + 40) ±(0.03 + 40) 8 mA ±500 V 500 µV 500 µV ±(0.03 + 100) ±(0.03 + 100) 8 mA ±1500 V 1.5 mV 1.5 mV ±(0.03 + 300) ±(0.03 + 300) 8 mA ±3000 V 3 mV 3 mV ±(0.03 + 600) ±(0.03 + 600) 4 mA 1. ±(% of reading value + offset voltage in V) Current range, resolution, and accuracy Current range Force resolution Measure resolution Force accuracy 1 ±(% + A + A) Measure accuracy 1 ±(% + A + A) Maximum voltage Minimum set current ±1 nA 10 fA 10 fA ±(0.1 + 6E-13 + Vo x 1E-15) ±(0.1 + 6E-13 + Vo x 1E-15) 3000 V 1pA ±10 nA 100 fA 100 fA ±(0.1 + 25E-13 + Vo x 1E-15) ±(0.1 + 25E-13 + Vo x 1E-15) 3000 V 1pA ±100 nA 100 fA 100 fA ±(0.05 + 25E-12 + Vo x 1E- 13) 1E-13)

3000 V 100 pA

±1 µ A 1 pA 1 pA ±(0.05 + 1E-10 + Vo x 1E-13) ±(0.05 + 1E-10 + Vo x 1E-13) 3000 V 100 pA ±10 µ A 10 pA 10 pA ±(0.04 + 2E-9 + Vo x 1E-11) ±(0.04 + 2E-9 + Vo x 1E-11) 3000 V 10 nA ±100 µ A 100 pA 100 pA ±(0.03 + 3E-9 + Vo x 1E-11) ±(0.03 + 3E-9 + Vo x 1E-11) 3000 V 10 nA ±1 mA 1 nA 1 nA ±(0.03 + 6E-8 + Vo x 1E-10) ±(0.03 + 6E-8 + Vo x 1E-10) 3000 V 100 nA ±10 mA 10 nA 10 nA ±(0.03 + 2E-7 + Vo x 1E-9) ±(0.03 + 2E-7 + Vo x 1E-9) 1500 V 1 µA 1. ±(%of reading value + fixed offset in A + proportional offset in A), Vo is the output voltage in V.) 2. Output current needs to be set more than current shown in the table. Voltage source mode: Current compliance Power I c ≤ 4 m 3000 x Ic + 12 (W) 1 4 m < Ic ≤ 8 m 1500 x Ic + 12 (W) 1 Where Ic is the current compliance setting. Current source mode: Voltage compliance Power Vc ≤ 1500 1500 x Io (W) + 12 1 1500 < Vc ≤ 3000 3000 x Io (W) + 12 1 Where Vc is the voltage compliance setting and Io is output current. 1. The “+ 12” factor does not apply to the first installed HVSMU; it only applies to the second thru fifth installed HVSMUs. HVSMU measurement and output range 3000 -3000 Current (mA) Voltage (V) -1500 1500 Power consumption HVSMU has 3 output range settings, which are “0 to +3 kV”, “-1500 V to +1500 V”, and “0 to -3 kV”. If more than one HVSMU is installed in the B1505A, all of the HVS - MUs must use the same output range setting. 10 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

MCSMU Module Specifications Voltage range, resolution, and accuracy Voltage range Force resolution Measure resolution Force accuracy 1 ±(% + mV) Measure accuracy 1 (% + mV) Maximum current ±20 V 20 µV 20 µV ±(0.06 + 3) ±(0.06 + 3) 1 A ±40 V2 40 µV 40 µV ±(0.06 + 3) ±(0.06 + 3) 1 A 1. ±(% of reading value + fixed offset in mV). 2. Maximum output voltage is 30 V. Current range, resolution, and accuracy Current range Force resolution Measure resolution Force accuracy 1 (% + A + A) Measure accuracy 1 (% + A + A) Maximum voltage ±10 µA 10 pA 10 pA ±(0.06 + 2E-9 + Vo x 1E-10) ±(0.06 + 2E-9 + Vo x 1E-10) 30 V ±100 µA 100 pA 100 pA ±(0.06 + 2E-8 + Vo x 1E-9) ±(0.06 + 2E-8 + Vo x 1E-9) 30 V ±1 mA 1 nA 1 nA ±(0.06 + 2E-7 + Vo x 1E-8) ±(0.06 + 2E-7 + Vo x 1E-8) 30 V ±10 mA 10 nA 10 nA ±(0.06 + 2E-6 + Vo x 1E-7) ±(0.06 + 2E-6 + Vo x 1E-7) 30 V ±100 mA 100 nA 100 nA ±(0.06 + 2E-5 + Vo x 1E-6) ±(0.06 + 2E-5 + Vo x 1E-6) 30 V ±1 A2 1 µA 1 µA ±(0.4 + 2E-4 + Vo x 1E-5) ±(0.4 + 2E-4 + Vo x 1E-5) 30 V 1. ±(% of reading value + fixed offset in A + proportional offset in A), Vo is the output voltage in V. 2. Pulse mode only. The maximum value of the base current during pulsing is ±50 mA. Voltage source mode: Voltage range Power Where Ic is the current compliance setting. Current source mode: Voltage compliance Power Vc ≤ 0.2 40 x Io (W) 0.2 < Vc ≤ 2 40 x Io (W) 2 < Vc ≤ 40 40 x Io (W) Where Vc is the voltage compliance setting and Io is output current. Pulse only DC and pulse 30-30 0.1 -0.1 Current (A) Voltage (V) Pulse only DC and pulse MCSMU measurement and output rangePower consumption 11 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

For HPSMU and MPSMU: VFIM, IFVM For HCSMU, MCSMU and HVSMU: VFIM, VFVM, IFVM, IFIM Output terminal/connection: For HPSMU and MPSMU: Dual triaxial connector, Kelvin (remote sensing) For HCSMU: Triaxial connector (for sense) and coaxial connector (for force) Kelvin (remote sensing) For MCSMU: Dual triaxial connector, Kelvin (remote sensing) For HVSMU: High voltage triaxial connector, non- Kelvin Voltage/current compliance (limiting) The SMU can limit output voltage or current to prevent damaging the device under test. Voltage:

0 V to ±200 V (HPSMU)

0 V to ±100 V (MPSMU)

0 V to ±40 V (HCSMU)

0 V to ±30 V (MCSMU)

0 V to ±3000 V (HVSMU)

Current: ±1 pA to ±1 A (HPSMU) ±1 pA to ±100 mA (MPSMU) ±10 nA to ±20 A (HCSMU) ±10 nA to ±1 A (MCSMU) ±1 pA to ±8 mA (HVSMU) Compliance accuracy: Same as the current or voltage set accuracy. Power compliance For HPSMU: Power: 0.001 W to 20 W Resolution: 0.001 W For MPSMU: Power: 0.001 W to 2 W Resolution: 0.001 W For HCSMU: Power: 0.001 W to 40 W (DC)

0.001 W to 400 W (Pulse)

Resolution: 0.001 W For MCSMU: Power: 0.001 W to 3 W (DC)

0.001 W to 30 W (Pulse)

Resolution: 0.001 W” For HVSMU: No power compliance SMU pulse measurement Pulse width, period, and delay: For HPSMU and MPSMU: Pulse width: 500 µs to 2 s Pulse width resolution: 100 µs Pulse period: 5 ms to 5 s Period ≥ delay + width + 2 ms (when delay + width ≤ 100 ms) Period ≥ delay + width + 10 ms (when delay + width > 100 ms) Pulse period resolution: 100 µs Pulse delay: 0 s For HCSMU: Pulse width: 50 µs to 1 ms (20 A range) 50 µs to 2 s (10 µA to 1 A range) Pulse width resolution: 2 µs Pulse period: 5 ms to 5 s Pulse period resolution: 100 µs Pulse duty: For 20 A range: ≤ 1% For 10 µA to 1 A range Period ≥ delay + width + 2 ms (when delay + width ≤ 100 ms) Period ≥ delay + width + 10 ms (when delay + width > 100 ms) Pulse delay: 0 to (Period–width) For MCSMU: Pulse width: 10 μs to 100 ms (1 A range) 10 μs to 2 s (10 μA to 100 mA range) Pulse width resolution: 2 μs Pulse period: 5 ms to 5 s Pulse period resolution: 100 μs Pulse duty: For 1 A range: ≤ 5% For 10 μA to 100 mA range Period ≥ delay + width + 2 ms (when delay + width ≤ 100 ms) Period ≥ delay + width + 10 ms (when delay + width > 100 ms) Pulse delay: 0 to (Period–width) For HVSMU: Pulse width: 500 µs to 2 s Pulse width resolution: 2 µs Pulse period: 5 ms to 5 s Period ≥ delay + width + 2 ms (when delay + width ≤ 100 ms) Period ≥ delay + width + 10 ms (when delay + width > 100 ms) Pulse period resolution: 100 µs Pulse delay: 0 to (Period – width) Pulse output limitation: When the pulse voltage is more than

1500 V, the peak and base of pulse

should be same polarities. Pulse measurement delay: 2 µs to (Period – pulse measurement time – 2 m) s, 2 µs resolution Supplemental Characteristics Current compliance setting ac- curacy (for opposite polarity): For HPSMU and MPSMU: For 1 pA to 10 nA ranges: V/I setting accuracy ±12% of range For 100 nA to 1 A ranges: V/I setting accuracy ±2.5% of range For HCSMU and MCSMU: For 10 µA to 1 A ranges: V/I setting accuracy ±2.5% of range For 20 A range (HCSMU): V/I setting accuracy ±0.6% of range For HVSMU: For 1 nA to 10 nA ranges: V/I setting accuracy ±12% of range For 100 nA to 10 mA ranges: V/I setting accuracy ±2.5% of range 12 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

For MCSMU: Sense: 10 Ω Force : 1 Ω (with Low Force) Maximum allowable inductance: For HCSMU and MCSMU: Force 3 µH (with Low Force (shield)) Maximum load capacitance: For HPSMU and MPSMU: 1 pA to 10 nA ranges: 1000 pF 100 nA to 10 mA ranges: 10 nF 100 mA and 1 A ranges: 100 µF For HCSMU: 10 µA to 10 mA ranges: 12 nF 100 mA to 20 A ranges: 100 µF For MCSMU: 10 µA to 10 mA range : 12 nF 100 mA to 1 A range : 100 µF For HVSMU: 1 nA to 1 µA ranges: 1000 pF 10 µA to 10 mA ranges: 10 nF Maximum guard capacitance: 900 pF (HPSMU and MPSMU) 1500 pF (HVSMU) Maximum shield capacitance: 5000 pF (HPSMU, MPSMU and HVSMU) Noise characteristics: For HPSMU, MPSMU and HVS- MU (Filter ON for HPSMU and MPSMU.) Voltage source: 0.01% of V range (rms.) Current source: 0.1% of I range (rms.) For HCSMU Voltage/Current source: 100 mV (0 to peak) max For MCSMU Voltage / Current source: 200 mV (0 to peak) max Overshoot: (Filter ON for all SMUs) For HPSMU and MPSMU Voltage source: 0.03% of V range Current source: 1% of I range For HCSMU and MCSMU (filter ON) Voltage/Current source: 10% of range For HVSMU Voltage source: 1 V (resistive load) Current source: 1% of I range Range switching transient noise: For HPSMU and MPSMU (filter ON): Voltage ranging: 250 mV Current ranging: 70 mV For HCSMU and MCSMU: 10 µA to 1 A ranges: Voltage ranging: 250 mV Current ranging: 70 mV

20 A ranges:

Voltage ranging: 5 V max For HVSMU: Voltage ranging: 300 mV Current ranging: 300 mV Maximum guard offset voltage: ±1 mV (HPSMU) ±3 mV (MPSMU) ±5 mV (HVSMU) Maximum slew rate:

0.2 V/µs (HPSMU and MPSMU)

1 V/µs (HCSMU and MCSMU)

0.4 V/µs (HVSMU)

For HVSMU: Output settling time: 500 µs To reach 0.01% of settling value. Conditions:

100 V step, 8 mA compliance,

SMU pulse setting accuracy (fixed measurement range): For HPSMU and MPSMU: Width: ±0.5% ± 50 µs Period: ±0.5% ± 100 µs For HCSMU and MCSMU: Width: ±0.1% ± 2 µs Period: ±0.1% ± 100 µs For HVSMU: Width: ±0.1% ± 2 µs Period: ±0.5% ± 100 µs Minimum pulse measurement time: 16 µs (HPSMU and MPSMU) 2 µs (HCSMU and MCSMU) 6 µs (HVSMU) Voltage source output resistance: (Force line, non-Kelvin connection) 0.2 Ω (HPSMU) 0.3 Ω (MPSMU) 3 Ω (HVSMU, at 10 mA range) Voltage measurement input resistance: ≥ 1013 Ω (HPSMU, MPSMU) ≥ 109 Ω (HCSMU, MCSMU, ≤ 1 A), 80 kΩ (HCSMU, 20 A) ≥ 1012 Ω (HVSMU) Current source output resistance: ≥ 1013 Ω (HPSMU, MPSMU) ≥ 109 Ω (HCSMU, MCSMU, ≤ 1 A), 80 kΩ (HCSMU, 20 A) ≥ 1012 Ω (HVSMU, at 10 nA range) Maximum allowable cable resistance: (Kelvin connection) For HPSMU and MPSMU: Sense: 10 Ω Force: 10 Ω (≤ 100 mA), 1.5 Ω (>100 mA) For HCSMU: Sense: 10 Ω Force: 0.6 Ω (with Low Force) 13 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

Measurement parameters: Cp-G, Cp-D, Cp-Q, Cp-Rp, Cs-Rs, Cs-D, Cs-Q, Lp-G, Lp-D, Lp-Q, Lp-Rp, Ls-Rs, Ls-D, Ls-Q, R-X, G-B, Z-θ, Y-θ Ranging: Auto and fixed Measurement terminal: Four-terminal pair configuration, four BNC (female) connectors Cable length: 1.5 m or 3 m, automatic identification of accessories Test signal Frequency: Range: 1 kHz to 5 MHz Resolution: 1 mHz (minimum) Accuracy: ±0.008% Output signal level: Range: 10 mVrms to 250 mVrms Resolution: 1 mVrms Accuracy: ±(10.0% + 1 mVrms) at the measurement port of the MFCMU ±(15.0% + 1 mV rms) at the measurement port of MFCMU cable (1.5 m or 3 m) Output impedance: 50 Ω, typical Signal level monitor: Range: 10 mVrms to 250 mV rms Accuracy: ±(10.0% of reading + 1 mVrms) at the measurement port of the MFCMU ±(15.0% + 1 mVrms) at the measurement port of MFCMU cable (1.5 m or 3 m) DC bias function DC bias: Range: 0 to ±25 V Resolution: 1 mV Accuracy: ±(0.5% + 5.0 mV) at the measurement port or the MFCMU or the MFCMU cable (1.5 m/3 m) Maximum DC bias current (Supplemental characteristics): Impedance measurement range Maximum DC bias current 50 Ω 10 mA 100 Ω 10 mA 300 Ω 10 mA 1 kΩ 1 mA 3 kΩ 1 mA 10 kΩ 100 µA 30 kΩ 100 µA 100 kΩ 10 µA 300 kΩ 10 µA Output impedance: 50 Ω, typical DC bias monitor: Range: 0 to ±25 V Accuracy (open load): ±(0.2% of reading + 10.0 mV) at the measurement port or the MFCMU cable (1.5 m/3 m) Sweep characteristics Available sweep parameters: Oscillator level, DC bias voltage, frequency Sweep type: linear, log Sweep mode: single, double Sweep direction: up, down Number of measurement points: Maximum 1001 points Measurement accuracy The following parameters are used to express the impedance measurement accuracy at the measurement port of the MFCMU or the MFCMU cable (1.5 m or 3 m). Z X: Impedance measurement value (Ω) DX: Measurement value of D E = EP’ + (ZS’/|ZX| + YO’|ZX|) x 100 (%) EP’ = EPL + EPOSC + EP (%) YO’ = YOL + YOSC + YO (S) ZS’ = ZSL + ZOSC + ZS (Ω) |Z| accuracy ±E (%) θ accuracy ±E/100 (rad) C accuracy at DX ≤ 0.1 ±E (%) at DX > 0.1 ±E x √(1+DX 2)(%) D accuracy at DX ≤ 0.1 ±E/100 at DX > 0.1 ±E x (1 + DX)/100 G accuracy at DX ≤ 0.1 ±E/ DX (%) at DX > 0.1 ±E x √(1+DX 2)/DX (%) Note: measurement accuracy is specified under the following conditions: Temperature: 23 ±5 °C Integration time: 1 PLC MFCMU (multi frequency capacitance measurement unit) module specifications 14 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

Oscillator level EPOSC (%) ZOSC (mΩ) 125 mV < VOSC ≤ 250 mV 0.03 x (250/ V OSC – 1) 5 x (250/V OSC – 1) 64 mV < VOSC ≤ 125 mV 0.03 x (125/ VOSC – 1) 5 x (125/VOSC – 1) 32 mV < VOSC ≤ 64 mV 0.03 x (64/ V OSC – 1) 5 x (64/V OSC – 1) VOSC ≤ 32 mV 0.03 x (32/ V OSC – 1) 5 x (64/V OSC – 1) VOSC is oscillator level in mV. Parameters E PL YOL ZSL Cable length EPL (%) YOL (nS) ZSL (mΩ) 1.5 m 0.02 + 3 x f/100 750 x f/100 5.0 3 m 0.02 + 5 x f/100 1500 x f/100 5.0 f is frequency in MHz. If measurement cable is extended, open compensation, short compensation, and load compensation must be performed. Parameters Y OSC YO EP ZS Frequency YOSC (nS) YO (nS) EP (%) ZS (mΩ) 1 kHz ≤ f ≤ 200 kHz 1 x (125/ VOSC – 0.5) 1.5 0.095 5.0 200 kHz < f ≤ 1 MHz 2 x (125/ VOSC – 0.5) 3.0 0.095 5.0 1 MHz < f ≤ 2 MHz 2 x (125/ VOSC – 0.5) 3.0 0.28 5.0 2 MHz < f 20 x (125/ VOSC – 0.5) 30.0 0.28 5.0 f is frequency in Hz. V OSC is oscillator level in mV. Example of calculated C/G measurement accuracy Frequency Measured capacitance C accuracy 1 Measured conductance G accuracy 1 5 MHz 1 pF ± 0.61% ≤ 3 µS ± 192 nS 10 pF ± 0.32% ≤ 31 µS ± 990 nS 100 pF ± 0.29% ≤ 314 µS ± 9 µS 1 nF ± 0.32% ≤ 3 mS ± 99 µS 1 MHz 1 pF ± 0.26% ≤ 628 nS ± 16 nS 10 pF ± 0.11% ≤ 6 µS ± 71 nS 100 pF ± 0.10% ≤ 63 µS ± 624 nS 1 nF ± 0.10% ≤ 628 µS ± 7 µS 100 kHz 10 pF ± 0.18% ≤ 628 nS ± 11 nS 100 pF ± 0.11% ≤ 6 µS ± 66 nS 1 nF ± 0.10% ≤ 63 µS ± 619 nS 10 nF ± 0.10% ≤ 628 µS ± 7 µS 10 kHz 100 pF ± 0.18% ≤ 628 nS ± 11 nS 1 nF ± 0.11% ≤ 6 µS ± 66 nS 10 nF ± 0.10% ≤ 63 µS ± 619 nS 100 nF ± 0.10% ≤ 628 µS ± 7 µS 1 kHz 100 pF ± 0.92% ≤ 63 nS ± 6 nS 1 nF ± 0.18% ≤ 628 nS ± 11 nS 10 nF ± 0.11% ≤ 6 µS ± 66 nS 100 nF ± 0.10% ≤ 63 µS ± 619 nS 1. The capacitance and conductance measurement accuracy is specified under the following conditions: DX ≤ 0.1 Integration time: 1 PLC Test signal level: 30 mVrms At four-terminal pair port of MFCMU 15 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

Device Capacitance Selector (N1272A) specification The N1272A simplifies 2 and 3 terminal device capacitance measurements by automatically creating the correct configu - ration of test resources (including adding any needed DC blocking capacitors and AC blocking resistors) for a specified capacitance measurement. To measure packaged device capacitance the N1273A Capacitance Test Fixture is also neces - sary. However, the N1272A can be used directly with a probe station to measure on-wafer device capacitances. Output terminals for 2-terminal device Collector/drain High High Emitter/source Low High Base/gate Low Low Measurement accuracy for 2-terminal device (Supplemental characteristics) The accuracy of the supplemental characteristics is defined at the output terminals of the TO socket adapter in the N1273A Capacitance Test Fixture when the N1272A is connected to B1505A with the 1.5 m CMU cable and the N1273A system cable. 1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 C measuremet value (F) Frequency (Hz) Measurement accuracy for 2-terminal device Error 3% Error 5% Error 10% Error 20% Condition AC level: 30 mV rms Dx < = 0.1 (Dx: Measurement value of D) DC bias characteristics 100 kΩ at SMU bias output resistance Voltage drop compensation function is available. Bypass capacitance in the capacitance selector Capacitance Withstand voltage Drain to source terminal 1 μF ±3000 V Gate to source terminal 1 μF ±100 V 16 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

Measurement accuracy for 3-terminal device (Supplemental characteristics) Accuracy of this supplemental characteristics is defined at the output terminals at the TO socket adapter in the N1273A Capacitance Test Fixture when N1272A is connected to B1505A with CMU 1.5 m cable and to the N1273A with system cable. Condition AC level: 30 mV rms, Dx < = 0.1 (Dx: Measurement value of D) 1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 1000 100001 000001 000000 )F( eulav temerusaem sgC Frequency (Hz) Cgs measurement accuracy 3-terminal Cgs:Cds:Cgd= 1:1:1 Error 3% Error 5% Error 10% Error 20% 1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 1000 100001 000001 000000 )F( eulav temerusaem sgC frequency (Hz) Cgs measurement accuracy 3-terminal Cgs:Cds:Cgd= 1:0.1:0.01 Error 3% Error 5% Error 10% Error 20% 17 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 1000 100001 000001 000000 )F( eulav temerusaem sdC Frequency (Hz) Cds measurement accuracy 3-terminal Cgs:Cds:Cgd = 1:1:1 Error 3% Error 5% Error 10% Error 20% 1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 1000 100001 000001 000000 )F( eulav temerusaem sdC Frequency (Hz) Cds measurement accuracy 3- terminal Cgs:Cds:Cgd = 1:0.1:0.01 Error 3% Error 5% Error 10% Error 20% 18 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 1000 100001 000001 000000 )F( eulav temerusaem dgC Frequency (Hz) Cgd measurement accuracy 3-terminal Cgs:Cds:Cgd = 1:1:1 Error 3% Error 5% Error 10% Error 20% 1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 1000 100001 000001 000000 )F( eulav temerusaem dgC Frequency (Hz) Cgd measurement accuracy 3-terminal Cgs:Cds:Cgd = 1:0.1:0.01 Error 3% Error 5% Error 10% Error 20% 19 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 1000 10000 100000 1000000 )F( eulav temerusaem ssiC Frequency (Hz) Ciss measurement accuracy 3-terminal Cgs:Cds:Cgd = 1:0.1:0.01 Error 3% Error 5% Error 10% Error 20% 1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 1000 100001 000001 000000 )F( eulav temerusaem ssiC Frequency (Hz) Ciss measurement accuracy 3-terminal Cgs:Cds:Cgd = 1:1:1 Error 3% Error 5% Error 10% Error 20% 20 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 1000 10000 100000 1000000 )F( eulav temerusaem ssoC Frequency (Hz) Coss measurement accuracy 3- terminal Cgs:Cds:Cgd = 1:1:1 Error 3% Error 5% Error 10% Error 20% 1.E-15 1.E-14 1.E-13 1.E-12 1.E-11 1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 1000 10000 100000 1000000 )F( eulav temerusaem ssoC Frequency (Hz) Coss measurement accuracy 3-terminal Cgs:Cds:Cgd = 1:0.1:0.01 Error 3% Error 5% Error 10% Error 20% 21 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

Parameter Name Coss Cds Crss Cgs Ciss /Rg Collector/drain Force Open Open Open Open Open Sense High High High AC Guard Low Emitter/source Force Open Open Open Open Open Sense Low Low Low AC Guard Low Base/gate High Low AC Guard Low High High Low Open Open Open Open Open Output terminals for 3-terminal device Definition of 3-terminal device capacitances Symbol Description Cgs Capacitace between Base/Gate terminal and Emitter/Source terminal Cds Capacitace between Collector/Drain terminal and Emitter/Source terminal Cgd Capacitace between Base/Gate terminal and Collector/Drain terminal Crss Capacitace between Base/Gate terminal and Collector/Drain terminal Ciss Capacitace between Base/Gate terminal and Emitter/Source terminal and capacitance between Base/Gate terminal and Collector/Drain terminal Coss Capacitace between Collector/Drain terminal and Emitter/Source terminal and capacitance between Base/Gate terminal and Collector/Drain terminal DC path leakage (Supplemental characteristics) HVSMU port input / Drain output Offset: 100 pA Leakage: Vo x 1E-13 (Vo: Output voltage) HVSMU port input / Direct output Offset: 100 pA Leakage: Vo x 1E-13 (Vo: Output voltage) MPSMU port input / Gate output Offset: 50 pA Leakage: Vo x 5E-13 (Vo: Output voltage) This information is provided for users not utilizing the N1273A capacitance test fix - ture but who wish to connect the selector outputs to other DUT interfaces such as a wafer prober. Functionality Selector capability The selector allows the user to make con - nections to perform various capacitance and DC measurements such as leakage, breakdown and threshold voltage mea - surement. Output terminals: HV Triaxial: 1 ea. SHV terminals: 4 ea. Gate/Base Drain/Collector Source/Emitter AC/DC guard Interlock terminal: 1 ea Digital I/O port: 1 ea. (D-sub 25 pin) Indicators Input terminals HV Triaxial: 1 ea. (HVSMU) Triaxial: 3 ea. (MPSMU Force/Sense, GNDU) BNC: 4 ea. (MCSMU Hcur, Lcur, Hpot, Lpot) Interlock terminal: 1 ea, Direct IO Selector information 22 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

UHC (Ultra High Current) Expander / Fixture (N1265A) Specifications Specifications Functions: Fixture capability Current expander capability Expands the B1505A’s current capability up to 1500 A. Current expansion is made using the Ultra High Current Unit (UHCU), which is comprised of an external module and either two MCSMUs, two HCSMUs or one MCSMU and one HCSMU. Selector capability This allows the user to switch the output between the UHCU and other modules connected to the selector input ports. The modules supported on the high-voltage input port are the HVSMU and HVMCU; the modules supported on the SMU input port are the HPSMU and MPSMU. Channels: Channel Number Input Output SMU 6 (When using non-Kelvin connections) 3 (When using Kelvin connections) Triaxial

1 Banana

UHV 1 UHV coaxial (High), SHV (Low) UHV coaxial (High), SHV (Low) Bias Tee 1 SHV x 2(High, Low) SHV x 2 (High, Low) Gate control 1 Triaxial x 2 (Force, Sense) Banana x 2 (High, Low) Selector 12 HV Triaxial x 1 Triaxial x 2 (Force, Sense) Banana x 6 (High Force/Sense, Low Force/ Sense, Guard, Chassis) 1. Either the HCSMU or the Dual HCSMU can be connected to the SMU 3 port. 2. The UHCU or any module connected to one of the other two selector input terminals can be connected to the output terminal. Maximum output for selector channel: HVSMU Output : ±3000 V/4 mA, ±1500 V/8 mA HVMCU Output : ±2200 V/1.1 A, ±1500 V/2.5 A HPSMU Output: ±200 V/1 A MPSMU Output: ±100 V/100 mA UHCU Output: ±60 V/1500 A or 500 A Refer to each module specification. Gate control channel: Non-Kelvin connection Maximum Voltage : ±40 V Maximum Current : ±1 A Pulse, 100 mA DC. Output Resistance: 0 Ω/10 Ω/100 Ω/1000 Ω (nominal value) 23 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

UHCU: Output peak power Current range Peak power ± 500 A 7.5 k W ± 1500 A 22.5 kW Voltage range, resolution, and accuracy Voltage range Setting resolution Measure resolution Setting accuracy 1.2,3 ±(% + mV) Measure accuracy 1,3 ±(% + mV) ± 60 V 200 µV 100 µV ±(0.2 + 10) ±(0.2 + 10) 1. ±(% of reading value + fixed offset in mV) 2. Setting accuracy is defined at open load. 3. Accuracy is defined 1 ms pulse width at 500 A range and 500 μs pulse width at 1500 A range. Current range, resolution, and accuracy 1 Current range Setting resolution Measure resolution Setting accuracy 2,3 ±(% + A + A) Measure accuracy 2,3 ±(% + A + A) 1. Maximum voltage compliance in current pulse mode is 63 V. Over 400 A at 500 A range and over 1200 A at 1500 A range are supplemental characteristics. 2. Accuracy is defined with 1 ms pulse width at 500 A range and with 500 μs pulse width at 1500 A range. 3. ±(% of reading value + fixed offset in A + proportional offset in A), Vo is the Output Voltage. UHCU Pulse width and resolution Current range Voltage pulse width Current pulse width Resolution Pulse period 1 500 A 10 μs – 1 ms 10 μs – 1 ms 2 μs Duty ≤ 0.4% 1500 A 10 μs – 500 μs 10 μs – 500 μs 2 μs Duty ≤ 0.1% 1. At continuous maximum current output, the output current may be reduced due to insufficient charging time. 24 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

UHC measurement and output range The UHCU output is only available in pulsed mode. In the equations in the above diagram, ‘I’ stands for current, ‘V’ for Voltage. The maximum current is defined when the output terminals are shorted. Also, the maximum current is limited by the residual resistance of the test leads, by by contact resistance between the internal jumper cable and the DUT and by the DUT impedance. Other functionality Fiilter Filter can be used for UHC output in current mode at 500 A range. Thermocouple input: 2 ea Two K-type thermocouple inputs Temperature range: -50 ° C to 300 °C. Other Terminals/Indicators Digital I/O input: 1 ea. Digital I/O output: 1 ea. Power indicator: 1 ea. High voltage indicator: 1 ea. Selector indicator: 1 ea. Interlock terminal: 1 ea. Earth terminal: 1 ea. Wrist strap terminal: 1 ea. UHCU Output resistance Output range Nominal value

500 A 120 mΩ

1500 A 40 mΩ

Supplemental characteristics Leakage Selector channel HVSMU is applied at High Sense terminal: less than 1 nA HPSMU/MPSMU is applied at High Force terminal: less than 10 nA UHVU channel Less than 1 nA SMU channel Less than 1 nA Thermocouple reading accuracy Temperature range Accuracy T ≥ 100 °C ±5 °C T < 0 °C ±5 °C 60-60 500 -500 1500 -1500 Current (A) Voltage (V) I = (60 -V)/ 0.04 I = (60 -V)/ 0.12 I = (-60 -V)/ 0.04 I = (-60 -V)/ 0.12 Measurement and output range for 1500 A range Measurement and output range for 500 A range 25 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

HVSMU Current Expander (N1266A) Specifications Specifications Functions: Current expander capability Expands HVSMU current up to 2.5 A. Current expansion is made using the High Voltage Medium Current Unit (HVMCU), which is comprised of a module in the N1266A, HVSMU and two MCSMUs. Selector capability This allows the connections between the output terminal to be switched between the HVMCU and the HVSMU. The HVSMU output can be routed either directly or through a 100 kΩ resistor. Output Terminals: High (HV Triaxial) Low (BNC) Maximum output: HVSMU : ±3000 V/4 mA, ±1500 V/8 mA HVMCU : Refer to HVMCU specification Output Peak Power Voltage range Peak power ± 2200 V 600 W ± 1500 V 900 W HVMCU Voltage range, resolution, and accuracy Voltage range Setting resolution Measure resolution Setting accuracy 1, 2, 3 ±(% + V) Measure accuracy 1, 2 ±(% + V) 1. ±(% of reading value + fixed offset in V) 2. Accuracy is defined with 100 μs pulse at 1.1 A range and 2.5 A range, 1 ms pulse at 100 mA range. 3. Setting accuracy is defined at open load. Current range, resolution, and accuracy 1, 2 Current range Measure resolution Measure accuracy 1 ±(% + A + A) ± 110 mA 200 nA ±(0.9 + 2E-4 + Vo x 3E-7) 1. Supplemental characteristics over 1.1 A. 2. Applicable condition: 20 averaging samples 26 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

Other Terminals / Indicators Digital I/O Input: 1 ea. Digital I/O output: 1 ea. Power indicator: 1 ea Selector indicator: 1 ea Output resistance Output range Nominal value 1500 V / 2.5 A 600 Ω 2200 V / 1.1 A 2000 Ω

2200 V / 110 mA 20000 Ω

Supplemental characteristics HVMCU Pulse width and resolution Output range Pulse width Resolution 1500 V / 2.5 A 10 μs – 100 μs 2 μs 2200 V / 1.1 A 10 μs – 100 μs 2 μs

2200 V / 110 mA 10 μs – 1 ms 2 μs

HVMCU Measurement and output range The HVMC’s output is only available in pulsed mode. In the equations in the above diagram, ‘I’ stands for current, ‘V’ for Voltage. The maximum current is defined when the output terminals are shorted. Also, the maximum current is limited by the residual resistance of the test leads, by contact resistance between the internal jumper cable and the DUT and by the DUT impedance. HVMCU Charged Capacitance: 0.22 μF Leakage Selector output HVSMU: less than 80 pA 2200 -2200 1.1 -1.1 2.5 -2.5 Current (A) Voltage (V) 1500 -1500 I = (1500 -V)/ 600 Measurement and output range 27 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

UHV (Ultra High Voltage) Expander (N1268A) Specifications Specifications Voltage range, resolution, and accuracy 1 Voltage range Force resolution Measure resolution Setting accuracy 2, 3 ±(% + V) Measure accuracy 2 ±(% + V) 1. N1268A is controlled and makes measurement with two MCSMUs or a combination of a HCSMU and a MCSMU. 2. ±(% of reading value + fixed offset in V) 3. Setting accuracy is defined at open load. Current range, resolution, and accuracy 1 Current range Measure resolution Measure accuracy 2 ±(% + A + A) ± 100 µA 100 pA ±(0.06 + 2E-8 + 1E-9) ± 100 mA3 100 nA ±(0.06 + 20E-6 + 1E-9) 1. N1268A is controlled and makes measurement with two MCSMUs or a combination of a HCSMU and a MCSMU. 2. ±(% of reading value + fixed offset in A + fixed offset in A) 3. Pulsed mode only (Maximum pulse width is 1 ms). The maximum current is 20 mA. UHV measurement and output range Pulse only DC and pulse 10000 -10000 0.01 -0.01 0.02 -0.02 Current (A) Voltage (V) Pulse only DC and pulse Other Terminals / Indicators Digital I/O Input: 1 ea. Power indicator: 1 ea High Voltage indicator: 1 ea Interlock terminal Input: 1 ea Interlock terminal Output: 1 ea Earth terminal: 1 ea UHVU Output resistance Output range Nominal value High 10000 Ω Low 1000 Ω Supplemental characteristics Other AC characteristics Slew rate 100 V/µs (with 1 m cable) Overshoot ±1% of setting voltage Ripple 3 Vp-p Maximum load capacitance 5 nF Maximum load inductance 5 µH UHV Pulse width and resolution Output range Pulse width Resolution 100 mA 100 µs to 1 ms 2 µs ≤ 10 mA 100 µs to 2 s 2 µs Output Terminals High : UHV coaxial Low : SHV Pulse Period Min: 10 ms Max: 5 s 28 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

Gate charge measurement specifications Qgate(C) QgdQgs Qgs1 Qg Qgs2 Vth Vgs pleteau Vgs Vgs(V) The B1505A can perform gate charge characterization for Nch MOSFETs and IGBTs. Both packaged devices and on-wafer devices are supported. The following table shows the available solutions and their required accessories (which depend on device type and current level). Temperature dependent measurements using a Thermostream or the Thermal plate are not supported. Qg: Gate charge Qgs: Gate-source charge Qgs1: Gate charge at threshold Qgs2: Gate charge from threshold to onset of plateau Qgd: Gate-drain charge Package solution On-wafer solution Hardware configurationHigh voltage module B1513B/C HVSMU Max voltage range 3000 V High current module B1512A HCSMU N1265A-500 N1265A-1500A B1512A HC- SMU N1265A-500A N1265A-1500A Max current range 20 A 500 A 1500 A 20 A 500 A 1500 A Gate control module B1514A MCSMU Ireg control module B1514A MCSMU Fixture/selector N1259A N1265A N1258A N1265A Adapter/selector N1259AU-014 N1265AU-014 N1274A N1275A Measurement parameterQg 1 nC to 100 µC Min resolution 10 pC Vds (vce) @high voltage

0 V to +3000 V

Vds(vce) @ high current Not Support -60 V to 60 V Not Support -60 V to 60 V Voltage /sampling resolu- tion 100 µV / 2 µs 100 µV / 2 µs Id (ic) maximum rated current 20 A 1 350 A1 500 A1,2 20 A1 350 A1 500 A1,2 Current/sampling resolution 2 mA / 2 µs Vgs (vge) -30 V to +30 V Voltage/sampling resolution 40 µV / 2 µs Ig 10 nA to 1 A Current/sampling resolution 10 pA / 2 µs Hardware configuration and measurement/setting parameters 29 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

Package solution On-wafer solution Setting parametersVds (vce) @high voltage 0 V to +3000 V Resolution 3 mV Vds(vce) @ high current -20 to 20 V1 -60 to 60 V -40 to 40 V 1 -60 to 60 V Resolution 20 µV 100 µV 40 µV 100 µV Id max 20 A1 450 A1 1100 A1,2 20 A1 350 A1 500 A1 Gate drive vgs(vge) -30 to +30 V Resolution 40 µV Gate control current ig 1 µA to 1 A Resolution 0.1 µA Current regulator control voltage -30 to +30 V Resolution 40 µV On time 50 - 950 µs 50 - 950 µs 50 - 950 µs 50 - 950 µs Resolution 2 µs Target devices: Nch MOSFETs and IGBTs in TO package, in modules and on-wafer Note that Pch MOSFETs are not supported. 1. The maximum current will be reduced by the series resistance of the current source, residual resistance in the measurement path, and the DUT impedance. 2. The gate charge measurement adapter also has a maximum current limit of 500 A. Hardware configuration and measurement/setting parameters (continued) 30 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

N1267A High Voltage Source Monitor Unit / High Current Source Monitor Unit Fast Switch

Features

The N1267A supports fast switching between the HVSMU and HCSMU to enable the measurement of the Gallium Nitride current collapse effect. The N1267A switch requires one MCSMU in the B1505A mainframe for control. The gate of the DUT (Device Under Test) can be driven by either an MCSMU or an HCSMU. Note #1: The N1267A can only be used with the B1513B or B1503C HVSMU; it cannot be used with the B1513A HVSMU. Note #2: The N1267A does not support the two HCSMU 40 A configuration. Note #3: The N1267A does not support the N1265A test fixture/current expander. Specifications Input terminals: HVSMU port, 1 ea (HV triaxial) HCSMU port, 1 ea (Force: BNC, Sense: Triaxial) MCSMU port, 1 ea (Force/Sense: Triaxial) GND port, 1 ea (Triaxial) Output terminals: High (HV triaxial), Low (BNC) Maximum current: 20 A Maximum voltage: 3000 V Measurement mode GaN Current collapse (Dynamic I-V) measure mode 1. I-V time domain measurement 2. I-V trace measurement Static characteristics mode 1. Id-Vds, Vf-If measurement 2. Id(off)-Vds, Vr-Ir measurement Source and Measure Range 31 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

HVSMU Source setting range for OFF-state Voltage Current +1 V - +3000 V 1 4 mA (V > 1500 V), 8 mA (V ≤ 1500 V) GaN current collapse measure mode To make the GaN current collapse measurement, the HVSMU first applies high voltage stress to the DUT when the DUT is in the OFF- state. Next the HVSMU performs voltage measurement and the HCSMU performs I-V measurement to monitor the ON-state charac - teristics of the DUT. When making the ON-state measurement, the HVSMU is measuring voltage and both the HVSMU and HCSMU are used to measure the total current. 1 Setting value must be the ON state voltage plus 1 V or more. HCSMU source setting range for ON-state Voltage Current

0 V - ±40 V 2

20 A pulse (V ≤ 20V) / 1 A DC 20 mA 3

2 Voltage actually applied to the device under test (DUT) is the setting value minus the voltage

drop of the switch. 3 Sum of HCSMU output current and HVSMU output current flow into DUT. Minimum voltage measurement resolution for OFF-state: 200 µV Minimum current measurement resolution for ON-state: 100 nA Minimum transition time (OFF to ON): 20 µs Duration setting for OFF-state: 10 ms - 655.35 s Sampling rate: 2 µs to 12 µs for current, 6 µs for voltage Minimum ON state duration: 50 µs Static characteristics mode The following information applies to measurement of the DUT ON-state static characteristics. The N1267A ensures that the DUT is in the ON-state during these measurements. The HVSMU applies 0 V with 1 µA compliance and measures Vds or Vf. At the same time, the HCSMU is also performing an I-V measurement. The Id or If is determined by adding together the total current measured by both the HCSMU and the HVSMU. HCSMU source setting for Id-Vds, Vf-If measurement Voltage Current

0 V - ±40 V

20 A pulse (V ≤ 20V) / 1 A DC 20 mA 4

4 Offset error for the Id-Vds, If-Vf measurement is typical 1 µA

Minimum voltage measurement resolution: 200 µV Minimum current measurement resolution: 10 pA 4) The following information applies to measurement of the DUT OFF-state static characteristics. The N1267A ensures that the DUT is in the OFF-state during these measurements. The HCSMU applies 0 V. At the same time, the HVSMU performs I-V measurement and measures Vds or Vr. The Id(Off) or Ir is determined by adding together the total current measured by both the HCSMU and the HVSMU. HVSMU source setting for Id(off)-Vds, Vr-Ir measurement Voltage Current

0 V - +3000 V

4 mA (V > 1500 V), 8 mA (V ≤ 1500 V) 10 µA 5 5 Leak error for the Idss, Ir-Vr measurement is typical 2 nA. Minimum voltage measurement resolution: 200 µV Minimum current measurement resolution: 10 pA 5) 32 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

Input terminals: HPSMU force port1, 1 ea., (Triaxial) HPSMU sense port1, 1 ea., (Triaxial) HCSMU force port, 1 ea. (BNC) HCSMU sense port, 1 ea. (Triaxial) HVSMU port2, 1 ea. (HV triaxial) GNDU port, 1 ea. (Triaxial) Digital I/O port, 1 ea. (D-sub 25 pin) AC power line connector, 1 ea. 1. Either HPSMU or MPSMU can be connected to HPSMU port. 2. Either HVSMU or HVMCU can be connected to HVSMU port. Output terminal: High force (HV triaxial) High sense (HV triaxial) Low force (BNC) Low sense (BNC) External relay control output (D-sub 15 pin) Protection: HPSMU, GNDU, HCSMU Low Force Power indicator: LED turns yellow when AC power is applied and turns green the module selector is ready to use. Status indicator: Green LED lights to indicate the present connection path of module selector; Open, HCSMU, HPSMU, or HVSMU. Maximum voltage/current: For HPSMU port: ±200 V/1 A For HCSMU port: ±40 V/2 A, ±20 V/30 A (Pulse width 1 ms, duty 1%) For HVSMU port: ±3000 V/4 mA, ±1500 V/2.5 A, ±2200 V/1.1 A Supplemental characteristics Leakage current: For HPSMU: 10 pA at 200 V For HCSMU: 100 pA at 10 V (High Force to Low Force, High Sense to Low Sense) For HVSMU: 10 pA at 1500 V (humidity range: 20% to 70% RH) 20 pA at 3000 V (humidity range: 20% to 50% RH) N1259A test fixture Specifications Input terminals: HPSMU port1, 2 ea. Force, sense (Triaxial) HCSMU port, 2 ea. Force (BNC), sense (Triaxial) HVSMU port2, 1 ea. (HV triaxial) GNDU port, 1 ea. (Triaxial) AUX port, 2 ea. (BNC) Interlock port, 1 ea. 1. Either HPSMU or MPSMU can be con- nected to HPSMU port. 2. Either HVSMU or HVMCU can be con- nected to HVSMU port. Protection: HPSMU, GNDU, HCSMU Low Force terminal High voltage indicator: LED turns red when a SMU output volt- age is over 42 V. Maximum voltage/current: For HPSMU port: Force: ±200 V/1 A Sense: ±200 V For HCSMU port: High Force: ±40 V/2 A, ±20 V/40 A (Pulse width 1 ms, duty 1%) Low Force: ±40 V/2 A, ±20 V/40 A (Pulse width 1 ms, duty 1%) High Sense: ±40 V Low Sense: ±40 V For HVSMU port: Force: ±3000 V/4 mA, ±1500 V/2.5 A, ±2200 V/1.1 A Note: The total power consumption of all modules cannot exceed 50 W when using test fixture under the condition that operat- ing temperature is more than 35 °C. Supplemental characteristics Leakage current: For HPSMU (Force, Sense) port: 10 pA at 200 V (Force, Sense) For HCSMU (High Force, High sense) port: 100 pA at 10 V For HVSMU (Force) port: 10 pA at 1500 V (humidity range: 20% to 70% RH) 20 pA at 3000 V (humidity range: 20% to 50% RH) N1259A-010 inline package socket module (3 pin) Specifications Number of terminal: Sockets, 6 ea. (Ø4 mm jack (banana)) DUT interface: Inline package socket (3-pin) Maximum voltage for terminals:

3000 Vdc

Number of terminal: Sockets, 8 ea. (Ø4 mm jack (banana)) Maximum voltage for terminals: 33 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

N1259A-013 Curve Tracer test adapter socket module Specifications Number of terminals: Sockets, 6 ea. (Ø4 mm jack (banana)) Test adapter interface:* Sockets, 6 ea. (Ø4 mm jack (banana)) Maximum voltage at terminals:

3000 V Vdc

Maximum current for terminals: For Collector/Drain Force and Emitter/Source Force

39 A (DC), 500 A (Pulse)

1 A (DC), 20 A (Pulse)

*A test adapter for Tektronix curve tracers (370B/371B) can be connected to this interface. N1259A-014 Gate Charge Socket Adapter Purpose To make gate charge measurements with the N1259A. Required Hardware – N1259A test fixture, 1 ea. – N1259A-300 Module selector, 1 ea. – B1512A HCSMU, 1 ea. – B1513B/C HVSMU, 1 ea. – B1514A MCSMU, 2 ea. Specifications Number of terminals: Sockets, 8 ea. (Ø4 mm jack (banana)) Maximum voltage at terminals: For Gate DUT High: 30 V For Gate DUT Low: 10 V For selector force High: 3000 V For selector force Low: 10 V For selector sense High: 3000 V For selector sense Low: 10 V For SMU control High: 30 V For SMU control Low: 10 V Maximum current for terminals: For Gate DUT High:1 A For Gate DUT Low: 1 A For selector force: 500 A For selector sense: 20 mA For SMU control: 1 A Furnished accessories – Test lead (red), short, 2 ea. – Test lead (black), short, 2 ea. – Test lead (red), long, 4 ea. – Test lead (black), long, 4 ea. N1259A-020 high voltage bias-tee Specifications Input terminals: DC bias input, 1 ea. (Ø4 mm jack (banana)) MFCMU port, 1 ea. Hcur, Hpot, Lcur, Lpot, (BNC) Guard input, 1ea (Ø4 mm banana jack) Output terminal: MFCMU port High (SHV) Low (SHV) External DC bias voltage: ±3000 V Frequency: 10 kHz to 1 MHz (150 Ω at 10 kHz) Series capacitance: 110 nF ±5% Input resistance: 100 kΩ ±1% N1259A-021 1 MΩ resistor box Specifications Input/output terminals: Ø4 mm jack (banana), 1 ea. Resistance: 1 MΩ ±5% Maximum voltage: ±3000 V Power rating: 9 W Supplemental characteristics Leakage current: 10 pA at 100 V N1259A-022 100 kΩ resistor box Specifications Input/output terminals: Ø4 mm jack (banana), 1 ea. Resistance: 100 kΩ ±5% Maximum voltage: ±3000 V Power rating: 6.4 W Supplemental characteristics Leakage current: 10 pA at 100 V N1259A-030 1 kΩ resistor box for gate Specifications Input/output terminals: Ø4 mm jack (banana), 1 ea. Resistance: 1 kΩ ±10% Maximum voltage: ±200 V Maximum power: 1 W Supplemental characteristics Leakage current: 10 pA at 100 V N1259A-035 Universal resistor box Specifications Input/output terminals: Ø4 mm banana jack, 1 ea. Resistance: Installed by a user Maximum voltage for terminals: ±3000 V N1259A-300 module selector for test fixture Specifications Input terminals: HPSMU port1, 1 ea. Force, sense (Triaxial) HCSMU port, 1 ea. Force (BNC), sense (Triaxial) HVSMU port2, 1 ea. (HV triaxial) GNDU port, 1 ea. (Triaxial) Digital I/O port, 1 ea. (D-sub 25 pin) AC power line connector, 1 ea. 1. Either HPSMU or MPSMU can be connected to HPSMU port. 2. Either HVSMU or HVMCU can be connected to HVSMU port. 34 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

Output terminal: High force and guard High sense and guard Low force Low sense (Ø4 mm jack (banana)) Protection: HPSMU, GNDU, HCSMU Low Force Power indicator: LED turns yellow when AC power is applied and turns green the module selector is ready to use. Status indicator: Green LED lights to indicate the present connection path of module selector; Open, HCSMU, HPSMU, or HVSMU. Maximum voltage/current: For HPSMU port: ±200 V/1 A For HCSMU port: ±40 V/2 A, ±20 V/30 A (Pulse width 1 ms, duty 1%) For HVSMU: ±3000 V/4 mA, ±1500 V/2.5 A, ±2200 V/1.1 A Supplemental characteristics Leakage current: For HPSMU: 10 pA at 200 V For HCSMU: 100 pA at 10 V (High Force to Low Force, High Sense to Low Sense) For HVSMU: 10 pA at 1500 V (humidity range: 20% to 70% RH) 30 pA at 3000 V (humidity range: 20% to 50% RH) N1260A high voltage bias- tee Specifications Input terminals: HVSMU port, 1 ea. (HV triaxial) MFCMU port, 1 ea. (4 BNC, Hp, Hc, Lp, Hc) Output terminal: H-AC Guard (SHV connector) L-AC Guard (SHV connector) External DC bias voltage: ±3000 V Frequency: 10 kHz to 1 MHz (150 Ω at 10 kHz) Series capacitance: 110 nF ±5% Input resistance: 100 kΩ ±1% N1261A protection adapt- er N1261A-001 protection adapter for HPSMU (triaxial output) Specifications Input terminals: Force (Triaxial) Sense (Triaxial) Output terminals: Force (Triaxial) Sense (Triaxial) 1. Either the HPSMU or the MPSMU can be connected to HPSMU port. Supplemental characteristics Leakage current: 10 pA at 200 V N1261A-002 protection adapter for GNDU (BNC output) Specifications Input terminals: Force/Sense (Triaxial) Output terminals: Force (BNC) Sense (BNC) N1261A-003 protection adapter for HPSMU (HV triaxial output) Specifications Input terminals1: Force (Triaxial) Sense (Triaxial) Output terminals: Force (HV triaxial) Sense (HV triaxial) 1. Either the HPSMU or the MPSMU can be connected to HPSMU port. Supplemental characteristics Leakage current: 10 pA at 200 V N1261A-004 protection adapter for GNDU (SHV output) Specifications Input terminals: Force/Sense (Triaxial) Output terminals: Force (SHV) Sense (SHV) N1262A Resistor Box N1262A-001 1 MΩ resistor box Specifications Input terminals: HVSMU port, 1 ea. (HV triaxial) Output terminals: SHV connector, 1 ea. Resistance: 1 MΩ ±5% Maximum voltage: ±3000 V Maximum power: 9 W Supplemental characteristics Leakage current: 10 pA at 100 V N1262A-002 100 kΩ resistor box Specifications Input terminals: HVSMU port, 1 ea. (HV triaxial) Output terminals: SHV connector, 1 ea. Resistance: 100 kΩ ±5% Maximum voltage: ±3000 V Maximum power: 6.4 W Supplemental characteristics Leakage current: 10 pA at 100 V 35 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

N1262A-010 1 kΩ resistor box for gate (triaxial output) Specifications Input terminals: Triaxial connector, 1 ea. Output terminals: Triaxial connector, 1 ea. Resistance: 1 kΩ ±10% Maximum voltage: ±200 V Maximum power: 1 W Supplemental characteristics Leakage current: 10 pA at 100 V N1262A-011 1 kΩ resistor box for gate (SHV output) Specifications Input terminals: HV triaxial connector, 1 ea. Output terminals: SHV connector, 1 ea. Resistance: 1 kΩ ±10% Maximum voltage: ±3000 V Maximum power: 1 W Supplemental characteristics Leakage current: 10 pA at 100 V N1262A-020 Universal resistor box, Triaxial Specifications Input terminals: Triaxial connector, 1 ea. Output terminals: Triaxial connector, 1 ea. Resistance: Installed by user Maximum voltage for terminals: ±200 V N1262A-021 Universal resistor box, HV Triaxial to SHV Specifications Input terminals: HVSMU port, 1 ea. (HV triaxial) Output terminals: SHV connector, 1 ea. Resistance: Installed by user Maximum voltage for terminals: ±3000 V N1262A-023 Universal resistor box for Ultra High Voltage Specifications Input terminals: UHV coaxial connector, 1 ea. Output terminals: UHV coaxial connector, 1 ea. Resistance: Installed by user Maximum voltage for terminals: ±10 kV N1262A-036 50 Ohm Termination Adapter Specifications Input terminal (BNC) Output terminal (BNC) Maximum power: 1 W Accessories for N1265A N1254A-524 Ultra High Current Prober System Cable Specifications Input terminals: 8 ea. (Ø4 mm jack (banana)) Selector Output High Force High Sense Low Force Low Sense Guard Gate output High Force Low Force Chassis Output terminals High Force (Ø4 mm jack (banana)) Low Force (Ø4 mm jack (banana)) High Sense (HV triaxial) Low Sense (BNC) Gate (BNC) Maximum voltage / current For High Force ±3000 V/39 A (DC), 500 A (Pulse) For Low Force ±200 V/39 A (DC), 500 A (Pulse) For High Sense ±3000 V/1 A For Low Sense, Gate ±200 V/1 A N1265A-010 Ultra High Current 3-pin Inline Package Socket Module Specifications Number of terminal: Sockets, 6 ea. (Ø4 mm jack (banana)) DUT interface: Inline package socket (3-pin) Maximum voltage for terminals: Maximum current for terminals: For Force 1A (DC), 20 A (Pulse) N1265A-011 Universal Socket Module Specifications Number of terminal: Sockets, 6 ea. (Ø4 mm jack (banana)) Maximum voltage for terminals: Universal blank area : 90 mm (W) x 81 mm (D) N1265A-013 Curve Tracer Test Adapter Socket Module Specifications Number of terminals: Sockets, 6 ea. (Ø4 mm jack (banana)) Test adapter interface:* Sockets, 6 ea. (Ø4 mm jack (banana)) Maximum voltage at terminals: 3000V Vdc Maximum current for terminals: For Collector/Drain Force and Emitter/Source Force *A test adapter for Tektronix curve tracers (370B/371B) can be connected to this interface. 36 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

To make gate charge measurements with the N1265A. Required Hardware – N1265A UHC expander, 1 ea. – B1513B/C HVSMU, 1 ea. – B1514A MCSMU, 2 ea. Specifications Number of terminals: Sockets, 8 ea. (Ø4 mm jack (banana)) Maximum voltage at terminals: For Gate DUT High: 30 V For Gate DUT Low: 10 V For selector force High: 3000 V For selector force Low: 10 V For selector sense High: 3000 V For selector sense Low: 10 V For SMU control High: 30 V For SMU control Low: 10 V Maximum current for terminals: For Gate DUT High:1 A For Gate DUT Low: 1 A For selector force: 500 A For selector sense: 20 mA For SMU control: 1 A Furnished accessories – Ultra high current banana test lead, 2 ea. – Test lead (red), short, 2 ea. – Test lead (black), short, 2 ea. – Test lead (red), long, 2 ea. – Test lead (black), long, 2 ea. N1265A-035 Universal R-Box for N1265A Specifications Input: 4 ea. (Ø4 mm plug (banana)) High (Force, Sense) Low (Force, Sense) Output terminals: 2 ea. (Ø4 mm jack (banana)) High, Low Resistance: Installed by a user Maximum voltage for terminals: ±200 V N1265A-040 10 kV Ultra High Voltage Gate Protection Adapter Specifications Input: 4 ea. (Ø4 mm plug (banana)) High (Force, Sense) Low (Force, Sense) Output terminals: 2 ea. (Ø4 mm jack (banana)) High, Low Maximum voltage: ±200 V Maximum surge voltage: ±10 kV N1265A-041 Thermocouple, Type K, 2 ea Feature N1265A-041 can be connected to Ther - mocouple terminal inside the N1265A and enables B1505A to read out temperature at the top of the thermocouple. Specifications Connector: Type K plug Length: 3000 mm N1265A-045 Container for Pro- tection Adapter and Bias Tee Feature N1265A-045 can accommodate protection adapters and bias tee which are used with N1265A to make the measurement envi- ronment clean and safe Specifications Dimension: 420 mm W x 193 mm H x 565 mm D Weight: 15 kg Maximum superimposed load: 50 kg N1269A Ultra High Voltage Con- nection Adapter Feature To make the connection simple and to protect measurement resources from unexpected surge when connecting UHVU to wafer prober. Specifications Input terminals: Gate MCSMU Force, 1 ea (Triaxial) Gate MCSMU Sense, 1 ea (Triaxial) Chuck MCSMU Force, 1 ea (Triaxial) Chuck MCSMU Sense, 1 ea (Triaxial) UHV Low, 1ea (HV triaxial) Output terminals: 3ea (SHV) Gate, Chuck, Source Maximum voltage: ±200 V Maximum surge voltage: ±10 kV N1271A Thermal test enclosure Operation Condition Temperature: +5 °C to 30 °C Humidity: 20% to 70% RH, Non- condensing Accuracy specifications degrade by a factor of 3x versus measurements made without the thermal enclosure. (Supplemental characteristics) Common furnished accessories: 200 mm high current cable, 2 ea. 300 mm high current cable, 2 ea. 200 mm normal cable, 6 ea. 300 mm normal cable, 4 ea. Banana pin adapter, 14 ea. Mini alligator clip, 10 ea. Large clip, 4 ea. N1271A-001 Thermal plate compatible enclosure for N1259A/N1265A Purpose Supports placement of the inTEST Thermal Plate within the test fixtures (N1259A/ N1265A) to enable temperature depen- dency measurements up to 250 °C. The inTest thermal plate with GP-IB control option is necessary for automated thermal measurement. 37 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

N1265A (3 kV IV) Purpose To enable thermal testing by creating an interface between the N1265A and an inTEST Thermostream. The enclosure supports fully automated IV temperature measurements from -50 °C. to +220 °C. Specifications Accuracy specifications degrade by a factor of 3x versus measurements made without the thermal enclosure. (Supplemental characteristics) Number of channels SMU: 6 (When using non-Kelvin connections), 3 (When using Kelvin connections) Gate: 1 Selector output: 1 N1271A-005 Thermostream compatible enclosure for N1265A (3 kV IV, CV & 10kV) Purpose To enable thermal testing by creating an interface between the N1265A and an inTEST Thermostream. The enclosure sup - ports fully automated IV and CV measure - ments up to 3 kV, and IV measurements up to 10 kV at temperature ranging from -50 °C. to +220 °C. Specifications Accuracy specifications degrade by a factor of 3x versus measurements made without the thermal enclosure. (Supplemental characteristics) Number of channels SMU: 4 (When using non-Kelvin connections), 2 (When using Kelvin connections) Gate: 1 Gate with protection resistor for UHV: 1 Selector output: 1 UHV: 1 Capacitance: 1 N1273A Capacitance Test Fixture Purpose To enable packaged device capacitance testing in conjunction with the N1272A Device Capacitance Selector. Specifications Input terminals: Collector/Drain (SHV) 3000 V 20 mA Base/Gate (SHV) 100 V 100 mA Emitter/Source (SHV) 100 V 120 mA AC/DC Guard (SHV) 3000 V 100 mA Interlock port, 1 ea. Earth terminal High voltage indicator: LED turns red when a SMU output is over 42V. Maximum voltage for SHV port: 3 kV Furnished accessories – System cable between selector and test fixture (SHV x 4, Interlock, Earth), 1 ea. – 3-pin Inline Package Socket Module, 1 ea – 200 mm normal cable, 4 ea. – Banana pin adapter, 4 ea. – Mini alligator clip, 4 ea. – M5 8 mm Torx pan head screw, 2 ea. N1273A-011 Universal Socket Module Specifications Number of terminals: Sockets, 6 ea. (O4 mm jack (banana)) Maximum voltage for terminals: 3 kV Furnished accessories: Test wire for thermal test (2 m) Lag connectors x 14 Screws N1273A-013 Curve Tracer Test Adapter Socket Module Specifications Number of terminals: Sockets, 6 ea. (O4 mm jack (banana)) (Sense terminals of this adapter are open. Only force terminals are connected to output terminals of N1273A.) Maximum voltage for terminals: 3 kV 100 mA *A test adapter for Tektronix curve tracers (370B/371B) can be connected to this interface. N1274A On-Wafer Gate Charge measurement adapter/selector for 20 A/3 kV Purpose To enable gate charge measurements on- wafer using the HCSMU (20 A) and HVSMU (3 kV). Note: The connection changes to switch between IV measurement and gate charge measurement are automatically performed via high voltage/high current switches in the N1258A module selector and relays in the N1274A. Required Hardware The following modules and accessories are required in addition to the N1274A. N1258A Module selector B1512A HCSMU B1513B/B1513C HVSMU B1514A MCSMU x 2 Current control MOSFET/IGBT Specifications Input terminals (Connector) [Maximum voltage/current]: – Current control MCSMU Force (Tri - axial) [±30 V/1 A] – Current control MCSMU Sense (Tri - axial) [±30 V/1 A] – DUT Gate control MCSMU/HCSMU Force (Triaxial) [±30 V/1 A] – DUT Gate control MCSMU/HCSMU Sense (Triaxial) [±30 V/1 A] 38 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

– High Force (HV triaxial) [±3 kV/20 A] – High Sense (HV triaxial) [±3 kV/20 A] – Low Force (BNC) [±40 V/20 A] – Low Sense (BNC) [±40 V/1 A] – Relay control port (D-sub 15 pin) Output terminal (Connector) [Maximum voltage/current]: – High Force (banana) [±30 V/1 A] – High Sense (HV triaxial) [±30 V/1 A] – Low Force (banana) [±30 V/1 A] – Low Sense (banana) [±30 V/1 A] – Gate (BNC) [±40 V/20 A] Supplemental characteristics DC leakage: – 1 nA at 3000 V (for HVSMU) – 1 nA at 100 V (for MPSMU) – 1 nA at 200 V (for HPSMU) – 1 nA at 40 V (for HCSMU) Furnished cables – HCSMU cable 30 cm, 2 ea. – HVSMU cable 35 cm, 1 ea. – HVTraiaxial plug coax cable 35 cm, 1 ea. – Relay control cable 30 cm, 1 ea. N1275A On-Wafer Gate Charge measurement adapter for N1265A Purpose To enable on-wafer gate charge measure - ments with the UHCU (500 A) and HVSMU (3 kV) Note: Unlike the N1274A, switching be- tween IV and Qg requires manual connec - tion changes. Required Hardware The following modules and accessories are required in addition to the N1274A. – N1265A Ultra High Current Expander – N1254A-524 Prober System Cable – B1513B/B1513C HVSMU – B1514A MCSMU x 2 – Current control MOSFET/IGBT Specifications Input terminals (Connector) [Maximum voltage/current]: – Current control MCSMU Force (Tri - axial) [±30 V/1 A] – Current control MCSMU Sense (Tri - axial) [±30 V/1 A] – High Force from N1254A Opt524 (ba - nana) [±60 V/500 A] – Low Sense from N1254A Opt524 (BNC) [±10 V/1 A] – Output terminal (Connector) [Maxi - mum voltage/current]: – High Force to DUT (banana) [±60 V/500 A] – Low Sense to DUT (banana) [±10 V/1 A] – Gate (BNC) [±40 V/20 A] Furnished cables – Ultra high current banana to banana cable (30 cm), 1 ea. – BNC cable (30 cm), 1 ea. Keysight EasyEXPERT group+ Software Keysight EasyEXPERT group+ GUI based characterization software is available either on the B1505A’s embedded Windows 7 platform with 15-inch touch screen or on your PC to accelerate the characterization tasks. It supports efficient and repeat- able device characterization in the entire characterization process from measurement setup and execution to analysis and data management either interactive manual operation or automation across a wafer in conjunction with a semiautomatic wafer prober. EasyEXPERT group+ makes it easy to perform complex device characterization immediately with the hundreds of ready-to-use measurements (application tests) furnished, and allows you the option of storing test condition and measurement data automatically after each measurement in a unique built-in database (workspace), ensuring that valuable information is not lost and that measurements can be repeated at a later date. Finally, EasyEXPERT has built-in analysis capabilities and a graphical programming environment that facilitate the development of complex testing algorithms. Key features – Multiple measurement modes for quick setup and measurement execution (ap- plication test, classic test, tracer test, quick test and oscilloscope view) – Graphical display, automated analysis capabilities and data generation to Excel and image for analysis and reporting – Built-in database (workspace) records test data automatically and simplifies the data management without numer- ous data files – GUI-based self-test, self-calibration and diagnostics menu for hardware mainte- nance – EasyEXPERT group+ remote control function supports the remote measure- ment execution of application tests that are created on GUI interactively, via the LAN interface – Data back capability and various data protection feature for shared usage by multiple users – Characterization environment is avail- able either on mainframe (embedded Windows 7) or on user’s PC as a person- al and portable analyzer environment. EasyEXPERT group+ can be installed on any PC as many as needed without additional charge. Device Type Application Tests Power MOSFET (Si, GaN) Id-Vds, Rds-Id, Id-Vgs, Vth, Cgs, Cds, Cgd, Current collapse, Breakdown, QSCV, etc. IGBT Ic-Vce, Ic-Vge, Vth, Cge, Cce, Cgc, Breakdown, etc. SiC Id-Vds, Rds-Id, Id-Vgs, Vth, Cgs, Cds, Cgd, Breakdown, QSCV, etc. Power BJT Ic-Vce, Vce(sat), Ic-Vcbo, Ic-Vceo, Ie-Vbeo, etc. Power Diode If-Vf, Ir-Vr, Cj-Vr, etc. Capacitor C-V, C-f, C-t, Ieak-V, Breakdown, TDDB, etc. And more And more 39 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

The oscilloscope view (available in tracer test mode) displays measured current or voltage data versus time. The pulsed measurement waveforms appear in a separate window for easy verification of the measurement timings. This function is useful for verifying waveform timings and debugging pulsed measurements. The following modules are supported in this view: HCSMU, MCSMU, HVSMU, UHCU, HVMCU, and UHVU. The oscil- loscope view can display the pulsed waveform timings at any (user specified) sweep step of the sweep output. Sampling interval: 2 μs (HCSMU/MCSMU/UHCU/ HVMCU/UHVU) 6 μs (HVSMU) Sampling points:

2000 Sa (HCSMU/MCSMU/

UHCU/HVMCU/UHVU)

4000 Sa (HVSMU)

Marker function: Read-out for each data channel Resolution: 2 μs Data saving: Numeric: Text/CSV/XMLSS Image: EMF/BMP/JPG/PNG Quick test mode A GUI-based Quick Test mode enables you to perform test sequencing without programming. You can select, copy, rear- range and cut-and-paste any application tests with a few simple mouse clicks. Once you have selected and arranged your tests, simply click on the measurement button to begin running an automated test sequence. Application library EasyEXPERT group+ comes with over 40 application tests conveniently organized by device type, application, and technol - ogy. You can easily edit and customize the furnished application tests to fit your specific needs. Application tests are pro - vided for the following categories; they are subject to change without notice. Measurement modes and functions Operation mode: Application test mode The application test mode provides application oriented point-and-click test setup and execution. An application test can be selected from the library by device type and desired measurement, and then executed after modifying the default input parameters as needed. Classic test mode The classic test mode provides function oriented test setup and execution with the same look, feel, and terminology of the 4155/4156 user interface. In addi- tion, it improves the 4155/4156 user interface by taking full advantage of EasyEXPERT group+’s GUI features. Tracer test mode The tracer test mode offers intuitive and interactive sweep control using a rotary knob similar to a curve tracer. Just like an analog curve tracer, you can sweep in only one direction (useful for R&D device analysis) or in both directions (useful in failure analysis applications). Test set ups created in tracer test mode can be seam- lessly and instantaneously transferred to classic test mode for further detailed measurement and analysis. Each SMU can sweep using VAR1 (pri- mary sweep), VAR2 (secondary sweep), or VAR1’ (synchronous sweep). Measurement modes: The Keysight B1505A supports the following measurement modes: – IV measurement – Spot – Staircase sweep – Pulsed spot – Pulsed sweep – Staircase sweep with pulsed bias – Sampling – Multi-channel sweep – Multi-channel pulsed sweep – List sweep – Linear search1 – Binary search1 – C measurement – Spot C – CV (DC bias) sweep – Pulsed spot C – Pulsed sweep CV – C-t sampling – C-f sweep – CV (AC level) sweep – Quasi-Static CV (QSCV) 1. Supported only by FLEX commands. Sweep measurement Number of steps: 1 to 10001 (SMU), 1 to 1001 (CMU) Sweep mode: Linear or logarithmic (log) Sweep direction: Single or double sweep Hold time: 0 to 655.35 s, 10 ms resolution Recommended GPIB I/F 1. An 82350B card is highly recommended because of stability and speed. 2. USB GPIB interfaces might cause serial poll error intermittently due to the intrinsic communi- cation scheme differences. It is reported that using an even GPIB address sometimes significantly decreases the chance of the error. The NI GPIB-USB-HS is recommended for stability, and the Keysight 82357B is recommended for speed. Interface B1505A Keysight 82350B PCI 82357A USB 82357B USB National Instrument GPIB-USB-HS USB 40 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

Delay time: 0 to 65.535 s, 100 μs resolution 0 to 655.35 s, 100 μs resolution (CV (AC level) sweep, C-f sweep) Step delay time: 0 to 1 s, 100 μs resolution Step output trigger delay time: 0 to (delay time) s, 100 μs resolution Step measurement trigger delay time: 0 to 65.535 s, 100 μs resolution Sampling (time domain) mea- surement Displays the time sampled voltage/current data (by SMU) versus time. Sampling channels: Up to 10 Sampling mode: Linear, logarithmic (log) Sampling points: For linear sampling: 1 to 100,001/(number of channels) For log sampling: 1 to 1+ (number of data for 11 decades) Sampling interval range: 100 μs to 2 ms, 10 μs resolution 2 ms to 65.535 s, 1 ms resolution For < 2 ms, the interval is ≥ 100 μs +20 μs x (num. of channels – 1) Hold time, initial wait time: -90 ms to -100 μs, 100 μs resolution 0 to 655.35 s, 10 ms resolution Measurement time resolution: 100 μs Other measurement characteristics Measurement control Single, repeat, append, and stop SMU setting capabilities Limited auto ranging, voltage/current compliance, power compliance, auto- matic sweep abort functions, self-test, and self-calibration Standby mode SMUs in “Standby” remain programmed to their specified output value even as other units are reset for the next mea- surement. List display Measurement data and calculated user function data are listed in conjunction with sweep step number or time domain sampling step number. Up to 20 data sets can be displayed. Data variable display Up to 20 user-defined parameters can be displayed on the graphics screen. Automatic analysis function On a graphics plot, the markers and lines can be automatically located using the auto analysis setup. Parameters can be automatically determined using automatic analysis, user function, and read out functions. Analysis functions Up to 20 user-defined analysis func- tions can be defined using arithmetic expressions. Measured data, pre-defined variables, and read out functions can be used in the computation. The results can be displayed on the LCD. Read out functions The read out functions are built-in func- tions for reading various values related to the marker, cursor, or line. Arithmetic functions User functions Up to 20 user-defined functions can be defined using arithmetic expressions. Measured data and pre-defined variables can be used in the computation. The results can be displayed on the LCD. Arithmetic operators +, -, *, /, ^, abs (absolute value), at (arc tangent), avg (averaging), cond (conditional evaluation), delta, diff (differential), exp (exponent), integ (integration), lgt (logarithm, base 10), log (logarithm, base e), mavg (moving average), max, min, sqrt, trigonometric function, inverse trigonometric function, and so on. 1. In case of some supplemental characteristics, humidity range is defined as 20% to 50% RH Bias hold function This function allows you to keep a source active between measurements. The source module will apply the specified bias between measurements when run- ning classic tests inside an application test, in quick test mode, or during a repeated measurement. The function ceases as soon as these conditions end or when a measurement that does not use this function is started. Current offset cancel This function subtracts the offset cur- rent from the current measurement raw data, and returns the result as the measurement data. This function is used to compensate the error factor (offset current) caused by the measurement path such as the measurement cables, manipulators, or probe card. Time stamp The B1505A supports a time stamp function utilizing an internal quartz clock. Resolution: 100 μs Data display, analysis and arith- metic functions Data Display X-Y graph plot X-axis and up to eight Y-axes, linear and log scale, real time graph plotting. X-Y graph plot can be printed or stored as image data to clip board or mass storage device. (File type: bmp, gif, png, emf) Scale: Auto scale and zoom Marker: Marker to min/max, interpolation, direct marker, and marker skip Cursor: Direct cursor Line: Two lines, normal mode, grad mode, tangent mode, and regression mode. Overlay graph comparison: Graphical plots can be overlaid. 41 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

Keyboard constants are stored in memory as follows: q: Electron charge, 1.602177E-19 C k: Boltzmann’s constant, 1.380658E-23 ε (e): Dielectric constant of vacuum, 8.854188E-12 Engineering units The following unit symbols are also avail- able on the keyboard: a (10 Data management Workspace (Built-in database) EasyEXPERT group+ supports the built-in database called “workspace”. Workspaces are created on a HDD, and they enable to manage and access all the measurement related data without handling numerous files. Every workspace supports the fol - lowing features: – Access to measurement capabilities and data stored in the workspace. – Save/Import/Export measurement settings and data (application library, measurement settings, my favorite setup, and measurement data) – Recall the setup for measurement reproduction and data for analysis Data auto record/ auto export EasyEXPERT group+ has the ability to au - tomatically store the measurement setup and data within a workspace. It can also export measurement data in real time, in a variety of formats such as Excel (xls). Import/export files File type: Keysight EasyEXPERT format, XML-SS format, CSV format Data Protection EasyEXPERT group+ has various options to protect important data as follows. – Password protection (workspace, test definition and my favorite) – User level access control (engineer mode/operator mode) Workspace back-up and porta- bility EasyEXPERT group+ has the ability to import/export a workspace for back-up and portability. General specification Temperature range Operating: +5 °C to +40 °C Storage: -20 °C to +60 °C Humidity range1 Operating: 20% to 70% RH, non-condensing Storage: 10% to 90% RH, non-condensing Storage: 20% to 80% RH, non-condensing (N1268A) Altitude Operating: 0 m to 2,000 m (6,561 ft) Storage: 0 m to 4,600 m (15,092 ft) 0 m to 2,000 m (6,561 ft) (N1268A) Power requirement ac Voltage: 90 V to 264 V Line Frequency: 47 Hz to 63 Hz Maximum volt-amps (VA) B1505A: 900 VA N1258A: 65 VA N1259A-300: 35 VA N1265A: 400 VA N1266A: 60 VA N1268A: 350 VA N1272A: 70 VA Acoustic Noise Emission Lpa < 65 dB Lwa: 66 dB (Operating mode) Lwa: 73 dB (Worst case mode) About measurement accuracy RF electromagnetic field and SMU measurement accuracy: SMU volt- age and current measurement accuracy can be affected by RF electromagnetic field strengths greater than 3 V/m in the frequency range of 80 MHz to 1 GHz. The extent of this effect depends upon how the instrument is positioned and shielded. Induced RF field noise and SMU measurement accuracy: SMU voltage and current measurement accuracy can be affected by induced RF field noise strengths greater than 3 Vrms in the frequency range of 150 kHz to 80 MHz. The extent of this effect depends upon how the instrument is positioned and shielded. Regulatory compliance EMC: IEC 61326-1 / EN 61326-1 Canada: ICES/NMB-001 AS/NZS CISPR 11 Safety: IEC61010-1 / EN 61010-1 CAN/CSA-C22.2 No. 61010-1 Certification CE, cCSAus, RCM Dimensions B1505A: 420 mm W x 330 mm H x 575 mm D N1258A module selector: 330 mm W x 120 mm H x 410 mm D N1259A test fixture: 420 mm W x 272 mm H x 410 mm D N1260A High voltage bias-tee: 164 mm W x 53 mm H x 125 mm D N1261A-001 HPSMU protection adapter (Triaxial output): 80 mm W x 40 mm H x 110 mm D N1261A-002 GNDU protection adapter (BNC output): 80 mm W x 40 mm H x 110 mm D N1261A-003 HPSMU protection adapter (HV triaxial output): 90 mm W x 40 mm H x 140 mm D N1261A-004 GNDU protection adapter (SHV output): 80 mm W x 40 mm H x 125 mm D 42 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

N1262A resister box: 50 mm W x 40 mm H x 125 mm D N1265A UHC expander / fixture: 420 mm W x 285mm H x 575 mm D N1266A HVSMU current expander: 420 mm W x 75 mm H x 575 mm D N1267A HVSMU / HCSMU fast switch: 202 mm W x 56 mm H x 175 mm D N1268A UHV expander: 420 mm W x 222 mm H x 482 mm D N1269A Ultra High Voltage Connection Adapter: 134 mm W x 56 mm H x 150 mm D N1271A-001 Thermal plate compatible enclosure for N1259A/N1265A 500 mm W 190 mm H 365 mm D N1271A-002 Thermostream compatible enclosure for N1265A (3kV IV) 330 mm W 340 mm H 430 mm D (Outer dimension) 284 mm W 150 mm H 195 mm D (Inner dimension) N1271A-005 Thermostream compatible enclosure for N1265A (3kV IV, CV & 10kV) 330 mm W 340 mm H 430 mm D (Outer dimension) 275 mm W 150 mm H 195 mm D (Inner dimension) N1272A: 420 mm W x 75 mm H x 575 mm D N1273A: 340 mm W x 200 mm H x 345 mm D N1274A: 330 mm W x 90 mm H x 410 mm D N1275A: 116 mm W x 78 mm H x 125 mm D Weight B1505A (empty): 20 kg B1511B: 1.1 kg B1510A: 2.0 kg B1512A: 2.1 kg B1513C: 2.0 kg B1514A: 1.3 kg B1520A: 1.3 kg N1258A: 5.0 kg N1259A: 12.0 kg N1260A: 0.6 kg N1261A: 0.3 kg N1262A: 0.3 kg N1265A: 30 kg N1266A: 10 kg N1267A: 0.8 kg N1268A: 18 kg N1269A: 0.4 kg N1271A-001: 4.5 kg N1271A-002: 10.5 kg N1271A-005: 10.5 kg N1272A: 9.4 kg N1273A: 0.7 kg N1274A: 3.2 kg N1275A: 0.4 kg Furnished accessories Measurement cables and adapter Triaxial cable for HPSMU, MPSMU and MCSMU, 2 ea. HCSMU cable, 1 ea. HCSMU Kelvin adapter, 1 ea. HVSMU cable, 1 ea. Interlock cable, 1 ea. Ground unit cable, 1 ea. Keyboard, 1 ea. Mouse, 1 ea. Stylus pen, 1 ea. Power cable, 1 ea. Product CD-ROM, 1 ea. Software entitlement document for EasyEXPERT group+ SMU number label for the B1505A installed with SMU, 1 sheet N1258A : Digital I/O cable, 1 ea. N1259A-300 : Digital I/O cable, 1 ea. N1265A : Digital I/O cable, 1 ea. N1266A : Digital I/O cable, 1 ea. N1268A : Digital I/O cable, 1 ea., Interlock cable, 1 ea. N1272A : Digital I/O cable 1.5m, 1 ea HVSMU cable 1.5 m, 1 ea. 43 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

B1505A Power Device Analyzer/Curve Tracer mainframe Configure the following modules: High power SMU (HPSMU) Medium power SMU (MPSMU) High current SMU (HCSMU) Medium current SMU (MCSMU) High voltage SMU (HVSMU) Multi frequency CMU (MFCMU) B1505A-015 1.5 m cable B1505A-030 3.0 m cable B1505A-050 50 Hz line frequency B1505A-060 60 Hz line frequency B1505A-A6J ANSI Z540 compliant calibration B1505A-UK6 Commercial calibration certificate with test data B1505A-ABA English documentation B1505A-ABJ Japanese documentation B1500A-1CM Rackmount kit B1505A expanders/fixtures N1259A Test fixture N1259A-010 Inline package socket module (3 pin) N1259A-011 Universal socket module N1259A-012 Blank PTFE board N1259A-013 Curve Tracer test adaptor socket module N1259A-014 Gate Charge socket adapter N1259A-020 High voltage bias-tee N1259A-021 1 MΩ Resistor box N1259A-022 100 kΩ Resistor box N1259A-030 1 kΩ Resistor box for gate N1259A-035 Universal R-Box N1259A-300 Module selector N1265A UHC expander / fixture N1265A-010 500 A Ultra High Current 3-pin Inline Package Socket Module N1265A-011 Universal Socket Module N1265A-013 Curve Tracer Test Adapter Socket Module N1265A-014 Gate Charge socket adapter N1265A-015 1500 A Current Option N1265A-035 Universal R-Box for N1265A N1265A-040 10 kV Ultra High Voltage Gate Protection Adapter N1265A-041 Thermocouple, Type K, 2 ea N1265A-045 Container for Protection Adapter and Bias Tee N1266A High Voltage Source Monitor Unit Current Expander N1267A High Voltage Source Monitor Unit / High Current Source Monitor Unit Fast Switch N1268A Ultra High Voltage Expander N1271A Thermal Test Enclosure N1271A-001 Thermal plate compatible enclosure for N1259A/N1265A N1271A-002 Thermostream compatible enclosure for N1265A (3kV IV) N1271A-005 Thermostream compatible enclosure for N1265A (3kV IV, CV & 10kV) N1272A Device Capacitance Selector N1273A Capacitance Test Fixture N1273A-011 Universal Socket Module N1273A-013 Curve Tracer Test Adapter Socket Module N1274A On-Wafer Gate Charge measurement adapter/selector for 20 A/3 kV N1275A On-Wafer Gate Charge measurement adapter for N1265A B1505A accessories 16444A-001 Keyboard 16444A-002 Mouse 16444A-003 Stylus pen N1253A-100 Digital I/O cable N1253A-200 Digital I/O BNC box N1254A-100 Ground unit Kelvin adapter N1254A-101 Triaxial(m)-BNC(f) N1254A-102 Triaxial(m)-BNC(m) N1254A-103 Triaxial(m)-BNC(f) N1254A-104 Triaxial(f)-BNC(m) N1254A-105 Triaxial(f)-BNC(m) N1254A-106 Triaxial(m)-BNC(f) N1254A-107 Triaxial(m)-BNC(f) N1254A-500 HV Jack Connector (Solder Type) N1254A-501 HV Jack /Jack Adapter N1254A-502 HV plug Connector(Solder Type) N1254A-503 BNC Coax Cable Assy 1.5m(Open End) N1254A-504 HVTriax Jack Coax Cable Assy 1.5m(Open End) N1254A-505 HVTriax Plug Triax Cable Assy 1.5m (Open End) N1254A-506 HVTriax Plug Coax Cable Assy 1.5m(Open End) N1254A-507 HVTriax Plug Coax Cable Assy 1.5m N1254A-508 Test Lead cable Black N1254A-509 Test Lead cable Red N1254A-510 Dolphin clip 2 ea. (red and black) N1254A-511 Cable lag adapter 2 ea. (red and black) N1254A-512 SHV Cable Assy 250 mm N1254A-513 SHV to Banana N1254A-514 BNC-Plug Plug N1254A-515 BNC-Jack-Plug-Jack N1254A-516 BNC-Jack-Jack-Jack N1254A-517 Adapter, Trixial Jack to Triaxial Plug N1254A-518 SHV Cable 1.5 m N1254A-520 10 kV Ultra High Voltage Open End Cable, 1 m. N1254A-521 10 kV Ultra High Voltage Jack to Jack Adapter N1254A-522 1500 A Ultra High Current Banana to Banana Cable, 2 ea. N1254A-523 1500 A Ultra High Current Banana to Open End Cable, 1 m, 2 ea Order Information 44 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

B1505AU Upgrade kit for B1505A B1505AU-001 Conversion kit from B1500A to B1505A B1505AU-010 High power source monitor unit (B1510A) B1505AU-11B Medium power source monitor unit (B1511B) B1505AU-012 High current source monitor unit (B1512A) B1505AU-13C High voltage source monitor unit (B1513C) B1505AU-014 Medium current source monitor unit (B1514A) B1505AU-020 Multi frequency capacitance measurement unit (B1520A) B1505AU-SWS EasyEXPERT group+ Extension support and subscription N1259AU Upgrade kit for N1259A N1265AU Upgrade kit for N1265A Package solution B1505AP Pre-configured Power Device Analyzer/Curve Tracer (B1505A w/ modules/fixture) B1505AP-H20 3 kV / 20 A / Fixture Pack B1505AP-H21 3 kV / 20 A / C-V / Fixture Pack B1505AP-H50 3 kV / 500 A / Fixture Pack B1505AP-H51 3 kV / 500 A / C-V / Fixture Pack B1505AP-H70 3 kV / 1500 A / Fixture Pack B1505AP-H71 3 kV / 1500 A / C-V / Fixture Pack B1505AP-U50 10 kV / 500 A / Fixture Pack B1505AP-U70 10 kV / 1500 A / Fixture Pack B1505A accessories (continued) N1254A-524 Ultra High Current Prober System Cable N1254A-525 SHV Cable Assy 1.5m - SHV Plug To Open-end N1254A-526 Ultra High Current Cable, 2m, No Connectors At Either End N1254A-527 PTFE Standoff, Jack, 4 ea. N1254A-528 PTFE Standoff With Banana Plug, 4 ea. N1254A-556 Test Leads and Connection Kit for Capacitance Test, 30 cm, 4 ea. N1254A-557 Test Leads And Connection Kit For Thermal Test with N1271A N1254A-558 SHV Cable 3m N1258A Module selector N1260A High voltage bias-tee N1261A Protection adapter N1262A Resistor box N1262A-020 Universal R-Box, Triaxial N1262A-021 Universal R-Box, HV Triaxial to SHV N1262A-023 Universal R-Box for Ultra High Voltage N1262A-036 50 Ohm Termination Adapter SMU cables/accessories 16493S-001 HCSMU cable (1.5 m) 16493S-002 HCSMU cable (3 m) 16493S-010 HCSMU Kelvin adapter 16493S-011 HCSMU non-Kelvin adapter 16493S-020 Dual HCSMU Kelvin combination adapter 16493S-021 Dual HCSMU combination adapter 16493T-001 High voltage triaxial cable (1.5 m) 16493T-002 High voltage triaxial cable (3 m) 16493U-001 High current BNC cable (1.5 m) 16493U-002 High current BNC cable (3 m) 16494A-001 Triaxial cable (1.5 m) 16494A-002 Triaxial cable (3 m) 16493K-001 Kelvin triaxial cable (1.5 m) 16493K-002 Kelvin triaxial cable (3 m) 16493V-001 10 kV Ultra High Voltage Cable, 1.5 m 16493V-002 10 kV Ultra High Voltage Cable, 3 m N1269A Ultra High Voltage Connection Adapter CMU accessories N1300A-001 CMU cable (1.5 m) N1300A-002 CMU cable (3 m) Other accessories 16493G-001 Digital I/O cable (1.5 m) 16493G-002 Digital I/O cable (3 m) 16493J-001 Interlock cable (1.5 m) 16493J-002 Interlock cable (3 m) 16493L -001 GNDU cable (1.5 m) 16493L -002 GNDU cable (3 m) Order Information (continued) 45 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

Keysight B1500A Semiconductor Device Analyzer www.keysight.com/find/B1500A Keysight B2900A Series Precision Source/ Measure Unit www.keysight.com/find/B2900A Keysight B1506A Power Device Analyzer for Circuit Design www.keysight.com/find/B1506A myKeysight www.keysight.com/find/mykeysight A personalized view into the information most relevant to you. Three-Year Warranty www.keysight.com/find/ThreeYearWarranty Keysight’s committed to superior product quality and lower total cost of ownership. Keysight is the only test and measurement company with three-year warranty standard on all instruments, worldwide. And, we provide a one-year warranty on many accessories, calibration devices, systems and custom products. Keysight Assurance Plans www.keysight.com/find/AssurancePlans Up to ten years of protection and no budgetary surprises to ensure your instruments are operating to specification, so you can rely on accurate measurements. Keysight Infoline www.keysight.com/find/service Keysight’s insight to best in class information management. Free access to your Keysight equipment company reports and e-library. Keysight Channel Partners www.keysight.com/find/channelpartners Get the best of both worlds: Keysight’s measurement expertise and product breadth, combined with channel partner convenience. www.keysight.com/find/b1505a For more information on Keysight Technologies’ products, applications or services, please contact your local Keysight office. The complete list is available at: www.keysight.com/find/contactus Americas Canada (877) 894 4414 Brazil 55 11 3351 7010 Mexico 001 800 254 2440 United States (800) 829 4444 Asia Pacific Australia 1 800 629 485 China 800 810 0189 Hong Kong 800 938 693 India 1 800 11 2626 Japan 0120 (421) 345 Korea 080 769 0800 Malaysia 1 800 888 848 Singapore 1 800 375 8100 Taiwan 0800 047 866 Other AP Countries (65) 6375 8100 Europe & Middle East Austria 0800 001122 Belgium 0800 58580 Finland 0800 523252 France 0805 980333 Germany 0800 6270999 Ireland 1800 832700 Israel 1 809 343051 Italy 800 599100 Luxembourg +32 800 58580 Netherlands 0800 0233200 Russia 8800 5009286 Spain 800 000154 Sweden 0200 882255 Switzerland 0800 805353 Opt. 1 (DE) Opt. 2 (FR) Opt. 3 (IT) United Kingdom 0800 0260637 For other unlisted countries: www.keysight.com/find/contactus (BP-02-10-16) DEKRA Certified ISO9001 Quality Management System www.keysight.com/go/quality Keysight Technologies, Inc. DEKRA Certified ISO 9001:2015 Quality Management System This information is subject to change without notice. © Keysight Technologies, 2013-2016 Published in USA, March 24, 2016 5990-3853EN www.keysight.com 46 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet

Product Information

B1505A specifications and overview.

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Power Device Analyzer/Curve Tracer

Description

Power Device Analyzer/Curve Tracer

Source title B1505A Datasheet(PDF) - Keysight Technologies

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