4200-SMU

DATASHEET SEARCH SITE | WWW.ALLDATASHEET.COM

Document overview

• Manufacturer or author: Provided By ALLDATASHEET.COM(FREE DATASHEET DOWNLOAD SITE)
• PDF pages: 45

Technical content

See your innovations come to life. The 4200A-SCS is a customizable and fully-integrated parameter analyzer that provides synchronized insight into current-voltage (I-V), capacitance-voltage (C-V), and ultra-fast pulsed I-V characterization. The highest performance parameter analyzer, the 4200A-SCS accelerates semiconductor, materials, and process development. The 4200A-SCS ClariusTM GUI-based Software provides clear, uncompromised measurement and analysis capability. Furnished with embedded measurement expertise and hundreds of ready-to-use application tests, Clarius Software enables you to dig deeper into your research with speed and confidence. The 4200A-SCS Parameter Analyzer is completely customizable and fully upgradable, so you can add the instruments you need now – or later. With the 4200A-SCS Parameter Analyzer, making connections to your bold discoveries has never been easier. Key Performance Specifications I-V Source Measure Unit (SMU)

• ±210 V/100 mA or ±210 V/1 A modules
• 100 fA measure resolution
• 10 aA measure resolution with optional preamp
• 10 mHz – 10 Hz very low frequency capacitance measurements
• 100 µF load capacitance
• 4-quadrant operation
• 2 or 4-wire connections C-V Multi-frequency Capacitance Unit (CVU)
• AC impedance measurements (C-V, C-f, C-t)
• 1 kHz – 10 MHz frequency range
• ±30 V (60 V differential) built-in DC bias, expandable to ±210 V (420 V differential)
• Simple switching between I-V and C-V measurements with the optional CVIV Multi-Switch Pulsed I-V Ultra-fast Pulse Measure Unit (PMU)
• Two independent or synchronized channels of high-speed pulsed I-V source and measure
• 200 MS/s, 5 ns sampling rate
• Transient waveform capture mode
• Arbitrary waveform generator for multi-level pulse waveform with 10 ns programmable resolution High Voltage Pulse Generator Unit (PGU)
• Two channels of high-speed pulsed V source
• Arbitrary waveform generator Segment ARB® mode for multi-level pulse waveform with 10 ns programmable resolution I-V/C-V Multi-Switch Module (CVIV)
• Easily switch between I-V and C-V measurements without re-cabling or lifting prober needles
• Move the C-V measurement to any terminal without re-cabling or lifting prober needles
• ±210 V DC bias capable Remote Preamplifier/Switch Module (RPM)
• Automatically switches between I-V, C-V, and ultra-fast pulsed I-V measurements
• Extends current sensitivity of the 4225-PMU to tens of picoamps
• Reduces cable capacitance effects 4200A-SCS Parameter Analyzer Datasheet WINDOWS

TEK.COM TEK.COM 3 4200A-SCS Parameter Analyzer Project Tree lets you organize tests and control test sequencing without writing code The Ultimate Parameter Analyzer for Materials, Semiconductor Devices and Process Development Perform I-V, C-V and pulsed I-V characterization with speed, clarity and confidence with the powerful Clarius software. Headphone jack to listen to instructional measurement videos USB 3.0 and 2.0 ports for use with keyboards, mouse and flashdrives More than 450 application tests jumpstart your testing Built-in audio speakers Tag and organize test results Built-in ground unit Standard ports include: USB, Ethernet, VGA, serial, DisplayPort, HDMI, audio jacks CVU instrument Add up to six dual-channel PMU instruments Accepts up to nine medium or high power SMUs and optional remote preamplifiers Large 15.6-inch touchscreen (1920×1080) HD display enables easier interactive testing 4200A-SCS can be rack mounted or installed on a bench Power on Solid-state hard drive facilitates fast start-ups and data storage/transfer Context-sensitive embedded videos for measurement and troubleshooting guidance

TEK.COM 4200A-SCS Instruments and Modules Model Description Key Measurements Range Measure Resolution 4200-SMU Medium Power Source-Measure Unit - DC I-V - Very Low Frequency C-V - QSCV ±100 mA, ±210 V 0.2 µV, 100 fA 4201-SMU Medium Power SMU for Capacitance Setups 4210-SMU High Power Source-Measure Unit ±1 A, ±210 V 4211-SMU High Power SMU for Capacitance Setups 4200-PA Remote Preamplifier Module Extends current ranges for all SMUs 0.2 µV, 10 aA 4210-CVU Capacitance-Voltage Unit - AC Impedance - C-V, C-f, C-t 1 kHz – 10 MHz ±30 V built-in DC bias (60 V differential) ±210 V DC bias with SMUs 1 aF, 1 nS, 0.001 degree 4200A-CVIV I-V/C-V Multi-Switch Module DC I-V and C-V with Automatic Switching — — 4225-PMU Ultra-Fast Pulse Measure Unit - Pulsed I-V - SegmentARB ® Multi-level pulsing - Transient Waveform Capture ±40 V (80 Vp-p), ±800 mA

200 MS/s simultaneous

4225-RPM Remote Preamplifier/ Switch Module DC I-V, C-V, Pulsed I-V with Automatic Switching Extends current range of 4225-PMU unit 200 pA 4220-PGU High Voltage Pulse Generator Unit - Pulsed Voltage Source - SegmentARB ® multi-level pulsing ±40 V (80 Vp-p) 2048 unique segments — Ground Unit Built-in, Low Noise Ground Unit — Triaxial connection: 2.6 A Binding post: 9.5 A — Example List of Extracted or Measured Parameters CMOS transistor Id-Vg, Id-Vd, Ig-Vg, Vth, Vtlin, Sub-Vt, Rds-on, breakdown, capacitance, QSCV, Low-frequency CV, self-heating reduction and more BJT Ic-Vc, Vcsat, Gummel plot, capacitance, β F, αF Non-volatile Memory Vth, endurance test, capacitance Nanoscale Resistance, Id-Vg, Id-Vd, Ic-Vc Discrete components Id-Vg, Id-Vd, Ic-Vc, Vfdiode, Vrdiode, capacitance Materials Van der Pauw, 4-point collinear resistivity, Hall Effect Photovoltaics Iforward , Ireverse, HiR, LoR Power device Pulsed Id-Vg, pulsed Id-Vd, breakdown Reliability NBTI/PBTI, charge pumping, hot carrier injection, V-Ramp, J-Ramp, TDDB

TEK.COM 4200A-SCS Parameter Analyzer 1. Clarius Software Take your research to new levels of understanding with the new Clarius Software user interface. The 4200A-SCS includes the Clarius+ software package, which allows peforming nearly any type of I-V, C-V, and pulsed I-V characterization test. The Clarius Software user interface provides touch-and-swipe or point-and-click control for advanced test definition, parameter analysis, graphing, and automation capabilities for modern semiconductor, materials, and process characterization. Key Features

• Ready-to-use, modifiable application tests, projects and devices that reduce test development time
• Industry’s first instrument with built-in measurement videos from world-wide Application engineers, in four languages, to reduce learning curve
• Pin to pad contact check ensures reliable measurements
• Multiple measurement functions
• Data display, analysis and arithmetic functions Reduce Characterization Complexity with Expert Videos Engage quickly with your application and reduce your learning curve by watching built-in videos from Keithley worldwide application engineers. Hours of expert measurement expertise help will guide you when unexpected results occur or questions arise on how to set up your test. All videos are provided in English, and many are translated into other languages including Chinese, Japanese, and Korean. These short expert videos enable quick insight to your bold discoveries. Select from Ready-to-Use Application Tests With over 450 furnished application tests in the Clarius library, select or modify the pre-defined application tests to accelerate your characterization or easily create custom tests from the beginning. With three easy steps, Clarius Software guides even the new user through parameter analysis like an expert. Real-time Results and Parameters Accelerate your time to insight with automated data display, arithmetic functions, analysis and real-time parameter extraction. Never worry about losing your data because all test history is stored. Verify Pulse Measurements without an Oscilloscope Pulse timing preview mode provides an easy-to-read view of your pulse timing parameters that confirms your pulsed I-V test will execute as needed. Use the transient I-V or waveform capture mode to make time-based current or voltage measurements without the need of an external oscilloscope. Typical Applications MOSFET, BJT Transistors Materials Characterization Non-volatile Memory Devices Resistivity & Hall Effect Measurements NBTI/PBTI III-V Devices Failure Analysis Nanoscale Devices Diodes and pn Junctions Solar Cells Sensors MEMS Devices Electrochemistry LED and OLED

TEK.COM Step 1 - Build your Test Plan Search, filter, and select from more than 450 pre-defined application tests, projects, and devices from the Clarius library. Filter test, device, or project libraries for quick selection Learn about each test with more detailed information including:

• Comprehensive test descriptions
• Schematic view of test
• Required equipment
• Short videos and application notes

TEK.COM 4200A-SCS Parameter Analyzer Step 2 – Configure Your Tests Quickly modify the test parameters using the Key Parameters View or All Parameters View. Confirm operation modes at a glance. Key Parameters View provides a visual perspective on each test and device and helps to reduce the learning curve. All Parameters View is ideal for entering test parameters. Parameter extractions and data analysis are displayed automatically. Step 3 – Analyze Results View results either graphically or numerically, filter your test data, and tag data for easy identification.

TEK.COM 2. Source Measure Units (SMU) Precision DC current vs. voltage (I-V) measurements are the cornerstone of device and materials characterization. World-class source measure unit (SMU) instruments are at the core of the 4200A-SCS Parameter Analyzer. A source measure unit can source either voltage or current and can simultaneously measure both voltage and current with high resolution and accuracy. The SMU integrates the voltage source, current source, ammeter and voltmeter in one instrument card for tight synchronization of I-V measurements. A source measure unit has four-quadrant capability, which means it can not only source but also sinks current, as when taking current from a device under test (DUT), such as a charged capacitor or solar cell. I-V sweep measurement. The 4200A-SCS Parameter Analyzer can be configured with up to nine SMUs. Four SMU models are available: two medium power SMUs that have a range up to 210 V and 100 mA and two high power SMUs that have a range up to 210 V and 1 A. The 4201 and 4211 SMUs can source into a fixture with a load capacitance of up to 10 µF and 100 µF respectively depending on the current range. (There is no spcified max fixture capacitance for the 4200 and 4210 SMUs, and they may oscillate when sourcing into fixtures with higher than typical capacitances.) All 4200A-SCS SMUs have shielded triaxial connections with active guarding for low current and high impedance measurements and 4-wire (Kelvin) force and sense connections. Field Installable SMUs Need to replace or add SMUs to your existing 4200A-SCS mainframe? Now available, a first-in-class field installable SMU and SMU/PA. Eliminate the time-consuming requirement of returning your parameter analyzer to a service center just to add or replace SMUs. These distinct SMUs can be installed at your facility and will maintain their specifications over the standard one year calibration cycle. Extend Measurement Resolution to 10 aA Many critical applications demand the ability to measure very low currents – such as determining the gate leakage current of FETs, testing sensitive nano-scale devices, and measuring leakage current of insulators and capacitors. When the SMUs are configured with the optional 4200-PA Remote Preamp, they are capable of exceptionally low current measurements. The 4200-PA provides 10 aA resolution by adding additional current ranges to either SMU model. To the user, the SMU simply appears to have additional measurement resolution available. Sub-fA measurements with optional 4200-PA preamplifier module. The preamplifier is shipped installed on the back of the 4200A-SCS mainframe. This installation allows for standard cabling to a prober, test fixture or switch matrix. The preamplifier can be removed from the back panel and placed in a remote location (such as in a light-tight enclosure or on a prober platen) to eliminate measurement problems due to long cables. Platen mounts and triax panel mount accessories are available.

TEK.COM 4200A-SCS Parameter Analyzer Very-low Frequency C-V Technique with SMUs The 4200A-SCS offers the unique ability to perform very-low frequency capacitance-voltage measurements without an LCR meter or capacitance module. Low frequency C-V measurements are used to characterize the slow trapping and de-trapping phenomenon in some materials. Very low frequency C-V measurements with SMUs and preamps. The 4200A-SCS uses a new narrow-band technique that takes advantage of the low current measurement capability of the integrated SMU instruments to perform C-V measurements at specified low frequencies in the range of 10 mHz to 10 Hz. This approach uses the 4200A-SCS’s SMUs with preamplifiers; no additional hardware or software is required. Local Switching Options To accommodate switching between I-V and other measurement types, the 4200A-SCS offers several options for switching easily between measurement types:

• 4200A-CVIV Multi-Switch Module – up to four channels that effortlessly switch between I-V and C-V measurements. In addition, the C-V measurements can be moved around the device under test without lifting the prober needles or changing the test setup.
• 4225-RPM Remote Preamplifier/Switch Module acts as a multiplexer switch that automatically switches between precision DC SMUs, C-V, and the ultra-fast pulsed I-V instruments. In addition, the RPM extends the low current measurement capability of the 4225- PMU Ultra-fast Pulsed I-V Instrument Module. 3. Capacitance-Voltage Unit (CVU) Capacitance-voltage (C-V) measurements are often used to characterize a MOSFET’s gate oxide thickness, oxide defect density, doping profiles, etc. In this measurement, as the gate voltage varies, the capacitance of the gate to the drain and source changes. Capacitance measurements are typically made using an AC technique. The multi-frequency C-V instrument module measures AC impedance by applying a DC bias voltage and sourcing an AC voltage across the device under test (DUT) and then measuring the resultant AC current and phase angle. AC Measurements from 1 kHz – 10 MHz The 4210-CVU instrument module performs multi- frequency capacitance measurements from femtofarads (f F) to microfarads (μF) at test frequencies from 1 kHz to

10 MHz and while providing a DC bias voltage of up to

±30 V or 60 V differential. Capacitance-Voltage sweeps. With up to 4096 measurement points, the CVU instrument can be used to measure capacitance vs. voltage (C-V), capacitance vs. frequency (C-f) and capacitance vs. time (C-t) to extract many important parameters such as:

• Doping profiles
• TOX
• Carrier lifetime tests
• Junction, pin-to-pin, and interconnect capacitance measurements

TEK.COM The 4200-CVU PWR option is also available to support:

• High power C-V measurements up to 400 V (200 V per device terminal) for testing high power devices, such as MEMS devices, LDMOS devices, and displays.
• DC currents up to 300 mA for measuring capacitance when a transistor is turned on. Ensure Validity of your Results Unlike other C-V modules on the market, the 4210-CVU is designed with unique, patented circuitry to support features and diagnostic tools that ensure the validity of your results.
• Switch the AC ammeter in software. This simple feature ensures that you are measuring the AC signal on the least noisy terminal, which will provide a more useful measurement. Without having to manually change cables, lift the prober needles, or change the test setup, you have easily eliminated potential mistakes. Change AC and DC sources to least noisy terminal with a simple click of the mouse.
• Move the DC bias to the terminal of choice. With just a click in the Clarius Software, you can change the terminal to which the DC bias is applied to ensure proper control of the electric field.
• Real-time C-V meter. The real-time C-V meter displays quick and accurate capacitance measurements with no need to run a pre-programmed test. This is especially useful to ensure you have an open and short circuit before you perform a measurement compensation. Additionally, you can use the real-time C-V meter for troubleshooting your test setup and device under test. Real-time capacitance measurements.
• Confidence Check. This diagnostic tool allows users to check the integrity of open and short connections and the connections to the DUT. When performing an open or short test, an impedance and noise measurement is made on the high and low sides of the test circuit. This is especially useful to confirm that contact has been made with the pads on a wafer or that the switch matrix is connected properly. If the Confidence check diagnostic test fails, additional troubleshooting guidance is given. Local Switching Options Because it can be difficult to switch between C-V and other measurement types, the 4200A-SCS offers several options to switch easily between measurement types:
• 4200A-CVIV Multi-Switch Module – Up to four channels that effortlessly switch between I-V and C-V measurements. In addition, the C-V measurements can be moved around the DUT without lifting the prober needles or changing the test setup.
• 4225-RPM Remote Preamplifier/Switch Module This acts as a multiplexer switch that automatically switches between precision DC SMUs, C-V, and the ultra-fast pulsed I-V instruments. In addition, the RPM extends the low current measurement capability of the 4225-PMU Ultra-fast Pulsed I-V Instrument Module.

TEK.COM 4200A-SCS Parameter Analyzer 4. Ultra-fast Pulse Measure Unit (PMU) Ultra-fast I-V sourcing and measuring have become increasingly important capabilities for many technologies, including compound semiconductors, medium power devices, non-volatile memory, MEMS devices and more. The 4225-PMU instrument card integrates ultra- fast voltage waveform generation and signal observation capabilities into the already-powerful 4200A-SCS test environment to deliver unprecedented I-V testing performance, expanding the system’s materials, device, and process characterization dramatically. It replaces traditional pulse/measure hardware configurations, which typically included an external pulse generator, a multi- channel oscilloscope, specially designed interconnect hardware, and integrated software. Minimize self-heating effects with ultra-fast pulsed I-V. Each module has two independent channels. Each channel can measure both voltage and current simultaneously with parallel 14-bit A/D converters with deep memory, allowing up to one million samples at 5 ns per sample (200 MS/s). Three Operating Modes for Complete Characterization The 4225-PMU can be used to perform three types of ultra-fast I-V tests: pulsed I-V, transient I-V, and pulsed sourcing. Pulsed I-V refers to any test with a pulsed source and a corresponding high speed, timed-based measurement that provides DC-like results. Using pulsed I-V signals to characterize devices rather than DC signals makes it possible to study or reduce the effects of self-heating (Joule heating) or to minimize current drift or degradation in measurements due to trapped charge. Transient I-V or waveform capture is a time-based current and/or voltage measurement that is typically the capture of a pulsed waveform. A transient test is typically a single pulse waveform that is used to study time-varying parameters, such as the drain current degradation versus time due to charge trapping or self-heating. Transient I-V measurements can be made to test a dynamic test circuit or can be used as a diagnostic tool for choosing the appropriate pulse settings in the pulsed I-V mode. Pulsed Sourcing involves outputting user-defined two- level or multi-level pulses using the built-in Segment ARB® function or outputting an arbitrarily defined waveform. When the instrument’s Segment ARB mode is used for multi- level pulsing, individual voltage segments can be as short as 20 ns and waveforms can have up to 2048 unique segments per channel, which provides the flexibility necessary to build waveforms for characterizing flash devices and other non- volatile memory technologies. Pulsed I-V Pulse/Measure with DC-like results Train, Sweep, Step modes General device characterization Transient I-V Time-based I and V measurements Waveform capture Dynamic device testing Pulsed Sourcing Multi-level pulsing Arbitrary waveform generator AC stress testing with measure Measure Window Time Samples Sequence A 1 2 3 4 5 Voltage Time Voltage Sequence A Definition Segment Start V Stop V Duration

1 V1 V2 T1

2 V2 V2 T2

3 V2 V3 T3

4 V3 V3 T4

5 V3 V4 T5

4225-PMU Operating Modes.

TEK.COM 5. Switching Solutions Tie it all together with your choice of high speed, high integrity switching solutions from Keithley. 4200A-CVIV Multi-Switch One of the most difficult problems associated with integrating various measurements into device characterization is that the cabling required for each measurement type is fundamentally different. 4200A-CVIV Multi-Switch. Matching cabling to the measurement type enhances measurement integrity. However, changing cables for each measurement type is so time-consuming many users simply tolerate the sub-optimal results. Moreover, whenever cables are rearranged, users run the risk of reconnecting them improperly, thereby causing errors and demanding extra troubleshooting time. Worse still, these errors may go unnoticed for a long time. One alternative is to use a remote switch capable of handling I-V and C-V signals, such as the Keithley 4200A-CVIV Multi-Switch. The new 4200A-CVIV Multi-Switch automatically switches between I-V and C-V measurements. In addition, C-V measurements can be moved to any output channel without re-cabling. This four-channel switch allows the user to maintain the same impedance during the I-V and C-V tests by keeping the probe needles on the wafer test site. Additionally, the test setup and cables don’t need to be changed to enhance the measurement. The built-in display provides exceptional, clear test information where you need it, near the device under test.

• View real-time test status
• Personalize output naming convention via Clarius software
• Rubber bumpers allow 2-way orientation on probe station
• Ability to rotate text allows user to orient the module as needed
• Turn off display to reduce light near DUT 4225-RPM Remote Preamplifier/Switch Module For some devices, multiple types of electrical measurements are required, such as pulsed I-V, DC I-V, and C-V tests. This usually requires an external switch matrix capable of switching the various types of signals to the device under test. However, the optional 4225- RPM Remote Preamplifier/Switch Module allows for switching automati cally between DC I-V, C-V, and pulsed I-V measurements, greatly simplfying the connections to the device. 4225-RPM Remote Preamplifier/Switch Module. 4200A-CVIV Multi-Switch connection schematic.

TEK.COM 4200A-SCS Parameter Analyzer Users can perform all the electrical measurements on the device without having to disconnect and reconnect cabling for each test, which ultimately saves valuable test time and reduces frustration. The 4225-RPM also serves as a preamp to extend the lower current ranges on the PMU. This is especially important for devices, such as diodes, that have I-V characteristics that extend over several decades of current. The pulsed I-V measurements of the diode through the 4225-RPM Remote Preamplifier/Switch are shown below. Its unique auto-range feature enables automatic range selection while the pulsed I-V sweep is in progress, so the user isn’t forced to select a fixed range, which can reduce measurement resolution. 4225-RPM provides lower current ranges for pulse applications. The optional Multi-measurement Prober Cable Kits (4210- MMPC) connect the 4200A-SCS Parameter Analyzer to a prober manipulator. In addition to eliminating the need for re-cabling, these kits help maximize signal fidelity by eliminating the measurement errors that often result from cabling errors. Switch Matrices A number of switch matrix configurations are available for the 4200A-SCS. The six-slot 707B and single-slot 708B Semiconductor Switch Matrix mainframes slash the time from command to connection, offering significantly faster test sequences and overall system throughput than earlier mainframe designs. 708B and 707B Switch Matrix mainframes. They are specifically designed for the requirements of both semiconductor lab and production test environments, delivering ultra-low current switching performance using standard triaxial connectors and cables. 4200-SMU1 4200A-SCS Chassis Sense Force 4225-RPM 1 Sense SMU1 CVU HI PMU CH1 CA-547-2A RPM Interconnect Cables CA-534-24A Triax to Triax Cables 237-TRX-T Triax Tee Diode enclosed in conductive shield connected to Force LO Force 4225-RPM 2 Sense SMU2 CVU LO PMU CH2 Force 4200-SMU2 Sense Force 4210-CVU HI Pot HI Curr LO Curr LO Pot 4225-PMU Ch. 1 Ch. 2 CA-447A SMA Cables 4200-TRX-2 or 4200-MTRX-2 Triax to Triax Cables Connection diagram when using 4225-RPM Remote Preamplifer/Switch Module.

TEK.COM 6. NBTI/PBTI Package Modeling negative/positive bias temperature instability (NBTI/PBTI) is a challenge when developing deeply scaled silicon CMOS transistor designs. Over time, NBTI effects cause a transistor’s threshold voltage (V T) to shift and its sub-threshold drain current to increase significantly, severely limiting transistor lifetime and circuit performance. These effects must be accurately modeled during device development and monitored during process integration and production. During BTI characterization, the transistor is alternately stressed and characterized. However, the BTI mechanism is susceptible to relaxation effects, which means that the instant the stress is removed, the transistor starts to recover and the degradation fades. Characterizing the degradation prior to relaxation demands the use of ultra-fast I-V techniques. The 4200-BTI-A Ultra-Fast BTI Package is the industry’s most advanced NBTI/PBTI test platform, with everything needed to make sophisticated NBTI and PBTI measurements on leading-edge silicon CMOS technology: a 4225-PMU Ultra-Fast I-V Module, two 4225-RPM Remote Preamplifier/Switches, Automated Characterization Suite (ACS) software, an Ultra-Fast BTI Test Project Module, and cabling. The test software module makes it easy to define stress timing, stress conditions, and a wide range of measurement sequences from spot ID, On-The-Fly (OTF), or ID-VG sweeps. It allows measuring recovery effects as well as degradation and offers pre-stress and post-stress measurement options that incorporate the 4200A-SCS’s DC SMUs for precision low-level measurements. The Ultra-Fast BTI test software module supports spot, step sweep, smooth sweep, and sample measurement types. Each type’s timing is defined by the test sample rate and the individual measurement settings. The software module also provides control over the voltage conditions between each element in the test sequence, for maximum flexibility and ease of use, even when defining complex test sequences. Ultra-fast BTI package supports spot, smooth sweep, triangle, and step sweep measurement types. M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M 300ns– 10µs1µs–100µs 10 pts. min. 10 pts. min. 20ns–100ksSpot Spot Triangle TriangleSpot Spot 20ns–100ks 100ns–100µs 20ns–100ks 300ns– 10µs Same as previous measure 200ns– 100µs VG–ID Sweep Initial/Final Meas. VD VGstress Combo Initial/Final Meas.Intermediate 1st Stress 2nd Stress 3rd Stress Intermediate VG–ID Sweep Measurement Types Spot Smooth Sweep Triangle Step Sweep

TEK.COM 4200A-SCS Parameter Analyzer Specifications All specifications are guaranteed unless noted otherwise. All specifications apply to all models unless noted otherwise. 1. Source Measure Units 4200-SMU and 4201-SMU Medium Power 4210-SMU and 4211-SMU High Power Optional 4200-PA Remote Preamplifier Current, maximum 100 mA 1 A Extends low current measure range of all SMUsVoltage, maximum 210 V 210 V Power 2.1 W 21 W General Information Four-quadrant source/sink operation A/D converter on every SMU Full remote sense capability Log and linear measurement sweeps 4200A-SCS mainframe can accept up to nine medium or high power SMU instruments Output Connectors Three mini-triaxial (f) on each SMU for Force, Sense and Sense Lo One custom, 15-pin, D-Sub (f) for connection to 4200-PA Optional Accessory 4200-PA remote preamplifier module Equivalent Instruments Field installable SMUs (4200-SMU-R, 4201-SMU-R, 4210-SMU-R, and 4211-SMU-R) have equivalent specifications to their non-field installable counterparts SMU Current Specifications 4 Current Range 1 Max. Voltage Measure Source Resolution 3 Accuracy ±(% rdg + amps) Resolution 3 Accuracy ±(% rdg + amps) 4210-SMU High Power SMU and 4211-SMU High Power SMU 2 1 A 21 V 1 µA 0.100% + 200 µA 50 µA 0.100% + 350 µA 100 mA 210 V 100 nA 0.045% + 3 µA 5 µA 0.050% + 15 µA 4200-SMU Medium Power SMU and 4201-SMU Medium Power SMU 2 100 mA 21 V 100 nA 0.045% + 3 µA 5 µA 0.050% + 15 µA 10 mA 210 V 10 nA 0.037% + 300 nA 500 nA 0.042% + 1.5 µA 1 mA 210 V 1 nA 0.035% + 30 nA 50 nA 0.040% + 150 nA 100 µA 210 V 100 pA 0.033% + 3 nA 5 nA 0.038% + 15 nA 10 µA 210 V 10 pA 0.050% + 600 pA 500 pA 0.060% + 1.5 nA 1 µA 210 V 1 pA 0.050% + 100 pA 50 pA 0.060% + 200 pA 100 nA 210 V 100 fA 0.050% + 30 pA 5 pA 0.060% + 30 pA 42XX-SMU with optional 4200-PA Preamp 10 nA 210 V 10 fA 0.050% + 1 pA 500 fA 0.060% + 3 pA 1 nA 210 V 1 fA 0.050% + 100 fA 50 fA 0.060% + 300 fA 100 pA 210 V 300 aA 0.100% + 30 fA 15 fA 0.100% + 80 fA 10 pA 210 V 100 aA 0.500% + 15 fA 5 fA 0.500% + 50 fA 1 pA 210 V 10 aA 1.000% + 10 fA 1.5 fA 1.000% + 40 fA Voltage Compliance: Bipolar limits set with a single value between full scale and 10% of selected voltage range. Notes 1. All ranges extend to 105% of full scale. 2. Specifications apply on these ranges with or without a 4200-PA. 3. Display resolution is limited by fundamental noise limits. Measured resolution is 6½ digits on each range. Source resolution is 4½ digits on each range. 4. The measurement and source accuracy are specified at the termina tion of the supplied cables.

• 23°C ±5°C, within 1 year of calibration, RH between 5% and 60%, after 30 minutes of warmup.
• Speed set to NORMAL.
• Guarded Kelvin connection.
• ±1°C and 24 hours from ACAL.

TEK.COM SMU Voltage Specifications 3 Voltage Range 1 Max. Current Measure Source 4200-SMU and 4201-SMU 4210-SMU and 4211-SMU Resolution 2 Accuracy ±(% rdg + volts) Resolution 2 Accuracy ±(% rdg + volts) 200 V 10.5 mA 105 mA 200 µV 0.015% + 3 mV 5 mV 0.02% + 15 mV 20 V 105 mA 1.05 A 20 µV 0.01% + 1 mV 500 µV 0.02% + 1.5 mV 2 V 105 mA 1.05 A 2 µV 0.012% + 150 µV 50 µV 0.02% + 300 µV 200 mV 105 mA 1.05 A 0.2 µV 0.012% + 100 µV 5 µV 0.02% + 150 µV Current Compliance: Bipolar limits set with a single value between full scale and 10% of selected current range. Notes 1. All ranges extend to 105% of full scale. 2. Specifications apply on these ranges with or without a 4200-PA. 3. The measurement and source accuracy are specified at the termina tion of the supplied cables.

• 23°C ±5°C, within 1 year of calibration, RH between 5% and 60%, after 30 minutes of warmup.
• Speed set to NORMAL.
• Guarded Kelvin connection. SMU Load Capacitance Specification Current Range Maximum Load Capacitance between Force HI and Force LO terminals Maximum Guard Capacitance between Force HI and Guard terminals Maximum Shield Capacitance between Guard and Force LO terminals 4211-SMU 1 A 100 µF 5 nF 10 nF 4211-SMU or 4211-SMU 100 mA 100 µF 4201-SMU or 4211-SMU 100 nA to 10 mA 10 µF 4201-SMU or 4211-SMU with 4200-PA preamplifier 1 nA to 10 nA 10 µF 1 pA to 100 pA 1 µF Voltage Monitor Mode High impedence voltmeter mode set at 0 Amps. Accuracy & Resolution Voltage Range Measure Resolution Measure Accuracy ±(%rdg + volts) 200 V 200 µV 0.015% + 3 mV 20 V 20 µV 0.01% + 1 mV 2 V 2 µV 0.012% + 110 µV 200 mV 0.2 µV 0.012% + 80 µV Input Impedance >1013 Ω Input Leakage Current <30 pA Measurement Noise 0.02% of measure range (rms). Differential Voltage Monitor Use two SMUs in VMU mode or use the low sense terminal provided with each SMU.

TEK.COM 4200A-SCS Parameter Analyzer SMU Supplemental Information Supplemental information is not warranted but provides useful infor mation about the 4200-SMU, 4210-SMU Instruments. Compliance Accuracy Voltage compliance equals the voltage source specifications Current compliance equals the current source specifications Overshoot <0.1% typical Voltage Full scale step, resistive load, and 10 mA range Current 1 mA step, RL = 10 kΩ, 20 V range Range Change Transient Voltage Ranging <200 mV Current Ranging <200 mV Temperature and Humidity Effect on Accuracy Accuracy specifications are multiplied by one of the following factors, depending upon the ambient temperature and humidity. and humidity. Temperature % Relative Humidity 5–60 60–80 10°–18°C ×3 ×3 18°–28°C ×1 ×3 28°–40°C ×3 ×5 Remote Sense <10 Ω in series with FORCE terminal not to exceed a 5 V difference between FORCE and SENSE terminals ±30 V maximum between COMMON and SENSE LO. Maximum Load Capacitance 10 nF Maximum Guard Offset Voltage 3 mV from FORCE Guard Output Impedance 100 kΩ Maximum Guard Capacitance 1500 pF Maximum Shield Capacitance 3300 pF 4200-SMU and 4210-SMU Shunt Resistance (Force to Common) >1012 Ω (100 nA–1 µA ranges) 4200-PA Shunt Resistance (Force to Common) >1016 Ω (1 pA and 10 pA ranges), >1013 Ω (100 pA–100 nA ranges) Noise Characteristics (typical) Voltage Source (rms) 0.01% of output range Current Source (rms) 0.1% of output range Voltage Measure (p-p) 0.02% of measurement range Current Measure (p-p) 0.2% of measurement range Maximum Slew Rate 0.2 V/µs DC Floating Voltage Common can be floated ±32 V from chassis ground

TEK.COM 2. SMU Preamplifier Module The low current measurement capabilities of any SMU can be extended by adding an optional 4200-PA preamplifier. The preamplifier provides 10 aA resolution by effectively adding five current ranges to either SMU model. The preamp module is fully integrated with the system; to the user, the SMU simply appears to have additional meas urement resolution available. 4200-PA General information Installation Local The preamplifier is shipped installed on the back panel of the 4200A-SCS for local operation. Remote Users can remove the preamplifier from the back panel and place it in a remote location (such as in a light- tight enclosure or on the prober platen) to eliminate measurement problems due to long cables. Input Connectors One custom, 15 pin, D-Sub (m) Output Connectors Two triaxial (f) Weight 4.8 oz. (136 g) SMU Current Specifications with 4200-PA Preamplifier 4 Current Range 1 Max. Voltage Measure Source Resolution 3 Accuracy ±(% rdg + amps) Resolution 3 Accuracy ±(% rdg + amps) 4210-SMU High Power SMU and 4211-SMU High Power SMU 2 1 A 21 V 1 µA 0.100% + 200 µA 50 µA 0.100% + 350 µA 100 mA 210 V 100 nA 0.045% + 3 µA 5 µA 0.050% + 15 µA 4200-SMU Medium Power SMU and 4201-SMU Medium Power SMU 2 100 mA 21 V 100 nA 0.045% + 3 µA 5 µA 0.050% + 15 µA 10 mA 210 V 10 nA 0.037% + 300 nA 500 nA 0.042% + 1.5 µA 1 mA 210 V 1 nA 0.035% + 30 nA 50 nA 0.040% + 150 nA 100 µA 210 V 100 pA 0.033% + 3 nA 5 nA 0.038% + 15 nA 10 µA 210 V 10 pA 0.050% + 600 pA 500 pA 0.060% + 1.5 nA 1 µA 210 V 1 pA 0.050% + 100 pA 50 pA 0.060% + 200 pA 100 nA 210 V 100 fA 0.050% + 30 pA 5 pA 0.060% + 30 pA 42XX-SMU with optional 4200-PA Preamp 10 nA 210 V 10 fA 0.050% + 1 pA 500 fA 0.060% + 3 pA 1 nA 210 V 1 fA 0.050% + 100 fA 50 fA 0.060% + 300 fA 100 pA 210 V 300 aA 0.100% + 30 fA 15 fA 0.100% + 80 fA 10 pA 210 V 100 aA 0.500% + 15 fA 5 fA 0.500% + 50 fA 1 pA 210 V 10 aA 1.000% + 10 fA 1.5 fA 1.000% + 40 fA Voltage Compliance: Bipolar limits set with a single value between full scale and 10% of selected voltage range. Notes 1. All ranges extend to 105% of full scale. 2. Specifications apply on these ranges with or without a 4200-PA. 3. Display resolution is limited by fundamental noise limits. Measured resolution is 6½ digits on each range. Source resolution is 4½ digits on each range. 4. The measurement and source accuracy are specified at the termina tion of the supplied cables.

• 23°C ±5°C, within 1 year of calibration, RH between 5% and 60%, after 30 minutes of warmup.
• Speed set to NORMAL.
• Guarded Kelvin connection.

TEK.COM 4200A-SCS Parameter Analyzer 3. Multi-Frequency Capacitance-Voltage Unit 4210-CVU General Information Measurement configuration Four-terminal pair, High POT, High CUR, Low POT, Low CUR Output connectors Four SMA (f) Supplied cable 100 Ω, SMA (m) to SMA (m), 1.5 m, 4 each Optional cables 100 Ω, SMA (m) to SMA (m), 3 m Measurement Functions Measurement parameters CP–G, CP–D, CS–RS, CS–D, R–jX, Z-theta Ranging Auto and fixed Integration time Fast, Normal, Quiet, and Custom Test Signal Frequency range 1 kHz to 10 MHz Minimum resolution 1 kHz, 10 kHz, 100 kHz, 1 MHz depending on frequency range Source frequency accuracy ±0.1% Signal output level range 10 mV rms to 100 mV rms Resolution 1 mV rms Accuracy ±(10.0% + 1 mV rms) unloaded (at rear panel) Output impedance 100 Ω, typical DC Bias Function DC voltage bias range ±30 V (60 V differential) DC voltage bias resolution 1.0 mV DC voltage bias accuracy ±(0.5% + 5.0 mV) unloaded Maximum DC current 10 mA Sweep Characteristics Available sweep parameters DC bias voltage, frequency, AC voltage Sweep type Linear, custom Sweep direction Up sweep, down sweep Number of measurement points 4096

TEK.COM Measurement Accuracy 4 Example of C/G Measurement Accuracy Frequency Measured Capacitance C Accuracy 1 G Accuracy 1, 2

10 MHz 3

1 pF ±0.92% ±590 nS 10 pF ±0.32% ±1.8 µS 100 pF ±0.29% ±17 µS 1 nF ±0.35% ±99 µS

1 MHz

1 pF ±1.17% ±64 nS 10 pF ±0.19% ±65 nS 100 pF ±0.10% ±610 nS 1 nF ±0.09% ±4 µS 100 kHz 10 pF ±0.31% ±28 nS 100 pF ±0.18% ±59 nS 1 nF ±0.10% ±450 nS 10 nF ±0.10% ±3 µS 10 kHz 100 pF ±0.31% ±15 nS 1 nF ±0.15% ±66 nS 10 nF ±0.08% ±450 nS 100 nF ±0.10% ±3 µS 1 kHz 1 nF ±0.82% ±40 nS 10 nF ±0.40% ±120 nS 100 nF ±0.10% ±500 nS 1 µF ±0.15% ±10 µS Notes 1. The capacitance and conductance measurement accuracy is specified under the following conditions: D X < 0.1. 2. Conductance accuracy is specified as the maximum conductance measured on the referenced capacitor. 3. These specs are typical, non- warranted, apply at 23°C, and are provided solely as useful information. 4. Integration time: 1 s or 10 s below 10 kHz. Test signal level: 30 mV rms. At the rear panel of the 4210-CVU. All specifications apply at 23°C ±5°C, within one year of calibration, RH between 5% and 60%, after 30 minutes of warmup. CVU Supplemental Cable Specification 3 These specifications are typical, non-warranted, apply at 23°C, and are provided solely as useful information. 4210-CVU Typical C Accuracy with 1.5m Cables (supplemental) Measured Capac itance 1 kHz 10 kHz 100 kHz 1 MHz 10 MHz 1 µF ±0.17% ±0.21% N/A N/A N/A 4210-CVU Typical C Accuracy with 3m Cables (supplemental) Measured Capac itance 1 kHz 10 kHz 100 kHz 1 MHz 10 MHz 1 µF ±0.17% ±0.21% N/A N/A N/A Notes 1. The capacitance and conductance measurement accuracy is specified under the following conditions: D X < 0.1. 2. Conductance accuracy is specified as the maximum conductance measured on the referenced capacitor. 3. These specs are typical, non- warranted, apply at 23°C, and are provided solely as useful information. 4. Integration time: 1 s or 10 s below 10 kHz. Test signal level: 30 mV rms. At the rear panel of the 4210-CVU. All specifications apply at 23°C ±5°C, within one year of calibration, RH between 5% and 60%, after 30 minutes of warmup.

TEK.COM 4200A-SCS Parameter Analyzer 4. CV-IV Multi-Switch Module The C-V/I-V Multi-Switch automatically switches between I-V and C-V measurements. In addition, C-V measurements can be moved to any output channel without recabling. Each channel is user configurable for low current measurement capabilities using the 4200-PA preamplifier or standard current resolution with a SMU Pass Thru 4200A-CVIV-SPT. 4200A-CVIV General Information Input connectors 4200-PA Preamplifier: Custom, 15-pin, D-Sub (m) 4200-CVIV-SPT SMU Pass-thru Module: Two triaxial (f) per module CVU: Four SMA (f) CVIV Ground Unit: Mini-triaxial Output connectors Eight triaxial (f) Dimensions 19.8 cm wide × 14.2 cm high × 11.1 cm deep Weight 1.5 kg (3.3 lb) Power From 4200A-SCS mainframe via USB cable Output channels Configurable up to 4 channels Voltage, max. 210 V Current, max. 1 A SMU Path With 4200-PA With 4200A-CVIV-SPT Offset current <100 fA <1 pA Offset voltage <100 µV <100 µV Shunt resistance >1e15 Ω >1e14 Ω DC output resistance (2-wire) 1.5 Ω 1.5 Ω DC output resistance (4-wire) <100 mΩ <100 mΩ CVU Path AC output impedance 100 Ω, typical (center pin to outer shield) Accuracy, typical Refer to chart below CVU DC Bias Function, using 4210-CVU Instrument DC biasing of AC signals is provided by the 4210-CVU instrument module. Range ±30V at 10 mA max. (60 V differential) Resolution 1 mV Additional errors (for CVU bias) <50 µV DC output resistance (4 wire) <100 mΩ Typical Accuracy of 4210-CVU through the 4200A-CVIV Multi-Switch, 2-wire mode unless otherwise noted 1,3 Measured Capacitance 1 kHz 10 kHz 100 kHz 1 MHz 1 pF Not Specified ±9.0% ±2.2% ±0.7% 10 pF Not Specified ±1.0% ±0.5% ±0.5% 100 pF Not Specified ±0.5% ±0.5% ±0.5% 1 µF ±0.5% ±0.5% Not Specified Not Specified Notes 1. Valid when CVU compensation is applied from a <1 month old compensation acquisition. 2. Specified in 4-wire mode; 4-wire always recommended for low impedance devices 3. The specifications above are typical, non-warranted, apply at 25˚C, and are provided solely as useful information.

TEK.COM CVU DC Bias Function, using SMU Instrument in bias tee DC biasing of AC signals is provided by the 42XX-SMU instrumen t modules. Range ±210V at 1 mA maximum (420 V differential) Typical Accuracy of 4210-CVU through the 4200A-CVIV Multi-Switch, 2-terminal bias tee Measured Capacitance 1 kHz 10 kHz 100 kHz 1 MHz 1 pF Not Specified Not Specified ±2.4% ±0.7% 10 pF Not Specified ±2.9% ±0.5% ±0.5% 100 pF Not Specified ±0.5% ±0.5% ±0.5% 1 µF ±3.5% ±2.0% Not Specified Not Specified Notes

• These specs are typical, non-warranted, apply at 23°C, and are provided solely as useful information.
• Measurements were taken using CVIV 2-wire and Bias Tee Low I modes.
• Measurement speed: Quiet, Test signal level: 30mV rms, AC Measure I Range: Auto
• Valid when CVU CVIV compensation is applied from a <1 month old compensation acquisition. Typical Accuracy of 4210-CVU through the 4200A-CVIV Multi-Switch, 3-terminal bias tee Measured Capacitance 1 kHz 10 kHz 100 kHz 1 MHz Cgd = 100 pF Not Specified ±5.0% ±5.0% Not Specified Measured Capacitance 1 kHz 10 kHz 100 kHz 1 MHz Cgd = 100 pF Not Specified ±2.0% ±2.0% ±5.0% Notes
• These specs are typical, non-warranted, apply at 23°C, and are provided solely as useful information.
• Measurements taken using the following CVIV configuration: - Ch1: BiasT: SMU LO I CV HI - Ch2: BiasT: SMU LO I CV LO - Ch3: Ground Unit - Ch4: Open - 2-Wire Mode
• Measurement speed: Quiet, Test signal level: 30mV rms, AC Measure I Range: Auto
• Valid when CVU CVIV compensation is applied from a <1 month old compensation acquisition.

TEK.COM 4200A-SCS Parameter Analyzer 5. Ultra-fast Pulse Measure Unit The two-channel 4225-PMU provides the combination of ultra-fast voltage waveform generation with fast simultaneous voltage and current measurements. 4225-PMU General Information Output connectors Four SMA (f) and two HDMI Suppled cables SMA (m) to SMA (m), 2 m, 4 each (CA-404B) SMA to SSMC Y-cable, 15 cm (6 in.), 2 each (4200-PRB-C) Optional accessory 4225-RPM single-channel, remote preamplifier/switch module PMU Current Measurement Timing parameters, typical 1 with or without the 4225-RPM Remote Preamplifier/Switch Module

10 V Range 40 V Range

Current measure ranges 10 mA 200 mA 800 mA Recommended minimum pulse width 2 160 ns 70 ns 770 ns Recommended minimum measure window 2 20 ns 20 ns 100 ns Recommended minimum transition time 3 20 ns 20 ns 100 ns Noise 4 15 µA 50 µA 200 µA Settling time 5 100 ns 30 ns 500 ns Notes 1. All typical values measured with an open circuit. 2. Using default measure window of 75% to 90% of pulse top. Recommended minimum pulse width = (Settling Time) / 75%. 3. Recommended rise/fall time to minimize overshoot. 4. RMS noise measured over the Recommended Minimum Measure Window for the given voltage or current range, typical. 5. Time necessary for the signal to settle to the DC accuracy level. (Example: 10 mA settling time on the PMU 10 V range is defined when the 6. 10 mA noise specification is different if RPM is used. See table below Timing parameters, typical 1 with the 4225-RPM Remote Preamplifier/Switch Module 10V Range 40 V Range Current measure ranges 100 nA 1 µA 10 µA 100 µA 1 mA 10 mA 6 100 µA 10 mA Recommended minimum pulse width 2 134 µs 20.4 µs 8.36 µs 1.04 µs 370 ns 160 ns 6.4 µs 770 ns Recommended minimum measure window 2 10 µs 1.64 µs 1 µs 130 ns 40 ns 20 ns 1 µs 100 ns Recommended minimum transition time 3 1 µs 360 ns 360 ns 40 ns 30 ns 20 ns 1 µs 100 ns Noise 4 200 pA 2 nA 5 nA 50 nA 300 nA 1.5 µA 75 nA 5 µA Settling time 5 100 µs 15 µs 6 µs 750 ns 250 ns 100 ns 4 µs 500 ns Notes 1. All typical values measured with an open circuit. 2. Using default measure window of 75% to 90% of pulse top. Recommended minimum pulse width = (Settling Time) / 75%. 3. Recommended rise/fall time to minimize overshoot. 4. RMS noise measured over the Recommended Minimum Measure Window for the given voltage or current range, typical. 5. Time necessary for the signal to settle to the DC accuracy level. (Example: 10 mA settling time on the PMU 10 V range is defined when the 6. 10 mA noise specification is different without RPM. See table above.

TEK.COM PMU Voltage Sourcing and Current Measurement Accuracy Voltage Range Current Range Current Measurement Accuracy Voltage Sourcing Accuracy 4225-PMU 40 V 10 V 200 mA ±(0.25% + 250 µA) ±(0.25% + 10mV)10 mA 1 ±(0.25% + 100 µA) 1 4225-PMU with 4225-RPM 10 V ±(0.25% + 10 mV) 1 mA ±(0.5%+1 µA Notes 1. Accuracy for 10mA range is ±(0.25% + 100uA) if no 4225-RPM attached and is ±(0.5% + 10uA) with 4225-RPM attached. PMU Voltage Measurement Timing parameters, typical 1 4225-PMU 4225-RPM Voltage measure ranges 10 V 40 V 10 V Recommended minimum pulse width 2 70 ns 150 ns 160 ns Recommended minimum measure window 2 20 ns 20 ns 20 ns Recommended minimum transition time 3 20 ns 100 ns 20 ns Noise 4 2 mV 8 mV 1 mV Settling time 5 30 ns 30 ns 100 ns Notes 1. All typical values measured with an open circuit. 2. Using default measure window of 75% to 90% of pulse top. Recommended minimum pulse width = (Settling Time) / 75%. 3. Recommended rise/fall time to minimize overshoot. 4. RMS noise measured over the Recommended Minimum Measure Window for the given voltage or current range, typical. 5. Time necessary for the signal to settle to the DC accuracy level. (Example: 10 mA settling time on the PMU 10 V range is defined when the

TEK.COM 4200A-SCS Parameter Analyzer Voltage and Current, Maximum 1 Resistance 2 10V Range 40V Range Maximum V 2 Maximum I 2 Maximum V 2 Maximum I 2 1 Ω 0.196 V 196 mA 0.784 V 784 mA 5 Ω 0.909 V 182 mA 3.64 V 727 mA 10 Ω 1.67 V 167 mA 6.67 V 667 mA 25 Ω 3.33 V 133 mA 13.3 V 533 mA 50 Ω 5.00 V 100 mA 20.0 V 400 mA 100 Ω 6.67 V 66.7 mA 26.7 V 267 mA 250 Ω 8.33 V 33.3 mA 33.3 V 133 mA 1 kΩ 9.52 V 9.5 mA 38.1 V 38.1 mA 10 kΩ 9.95 V 995 μA 39.8 V 3.98 mA Notes 1. To calculate the approximate maximum current and voltage for any resistance I MAX = V range/(50 Ω + Resistance) V MAX = IMAX · Resistance where Resistance is the total resistance connected to the PMU or PGU channel and V range is either 10 or 40. Example: 10 V range using R = 10 Ω (for DUT + interconnect) V MAX = IMAX · R = 0.167 · 10 = 1.67 V 2. Typical maximum at pulse output connector. Resistance is the total resistance connected to the pulse output connector, including device and interconnect. I I V V 1 100 10000 DUT Resistance (Ω) Max. Output Voltage (V) Max. Current (A) 10V Range: Max. Output vs. DUT Resistance 0.20 0.18 0.16 0.14 0.12 0.10 0.08 0.06 0.04 0.02 0.00 I I V V 1 100 10000 DUT Resistance (Ω) Max. Output Voltage (V) Max. Current (A) 40V Range: Max. Output vs. DUT Resistance 0.8 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0.0 PMU Pulse/Level 1,2 50 Ω into 1 MΩ –10 V to +10 V –40 V to +40 V 50 Ω into 50 Ω –5 V to +5 V –20 V to +20 V Accuracy ±(0.5% + 10 mV) ±(0.2% + 20 mV) Resolution 50 Ω into 50 Ω <250 µV <750 µV 50 Ω into 1 MΩ <0.05 mV <1.5 mV Overshoot/pre-shoot/ringing 3 50 Ω into 50 Ω ±(3% + 20 mV) ±(3% + 80 mV) 50 Ω into 50 Ω, typical best case ±(2% + 20 mV) ±(0.8% + 40 mV) Baseline noise ±(0.3% + 1 mV) RMS typical ±(0.1% + 5 mV) RMS typical Source impedance 50 Ω nominal 50 Ω nominal Current into 50 Ω load (at full scale) ±100 mA typical ±400 mA typical Short circuit current ±200 mA ±800 mA Output limit Programmable limit to protect the device under test Notes 1. Unless stated otherwise, all specifications assume a 50 Ω termination. 2. Level specifications are valid after 50 ns typical settling time (after slewing) for the 10 V source range and after 500 ns typical settling time (after slewing) for the 40 V source range into a 50 Ω load. 3. With transition time of 20 ns (0%–100%) for the 10 V source range and 100 ns (0% to 100%) for the 40 V source range.

TEK.COM PMU Pulse Timing

10 V Range

40 V Range

Frequency range 1 Hz to 50 MHz 1 Hz to 8.3 MHz 1 Hz to 10 MHz 1 Hz to 3.5 MHz Timing resolution 10 ns 10 ns 10 ns 10 ns RMS jitter (period, width), typical 0.01% + 200 ps 0.01% + 200 ps 0.01% + 200 ps 0.01% + 200 ps Period range 20 ns to 1 s 120 ns to 1 s 100 ns to 1s 280 ns to 1s Accuracy ±1% ±1% ±1% ±1% Pulse width range 10 ns to (Period–10 ns) 60 ns to (Period–10 ns) 50 ns to (Period–10 ns) 140 ns to (Period–10 ns) Accuracy ±(1% + 200 ps) ±(1% + 200 ps) ±(1% + 5 ns) ±(1% + 5 ns) Programmable transition time (0%–100%) 10 ns to 33 ms 20 ns to 33 ms 30 ns to 33 ms 1 100 ns to 33 ms Transition slew rate accuracy ±1% (transitions > 100 ns) ±1% (transitions > 100 ns) ±1% (transitions > 1 µs) ±1% (transitions > 100 ns) Solid state relay open/close time 25 µs 25 µs 25 µs 25 µs Notes 1. 40 V range minimum programmable transition time (source only) is 30 ns for voltage <10 V and 100 ns for voltages >10 V. Voltage Source, Best Performance When the 4225-PMU is used as a voltage source only (no measurements of voltage or current), the timing performance is improved. The following is provided to offer a clearer idea of best performance when used as a voltage source, as achievable under optimal conditions. This should not be interpreted as a guarantee. 10V Range 40V Range Rise time <10 ns 50 ns to 10 V, 100 ns to 40 V Pulse width 10 ns (FWHM) 50 ns (FWHM) Period 20 ns 100 ns Overshoot/preshoot/ringing ±(2% + 20 mV) ±(0.5% + 40 V)

TEK.COM 4200A-SCS Parameter Analyzer Trigger Trigger output impedance 50 Ω Trigger output level TTL Trigger in impedance 10 kΩ Trigger in level TTL Trigger in transition timing, maximum <100 ns Trigger in to pulse output delay 400 ns Trigger synchronization/jitter 1 <2 ns Segment ARB® and Timing Segment ARB capabilities are available with the 4225-PMU and 4220-PGU, with or without the 4225-RPM Remote Preamplifier/Switch Module. Max. Number of Segments 2 2048 Max. Number of Sequences 2 512 Max. Number of Sequence Loops 1012 Time per Segment 20 ns to 40 s Segment Timing Resolution 10 ns Control Parameters for Each Segment Start V Stop V Duration Measurement window (PMU or PMU+RPM only) Measurement type (PMU or PMU+RPM only) RMS Jitter (Segment) 0.01% + 200 ps typical Notes 1. For multiple 4225-PMU or 4220-PGU cards in a single 4200A-SCS chassis 2. Per channel

TEK.COM 6. Pulse Generator Unit The two-channel, voltage-only pulse generator is an economical alternative to the 4225-PMU Ultra-fast Pulse Measure Unit if pulse measurement is not needed. 4220-PGU General Information Output connectors Four SMA (f) Supplied cables SMA (m) to SMA (m), 2 m, 4 each (CA-404B) SMA (m) to SSMC 4-cable, 15 cm (6 in.), 2 each (4200-PRB-C) Pulse/Level 1, 2 10V Range 40V Range VOUT 50 Ω into 1 MΩ –10 V to +10 V –40 V to +40 V 50 Ω into 50 Ω –5 V to +5 V –20 V to +20 V Accuracy — ±(0.5% + 10 mV) ±(0.2% + 20 mV) Resolution 50 Ω into 50 Ω <250 µV <750 µV 50 Ω into 1 MΩ <0.5 mV <1.5 mV Overshoot/pre-shoot/ringing 3 50 Ω into 50 Ω ±(3% + 20 mV) ±(3% + 80 mV) 50 Ω into 50 Ω, typical best case ±(2% + 20 mV) ±(0.8% + 40 mV) Baseline noise — ±(0.3% + 1 mV) RMS typical ±(0.1% + 5 mV) RMS typical Source impedance — 50 Ω nominal 50 Ω nominal Current into 50 Ω load (at full scale) — ±100 mA typical ±400 mA typical Short circuit current — ±200 mA ±800 mA Output limit — Programmable limit to protect the device under test Notes 1. Unless st ated otherwise, all specifications assume a 50 Ω termination. 2. Level specifications are valid after 50 ns typical settling time (after slewing) for the 10 V source range and after 500 ns typical settling time (after slewing) for the 40 V source range into a 50 Ω load. 3. With transition time of 20 ns (0%–100%) for the 10 V source range and 100 ns (0%–100%) for the 40 V source range. Pulse Timing Frequency range 1 Hz to 50 MHz 1 Hz to 10 MHz Timing resolution 10 ns 10 ns RMS jitter (period, width), typical 0.01% + 200 ps 0.01% + 200 ps Period range 20 ns to 1 s 100 ns to 1s Accuracy ±1% ±1% Pulse width range 10 ns to (Period–10 ns) 50 ns to (Period–10 ns) Accuracy ±(1% + 200 ps) ±(1% + 5 ns) Programmable transition time (0%–100%) 10 ns to 33 ms 30 ns to 33 ms 1 Transition slew rate accuracy ±1% (transitions > 100 ns) ±1% (transitions > 1 µs) Solid state relay open/close time 25 µs 25 µs Notes 1. 40 V range minimum programmable transition time (source only) is 30 ns for voltage <10 V and 100 ns for voltages >10 V.

TEK.COM 4200A-SCS Parameter Analyzer Voltage Source, Best Performance When the 4225-PMU is used as a voltage source only (no measurements of voltage or current), the timing performance is improved. The following is provided to offer a clearer idea of best performance when used as a voltage source, as achievable under optimal conditions. This should not be interpreted as a guarantee. Rise Time <10 ns 50 ns to 10 V, 100 ns to 40 V Pulse Width 10 ns (FWHM) 50 ns (FWHM) Period 20 ns 100 ns Overshoot/ Preshoot/Ringing ±(2% + 20 mV) ±(0.5% + 40 mV) Trigger Trigger output impedance 50 Ω Trigger output level TTL Trigger in impedance 10 kΩ Trigger in level TTL Trigger in transition timing, maximum <100 ns Trigger in to pulse output delay 400 ns Trigger synchronization/jitter 1 <2 ns Segment ARB® and Timing Segment ARB capabilities are available with the 4225-PMU and 4220-PGU, with or without the 4225-RPM Remote Preamplifier/Switch Module. Max. Number of Segments 2048 per PMU channel Max. Number of Sequences 512 per PMU channel Max. Number of Sequence Loops 1012 Time per Segment 20 ns to 40 s Segment Timing Resolution 10 ns Control Parameters for Each Segment Start V Stop V Duration Measurement window (PMU or PMU+RPM only) Measurement type (PMU or PMU+RPM only) RMS Jitter (Segment) 0.01% + 200 ps typical Notes 1. For multiple 4225-PMU or 4220-PGU cards in a single 4200A-SCS chassis

TEK.COM 7. Remote Preamplifier/Switch Module The 4225-RPM enables automatic switching between I-V, C-V and Pulsed I-V measurements, allowing you to choose the appropriate measurement without recabling your test setup. Additionally, the RPM expands the range of the 4225-PMU Pulse Measure Module. 4225-RPM General Information Inputs Three inputs. SMU Force, SMU Sense, CVU Pot, CVU Cur, RPM Control Outputs One channel Input connector Triaxial (f), two SMA (f), two HDMI Output connector Triaxial (f), two Weight 8.6 oz. (245 g) (with base: 13.4 oz. (381 g)) Optional Accessories Magnetic base Vacuum base RPM Current Measurement Timing parameters, typical 1 with the 4225-PMU and 4225-RPM Remote Preamplifier/Switch Module 10V Range Current measure ranges 100 nA 1 µA 10 µA 100 µA 1 mA 10 mA Recommended minimum pulse width 2 134 µs 20.4 µs 8.36 µs 1.04 µs 370 ns 160 ns Recommended minimum measure window 2 10 µs 1.64 µs 1 µs 130 ns 40 ns 20 ns Recommended minimum transition time 3 1 µs 360 ns 360 ns 40 ns 30 ns 20 ns Noise 4 200 pA 2 nA 5 nA 50 nA 300 nA 1.5 µA Settling time 5 100 µs 15 µs 6 µs 750 ns 250 ns 100 ns Notes 1. All typical values measured with an open circuit. 2. Using default measure window of 75% to 90% of pulse top. Recommended minimum pulse width = (Settling Time) / 75%. 3. Recommended rise/fall time to minimize overshoot. 4. RMS noise measured over the Recommended Minimum Measure Window for the given voltage or current range, typical. 5. Time necessary for the signal to settle to the DC accuracy level. (Example: 10 mA settling time on the PMU 10 V range is defined when the Current Measurement Accuracy 4225-PMU and RPM Combined Current measure ranges 100 nA 1 µA 10 µA 100 µA 1 mA 10 mA

TEK.COM 4200A-SCS Parameter Analyzer Pulse/Level 1 Pulse/Level1 4225-PMU with 4225-RPM VOUT –10 V to +10 V Accuracy2 into open load ±(0.5% ± 10 mV) Resolution <0.05 mV Baseline noise ±(0.39% ± 1 mV) RMS typical Overshoot/Pre-shoot/Ringing 3 ±2% of amplitude ±20 mV Notes 1. Performance at the triax output connection of the 4225-RPM when using a 2 m RPM interconnect cable between the 4225-PMU and 4225-RPM Remote Preamplifier/Switch Module. 2. 100 mV to 10 V. 3. Typical, with transistion time of 100 ns (0% to 100%). RPM Voltage Measurement with the 4225-PMU Timing parameters, typical 1 4225-RPM Voltage measure range 10 V Recommended minimum pulse width 2 160 ns Recommended minimum measure window 2 20 ns Recommended minimum transition time 3 20 ns Noise 4 1 mV Settling time 5 100 ns Notes 1. All typical values measured with an open circuit. 2. Using default measure window of 75% to 90% of pulse top. Recommended minimum pulse width = (Settling Time) / 75%. 3. Recommended rise/fall time to minimize overshoot. 4. RMS noise measured over the Recommended Minimum Measure Window for the given voltage or current range, typical. 5. Time necessary for the signal to settle to the DC accuracy level. (Example: 10 mA settling time on the PMU 10 V range is defined when the

1. Switch Matrix Configurations Ultra-Low Current/Local Sense Configuration (4200-UL-LS-XX) The Ultra-Low Current/Local Sense switch configuration is built using the Keithley 7174A Low Current Matrix Card (with the 707B or 708B Switch Matrix), which is designed for sem iconductor research, development, and production applications requiring high quality, high p erformance switching of I-V and C-V signals. This configuration provides eight instrument inpu ts with up to 72 output pins at only 10 fA typi cal offset current. General Information (4200-UL-LS-XX) Connector Type 3-lug triax Maximum Signal Level 200 V, 2 A Offset Current 100 fA max, 10 fA typical Maximum Leakage 0.01 pA/V 3 dB Bandwidth 30 MHz typical 4200-UL-LS-12/B (or -12/707B) (1) 708B (or 707B) Switch Mainframe (1) 7174A Switch Card (12) 4200-TRX-3 Cable for each 12 pins (1) 7007-1 IEEE-488 Cable (2) 7078-TRX-BNC Adapter (1) 707B Switch Mainframe (1) 7174A Switch Card for each 12 pins (12) 4200-TRX-3 Cable for each 12 pins (1) 7007-1 IEEE-488 Cable (2) 7078-TRX-BNC Adapter 707B Six-slot Semiconductor Switch Matrix Mainframe 708B Single-slot Semiconductor Switch Matrix Mainframe

TEK.COM 4200A-SCS Parameter Analyzer Low Current/Local Sense Configuration (4200-LC-LS-XX) The Low Current/Local Sense switch configuration is built using the Keithley 7072 Semiconductor Matrix Card, which is designed for semiconductor applications requiring good quality I-V and C-V signals. The configuration provides eight instrument inputs with up to 72 output pins with less than 1 pA offset current. General Information (4200-LC-LS-XX) Connector Type 3-lug triax Maximum Signal Level 200 V, 1 A Offset Current <1 pA (Rows A to B) Maximum Leakage 0.1 pA / V 3 dB Bandwidth 5 MHz typical (Rows G to H) 4200-LC-LS-12/B (or -12/707B) (1) 708B (or 707B) Switch Mainframe (1) 7072 Matrix Switch Card (12) 4200-TRX-3 Cable (1) 7007-1 IEEE-488 Cable (2) 7078-TRX-BNC Adapter (1) 707B Switch Mainframe (1) 7072 Matrix Switch Card for each 12 pins (12) 4200-TRX-3 Cable for each 12 pins (1) 7007-1 IEEE-488 Cable (2) 7078-TRX-BNC Adapter

TEK.COM 9. NBTI/PBTI Package The 4200-BTI-A package combines advanced DC I-V and ultra-fast I-V measurement capabilities of Keithley with automatic test executive software to provide the most advanced NBTI/PBTI test platform available in the semiconductor test industry. 4200-BTI-A Ultra-fast NBTI/PBTI The 4200-BTI-A package includes all the instruments, interconnects, and software needed to make the most sophisticated NBTI and PBTI measurements on leading-edge silicon CMOS technology. Model 4200-BTI-A Offers the best high-speed, low-current measurement sensitivity available in a single-box integrated solution. Ensures that source/measure instrumentation will not be the limiting factor when making low-level measurements. The ACS software, which is provided in the package, supports building complex test sequences, including up to 20 measurement sequences and full prober integration. It also:

• Easily integrates DC I-V and ultra-fast I-V measurements into a pre- and post-stress measurement sequence.
• Characterizes degradation and recovery behaviors using either AC or DC stress.
• Incorporates single pulse charge trapping (SPCT) measurements into longer stress-measure sequences. 4200-BTI-A Ultra-fast NBTI/PBTI includes: (1) 4225-PMU Ultra-Fast I-V Module (2) 4225-RPM Remote Preamplifier/Switch Modules Automated Characterization Suite (ACS) Software Ultra-Fast BTI Test Project Module Cabling SMU1 SMU5 SMU6 SMU7 SMU8 SMU2 SMU3 SMU4 Example of using eight SMUs to stress 20 devices in parallel for HCI and NBTI. A separate ground unit (GNDU) is used for common terminals.

TEK.COM 4200A-SCS Parameter Analyzer 10. Clarius+ Software Clarius+ software provides a variety of tools for operating and maintaining the 4200A-SCS parameter analyzer. Furnished Software Modules Clarius The graphical user interface for testing and characterizing your devices, materials and processes. Clarius software provides a unified measurement interface that guides you through complex characterization tests, enabling you to focus on your research or development projects. Keithley User Library Tool (KULT) Assists test engineers to create custom test routines as well as use existing Keithley and third-party C-language subroutine libraries. Users can edit and compile subroutines, then integrate libraries of subroutines with Clarius, allowing the 4200A-SCS to control an entire test rack from a single user interface. Requires optional 4200-Compiler. Keithley External Control Interface (KXCI) Controls the 4200A-SCS from an external computer via GPIB bus or Ethernet. Keithley Configuration Utility (KCon) Allows test engineers to define the configuration of GPIB instruments, switch matrices, and analytical probers connected to the 4200A-SCS. It also provides diagnostic functions. KPulse A graphical user interface that is a non-programming alternative to configure and control the installed 4225-PMU or 4220-PGU pulse generator modules. It is used for quick tests requiring minimal interaction with other 4200A-SCS test resources. Clarius User Interface Software Clarius is the resident user interface software running on the 4200A-SCS. Clarius runs on the embedded Windows 7 operating system. It provides test plan selection and development, advanced test configurations, parameter analysis and graphing, and automation capabilities required for modern semiconductor device, materials and process characterization. Data Analysis Two methods of parameter extraction are available. The Formulator executes data transformations for performing automated line fits and parameter extraction. A spreadsheet offers standard spreadsheet analysis tools. Many of the sample libraries include parameter extraction examples. Formulator The Formulator supports mathematical functions, conversion functions, search functions, common industry constants and line fit/parameter extraction functions. The Formulator supports the following functions: Mathematical Functions Addition (+), subtraction (-), division (/), multiplication (*), exponent (^), absolute value (ABS), value at an index position (AT), average (AVG), moving average (MAVG), conditional computation (COND), derivative (DELTA), differential coefficient (DIFF), exponential (EXP), square root (SQRT), natural logarithm (LN), logarithm (LOG), integral (INTEG), standard deviation (STDEV), moving summation (SUMMV), arc cosine (ACOS), arc sine (ASIN), arc tangent (ATAN), cosine (COS), sine (SIN), tangent (TAN) Conversion Functions Radians to degrees (DEG), degrees to radians (RAD) Line Fits and Parameter Extraction Functions Exponential line fit (EXPFIT), coefficient a (EXPFITA), coefficient b (EXPFITB), linear fit (LINFIT), linear slope (LINFITSLP), x intercept (LINFITXINT), y intercept (LINFITYINT), logarithmic line fit (LOGFIT), coefficient a (LOGFITA), coefficient b (LOGFITB), linear regression line fit (REGFIT), slope (REGFITSLP), x intercept (REGFITXINT), y intercept (REGFITYINT), tangent line fit (TANFIT), slope (TANFITSLP), x intercept (TANFITXINT), y intercept (TANFITYINT), polynomial line fit including POLYFIT2, POLY2COEFF, and POLYNFIT, maximum value (MAX), minimum value (MIN), midpoint (MEDIAN) Search Functions Find down (FINDD), find up (FINDU), find using linear interpolation (FINDLIN), maximum position (MAXPOS), minimum position (MINPOS), first position (FIRSTPOS), last position (LASTPOS), sub array (SUBARRAY), return a specified number of points (INDEX)

TEK.COM Formulator Constants The Formulator supports user-supplied constants for use in parameter extractions. These constants are factory installed: PI = 3.14159 rad (π) K = 1.38065 × 10–23 J/K (Boltzmann’s constant) Q = 1.60218 × 10–19 C (Charge of electron) M 0 = 9.10938 × 10–31 kg (Electron mass) E V = 1.60218 × 10–19 J (Electron Voltage) U 0 = 1.25664 × 10–6 N/A2 (Permeability) E 0 = 8.85419 × 10–12 F/m (Permittivity of a Vacuum) H = 6.62607 × 10–34 m2 * kg/s (Planck’s constant) C = 2.99792 × 10+8 m/s (Speed of light) KT/Q = 0.02568 V (Thermal Voltage) Automation Test Sequencing Clarius provides point-and-click test sequencing on a device, a group of devices (subsite, module, or test element group), or a user-programmable number of probe sites on a wafer. Prober Control Keithley provides integrated prober control for supported analytical probers when test sequencing is executed on a user-programmable number of probe sites on a wafer. Contact the factory for a list of supported analytical probers. A manual prober mode prompts the operator to perform prober operations during the test sequence. Supported Probers Manual Prober Use the manual prober driver to test without utilizing automatic prober functionality. Manual prober replaces all computer control of the prober with that of the operator. At each prober command, a dialog box appears, instructing the operator what operation is required. Fake Prober The Fake prober is useful when prober actions are not desired, such as when debugging, without having to remove prober commands from a sequence. Supported Semi-automatic (Analytical) Probers FormFactor (formerly Cascade Microtech) Summit TM 12K Series - Verified with Nucleus UI, compatible with Velox Karl Suss Model PA-200 - Verified with Wafermap for ProberBench NT, NI-GPIB Driver for ProberBench NT, PBRS232 Interface for ProberBench NT, Navigator for ProberBench NT, Remote Communicator for ProberBench NT MicroManipulator 8860 Prober - Verified with pcBridge, pcLaunch, pcIndie, pcWfr, pcNav, pcRouter Signatone CM500 driver also works with other Signatone probers with interlock controller such as the WL250 and S460SE Wentworth Laboratories Pegasus™ FA Series Other probers supported but not listed Supported Cryogenic Temperature Controllers LakeShore Model 336 Cryogenic Temperature Controller

TEK.COM 4200A-SCS Parameter Analyzer Keithley User Library Tool (KULT) (Requires optional 4200-COMPILER) The Keithley User Library Tool supports creating and integrating C-language subroutine libraries with the test environment. User library modules are accessed in Clarius through User Test Modules. Factory supplied libraries provide up and running capability for supported instruments. Users can edit and compile subroutines, then integrate libraries of subroutines with Clarius, allowing the 4200A-SCS to control an entire test rack from a single user interface. System Configuration and Diagnostics (KCon) The Keithley Configuration Utility (KCon) simplifies programming and maintaining a fully integrated test station. KCon provides a single interface for configuring external instruments, switch matrices, and analytical probers, and for executing system diagnostics. External Instrument Configuration KCon allows lab managers to integrate external instruments with the 4200A-SCS and a supported switch matrix. After the user configures the GPIB addresses for supported instruments, Keithley-supplied libraries will function and test modules can be transferred between 4200A-SCS systems without any user modification. In addition to the standard supported instruments, the General Purpose Instrument allows users to develop subroutines and control switches for a generic two-terminal or four-terminal instrument. For the widest possible system extensibility, users can develop their own test libraries for general purpose instruments. Switch Matrix Configuration Users define the connection of 4200A-SCS instruments and external instruments to device under test (DUT) pins through a supported switch matrix configuration. (See Switch Matrix Support and Configurations.) Once connections are defined, users need only enter the instrument terminal name and pin number to establish connections. The 4200A-SCS applications and standard user libraries manage the routing of test signals between instrument terminals and DUT pins. The user doesn’t need to remember and program row and column closures. Test modules can transfer between 4200A-SCS systems without re-entering connection information. 4200A-SCS Instrument Diagnostics Users can confirm system integrity of SMUs, C-V measurement unit, pulse generator, oscilloscopes, and remote preamplifiers by running a system self-test. For more complex problems, the system’s configuration analysis tool can generate reports that assist the Technical Support staff of Keithley in diagnosing problems. Keithley External Control Interface (KXCI) With KXCI, you can use an external computer to control the SMUs and CVU modules in the 4200A-SCS directly. KXCI also provides you with indirect control of the Ultra-fast I-V Pulse Measure Unit, using UTMs via either the built-in GPIB or Ethernet. For the SMUs, the KXCI command set includes an HP 4145 compatibility mode, allowing many programs already developed for the HP4145 to use the 4200A-SCS instead.

TEK.COM 11. Supplied Accessories 4200A-SCS Parameter Analyzer Mainframe (1) 236-ILC-3 Interlock Cable, 3 m (10 ft) (2) 4200-TRX-2 Ultra Low Noise Triax Cables, 2 m (6.6 ft) 4200-SMU Medium Power Source-Measure Unit for 4200A-SCS, 100 mA to 100 fA, 200 V to 0.2 µV, 2 Watts If configured with a preamp: All cables are provided with the 4200-PA. See 4200-PA below. If configured without a preamp: (2) 4200-MTRX-2 Mini Ultra Low Noise Triax Cables, 2 m (6.6 ft) 4201-SMU Medium Power Source-Measure Unit for 4200A-SCS and high-capacitance setups, 100 mA to 100 fA, 200 V to 0.2 µV, 2 Watts, 10 µF load capacitance If configured with a preamp: All cables are provided with the 4200-PA. See 4200-PA below If configured without a preamp: (2) 4200-MTRX-2 Mini Ultra Low Noise Triax Cables, 2 m (6.6 ft) 4210-SMU High Power Source-Measure Unit for 4200A-SCS, 1 A to 100 fA, 200 V to 0.2 µV, 20 Watts If configured with a preamp: All cables are provided with the 4200-PA. See 4200-PA below. If configured without a preamp: (2) 4200-MTRX-2 Mini Ultra Low Noise Triax Cables, 2 m (6.6 ft) 4211-SMU High Power Source-Measure Unit for 4200A-SCS and high-capacitance setups, 1 A to 100 fA, 200 V to 0.2 µV, 2 Watts, 100 µF load capacitance If configured with a preamp: All cables are provided with the 4200-PA. See 4200-PA below If configured without a preamp: (2) 4200-MTRX-2 Mini Ultra Low Noise Triax Cables, 2 m (6.6 ft) 4200-PA Remote Preamp Option for 4200-SMU and 4210-SMU, extends SMU to 0.1 fA resolution (1) 4200-RPC remote preamp cable, 3 m (9.8 ft) (2) 4200-TRX-2 Ultra Low Noise Triax Cables, 2 m (6.6 ft) 4210-CVU Capacitance-Voltage (C-V) Module (4) CA-447A SMA Cables, male to male, 100 Ω, 1.5 m (5 ft) • (4) CS-1247 Female SMA to Male BNC Adapters (2) CS-701 BNC Tee Adapters 4225-PMU Ultra-Fast Pulse Measure Unit (4) CA-404B SMA-to-SMA 50 Ω cables, 2 m (6.6 ft) (2) 4200-PRB-C SMA-to-SSMC Y-Cable Assembly, 15 cm (6 in.) 4225-RPM Remote Preamplifier/Switch Module (1) CA-452A SMA-to-SMA 50 Ω Cable, 20 cm (7.9 in) (1) 7078-TRX-BNC Triax-to-BNC Adapter (1) CS-1247 BNC-to-SMA Adapter (1) CA-547-2A RPM Cable, 2.1 m (6.9 ft)

TEK.COM 4200A-SCS Parameter Analyzer 4220-PGU High Voltage Pulse Generator (4) CA-404B SMA-to-SMA 50 Ω cables, 2 m (6.6 ft) (2) 4200-PRB-C SMA-to-SSMC Y-Cable Assembly, 15 cm (6 in.) 4200A-CVIV I-V, C-V Multi-switch Module (2) 4200A-CVIV-SPT SMU Pass-Thru Modules (2) 214543500 Slot Blockers (1) 174691500 USB Cable (1) 4200-MTRX-2 Mini Ultra Low Noise Triax Cable, 2 m (6.6 ft) NOTE: For each SMU connected through the 4200A-CVIV, one 4200A-CVIV-SPT or one 4200-PA is required. Switching Systems and Cards 707B 6-slot Switching Matrix Mainframe CA-180-4A CAT 5 Ethernet Crossover Cable, 1 m (3.3 ft) CA-179-2A CAT 5 Ethernet Cable 3 m (10 ft) CO-7 Line Cord Rear Fixed Rack Mount Hardware 708B Single-slot Switching Matrix Mainframe CA-180-4A CAT 5 Ethernet Crossover Cable, 1 m (3.3 ft) CA-179-2A CAT 5 Ethernet Cable 3 m (10 ft) CO-7 Line Cord 7072 8×12, Semiconductor Matrix Card 7174A 8×12, High Speed, Low Leakage Current, Matrix Card

TEK.COM 12. Optional Accessories Connectors and Adapters CS-565 Female BNC to Female BNC Adapter CS-701 BNC Tee Adapter (female, male, female) CS-719 3-lug Triax Jack Receptacle CS-1247 SMA Female to BNC Male Adapter CS-1249 SMA Female to SMB Plug Adapter CS-1251 BNC Female to SMB Plug Adapter CS-1252 SMA Male to BNC Female Adapter CS-1281 SMA Female to SMA Female Adapter CS-1382 Female MMBX Jack to Male SMA Plug Adapter CS-1390 Male LEMO Triax to Female SMA Adapter CS-1391 SMA Tee Adapter (female, male, female) CS-1479 SMA Male to BNC Male Adapter 237-BAN-3A Triax Cable Center Conductor terminated in a safety banana plug 237-BNC-TRX Male BNC to 3-lug Female Triax Adapter 237-TRX-BAR 3-lug Triax Barrel Adapter (female to female) 237-TRX-T 3-slot Male to Dual 3-lug Female Triax Tee Adapter 7078-TRX-BNC 3-slot Male Triax to BNC Adapter 7078-TRX-GND 3-slot Male Triax to Female BNC Connector (guards removed) Test Fixtures 8101-4TRX 4-pin Transistor Fixture 8101-PIV Pulse I-V Demo Fixture Cabinet Mounting Accessories 4200A-RM Fixed Cabinet Mount Kit for 4200A-SCS Cables and Cable Sets NOTE: All 4200A-SCS systems and instrument options are supplied with required cables, 3 m (9.8 ft.) length. CA-19-2 BNC to BNC Cable, 1.5 m CA-404B SMA to SMA Coaxial Cable, 2 m CA-405B SMA to SMA Coaxial Cable, 15 cm CA-406B SMA to SMA Coaxial Cable, 33 cm CA-446A SMA to SMA Coaxial Cable, 3 m CA-447A SMA to SMA Coaxial Cable, 1.5 m

TEK.COM 4200A-SCS Parameter Analyzer CA-451A SMA to SMA Coaxial Cable, 10.8 cm CA-452A SMA to SMA Coaxial Cable, 20.4 cm 236-ILC-3 Safety Interlock Cable, 3 m 237-ALG-2 Low Noise Triax Input Cable terminated with 3 alligator clips, 2 m 4210-MMPC-C Multi-Measurement (I-V, C-V, Pulse) Prober Cable Kit for Cascade Microtech 12000 prober series 4210-MMPC-S Multi-Measurement (I-V, C-V, Pulse) Prober Cable Kit for SUSS MicroTec PA200/300 prober series 4210-MMPC-L Multi-Measurement (I-V, C-V, Pulse) Prober Cable Kit for Lucas Signatone probers 4210-MMPC-W Multi-Measurement (I-V, C-V, Pulse) Prober Cable Kit for Wentworth Laboratories probers 4200-MTRX-* Ultra Low Noise SMU Triax Cable: 1 m, 2 m, and 3 m options 4200-PRB-C SMA to SSMC Y Cable with local ground 4200-RPC-* Remote Preamp Cable: 0.3m, 2 m, 3 m, 6 m options 4200-TRX-* Ultra Low Noise Preamp Triax Cable: 0.3 m, 0.75 m, 2 m, 3 m options 7007-1 Double-Shielded Premium GPIB Cable, 1 m 7007-2 Double-Shielded Premium GPIB Cable, 2 m Adapter, Cable, and Stabilizer Kits 4200-CVU-PWR CVU Power Package for ±200 V C-V 4200-CVU-PROBER-KIT Accessory Kit for connection to popular analytical probers 4200-PMU-PROBER-KIT General Purpose Cable/Connector Kit. For connecting the 4225-PMU to most triax and coax probe stations. One kit required per 4225-PMU module. Remote Preamp Mounting Accessories 4200-MAG-BASE Magnetic Base for mounting 4200-PA on a probe platen 4200-TMB Triaxial Mounting Bracket for mounting 4200-PA on a triaxial mounting panel 4200-VAC-BASE Vacuum Base for mounting 4200-PA on a prober platen Software ACS-BASIC Component Characterization Software Drivers 4200ICCAP-6.0 IC-CAP Driver and Source Code for 4200A-SCS: UNIX/Windows (shareware only) Other Accessories EM-50A Modified Power Splitter TL-24 SMA Torque Wrench 4200-CART Roll-Around Cart for 4200A-SCS 4200A-CASE Transport Case for 4200A-SCS

TEK.COM 13. General Specifications Mainframe Display 15.6 in. LCD, capacitive touchscreen 1920 × 1080 full HD 10 point touch External Display External VGA, HDMI, or Display Port: The system is designed to work with an external monitor of resolution 1920 × 1080 Temperature Range Operating: +10° to +40°C Storage: –15° to +60°C Humidity Range Operating: 5% to 80% RH, non-condensing Storage: 5% to 90% RH, non-condensing Altitude Operating: 0 to 2000 m Storage: 0 to 4600 m Power Requirements 100 V to 240 V, 50 to 60 Hz Maximum VA 1000 VA Regulatory Compliance Safety: European Low Voltage Directive. NRTL listed by Intertek for the US and Canada. EMC: European EMC Directive Dimensions 43.6 cm wide × 22.3 cm high × 56.5 cm deep (175⁄32 in × 8¾ in × 22¼ in) Weight (approx.) 29.7 kg (65.5 lb) for typical configuration of four SMUs I/O Ports USB, SVGA, Display Port, RS-232, GPIB, Ethernet, mouse, keyboard, audio Ground Unit Voltage error when using the ground unit is included in the 4200-SMU, 4210-SMU, and 4200-PA specifications. No additional errors are intro duced when using the ground unit. Output Terminal Connection Dual triaxial, 5-way binding post Maximum Current 2.6 A using dual triaxial connection; 9.5 A using 5-way binding posts Load Capacitance No limit Cable Resistance FORCE ≤1 Ω, SENSE ≤10 Ω LCD Display Pixel Guideline LCD displays are made up of a matrix of pixels, with each pixel consisting of red, green, and blue sub- pixels. These pixels and sub-pixels can become fixed in an unchanging state resulting in permanently black, white, or colored spots on the display. These are typically categorized as Bright or Black pixel (or dot) defects. Bright dot defect: A dot that is always lit, either as a white or colored dot, visible on a black check pattern. Black dot defect: A dot that appears as either black or purple (magenta) on red, green, and/or blue check patterns. The LCD display used in the 4200A-SCS is permitted to have a maximum of 6 (six) bright dot defects upon receipt of a new instrument. A maximum of three bright dot defect pairs (adjacent defective dots) are permitted. Three adjacent bright dots are not permitted under the pixel guideline. The LCD display is permitted to have a maximum of 5 (five) black dot defects. Two adjacent black dot defects are to be counted as a single black dot defect. A maximum of three black dot defect pairs (adjacent defective dots) are permitted. Three adjacent black dot defects are not permitted under the pixel guideline.

TEK.COM 4200A-SCS Parameter Analyzer 14. Ordering Information Mainframes 4200A-SCS Parameter Analyzer with 15.6” LCD display 4200A-SCS-ND Parameter Analyzer without LCD display Instruments/Modules 4200-PA Remote SMU Preamplifier Module 4200-SMU Medium Power Source Measure Unit 4200-SMU-R Field Installable, Medium Power Source Measure Unit 4200-SMU/PA-R Field Installable, Medium Power Source Measure Unit with Preamplifier 4201-SMU Medium power Source Measure Unit for high-capacitance setups 4201-SMU-R Field installable medium power Source Measure Unit for high-capacitance setups 4201-SMU/PA-R Field Installable, medium Power Source Measure Unit for high-capacitance setups with Preamplifier 4210-SMU High Power Source Measure Unit 4210-CVU Multi-frequency C-V Unit 4210-SMU-R Field Installable, High Power Source Measure Unit 4210-SMU/PA-R Field Installable, High Power Source Measure Unit with Preamplifier 4211-SMU High power Source Measure Unit for high-capacitance setups 4211-SMU-R Field installable high power Source Measure Unit for high-capacitance setups 4211-SMU/PA-R Field Installable, high power Source Measure Unit for high-capacitance setups with Preamplifier 4225-PMU Ultra-fast Pulsed I-V Unit 4220-PGU Pulse Generator Unit 4225-RPM Remote Preamplifier/Switch Module 4200A-CVIV CVIV Multi-Switch Module 4200-CVU-PWR C-V Power Package

TEK.COM 15. Configured Packages 4200A-SCS-PK1 High Resolution I-V 4200A-SCS Parameter analyzer mainframe 4200-SMU Two medium power SMU 4200-PA One preamplifier 8101-PIV One test fixture with sample devices 4200A-SCS-PK2 High Resolution I-V and C-V 4200A-SCS Parameter analyzer mainframe 4200-SMU Two medium power SMU 4200-PA One preamplifier 4210-CVU One multi-frequency C-V unit 8101-PIV One test fixture with sample devices 4200A-SCS-PK3 High Power I-V and C-V 4200A-SCS Parameter analyzer mainframe 4200-SMU Two medium power SMU 4210-SMU Two high power SMU 4200-PA Two preamplifier 4210-CVU One multi-frequency C-V unit 8101-PIV One test fixture with sample devices 4200A-SCS-PKA High Resolution I-V 4200A-SCS Parameter Analyzer mainframe 4201-SMU Two medium power SMUs for high capacitance setups 4200-PA One preamplifier 8108-PIV One test fixture with sample devices 4200A-SCS-PKB High Resolution I-V and C-V 4200A-SCS Parameter Analyzer mainframe 4200-SMU Two medium power SMUs for high capacitance setups 4200-PA One preamplifier 4210-CVU One multi-frequency C-V unit 8108-PIV One test fixture with sample devices 4200A-SCS-PKC-High Power I-V and C-V 4200A-SCS Parameter Analyzer mainframe 4201-SMU Two medium power SMUs for high capacitance setups 4211-SMU Two high power SMUs for high capacitance setups 4200-PA two preamplifier 4210-CVU One multi-frequency C-V unit 8101-PIV One test fixture with sample devices

TEK.COM 4200A-SCS Parameter Analyzer 16. Upgrading the 4200A-SCS Parameter Analyzer Besides adding instrument modules to your parameter analyzer, there are other upgrade options available to keep your parameter analyzer up-to-date with the latest technologies and applications tests. 4200A-MF-UP This upgrade service will convert any 4200-SCS mainframe to the 4200A-SCS widescreen mainframe with Clarius+ software. Any instrument modules in the 4200-SCS will be moved to the 4200A-SCS mainframe and the system will receive a factory calibration and a one year warranty on the mainframe. 4200A-IFC Required installation and factory calibration service when any instrument module is added to the 4200A-SCS mainframe. Only one 4200A-IFC is required per instrument module upgrade order. Not required when ordering the 4200A-MF-UP. 4200A-WIN10-UP This service ugrades the embedded operating system of the 4200A-SCS Parameterr Analyzer to Microsoft ® Windows® 10. 17. Warranty Information Warranty Summary This section summarizes the warranties of the 4200A-SCS. Any portion of the product that is not manufactured by Keithley is not covered by this warranty and Keithley will have no duty to enforce any other manufacturer’s warranties. Hardware Warranty Keithley Instruments warrants the Keithley manufactured portion of the hardware for a period of one year from defects in materials or workmanship; provided that such defect has not been caused by use of the Keithley hardware which is not in accordance with the hardware instructions. The warranty does not apply upon any modification of Keithley hardware made by the customer or operation of the hardware outside the environmental specifications. Software Warranty Keithley warrants for the Keithley produced portion of the software or firmware will conform in all material respects with the published specifications for a period of ninety (90) days; provided the software is used on the product for which it is intended in accordance with the software instructions. Keithley does not warrant that operation of the software will be uninterrupted or error-free, or that the software will be adequate for the customer’s intended application. The warranty does not apply upon any modification of the software made by the customer. 18. Embedded Computer Policy CAUTION: If you install software that is not part of the standard application software for the 4200A-SCS, the non-standard software may be removed if the instrument is sent in for service. Back up the applications and any data related to them before sending the instrument in for service. CAUTION: Do not reinstall or upgrade the Microsoft ® Windows® operating system (OS) on any 4200A-SCS. This action should only be performed at an authorized Keithley Instruments service facility. Violation of this precaution will void the 4200A-SCS warranty and may render the 4200A-SCS unusable. Any attempt to reinstall or upgrade the operating system (other than a Windows service pack update) will require a return-to-factory repair and will be treated as an out-of-warranty service, including time and material charges. Although you must not attempt to reinstall or upgrade the operating system, you can restore the hard drive image (complete with the operating system) using the Acronis True Image OEM software tool, included with the 4200A-SCS.

Contact Information: Australia 1 800 709 465 Austria* 00800 2255 4835 Balkans, Israel, South Africa and other ISE Countries +41 52 675 3777 Belgium* 00800 2255 4835 Brazil +55 (11) 3759 7627 Canada 1 800 833 9200 Central East Europe / Baltics +41 52 675 3777 Central Europe / Greece +41 52 675 3777 Denmark +45 80 88 1401 Finland +41 52 675 3777 France* 00800 2255 4835 Germany* 00800 2255 4835 Hong Kong 400 820 5835 India 000 800 650 1835 Indonesia 007 803 601 5249 Italy 00800 2255 4835 Japan 81 (3) 6714 3010 Luxembourg +41 52 675 3777 Malaysia 1 800 22 55835 Mexico, Central/South America and Caribbean 52 (55) 56 04 50 90 Middle East, Asia, and North Africa +41 52 675 3777 The Netherlands* 00800 2255 4835 New Zealand 0800 800 238 Norway 800 16098 People’s Republic of China 400 820 5835 Philippines 1 800 1601 0077 Poland +41 52 675 3777 Portugal 80 08 12370 Republic of Korea +82 2 565 1455 Russia / CIS +7 (495) 6647564 Singapore 800 6011 473 South Africa +41 52 675 3777 Spain* 00800 2255 4835 Sweden* 00800 2255 4835 Switzerland* 00800 2255 4835 Taiwan 886 (2) 2656 6688 Thailand 1 800 011 931 United Kingdom / Ireland* 00800 2255 4835 USA 1 800 833 9200 Vietnam 12060128 * European toll-free number. If not accessible, call: +41 52 675 3777 Find more valuable resources at TEK.COM in all previously published material. Specification and price change privileges reserved. TEKTRONIX and TEK are registered trademarks of Tektronix, Inc. All other trade names referenced are the service marks, trademarks or registered trademarks of their respective companies.

91919 AH 1KW-60780-5