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LOW LEVEL MEASURE & SOURCE A Greater Measure of Confidence www.keithley.com 1.888.KEITHLEY (U.S. only) Precision low current sourcing 6220 and 6221

• so urce and sink (programmable load) 100fa to 100ma
• 1014W output impedance ensures stable current sourcing into variable loads
• 6 5000-point source memory allows executing comprehensive test current sweeps directly from the current source bu ilt-in rs- 232, GPIb, T rigger li nk, and digital I/ o interfaces
• re configurable triax output simplifies matching the application’s guarding requirements M odel 220 emulation mode eliminates need to reprogram existing applications 6221 on ly
• so urce aC c urrents from 4pa t o 210ma peak to peak for aC c harac ter iza tion of components and materials. The 6221’s 10MHz output update rate generates smooth sine waves up to 100kHz bu ilt-in standard and arbitrary waveform generators with 1mHz to 100kHz frequency range. ap plications include use as a complex programmable load or sensor signal and for noise emulation P rogrammable pulse widths as short as 5µs, limiting power dissipation in delicate com po nents. sup ports pulsed I-V measurements down to 50µs when used with Model 2182 a N anovoltmeter
• bui lt-in Ethernet interface for easy remote control without a GPI b c ontroller card The Model 6220 DC Current Source and Model 6221 AC and DC Current Source combine ease of use with exceptionally low current noise . Low current sourcing is critical to applications in test environ - ments ranging from R&D to production, especially in the semiconductor, nanotechnology, and super- conductor industries . High sourcing accuracy and built-in control functions make the Models 6220 and 6221 ideal for applications like Hall measurements, resistance measurements using delta mode, pulsed measurements, and differential conductance measurements T he need for precision, low current sourcing. Device testing and characterization for today’s very small and power-efficient electronics requires sourcing low current levels, which demands the use of a precision, low current source Lower stimulus currents produce lower—and harder to measure— voltages across the device . Combining the Model 6220 or 6221 with a Model 2182A Nanovoltmeter makes it possible to address both of these challenges . A C current source and current source waveform generator. The Model 6221 is the only low current AC source on the market Before its introduction, researchers and engineers were forced to build their own AC current sources . This cost-effective source provides better accuracy, consistency, reliability, and robustness than “home-made” solutions . The Model 6221 is also the only commercially available current source waveform generator, which greatly simplifies creating and outputting com - plex waveforms . S imple programming. Both current sources are fully programmable via the front panel controls or from an external controller via RS-232 or GPIB interfaces; the Model 6221 also features an Ethernet interface for remote control from anywhere there’s an Ethernet connection Both instruments can source DC currents from 100fA to 105mA; the Model 6221 can also source AC currents from 4pA to 210mA peak to peak The output voltage compliance of either source can be set from 0 .1 V to 105V in 10mV steps . Voltage compliance (which limits the amount of voltage applied when sourcing a current) is critical for applications in which overvoltages could damage the device under test (DUT) D rop-in replacement for the Model 220 current source. These instruments build upon Keithley’s popular Model 220 Programmable Current Source; a Model 220 emulation mode makes it easy to replace a Model 220 with a Model 6220/6221 in an existing application with- out rewriting the control code D efine and execute current ramps easily. Both the Models 6220 and 6221 offer tools for defining current ramps and stepping through predefined sequences of up to 65,536 output values using a trigger or a timer Both sources support linear, logarithmic, and custom sweeps . aPP lI C aT I oNs
• N anotechnology – D ifferential conductance – P ulsed sourcing and resistance
• o ptoelectronics – P ulsed I-V
• re placement for aC resistance bridges (when used with Model 2182a) – M easuring resistance with low power
• re placement for lock-in amplifiers (when used with Model 2182 – M easuring resistance with low noise 6220 6221 DC Current Source AC and DC Current Source

LOW LEVEL MEASURE & SOURCE www.keithley.com 1.888.KEITHLEY (U.S. only) A Greater Measure of Confidence T he Model 6221’s combination of high source resolution and megahertz update rates makes it capable of emulating high fidelity current signals that are indistinguishable from analog current ramps . fr ee Instrument Control Example st art-up so ftware The instrument control example software available for the sources simplifies both performing basic sourcing tasks and coordinating complex measurement functions with the Keithley Model 2182A . The software, developed in the LabVIEW® programming environment, includes a step-by-step measure - ment guide that helps users set up their instruments and make proper connections, as well as pro - gram basic sourcing functions . The advanced tools in the package support delta mode, differential conductance, and pulse mode measurements . From this package, users can print out the instrument commands for any of the pre-programmed functions, which provides a starting point for incorporat - ing these functions into customized applications . D ifferential Conductance Differential conductance measurements are among the most important and critical measurements made on non-linear tunneling devices and on low temperature devices Mathematically, differential conductance is the derivative of a device’s I-V curve . The Model 6220 or 6221, combined with the Model 2182A Nano v oltmeter, is the industry’s most complete solution for differential conductance measurements . Together, these instruments are also the fastest solution available, providing 10× the speed and significantly lower noise than other options . Data can be obtained in a single measure- ment pass, rather than by averaging the result of multiple sweeps, which is both time-consuming and prone to error The Model 622X and Model 2182A are also easy to use because the combination can be treated as a single instrument Their simple connections eliminate the isolation and noise current problems that plague other solutions . fi gure 1. Perform, analyze, and display differential conductance measurements. Delta Mode Keithley originally developed the delta mode method for making low noise measurements of voltages and resistances for use with the Model 2182 Nanovoltmeter and a triggerable external current source . E ssentially, the delta mode automatically triggers the current source to alternate the signal polarity, then triggers a nanovoltmeter reading at each polarity . This current reversal technique cancels out any constant thermoelectric offsets, ensuring the results reflect the true value of the voltage . T his same basic technique has been incorporated into the Model 622X and Model 2182A delta mode, but its implementation has been dramatically enhanced and simplified The technique can now c ancel thermoelectric offsets that drift over time, produce results in half the time of the previ - ous technique, and allow the source to control and configure the nanovoltmeter, so setting up the me asurement takes just two key presses . The improved cancellation and higher reading rate reduces measurement noise to as l ittle as 1nV . or dering Information

6220 DC Precision Current so urce

C omplete Delta Mode s ystem, w/DC Current so urce, Nanovoltmeter, and all necessary cables (GPIb cables not i ncluded) 6221/2182a C omplete Delta Mode sy stem, w/ aC a nd DC Current so urce, Nano v olt- m eter, and all necessary cables (GPIb c ables not included) a ccessories s upplied 237-a l G -2 6 .6 ft (2m), lo w Noise, Input Cable with Triax- to-al ligator Clips 501-2 .6 ft (2m) Trigger li nk Cable to connect 622x to 2182 a Ca- 180-3a E thernet Crossover Cable (6221 only) Ca- 351 C ommunication Cable between 2182a and 622x Cs- 1195-2 sa fety Interlock Connector Instruction manual on CD Getting s tarted manual (hardcopy) so ftware (downloadable) aCCEssorI E s aVaIl ablE 7006-* G PIB Cable with Straight-On Connector 7007-1 S hielded IEEE-488 Cable, 1m (3 .3 f 7007-2 S hielded IEEE-488 Cable, 2m (6 .6 f 7078-TRX-5 5 f t (1 .5 m), Low Noise, Triax-to-Triax Cable (Male on Both Ends) K PCI-488LPA I EEE-488 Interface/Controller for the PCI Bus KUSB-488B I EEE-488 USB-to-GPIB Interface Adapter sEr VICEs aVaIl ablE 6220-3Y-EW 1 -year factory warranty extended to 3 years from date of shipment 6221-3Y-EW -year factory warranty extended to 3 years from date of shipment C/6220-3Y-ISO 3 ( ISO-17025 accredited) calibrations within 3 years of purchase* C/6221-3Y-ISO 3 ( ISO-17025 accredited) calibrations within 3 years of purchase* *Not available in all countries 6220 6221 DC Current Source AC and DC Current Source Precision low current sourcing

LOW LEVEL MEASURE & SOURCE A Greater Measure of Confidence www.keithley.com 1.888.KEITHLEY (U.S. only) Precision low current sourcing The delta mode enables measuring low voltages and resistances accurately . Once the Model 622X and the Model 2182A are connected properly, the user simply presses the current source’s Delta button, followed by the Trigger button, which starts the test The Model 622X and the Model 2182A work together seamlessly and can be controlled via the GPIB interface (GPIB or Ethernet with the Model 6221) The free example control software available for the Model 622X includes a tutorial that “walks” users through the delta mode setup process . P ulsed Tests Even small amounts of heat introduced by the measurement process itself can raise the DUT’s tem - perature, skewing test results or even destroying the device . The Model 6221’s pulse measurement capability minimizes the amount of power dissipated into a DUT by offering maximum flexibility when making pulsed measurements, allowing users to program the optimal pulse current amplitude, pulse interval, pulse width, and other pulse parameters T he Model 6221 makes short pulses (and reductions in heat dissipation) possible with microsecond rise times on all ranges . The Model 6221/2182A combination synchronizes the pulse and measure- ment—a measurement can begin as soon as 16µs after the Model 6221 applies the pulse . The entire pulse, including a complete nanovolt measurement, can be as short as 50µs . Line synchronization between the Model 6221 and Model 2182A eliminates power line related noise . s tandard and ar bitrary Waveform Generator The Model 6221 is the only low current AC source on the market It can be programmed to gen - erate both basic waveforms (sine, square, triangle, and ramp) and customizable waveforms with an arbitrary waveform generator (ARB) that supports defining waveforms point by point It can generate waveforms at frequencies ranging from 1mHz to 100kHz at an output update rate of 10 megasamples/ second . P erformance s uperior to aC re sistance br idges and lo ck-In amp lifiers The Model 622X/2182A combination provides many advantages over AC resistance bridges and lock-in amplifiers, including lower noise, lower current sourcing, lower voltage measurements, less power dissipation into DUTs, and lower cost It also eliminates the need for a current p re-amplifier . Models 6220 and 6221 vs. Homemade Current so urces Many researchers and engineers who need a current source attempt to get by with a volt- age source and series resistor instead . This is o ften the case when an AC current is needed T his is because, until the introduction of the Model 6220/6221, no AC current sources were available on the market However, homemade current sources have several disadvantages vs . t rue current sources:

• H omemade Current Sources Don’t Have Voltage Compliance. You may want to be sure the voltage at the terminals of your homemade “current source” never exceeds a certain limit (for example, 1–2V in the case of many optoelectronic devices) The most straightforward way to accomplish this is to reduce the voltage source to that level This requires the series resistor to be reduced to attain the desired current If you want to program a different current, you must change the resistor while the voltage is held constant! Another possibility is to place a protection circuit in parallel with the DUT These do not have precise voltage control and always act as a parallel device, stealing some of the programmed current intended for the DUT
• H omemade Current Sources Can’t Have Predictable Output. With a homemade “current source” made of a voltage source and series resistor, the impedance of the DUT forms a voltage divider If the DUT resistance is entirely predictable, the current can be known, but if the DUT resistance is unknown or changes, as most devices do, then the current isn’t a simple function of the voltage applied The best way to make the source predictable is to use a very high value series resistor (and accordingly high voltage source), which is in direct contradiction with the need for compliance W hile it’s possible to know (if not control) the actual current coming from such an unpredictable source, this also comes at a cost This can be done with a supplemental measurement of the current, such as using a voltmeter to measure the voltage drop across the series resistor This measurement can be used as feedback to alter the voltage source or simply recorded Either way, it requires additional equipment, which adds complexity or error To make matters worse, if the homemade current source is made to be moderately predictable by using a large series resistor, this readback would require using an electrometer to ensure accuracy DC Measurement Delta Mode Measurement 4µV 5nV fi gure 2. Delta mode offers 1000-to-1 noise reduction. 6220 6221 DC Current Source AC and DC Current Source

LOW LEVEL MEASURE & SOURCE www.keithley.com 1.888.KEITHLEY (U.S. only) A Greater Measure of Confidence fi gure 4. The Model 6221 and the free example start-up control software make it easy to create complex waveforms by adding, multiplying, stringing together, or applying filters to standard wave shapes. The Model 6221 can also expand the capabilities of lock-in amplifiers in applications that already employ them For example, its clean signals and its output synchronization signal make it an ideal output source for lock-in applications such as measuring second and third harmonic device response Model 2182a N anovoltmeter The Model 2182A expands upon the capabilities of Keithley’s original Model 2182 Nano v olt- me ter . Although the Model 6220 and 6221 are compatible with the Model 2182, delta mode and differential conductance measurements require approximately twice as long to complete with the Model 2182 as with the Model 2182A Unlike the Model 2182A, the Model 2182 does not sup- port pulse mode measurements . Source Current 1/60 second (1/50 when operating off 50Hz power) Programmable: 50µs to 12ms Measurement integration period Measuring difference voltage eliminates line frequency noise, DC offsets Voltage measurement noise at line frequency Measured response voltage Pulsed measurement without line sync Line synchronized pulse measurements fi gure 3. Measurements are line synchronized to minimize 50/60Hz interference.

• a PP lI CaT IoNs o f 622X/2182a CoMbI NaT Io
• E asy instrument coordination and intuitive example software simplifies setup and operation in many applications. M easure resistances from 10n W to 100MW. One measurement system for wide ranging devices.
• L ow noise alternative to AC resistance bridges and lock-in amplifiers for measuring resistances. C oordinates pulsing and measurement with pulse widths as short as 50µs (6221 only). M easures differential conduc - t ance up to 10× faster and with lower noise than earlier solutions allow. Differential conductance is an important parameter in semi c on d uctor research for describing density of states in bulk material.
• D elta mode reduces noise in low resistance measurements by a factor of 1000. F or low impedance Hall measure - m ents, the delta mode operation of the Model 622X/2182A combination provides industry-leading noise performance and rejection of contact potentials. For higher impedance Hall measurements (greater than 100MW), the Model 4200-SCS can replace the current source, switching, and multiple high impedance voltage measurement channels. This provides a complete solution with pre-programmed test projects. 6220 6221 DC Current Source AC and DC Current Source Precision low current sourcing

LOW LEVEL MEASURE & SOURCE A Greater Measure of Confidence www.keithley.com 1.888.KEITHLEY (U.S. only) Model 6220 and 6221 specifications so urce sp ecifications range (+5% over range) a ccuracy (1 Year) 23°C ±5°C ±(% rdg. + amps) Programming r esolution Temperature Coefficient/°C 0°–18°C & 28°–50°C Typical Noise (peak-peak)/ rM s 3 0.1Hz–10Hz 6221 o nly s ettling Time 1, 2 (1% of f inal Value) Typical Noise (peak-peak)/ rM s 3 10Hz–( b o utput r esponse b andwidth ( b W) Into s hort o utput r esponse f ast (Typical3) (6221 o nly) 6220, 6221 with ou tput re sponse sl ow (Max.) 2 nA 0 .4 % + 2 p A 10 0 f A 0 .0 2 % + 2 00 f A 4 00 / 8 0 f A 2 50 / 5 0 p A 10 kHz 90 µs 100 µs nA 0 .3 p A 1 pA 0 .0 % + f A 4 0 .8 p A 2 50 / p A 10 kHz 90 µs 100 µs nA 0 .3 p A 10 pA 0 .0 % + p A 2 0 / p A 2 .5 / 0 .5 n A 10 kHz 30 µs 100 µs µA 0 .1 n A 10 pA 0 .0 % + p A 2 00 / p A 2 5 / 5 .0 n A 1 MHz 4 µ s 100 µs µA 0 .0 n A 1 nA 0 .0 05% + p A 2 / 0 .4 n A 5 00 / 100 n A 1 MHz 2 µ s 100 µs µA 0 .0 n A 10 nA 0 .0 05% + n A 2 0 / n A 1 .0 / 0 .2 µ A 1 MHz 2 µ s 100 µs mA 0 .0 µ A 10 nA 0 .0 05% + n A 2 00 / n A 5 .0 / µ A 1 MHz 2 µ s 100 µs mA 0 .0 µ A 1 µ A 0 .0 05% + n A 2 / 0 .4 µ A 2 0 / 4 .0 µ A 1 MHz 2 µ s 100 µs mA 0 .1 µ A 10 µ A 0 .0 % + µ A 1 0 / µ A 1 00 / µ A 1 MHz 3 µ s 100 µs aD DITI oNa l sourC E sP ECIfI CaT I oNs OUTPUT RESISTANCE: >10 14W (2nA/20nA range) . OU TPUT CAPACITANCE: <10pF, <100pF Filter ON (2nA/20nA range) . LO AD IMPEDANCE: Stable into 10µH typical, 100µH for 6220, or for 6221 with Output Response SLOW . V OLTAGE LIMIT (Compliance): Bipolar voltage limit set with single value . 0 .1 V to 105V in 0 .0 1V programmable steps . M AX. OUTPUT POWER: 11W, four quadrant source or sink operation . G UARD OUTPUT A C CURAC y : ±1mV for output currents <2mA (excluding output lead voltage drop) . P ROGRAM MEMOR y: N umber of Locations: 64K . Offers point-by-point control and triggering, e .g . sweeps . MA TR IGGER RA TE: 1000/s . R MS NO ISE 10Hz–20MHz (2nA–20mA Range ): Less than 1mVrms, 5mVp-p (into 50 W load) . s ourC E N o TEs 1 . S ettling times are specified into a resistive load, with a maximum resistance equal to 2V/ I full scale of range . See manual for other load conditions . 2 . S ettling times to 0 .1 % of final value are typically <2 × of 1% settling times . 3 . T ypical values are non warranted, apply at 23°C, represent the 50th percentile, and are provided solely as useful information . 2182a MEa surE MENT fu NCTIoNs DUT RESISTANCE: Up to 1G W (1ns) (100MW limit for pulse mode) . D ELTA MODE RESISTANCE MEASUREMENTS A ND D IFFERENTIAL CONDUCTANCE: Controls Keithley Model 2182A Nanovoltmeter at up to 24Hz reversal rate (2182 at up to 12Hz) . P ULSE MEASUREMENTS (6221 O NLy P ulse Widths: 50µs to 12ms, 1pA to 100mA . R epetition Interval: 83 .3 ms to 5s . ar b I T r ar Y fuN CTIoN GENE raTo r (6221 only) WAVEFORMS: Sine, Square, Ramp, and 4 user defined arbitrary waveforms . FR EQUENCy RA NGE: 1mHz to 100kHz .5 FREQUENC y ACCURAC y4: ±100ppm (1 year) . S AMPLE RAT E: 10 MSPS . A MPLITUDE: 4pA to 210mA peak-peak into loads up to 10 12W . AM PLITUDE RE SOLUTION: 1 6 bits (including sign) . A MPLITUDE ACCURAC y (<10kHz): 5 Magnitude: ±(1% rdg + 0 .2% r ange) . Offset: ±(0 .2% r dg + 0 .2% r ange) . S INE WAVE CHARACTERISTICS: A mplitude Flatness: Less than 1dB up to 100kHz .6 SQUARE WAVE CHARACTERISTICS: Overshoot: 2 .5 % max .6 V ariable Duty Cycle: 4 Settable to 1µs min . pulse duration, 0 .0 1% programming resolution . ji tter (RMS): 100ns + 0 .1 % of period .6 RAMP WAVE CHARACTERISTICS: Linearity: <0 .1 % of peak output up to 10kHz .6 ARBITRAR y WAVE CHARACTERISTICS: W aveform Length: 2 to 64K points . ji tter (RMS): 100ns + 0 .1 % of period .6 WaV E f or M NoT E s 4 . M inimum realizable duty cycle is limited by current range response and load impedance . 5 . A mplitude accuracy is applicable into a maximum resistive load of 2V/ I full scale of range . Amplitude attenuation will occur at higher frequencies dependent upon current range and load impedance 6 . T hese specifications are only valid for the 20mA range and a 50W load . GENEral COMMON MODE VOLTAGE: 250V rms, DC to 60Hz . CO MMON MODE ISOLATION: >109W, <2nF . S OURCE OUTPUT MODES: Fixed DC level, Memory List . R EMOTE INTERFACE: IEEE-488 and RS-232C S CPI (Standard Commands for Programmable Instruments) . D DC (command language compatible with Keithley Model 220) . P ASSWORD PROTECTION: 11 characters . D IGITAL INTERFACE: Handler Interface: Start of test, end of test, 3 category bits, +5V@300mA supply . D igital I/O: 1 trigger input, 4 TTL/Relay Drive outputs (33V@500mA, diode clamped) . OU TPUT CONNECTIONS: Teflon insulated 3-lug triax connector for output . B anana safety jack for GUARD, OUTPUT LO . S crew terminal for CHASSIS . D B-9 connector for EXTERNAL TRIGGER INPUT, OUTPUT, and DIGITAL I/O . T wo position screw terminal for INTERLOCK . I NTERLOCK: Maximum 10 W external circuit impedance . P OWER SUPPLy: 1 00V to 240V rms, 50–60Hz . P OWER CONSUMPTION: 120VA . EN VIRONMENT: For Indoor Use Only: Maximum 2000m above sea level . O perating: 0°–50°C, 70%R .H . up to 35°C . Derate R .H ./ °C, 35°–50°C . St orage: –25°C to 65°C, guaranteed by design . E MC: Conforms to European Union Directive 89/336/EEC, EN 61326-1 . S AFET y : Conforms to European Union Directive 73/23/EEC, EN61010-1 . V IBRATION: MIL-PRF-28800F Class 3, Random . WA RMUP: 1 hour to rated accuracies . Passive Cooling: No fan . D IMENSIONS: Rack Mounting: 89mm high × 213mm wide × 370mm deep (3 .5 i n . × 8 .3 75 in . × 14 .5 63 in .) . B ench Configuration (with handle and feet): 104mm high × 238mm wide × 370mm deep (4 .1 25 in . × 9 .3 75 in . × 14 .5 63 in .) . 6220 6221 DC Current Source AC and DC Current Source