WAFERMAXT AEROTECH | Alldatasheet
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Technical content
Mechanical-Bearing, Direct-Drive Rotary Stage WaferMaxT KEY FEATURES: Superior mechanical architecture MAXIMIZES THROUGHPUT & MINIMIZES ERROR MOTIONS Ironless motor delivers SMOOTH MOTION with exceptional dynamic capabilities LOW-PROFILE DESIGN for space- constrained applications eases assembly & integration Optional single-port rotary union provides EASY-ACCESS PNEUMATIC SERVICE to wafer chucks Combines effortlessly with WAFERMAXZ to create a compact & effective Z-THETA SOLUTION High Performance in a Low-Height Package WaferMaxT meets the extreme precision and throughput demands of cutting-edge wafer processing applications. Its ironless motor provides ultra-smooth, high-dynamic motion free from parasitic forces. Outstanding geometric performance minimizes axial-, radial- and tilt-error motions, helping to ensure superior process stability. Its high-stiffness yet low- profile design—with a large, clear aperture and optional rotary union— simplifies integration into compact, high-performance systems and machines. Choose WaferMaxT to improve process capability, increase throughput and maximize yield in critical wafer processing applications. Key Applications WaferMaxT is ideal for wafer processing applications and more, including: Wafer inspection & metrology Advanced packaging High-precision wafer handling & orientation Photolithography & mask/reticle alignment Photonic Integrated Circuit testing
aerotech.com WAFERMAXT SPECIFICATIONS Notes: 1. Available with Aerotech controllers. 2. Maximum loads are mutually exclusive. 3. Specifications are for single-axis systems, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications. The WaferMaxT easily combines with the WaferMax Z to provide a compact, 2-axis solution for alignment and focus. WaferMaxT Travel 360 degrees, continuous Tabletop Diameter 106.7 mm Drive System Direct drive brushless servomotor Maximum Bus Voltage Up to 340 VDC Maximum Torque (Continuous) 5.99 N·m Accuracy(1) ±25 µrad (±5 arc sec) Repeatability (Bi-Directional) ±10 µrad (±2 arc sec) Tilt Error Motion 97 µrad (20 arc sec) Axial Error Motion 5 µm Radial Error Motion 5 µm Maximum Speed 400 rpm (unloaded) Maximum Load(2) Axial 40 kg Radial 20 kg Inertia 0.008130 kg-m2 Mass 7.0 kg Material Aluminum Finish Black Anodize Axial and Radial Cantilevered Load Capability (WaferMaxT)
aerotech.com WAFERMAXT ORDERING OPTIONS Feedback -E3 Incremental encoder, 10052 lines/rev, 1 Vpp WaferMaxT Options -RU1 Single-port rotary union for air/vac feed-through Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required or if you desire custom integration support with your system. -TAS Integration - Test as system Testing, integration and documentation of a group of components as a complete system that will be used together (ex: drive, controller and stage). This includes parameter file generation, system tuning and documentation of the system configuration. -TAC Integration - Test as components Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system.
aerotech.com WAFERMAXT DIMENSIONS