DATASHEET SEARCH SITE | WWW.ALLDATASHEET.COM

Document overview

  • Manufacturer or author: Provided By ALLDATASHEET.COM(FREE DATASHEET DOWNLOAD SITE)
  • PDF pages: 4

Technical content

WWW.MKSInST.COM SRG-3 SPINNING ROTOR GAUGE SYSTEM The Spinning Rotor Gauge (SRG) line is well established with users around the world as a stable, high accuracy transfer standard for high vacuum pressure measurements. We continue to be at the forefront of SRG development with the introduction of the SRG-3 Spinning Rotor Gauge System. The complete SRG-3 system is compr ised of a microprocessor-based electronics unit, a measuring head and a ball/flange assembly. The measuring head easily decouples from the ball/flange assembly, allowing several permanently mounted ball/flange assemblies to be used with one measuring head and electronics unit. This facilitates taking measurements from multiple locations when continuous readings are not necessary. Features & Benefits T raceability

  • German Calibr ation Ser vice, DKD traceable
  • Ensures absolute consistency Recognized tr ansfer standard A ccuracy
  • Guaranteed precision from 5x10-7 to 1x10-2 mbar (Torr)
  • Overall measur ing r ange e xtends to 1 mbar (T orr)
  • No ther mal or ionization eff ects Stability
  • Superior long ter m stability Wetted surf aces are stainless steel Assures chamber-to-chamber consistency Pressure & Vacuum Measurement Solutions

Principle of a Spinning Rotor Gauge The sensing element of the SRG is a magnetically levitated stainless steel ball that resides in a tube connected to the vacuum system. The ball is suspended and rotated by the separable drive assembly. Once the ball reaches a certain rotational speed, the ball is allowed to free spin. Collisions of the gas molecules with the surface of the ball impart a drag which decelerates the ball. Pickup coils measure the deceleration. The electronics unit then uses an algorithm based on the sampling time, physical parameters and gas characteristics to accurately determine the pressure. Since the measurement principle is mechanical, there are no ther mal or ionization eff ects (as is the case with ionization gauges) that will influence the accur acy of the measurements . Also, the calibration constant is only w eakly influenced by the ball’s surface roughness, making the SRG a very stable reference standard. The SRG-3 will find applications in metrology and in e xperiments where high accuracy and repeatability are essential. Away from the test bench, the MKS Spinning Rotor Gauge may also be used in situ on a process chamber to assure high v acuum gauge reading accuracy and tool-to-tool consistency.This provides repeatable process results , high uptime and optimum cycle times. MKS Instruments, Inc. delivers the SRG-3 with a calibrated measuring head and ball/flange assembly along with a calibration certificate. Calibration is made against the ref erence standards of our DKD1 calibration laboratory. As a result, the Spinning Rotor Gauge SRG-3 system off ers the user consistent traceability as required for ISO9000. Should measuring flanges with non-calibrated balls be ordered, the y will be checked for usability by the factory. Calibration, T raceability, Stability — In addition to the SRG-3, MKS Instruments offers transfer standard Bar atron® capacitance manometers to meet all of your needs for vacuum gauge calibration. Dimensional Drawing — Note: Unless otherwise specified, dimensions are nominal values in millimeters Electronics - 1/2" x 19" Rack Mount, 2HE SRG-3 SRG-3

Measuring Range 5x10-5 to 100 Pa Accuracy up to 1 P a 1% of measur ing value + U; U expresses the residual drag variation 1 to 100 P a increasing up to 10% of measured v alue (typical) Long-Term Stability Better than 1% per y ear Display 4½ digit LCD displa y Pressure Display P a, mbar, or Torr; user selectable Display Format Scientific notation Analog Output 0-10 VDC, into 2kW min. load, linear or logarithmic Switching Points

2 SPDT rela

ys, adjustable, nominal switching capacity (resistive load): 1A 30VDC, 0.5A 25V AC eff Digital Interface (a) RS-232; (b) USB (USB 2.0 compatible) Measuring Flange 2¾ CF , made of stainless steel, bakeable up to 450°C (without measuring head) Rotor Stainless steel ball, 4.5 mm in diameter (nominal) Operating T emperature Electronics: 10-40°C; measuring head: 10-50°C; ball/flange assembly bakeable to 450°C Enclosure Half 19-inch r ack mount or table top ; 241mm x 185 mm x 88 mm (BxDxH) Weight Electronics: 2.5kg; measuring head: 0.6kg; measuring flange: 0.5kg Operating Voltage 85-256 V AC, 47-63 Hz W etted Materials Ball and Flange Pr ogramming Features prog rammable data sets to minimiz e set up time; database of frequently used gases with the option f or the user to add 8 additional gases Compliance CE

SRG-3 Spinning Rotor Gauge SRG3-EL Electronic Control Unit SRG-SH700-V3 Measur ing head with 3m long cable SRG-BF-CAL Ball/Flange Assembly, calibrated SRG-BF Ball/Flange Assemb ly, not calibrated The sense/drive head and ball/flange assembly of the SRG-3 are compatible with the former Spinning Rotor Gauge Types SRG-2 and SRG-2CE. SRG3 - 10/18 © 2009-2018 MKS Instruments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice. mksinst™ is a trademark and Baratron® is a registered trademark of MKS Instruments, Inc., Andover, MA. MKS Instruments, Inc. Pr essure & Vacuum Measurement Solutions

6450 Dry Creek Parkway

Longmont, CO 80503 Tel: 303.652.4400 MKS Instruments, Inc. Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 T el: 800.227.8766 (in USA) Web: www.mksinst.com