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WWW.MKSINST.COM 627E/628E/E27E/E28E HEATED ABSOlUTE BARA TRO n® CAPACiTAnCE M A n OMETER wi TH E THER n ET C OMMU ni CAT i O n S The Ethernet-enabled 627E and 628E Baratron® capacitance manometers can now network with Ethernet hubs and other devices for local or network diagnostics without disassembly or removal from the host system. Like other MKS Ethernet-equipped products, the 62xE Series manometer includes embedded Internet browser software that allows it to communicate with any Windows ®-based PC. Since the Ethernet port operates in parallel to the standard analog communications, the device can be diagnosed on a real-time basis during processing – a huge benefit for users who perform their own system analysis and troubleshooting. Even for users who do not use Ethernet networking, the 627E and 628E also have external LEDs to give a fast intuitive guide to the device’s status. The 627E and 628E models use the MKS standard capacitance sensor, while the E27E and E28E models are equipped with the MKS patented etch baffle that greatly reduces manometer drift in processes with condensable byproducts. Features & Benefits

  • Industry-leading accur acy and repeatability
  • Standard product includes both analog and Ether net communications for use in e xisting and latest generation of netw orked process tools
  • Ethernet comm unications are real-time and can be r un in parallel with analog comm unications, allowing in-situ diagnostics of de vice and process – no cab le disconnection required
  • Embedded Inter net w eb bro wser comm unicates with any Windows-based PC
  • Standard intuitiv e Gr aphical User Interf ace (GUI) with complete set of diagnostic routines that can be used f or the de vice or the process
  • Easy-to-understand e xternal indicators f or immediate device status information
  • Full Scale pressure r anges from 1,000 T orr to 0.10 Torr
  • Operating temper atures of 45°C or 100°C f or use in difficult semiconductor, displa y manufacturing, and biophar maceutical processes
  • Available with either standard sensor or patented etch baffle f or most applications
  • Pin-to-pin compatib le with other heated analog Bar atron® capacitance manometers and some competitiv e products Pressure & Vacuum Measurement Solutions

Full Scale Ranges 0.1, 0.25, 1, 2, 10, 20, 100, 500, 1000 Torr Resolution 0.001% Full Scale Accurac 627E and E27E 0.10% of Reading f or ranges of 1 Torr or higher, 0.15% of Reading for 0.1 and 0.25 Torr ranges 628E and E28E 0.25% of Reading f or ranges of 1 Torr or higher, 0.50% of Reading for 0.1 and 0.25 Torr ranges Temperature Coefficients Zero 0.002% Full Scale/°C f or all models of 1 Torr and higher; 0.005% Full Scale/°C f or 0.1 Torr range 627E, 0.01% Full Scale/°C for 0.1 Torr range 628E Span 0.02% Reading/°C Ambient Operating Temperature 45°C Models 15 to 40°C 100°C Models 15 to 50°C V olume 6.3 cm3 warm up Time 2 hours f or ranges of 1 Torr and higher; 4 hours for ranges below 1 Torr Overpressure l imit 45 psia (310 kP a) or 120% of Full Scale, whichever is higher Materials Exposed to Process Gases Inconel i nput Power Required 45°C Models ±15VDC ± 5% or +24VDC ± 5% @ 300 mA 100°C Models 600 mA Output Signal Analog 0-10VDC into > 10 k Ω load Digital Ether net Electrical Connectors Analog or 15-pin D-subminiature Digital RJ45 receptacle External i ndicators Multicolor status LED and tw o (2) green LEDs for Ethernet communications status Fittings Standard 0.50'' (12 mm) OD tube Optional 8 VCR® male or female, 8 VCO® female, NW16-KF , NW25-KF , and 1.33'' (33.8 mm) OD Conflat® Compliance CE, SEMI S2-93 Specifications *Includes non-linearity, hysteresis, and non-repeatability.

T Ordering Inf ormation Dimensional Drawing — Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). 627E/628E/E27E/E28E - 12/18 © 2017-2018 MKS Instr uments, Inc. All rights reserved. Some Baratron® capacitance manometer products may not be exported to many end user countries without both US and local government export licenses under ECCN 2B230. Specifications are subject to change without notice. mksinst™ is a trademark and Baratron® is a registered trademark of MKS Instruments, Inc., Andover, MA. Windows® is a registered trademark of Microsoft Corporation, Redmond, WA. Inconel ® is a registered trademark of Inco Alloys, Inc., Huntington, WV. VCR® and VCO® are registered trademarks of Swagelok Co., Solon, OH. Conflat® is a registered trademark of Varian Associates, Beverly, MA. Java® is a registered trademark of Oracle and/or its affiliates. B C 628E Ordering Code Example: 628E11TGAC1B1 Code Configuration 627E, standard sensor , heated to 45°C 627E 628E, standard sensor , heated to 100°C 628E E27E, etch sensor , heated to 45°C E27E E28E, etch sensor , heated to 100°C E28E Pressure Rang e, Full Scale 0.1 0.25 RE 100 500 1000 (not a vailable on E27E or E28E) Engineering Units T orr/mm Hg T mbar M kP a K Pascal L Fittings Str aight 0.50'' (12mm) OD tube BA VCR female CE VCR male CF VCR female, short tube CR NW16-KF GA NW25-KF GC VCO female D A Mini-CF rotatab le HA Accurac y 0.10% Reading (see specifications f or applicability) C 0.15% Reading (see specifications f or applicability) D 0.25% Reading (see specifications f or applicability) E 0.50% Reading (see specifications f or applicability) F Options V ertical calibration Hor izontal calibration Analog Electrical Connector 15-pin D-subminiature , thread lock B 15-pin D-subminiature , slide lock P 9-pin D-subminiature , thread lock A 9-pin D-subminiature , slide lock Z Digital Electrical Connector Ether net RJ45 jack, diagnostics MKS Instruments, Inc. Global Headquar ters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 Web: www.mksinst.com MKS Instruments, Inc. Pr essure & Vacuum Measurement Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350