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Technical content
DS-0343 Rev A Tel: 408.225.4314 www.allsensors.com Fax: 408.225.2079 info@allsensors.com
Applications
- Industrial - Vacuum technology - Pneumatic and hydraulic components (e.g. valves, pumps) - Level measuring (e.g. environmental technology) Specifications All parameters are measured at supply current of 1 mA reference conditions unless otherwise specified Standard Pressure Ranges PSI1) bar Output signal (Offset) [mV] Output signal (Span) [mV] Proof pressure [PSI1)/bar] Negative pressure [PSI1)/bar] Burst pressure [PSI1)/bar] 1.5 0.1 -2 0 2 14 33 60 15 1 -15 -1 22 ≥ 1.5 3 0.2 30 2 -15 -1 45 ≥ 3 5 0.35 -2 0 2 50 75 100 30 2 -15 -1 45 ≥ 3 15 1 -2 0 2 80 130 180 75 5 -15 -1 112 ≥ 7.5 30 2 150 10 -15 -1 225 ≥ 15 50 3.5 250 17.5 -15 -1 375 ≥ 25 100 7 500 35 -15 -1 750 ≥ 50 Supply / Performance min. typ. max. Supply current [mA] - 1 3 Supply voltage [V] - - 10 Linearity [% FSO BFSL] - 0.25 0.1 0.25 Hysteresis [%FS0] - 0.05 0.02 0.05 Input impedance [kΩ] pn ≤ 3 psi : 2.7 to 4.0 pn > 3 psi: 4.0 to 6.0 Output impedance [kΩ] pn ≤ 3 psi: 2.7 to 4.0 pn > 3 psi: 4.0 to 6.0 Insulation resistance [MΩ] 50 (between housing and sensor chip) @ 50 VDC Rise time (10 to 90 %) [ms] ≤ 0.1 1) PSI values around rounded and for reference only SPM 401 Piezoresistive Silicon Pressure Sensor Calibrated and compensated With media separation Vacuum resistant O- ring mounting Pressure ranges: 1.5 to 100 psi Page 1 of 3
Piezoresistive silicon pressure sensor Specifications DS-0343 Rev A Tel: 408.225.4314 www.allsensors.com Fax: 408.225.2079 info@allsensors.com Thermal errors pn ≤ 5 psi pn > 5psi Thermal error offset 2) [% FSO] ≤ 1.0 ≤ 0.75 Thermal error span 2) [% FSO] ≤ 1.0 ≤ 0.75 0 to 70 °C (32 to 158 °F) 0 to 85 °C (32 to 185 °F) Operating temperature ranges Medium -40 to 125 °C (-40 to 257 °F) Storage -40 to 125 °C (-40 to 257 °F) Mechanical stability Vibration 10 g RMS (20 to 2000 Hz) Schock 100 g / 11 ms Electrical connections Standard 4 Solder pads pitch 2.54 Materials / Filling fluids Housing Stainless steel 316L (1.4404) Diaphragm Stainless steel 316L (1.4435) Media wetted parts Housing, diaphragm Filling liquid Silicone oil Miscellaneous Installation position any 3) Protection class IP 00 Weight Standard: approx. . 10 g Sealing O-Ring 15,5 x 1,5 (material: FKM) Wiring diagram Dimensions (in mm) Standard 2) error band within the compensated temperature range 3) The sensors are calibrated with the face down diaphragm. By changing the mounting position the offset can shift a little for pressure ranges p n≤15 psi. Signal Supply - Supply + Signal + V This data sheet contains product specification, properties are not guaranteed. Subject to be changed without notice. Page 2 of 3
Piezoresistive silicon pressure sensor Specifications DS-0343 Rev A Tel: 408.225.4314 www.allsensors.com Fax: 408.225.2079 info@allsensors.com Ordering Codes SPM401 - Type of pressure gauge G Pressure range 1.5 psi / 100 mbar P L 1 5 3 psi / 200 mbar P 0 0 3 5 psi / 350 mbar P 0 0 5 15 psi / 1 bar P 0 1 5 30 psi / 2 bar P 0 3 0 50 psi / 3.5 bar P 0 5 0 100 psi / 7 bar P 1 0 0 Special pressure ranges 9 9 9 9 Electrical connection Solder pads 0 P 0 others 9 9 9 Housing material Stainless steel 1.4404 8 others 9 Diaphragm material Stainless steel 1.4435 1 others 9 Sealing FKM 1 others 9 Filling liquid Silicone oil 1 others 9 Design Standard 0 1 others 9 9 Special versions Standard 0 0 0 others 9 9 9 Subject to change without advance notice Page 3 of 3