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Technical content

Features

FPS SERIES PRESSURE SENSOR

  • Pressure Ranges from 0.1 to 2 inH2O (25 to 500 Pa)
  • Pressure Sensor based on thermal micro-flow measurement
  • Calibrated and Temperature compensated
  • Analog Output and Digital SPI Interface
  • High Flow Impedance
  • Very low flow-through leakage
  • High immunity to dust and humidity
  • No loss in sensitivity using long tubing
  • RoHS and REACH compliant
  • Air and other non-corrosive gasses Media Device Opera ting Pressure Pr oof Pressure5 Burst Pr essure5 FPSS025U 0.1 inH2O 0 - 25 Pa 0 - 0.25 mbar 30 psi (2 bar) 30 psi (2 bar) FPSS050U 0.2 inH2O 0 - 50 Pa 0 - 0.50 mbar 30 psi (2 bar) 30 psi (2 bar) FPSS100U 0.4 inH2O 0 - 100 Pa 0 - 1.00 mbar 30 psi (2 bar) 30 psi (2 bar) FPSS250U 1.0 inH2O 0 - 250 Pa 0 - 2.50 mbar 30 psi (2 bar) 30 psi (2 bar) FPSS500U 2.0 inH2O 0 - 500 Pa 0 - 5.00 mbar 30 psi (2 bar) 30 psi (2 bar) FPSS025B ±0.1 inH2O 0 - ±25 Pa 0 - ±0.25 mbar 30 psi (2 bar) 30 psi (2 bar) FPSS050B ±0.2 inH2O 0 - ±50 Pa 0 - ±0.50 mbar 30 psi (2 bar) 30 psi (2 bar) FPSS100B ±0.4 inH2O 0 - ±100 Pa 0 - ±1.00 mbar 30 psi (2 bar) 30 psi (2 bar) FPSS250B ±1.0 inH2O 0 - ±250 Pa 0 - ±2.50 mbar 30 psi (2 bar) 30 psi (2 bar) FPSS500B ±2.0 inH2O 0 - ±500 Pa 0 - ±5.00 mbar 30 psi (2 bar) 30 psi (2 bar) Pressure Sensor Characteristics Page 1 Gas Type Cor rection Factor Dry Air 1.00 Oxygen (O2) 1.07 Nitrogen (N2) 0.97 Argon (Ar) 0.98 Carbon dioxide (CO2) 0.56 Gas Correction Factors10 (Page 7) Electrical Connection
  • HVAC
  • Medical

Applications

1, 10 Do Not Connect 2 Vs

3 GND

4, 5 Vout

6 SCLK

7 MOSI

8 MISO

Note: Pins 1 and 10 are internally connected.

FPS Series Pressure Sensor Pressure Sensor Maximum Ratings Environmental Specifications Supply Voltage (VS) FPS 3V 2.70 to 3.30 Vdc FPS 5V 4.75 to 5.25 Vdc Output Current 1 mA Lead Specifications Average preheating temperature gradient 2.5 C/s Soak time Appr ox. 3 min Time above 217°C 50 s Time above 230°C 40 s Time above 250°C 15 s Peak Temperature 260°C Cooling Temperature gradient -3.5 C/s Temperature Ranges Compensated 0°C to 70°C Operating -20°C to 80 °C Storage -40°C to 80 °C Humidity Limits 97% RH (non condensing) Vibration1 20 g Mechanical Shock2 500 g Specification Notes note 1: Sweep 20 to 2000 Hz, 8 min, 4 cycleS per axiS, mil-StD-883, metHoD 2007. note 2: 5 SHockS, 3 axeS, mil-StD-883e, metHoD 2002.4. Specifications Page 2 Performance Characteristics4 for: FPSS025x, FPSS050x 5V Device (VS = 5.0 VDC , TA= 20 °C , PAbs = 1 bara, calibrated in air, output signals analog and digital are non-ratiometric to VS) Analog Output (Unidirectional Devices) Common Characteristics Min Typ Max Un its Non-Linearity9 - - ± (1% of reading + 0.5 % FSS) - Total Accuracy3 5 to 55°C - - ± (1.5% of reading + 1.5 % FSS) - 0 to 70°C - - ± (3.5% of reading +1.5 %FSS) - Noise Level(RMS) - 0.03 - %FSS Offset Warm-Up Shift - - less than noise - Offset Long Term Stability6 - ±0.0002 ±0.0004 inH2O/year Current Consumption (no load)8 - 7 8 mA Response Time (t63) - 5 - ms Power-On Time - - 25 ms Characteristics Min Typ Max Units Zero Pressure Offset 0.49 0.50 0.51 V Full Scale Span 3.97 4.00 4.03 V Full Scale Output - 4.50 - V Thermal Effects Offset @ 5 to 55°C - - ±20 mV Offset @ 0 to 70°C - - ±40 mV Thermal Effects Span @ 5 to 55°C - ±1.25 ±2 %FSS Span @ 0 to 70°C - ±1.75 ±2.75 %FSS

a 16035 Vineyard Blvd. Morgan Hill, CA 95037 p 408 225 4314 f 408 225 2079 e www.allsensors.com all sensors All Sensors DS-0329 Rev B Performance Characteristics4 (Cont’d) Analog Output (Bidirectional Devices) Digital Output Performance Characteristics4 for: FPSS100x, FPSS250x, FPSS500x 5V Device (VS = 5.0 VDC , TA= 20 °C , PAbs = 1 bara, calibrated in air, output signals analog and digital are non-ratiometric to VS) Page 3 Characteristics Min Typ Max Units Zero Pressure Offset 2.49 2.50 2.51 V Full Scale Span 3.97 4.00 4.03 V Output @ Max. Specified Pressure - 4.50 - V Output @ Min. Specified Pressure - 0.50 - V Thermal Effects Offset @ 5 to 55°C - - ±15 mV Offset @ 0 to 70°C - - ±30 mV Thermal Effects Span @ 5 to 55°C - ±1.25 ±2 %FSS Span @ 0 to 70°C - ±1.75 ±2.75 %FSS Characteristics Min Typ Max Units Scale Factor (Digital Output)7 0.1 inH2O / ±0.1 inH2O - 300 - coun ts/0.001 inH2O 0.2 inH2O / ±0.2 inH2O - 150 - coun ts/0.001 inH2O Zero Pressure Offset Tolerance -0.2 - +0.2 %FSS Full Scale Span Tolerance -0.75 - +0.75 %FSS Thermal Effects Offset @ 5 to 55°C - - ±60 coun ts Offset @ 0 to 70°C - - ±120 coun ts Thermal Effects Span @ 5 to 55°C - ±1 ±1.75 %FSS Span @ 0 to 70°C - ±1.75 ±2.75 %FSS Common Characteristics Min Typ Max Un its Non-Linearity9 - - ± (1% of reading + 0.5 % FSS) - Total Accuracy3 @ 5 to 55°C - - ± (1.5% of reading + 1.5 % FSS) - @ 0 to 70°C - - ± (3.5% of reading +1.5 %FSS) - Noise Level(RMS) - 0.03 - %FSS Offset Warm-Up Shift - - less than noise - Offset Long Term Stability6 - - ±0.1 %FSS/year Current Consumption (no load)8 - 7 8 mA Response Time (t63) - 5 - ms Power-On Time - - 25 ms

FPS Series Pressure Sensor Analog Output (Unidirectional Devices) Analog Output (Bidirectional Devices) Digital Output Page 4 Characteristics Min Typ Max Units Zero Pressure Offset 0.49 0.50 0.51 V Full Scale Span 3.97 4.00 4.03 V Full Scale Output - 4.50 - V Thermal Effects Offset @ 5 to 55°C - - ±10 mV Offset @ 0 to 70°C - - ±12 mV Thermal Effects Span @ 5 to 55°C - ±1 ±1.75 %FSS Span @ 0 to 70°C - ±2 ±2.75 %FSS Characteristics Min Typ Max Units Zero Pressure Offset 2.49 2.50 2.51 V Full Scale Span 3.97 4.00 4.03 V Output @ Max. Specified Pressure - 4.50 - V Output @ Min. Specified Pressure - 0.50 - V Thermal Effects Offset @ 5 to 55°C - - ±10 mV Offset @ 0 to 70°C - - ±12 mV Thermal Effects Span @ 5 to 55°C - ±1 ±1.75 %FSS Span @ 0 to 70°C - ±2 ±2.75 %FSS Characteristics Min Typ Max Units Scale Factor (Digital Output)7 0.4 inH2O / ±0.4 inH2O - 75 - coun ts/0.001 inH2O 1.0 inH2O / ±1.0 inH2O - 30 - coun ts/0.001 inH2O 2.0 inH2O / ±2.0 inH2O - 15 - coun ts/0.001 inH2O Zero Pressure Offset Tolerance -0.1 - +0.1 %FSS Full Scale Span Tolerance -0.75 - +0.75 %FSS Thermal Effects Offset @ 5 to 55°C - - ±30 coun ts Offset @ 0 to 70°C - - ±60 coun ts Thermal Effects Span @ 5 to 55°C - ±1 ±1.75 %FSS Span @ 0 to 70°C - ±2 ±2.75 %FSS Performance Characteristics4 (Cont’d)

a 16035 Vineyard Blvd. Morgan Hill, CA 95037 p 408 225 4314 f 408 225 2079 e www.allsensors.com all sensors All Sensors DS-0329 Rev B Analog Output (Bidirectional Devices) Page 5 Performance Characteristics4 for: FPSS025x, FPSS050x 3V Device (VS = 3.0 VDC , TA= 20 °C , PAbs = 1 bara, calibrated in air, output signals analog and digital are non-ratiometric to VS) Analog Output (Unidirectional Devices) Common Characteristics Min Typ Max Un its Non-Linearity9 - - ± (1% of reading + 0.5 % FSS) - Total Accuracy3 @ 5 to 55°C - - ± (1.5% of reading + 1.5 % FSS) - @ 0 to 70°C - - ± (3.5% of reading +1.5 %FSS) - Noise Level(RMS) - 0.03 - %FSS Offset Warm-Up Shift - - less than noise - Offset Long Term Stability6 - ±0.0002 ±0.0004 inH2O/year Current Consumption (no load)8 - 14 16 mA Response Time (t63) - 5 - ms Power-On Time - - 25 ms Characteristics Min Typ Max Units Zero Pressure Offset 0.29 0.30 0.31 V Full Scale Span 2.37 2.40 2.43 V Full Scale Output - 2.70 - V Thermal Effects Offset @ 5 to 55°C - - ±20 mV Offset @ 0 to 70°C - - ±40 mV Thermal Effects Span @ 5 to 55°C - ±1.25 ±2 %FSS Span @ 0 to 70°C - ±1.75 ±2.75 %FSS Characteristics Min Typ Max Units Zero Pressure Offset 1.49 1.50 1.51 V Full Scale Span 2.37 2.40 2.43 V Output @ Max. Specified Pressure - 2.70 - V Output @ Min. Specified Pressure - 0.30 - V Thermal Effects Offset @ 5 to 55°C - - ±15 mV Offset @ 0 to 70°C - - ±30 mV Thermal Effects Span @ 5 to 55°C - ±1.25 ±2 %FSS Span @ 0 to 70°C - ±1.75 ±2.75 %FSS

FPS Series Pressure Sensor Performance Characteristics4 (Cont’d) Page 6 Digital Output Performance Characteristics4 for: FPSS100x, FPSS250x, FPSS500x 3V Device (VS = 3.0 VDC , TA= 20 °C , PAbs = 1 bara, calibrated in air, output signals analog and digital are non-ratiometric to VS) Analog Output (Unidirectional Devices) Characteristics Min Typ Max Units Scale Factor (Digital Output)7 0.1 inH2O / ±0.1 inH2O - 300 - coun ts/0.001 inH2O 0.2 inH2O / ±0.2 inH2O - 150 - coun ts/0.001 inH2O Zero Pressure Offset Tolerance -0.2 - +0.2 %FSS Full Scale Span Tolerance -0.75 - +0.75 %FSS Thermal Effects Offset @ 5 to 55°C - - ±60 coun ts Offset @ 0 to 70°C - - ±120 coun ts Thermal Effects Span @ 5 to 55°C - ±1 ±1.75 %FSS Span @ 0 to 70°C - ±1.75 ±2.75 %FSS Common Characteristics Min Typ Max Un its Non-Linearity9 - - ± (1% of reading + 0.5 % FSS) - Total Accuracy3 5 to 55°C - - ± (1.5% of reading + 1.5 % FSS) - 0 to 70°C - - ± (3.5% of reading +1.5 %FSS) - Noise Level(RMS) - 0.03 - %FSS Offset Warm-Up Shift - - less than noise - Offset Long Term Stability6 - - ±0.1 %FSS/year Current Consumption (no load)8 - 14 16 mA Response Time (t63) - 5 - ms Power-On Time - - 25 ms Characteristics Min Typ Max Units Zero Pressure Offset 0.29 0.30 0.31 V Full Scale Span 2.37 2.40 2.43 V Full Scale Output - 2.70 - V Thermal Effects Offset @ 5 to 55°C - - ±10 mV Offset @ 0 to 70°C - - ±12 mV Thermal Effects Span @ 5 to 55°C - ±1 ±1.75 %FSS Span @ 0 to 70°C - ±2 ±2.75 %FSS

a 16035 Vineyard Blvd. Morgan Hill, CA 95037 p 408 225 4314 f 408 225 2079 e www.allsensors.com all sensors All Sensors DS-0329 Rev B Performance Characteristics4 (Cont’d) Page 7 Specification Notes (Cont’d) note 3: total accuracy iS tHe combineD error from offSet anD Span calibration, linearity, preSSure HyStereSiS anD temperature effectS. note 4: tHe SenSor iS calibrateD witH a common moDe preSSure of 1 bar abSolute. Due to tHe maSS flow baSeD meaSuring principle, variationS in abS- olute common moDe preSSure neeD to be compenSateD accorDing to tHe following formula: note 5: tHe max. common moDe preSSure iS 30 pSi note 6: figure baSeD on accelerateD lifetime teSt correSponDing to 1 year of life. note 7: tHe Digital output Signal iS a SigneD, two’S complement integer. negative preSSureS will reSult in a negative output. note 8: pleaSe contact all SenSorS corporation for low power optionS. note 9: non-linearity referS to a terminal baSeD fSl (fitting StraigHt line) going tHrougH tHe actual zero preSSure reaDing. note 11: for correct operation of fpS 3v DeviceS, tHe Device Driving tHe Spi buS muSt Have a minimum Drive capability of ± 2 mA. gas correction factor ΔPeff = ΔPsensor x ΔPeff = True differenti al pressure ΔPsensor = Differential pressure as indicated by output voltage Analog Output (Bidirectional Devices) Digital Output Characteristics Min Typ Max Units Zero Pressure Offset 1.49 1.50 1.51 V Full Scale Span 2.37 2.40 2.43 V Output @ Max. Specified Pressure - 2.70 - V Output @ Min. Specified Pressure - 0.30 - V Thermal Effects Offset @ 5 to 55°C - - ±10 mV Offset @ 0 to 70°C - - ±12 mV Thermal Effects Span @ 5 to 55°C - ±1 ±1.75 %FSS Span @ 0 to 70°C - ±2 ±2.75 %FSS Characteristics Min Typ Max Units Scale Factor (Digital Output)7 0.4 inH2O / ±0.4 inH2O - 75 - coun ts/0.001 inH2O 1.0 inH2O / ±1.0 inH2O - 30 - coun ts/0.001 inH2O 2.0 inH2O / ±2.0 inH2O - 15 - coun ts/0.001 inH2O Zero Pressure Offset Tolerance -0.1 - +0.1 %FSS Full Scale Span Tolerance -0.75 - +0.75 %FSS Thermal Effects Offset @ 5 to 55°C - - ±30 coun ts Offset @ 0 to 70°C - - ±60 coun ts Thermal Effects Span @ 5 to 55°C - ±1 ±1.75 %FSS Span @ 0 to 70°C - ±2 ±2.75 %FSS Pabs ΔPeff = ΔPsensor x 14.5 psia ΔPeff = True differential pressure ΔPsensor = Differential pressure as indicated by output voltage ΔPabs = Current absolute common mode pressure

FPS Series Pressure Sensor SPI - SERIAL PERIPHERAL INTERFACE Page 8 Introduction The FPS serial interface is a high-speed data input and output communication port that is asynchronous to the internal conversion cycle. The serial interface operates in 3-wire SPI mode. In this setup, the MOSI and MISO pins are tied together, forming a bidirec- tional data line to the master microcontroller. The remaining serial interface connections consist of chip select (/CS) and serial clock (SCLK). Care should be taken to ensure that the sensor is properly connected to the master microcontroller. Refer to the manufacturer's datasheet for more infor- mation regarding physical connections. Signal control The serial interface is enabled by asserting /CS low. The serial input clock, SCLK, is gated internally to begin accepting the input data at MOSI, or sending the output data on MISO. When /CS rises, the data clocked into MOSI is loaded into an internal register. Note: If SPI communication is not required (i.e. only analog output is being used) pins 6 to 8 must be connected to ground and pin 9 to Vs. Failure to do so may result in damage to the sensor. Note: It is important to adhere to the communication protocol in order to avoid damage to the Sensor. Data read When powered on, the sensor begins to continuous- ly measure pressure. To initiate data transfer from the sensor, the following three unique bytes must be written sequentially, MSB first, to the MOSI pin (see Fig. 1): Step Hexadecimal Binary Description 1 0x2D B00101101 Poll current pressure measurement 2 0x14 B00010100 Send result to data register 3 0x98 B10011000 Read data register The entire 16 bit content of the FPS register is then read out on the MISO pin, MSB first, by applying 16 successive clock pulses to SCLK with /CS asserted low. Note that the value of the FPS is held at zero for internal signal processing purposes. This is below the noise threshold of the sensor and thus its fixed value does not affect sensor performance and accuracy. From the digital sensor output the actual pressure value can be calculated as follows: So for a 1.0 inH2O sensor (FPSS250B...) with a scale factor of 120 a digital output of 30,000 counts (7530’h) calculates to a positive pressure of 1.0 inH2O. Similarly, a digital output of -30,000 counts (8AD0’h) calculates to a negative pressure of -1.0 inH2O. Fig. 1 : Data Transfer SCLK (CPOL=0) (CP AH=0) MOSI MISO /CS 0 101 1 1 0 0 0 101 0 000 Step 2Step 1 SCLK (CPOL=0) (CP AH=0) MOSI MISO /CS 1 0 1 1 0 00 Data from sensorStep 3 15 14 13 12 1 1 10 987654 3210 MSB scale factor Pressure [inH2O] = digital output [counts] counts inH2O

a 16035 Vineyard Blvd. Morgan Hill, CA 95037 p 408 225 4314 f 408 225 2079 e www.allsensors.com all sensors All Sensors DS-0329 Rev B Serial Interface Specification Parameter Symbol Conditions Min. Typ . Max. Units Internal Oscillator Clock Frequency fICLK OSC(4:0)=00000 3.3 4.15 5.3 MHZ External Clock Frequency fECLK VCKSEL=0 Min. - 0.2 - MHZ Max. - 5 - MHZ External Master Clock Input Low Time fECLKIN LO tECLK=1/fECLK 40 - 60 %tECLK External Master Clock Input High Time fECLKIN HI tECLK=1/fECLK 40 - 60 %tECLK SCLK Setup to Falling Edge /CS tSC - 30 - - ns /CS Falling Edge to SCLK Rising Edge Setup Time tCSS - 30 - - ns /CS Idle Time tCSI fCLK= 4 MHZ 1.5 - - µs SCLK Falling Edge to Data Valid Delay tDO CLOAD=15 pF - - 80 ns Data Valid to SCLK Rising Edge Setup Time tDS - 30 - - ns Data Valid to SCLK Rising Edge Hold Time tDH - 30 - - ns SCLK High Pulse Width tCH - 100 - - ns SCLK Low Pulse Width tCI - 100 - - ns /CS Rising Edge to SCLK Rising Edge Hold Time tCSH - 30 - - ns /CS Falling Edge to Output Enable tDV CLOAD=15 pF - - 25 ns /CS Rising Edge to Output Disable tTR CLOAD=15 pF - - 25 ns FPS (5 V Supply) Maximum Output Load Capacities CLOAD RLOAD= ∞, - 200 - pF Phase Margin > 55 ° Input Voltage, Logic HIGH VIH - 0.8 x V s - - V Input Voltage, Logic LOW VIL - - - 0.2 x V s V Output Voltage, Logic HIGH VOH RLOAD= ∞, Vs-0.1 - - V RLOAD= 2 k Ω, Vs-0.15 - - V Output Voltage, Logic LOW VOL RLOAD= ∞, - - 0.5 V RLOAD= 2 k Ω, - - 0.2 V FPS (3 V Supply)11 Maximum Output Load Capacities CLOAD RLOAD= 1 k Ω, - 15 - pF Input Voltage, Logic HIGH VIH - 0.65 x V s - - V Input Voltage, Logic LOW VIL - - - 0.35 x V s V Output Voltage, Logic HIGH VOH IO= -20 µA Vs-0.4 - - V Output Voltage, Logic LOW VOL IO=20 µA - - 0.4 V Page 9 Fig. 2 : Timing Diagram CSSt tDV SCLK MOSI MISO /CS tSC tCL CHt tDH tDS DOt tTR tCSH tCSI

FPS Series Pressure Sensor Package Drawings Page 10 10 9 8 7 6 1 2 3 4 5 5.017.53 ±0.15 12.70 ±0.15 17.70 18.03 Ø 2.20 6.26 14.97 7.85 8.95 ±0.5 5.60 ±0.2 15.65 16.05 3.0 0.25 0.46 2.54 10.16 5.60 3.10 ±0.2 1.60 ±0.2 2.50 10.70 High pressure port 10 9 8 7 6 1 2 3 4 5 5.017.53 ±0.15 12.70 ±0.15 17.70 18.03 Ø 2.20 6.26 15.22 1.43 5.60 ±0.2 5.08 3.0 0.25 0.51 1.27 2.54 5.60 3.10 ±0.2 1.60 ±0.2 2.50 10.70 High pressure port 13.85 dimensions in mm dimensions in mm

a 16035 Vineyard Blvd. Morgan Hill, CA 95037 p 408 225 4314 f 408 225 2079 e www.allsensors.com all sensors All Sensors DS-0329 Rev B How To Order Page 11 Series Pressure Range Calibration Housing Output Grade FPS S025 0.1 inH2O (25 Pa) B Differential (Bidirectional) E FA01 SMT, 2 ports same side 3 non-ratiometric,

3 V supply

S050 0.2 inH2O (50 Pa) U Gage (Unidirectional) F FA02 DIP, 2 ports 6 non-ratiometric,

5 V supply

S100 0.4 inH2O (100 Pa) S250 1 inH2O (250 Pa) S500 2 inH2O (500 Pa) Example: FPS S250 B F 6 S Options All Sensors reserves the right to make changes to any products herein. All Sensors does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others.