SMP220 AEROTECH | Alldatasheet

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www.aerotech.com Dedicated to the Science of Motion Ultra-High Precision Multi-Axis Motion Platform Surface Measurement Motion Platform [SMP] CZ RR Spherical Aspheric Cylindrical TT C Z RR TT C Z

  • 2D and 3D contouring - Measurement of spherical, aspheric and cylindrical shapes (Application example: precision optical component measurement) - Scanning or point-to-point motion profiles - Available in multiple configurations
  • Generic high-speed electrical interface between the motion and sensor controller
  • Open architecture software to integrate a large variety of sensors such as white light or multi-wavelength interferometers, camera systems or capacitive probes
  • Easy-to-use, advanced motion algorithms ease motion profile generation Higher Precision
  • Axis repeatability in the low nanometer range
  • Nanometer-level minimum incremental motion (resolution)
  • Ultra-smooth motion even at very low velocities Reduced Processing Time
  • Save up to 40% of measurement time compared with conventional Cartesian systems
  • Real-time communication between motion and sensor controller provides synchronization of measurement and position data
  • Fast data access during the measurement and intelligent data management Minimal Footprint
  • 60% footprint savings compared to Cartesian systems Advance to the next level of surface measurement technology by utilizing Aerotech’s Surface Measurement Motion Platform (SMP). The SMP is a complete multi-axis motion system that is specifically designed to provide an ideal motion platform for surface measurement applications. The SMP is optimized to provide more flexibility in 2D and 3D contouring, higher precision with nanometer resolution, significantly reduced processing time and minimal footprint. Aerotech’s Surface Measurement Platform SMP Benefits

C Z RR Spherical Aspheric CylindricalTT C Z RR TT C Z Common Surface Measurement Applications Aerotech’s industry leading SMP platform was used to generate this state-of-the-art surface contour plot. Actual Surface Contour Plot

Axis C RR Z (Optional) TT (Optional) Resolution 0.08 arc sec 1 nm 1 nm 0.01 arc sec Accuracy ±2 arc sec ±0.3 µm ±0.5 µm 3 arc sec Repeatability <1 arc sec ±75 nm ±100 nm 1.5 arc sec Straightness ±1.0 µm ±1 µm Flatness ±1.0 µm ±1 µm Axial Error <100 nm Radial Error <250 nm Tilt Error <0.7 arc sec Travel 360° continuous 110 mm 50 mm 180° Maximum Speed 1800°/s 350 mm/s 200 mm/s 120°/s SMP220 Individual Axis Specifications SMP220 System Details Maximum part size/mass: 220 mm diameter; 31 kg Maximum sensor mass: 1.5 kg Sensor motion axes (RR, Z and TT axes): All sensor axes are direct drive, brushless-motor- driven servo axes Part motion axis (C axis): 360° continuous rotation, high- precision Aerotech rotary air-bearing

458.2 BB 380 148.4 A ABL MOTOR/FEEDBACK ABRS MOTOR/FEEDBACK ABRS SUPPLY C-BALANCE SUPPLY C-BALANCE REGULATOR ANT-L R [110 mm] TRAVEL ANT-R(TT AXIS)

180 ROTATION

ABRS(C AXIS) CONTINUOUS

360 ROTATION

75 B.C. 50 B.C. 12X M3X0.5 3 30° 60° TYP. DETAIL A SCALE 1 : 8 377.5 C SECTION B-B SCALE 1 : 16 160 B.C. 125 B.C. 100 B.C. 75 B.C. 50 B.C. 30° TYP. 177.1 TABLE TOP APERTURE 54X M5X0.8 7.5 DETAIL C SCALE 1 : 8 477.5 157.5 86.5 DIMENSIONS: MILLIMETERS LINEAR AXIS SHOWN AT THE CENTER OF TRAVEL ANT-L Z [50 mm] TRAVEL REVISIONS MCN REV. DESCRIPTION DATE APPROVED TBYRNE MODEL BY: MODEL FILENAME: SMP220-CAT ES16890-10 PART CODE: ANT95-50-L-Z/ANT95-180-R SMP220_CAT PART NAME: DWG. NO. REV ABRS200MP/ANT130-110/ SHEET 1 OF 1 FEB-2014 DATE MMAURER DRAW TBYRNE TBYRNE NAME CHECK APPR. FEB-2014 FEB-2014 PLACE DRAWING VIEWS BELOW

Axis C RR Z (Optional) TT (Optional) Resolution 0.01 arc sec 1 nm 1 nm 0.01 arc sec Accuracy ±2 arc sec ±0.5 µm ±0.5 µm 3 arc sec Repeatability 1 arc sec ±100 nm ±100 nm 1.5 arc sec Straightness ±0.5 µm ±1 µm Flatness ±0.5 µm ±1 µm Axial Error <100 nm Radial Error <250 nm Tilt Error <0.5 arc sec Travel 360° continuous 150 mm 50 mm 180° Maximum Speed 3000°/s 300 mm/s 200 mm/s 120°/s SMP320 Individual Axis Specifications SMP320 System Details Maximum part size/mass: 320 mm diameter; 66 kg Maximum sensor mass: 1.5 kg Sensor motion axes (RR, Z and TT axes): All sensor axes are direct drive, brushless-motor- driven servo axes Part motion axis (C axis): 360° continuous rotation, high- precision Aerotech rotary air-bearing

517.2 BB 425 172.8 A 87.5 112.5 ABL MOTOR/FEEDBACK ABRS MOTOR/FEEDBACK ABL SUPPLY ABRS SUPPLY OPTIONAL VAC SUPPLY C-BALANCE SUPPLY C-BALANCE REGULATOR CUSTOMER PORT ABRS(C AXIS) CONTINUOUS R [150 mm] TRAVEL ANT-R(TT AXIS) 75 B.C. 70 B.C. 50 B.C. 60° TYP 30° TYP M5X0.8 THD. (3) PLACES AS SHOWN M3X0.5 - 6H 3 (12) PLACES AS SHOWN DETAIL A SCALE 1 : 7 410 C SECTION B-B SCALE 1 : 14 15.00° TYP 15.00° TYP 228.1 TABLETOP 210 B.C. 175 B.C. 150 B.C. 125 B.C. 100 B.C. 50 B.C. APERATURE M5x0.8 THD. 7.5 (66) PLACES AS SHOWN DETAIL C SCALE 1 : 7 172 67 520 10-32 UNF THD (ROTARY UNION OPTION) DIMENSIONS: MILLIMETERS LINEAR AXIS SHOWN AT THE CENTER OF TRAVEL ANT-L Z [50 mm] TRAVEL SMP320 System Dimensions

Axis C RR Z (Optional) TT (Optional) Resolution 0.005 arc sec 1 nm 1 nm 0.01 arc sec Accuracy ±2 arc sec ±200 nm ±0.5 µm 3 arc sec Repeatability <1 arc sec ±125 nm ±100 nm 1.5 arc sec Straightness ±1.5 µm ±2.5 µm Flatness ±1.5 µm ±2.5 µm Axial Error <100 nm Radial Error <250 nm Tilt Error <0.5 arc sec Travel 360° continuous 260 mm 100 mm 180° Maximum Speed 3000°/s 500 mm/s 200 mm/s 120°/s SMP420 Individual Axis Specifications SMP420 System Details Maximum part size/mass: 420 mm diameter; 97 kg Maximum sensor mass: 1.5 kg Sensor motion axes (RR, Z and TT axes): All sensor axes are direct drive, brushless-motor- driven servo axes Part motion axis (C axis): 360° continuous rotation, high- precision Aerotech rotary air-bearing

704.7 230 BB 640 257.5 A ABL MOTOR/FEEDBACK ABRS MOTOR/FEEDBACK ABRS SUPPLY C-BALANCE SUPPLY C-BALANCE REGULATOR ANT-L R [260 mm] TRAVEL ANT-R(TT AXIS) ABRS(C AXIS) CONTINUOUS 75 B.C. 50 B.C. 12X M3X0.5 3 30° 60° TYP. DETAIL A SCALE 1:10 651.7 C SECTION B-B SCALE 1 : 20 22.5° TYP. 278.1 TABLETOP APERTURE 100 B.C. 150 B.C. 200 B.C. 260 B.C. 56X M6X1.0 9 DETAIL C SCALE 1:10 223.7 231.2 770 10-32 UNF THD (ROTARY UNION OPTION) DIMENSIONS: MILLIMETERS LINEAR AXIS SHOWN AT THE CENTER OF TRAVEL ANT-L Z [100 mm] TRAVEL SMP420 System Dimensions

Aerotech Operator Interface Aerotech’s Operator Interface can be customized to suit any measurement application. This allows fast and efficient deployment of a custom solution. Position Synchronized Output (PSO) Aerotech’s Position Synchronized Output (PSO) functionality provides a digital output based on real-time position feedback on up to three axes, providing precise sensor data capture. State-of-the-Art Control Electronics and Software that Complement the SMP

Corporate Headquarters • Pittsburgh, PA • USA Worldwide startup service and on-site training Fully equipped on-site training facilities Worldwide Service and SupportHigh Volume Manufacturing Hundreds of thousands of axes installed worldwide Aerotech UK Aerotech Germany Aerotech Japan Aerotech China Aerotech Taiwan

Aerotech’s Worldwide Sales and Service Locations  - Aerotech Headquarters  - Direct Field Sales Office  - Aerotech Subsidiary  - Representative CA0414A WORLD HEADQUARTERS Aerotech, Inc.:101 Zeta Drive, Pittsburgh, PA 15238 • Ph: 412-963-7470 • Fax: 412-963-7459 • Email: sales@aerotech.com Aerotech France: 28300 Coltainville • Ph: +33 2 37 21 87 65 • Fax: +44 (0)1256 855649 • Email: cmonnier@aerotech.com Aerotech Germany: Gustav-Weißkopf-Str. 18 • 90768 Fürth, Germany • Ph: +49 (0)911 967 9370 • Fax: +49 (0)911 967 93720 • Email: sales@aerotechgmbh.de Aerotech UK: The Old Brick Kiln • Ramsdell, Tadley • Hampshire RG26 5PR • Ph: +44 (0)1256 855055 • Fax: +44 (0)1256 855649 • Email: sales@aerotech.co.uk Aerotech China: Room 101, No. 28 Building • Tianlin Road 140 • Xuhui District • Shanghai, China 200234 • Ph: +86 (21) 6126 1058 • Email: sales@aerotech.com Aerotech Japan: WBG Marive East 22F • 2-6-1 Nakase • Mihama Ward, Chiba • Japan 261-7122 • Ph: +81 (0)50 5830 6821 • Fax: +81 (0)43 306 3773 • Email : sales@aerotechkk.co.jp Aerotech Taiwan: 5F, No 32, Aly 18, Ln 478 • Ruiguang Road • Neihu District, Taipei City, 114 • Taiwan R.O.C. • Ph: +886 (0)2 8751 6690 • Email: sales@aerotech.tw