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DOC # 40DS3008.04 SM5G-GG Series Small, Gauge Pressure Sensor

DESCRIPTION

The SM5G-GG Series is a small outline SO8 packaged pressure sensor that incorporates SMI’s new SM30G MEMS piezoresistive pressure sensing die. The SM5G-GG Series has been optimizedto provide the highest possible accuracy for a package of this size. Performance is achieved through careful resistor placement and mechanicalconfiguration alongwithadvancedMEMSprocess ing. Thepackagedsensorisintendedforhighvolumeapplication swhere cost is a critical factor, such as industrial and medical products. Samples of the SM5G-GG Series are available as a gauge pressure sensors in several pressure ranges. It is designed to be surface- mounted on ceramic or PC board substrates by high-volume OEM manufacturers. Page 1

FEATURES

  • Improved stability with integrated field shields
  • Small SO8 surface-mount package
  • 90 millivolt output
  • Constant current or constant voltage drive
  • Ported configuration
  • Wide operating temperature range (-40°to +125°C) The SM5G-GG Series is in a ported package. It can be used to sense pressure inamanifold configurationwithanO-ringseal. TheSM5G-GGSeries isavailable insticksorintape&reel. Industrial Consumer Medical Handheld Meters Sports Equipment WoundTherapy Pneumatic Gauges Appliances Health Monitoring Pressure Switches Blood Pressure Bioreactors

DOC # 40DS3008.04 SM5G-GG Series www.si-micro.com ABSOLUTE MAXIMUM RATING TABLE All parameters are specified at VDD = 5.00 V DC SUPPLY at 25 oC, unless otherwise noted. No. Characteristic Symbol Minimum Typical Maximum Units 1 Supply Voltage (a) VDD 0.0 10 V

2 Operating Temperature Range T OP -40 +125 °C

3 Storage Temperature Range T STG -40 - +125 °C

No. Product Operating Pressure Proof Pressure (P PROOF ) BurstPressure (P BURST ) 4a SM5G-005S 0-5 PSI 15 PSI 25 PSI 4b SM5G-015S 0-15 PSI 45 PSI 75 PSI 4c SM5G-030S (b) 0-30 PSI TBD TBD 4d SM5G-080S (b) 0-80 PSI TBD TBD Page 2 Notes: a. If driven with constant current, the maximum supply voltage must not exceed 10 V. Notes: b. This product is in development

DOC # 40DS3008.04 SM5G-GG Series www.si-micro.com No. Characteristic Symbol Minimum Typical Maximum Units

5 Span (c, d)

5, 15, 80 (b) PSI VSPAN 60 90 120 mV 30 (b) PSI 55 80 105 mV

6 Zero Offset V ZERO -25 10 45 mV

7 TC Span (c, e, f) TCS -0.240 -0.19 -0.155 %FS/ oC

8 TC Zero Offset (c, e, f) TCZ -75 - 75 μV/ oC

9 TC Resistance (c, e, f) TCR 0.24 0.275 0.33 %R B/°C

10 Linearity (c, f)

5 PSI

-0.35 - 0.35 %FS 11 Bridge Resistance R B 4.0 5.0 6.0 kOhm 12 Pressure Hysteresis (g) Phys 0.1 %FS 13 Thermal Hysteresis (h) Thys 0.15 %FS OPERATING CHARACTERISTICSTABLE All parameters are specified at V DD = 5.0 V DC SUPPLY at 25°C, unless otherwise noted. Notes: b. This product is in development. c. Tested on a sample basis. d. The device can only be driven with the supply vol tage connected to the pins as shown. e. Determined by measurements taken at -40°C and 125 °C. f. Defined using best fit straight line. g. Pressure hysteresis describes a phenomenon whereb y the same applied pressure results in different output signals, depending upon whether the pressure is approached from a lower or higher pressure. The values shown represent the maximum values over the specified operating pressure and temperature range. h. Temperature hysteresis describes a phenomenon whe reby the same applied temperature results in different output signals depending upon whether the temperature is approached from a lower or higher temperature. The values shown represent the maximum change of zero offset at 25°C when the device is cycled over the specified operating temperature range. Page 3

DOC # 40DS3008.04 SM5G-GG Series www.si-micro.com Diagrams & Dimensions Page 4 - All dimensions are for reference only - All dimensions are in mm

DOC # 40DS3008.04 SM5G-GG Series www.si-micro.com Typical Operation Pin No. Description Type Value 2 +Sig AnalogOut -

4 Gnd Gnd 0 V

4 Gnd

DOC # 40DS3008.04 SM5G-GG Series www.si-micro.com Order Code Pressure Type Full-Scale Pressure Range Cap Configuration Shipping Configuration SM5G-GGG-T-005S-000 Gauge 5PSI Port Sticks or Tape & ReelSM5G-GGG-T-015S-000 15 PSI

Ordering Information

  • REACHcompliant
  • RoHScompliant
  • PFOS/PFOAcompliant
  • ForqualificationspecificationspleasecontactSalesats ales@si-micro.com Part Number Legend Page 6

DOC # 40DS3008.04 Silicon MicrostructuresWarrantyand Disclaimer: Silicon Microstructures, Inc. reserves the right to make changes without further notice to any products herein and to amendthecontentsofthisdatasheetatanytimeandatitssol ediscretion. Information in this document is provided solely to enable so ftware and system implementers to use Silicon Microstructures, Inc. products and/or services. No express or implied copyright licenses are granted hereunder to designorfabricateanysilicon-basedmicrostructuresbas edontheinformationinthisdocument. Silicon Microstructures, Inc. makes no warranty, representation, or guarantee regarding the suitability of its products for any particular purpose, nor does Silicon Microstructures, Inc. assume any liability arising out of the applicationor use of any product or silicon-based microstructure, and specifically disclaims any and all liability, including without limitationconsequentialorincidentaldamages.“Typical ”parameterswhichmaybeprovidedinSiliconMicrostructur e’s datasheets and/or specifications can and do vary indifferent applications and actual performance may vary over time. Alloperatingparameters,including“Typicals”,must be va lidatedforeachcustomerapplicationby customer’stechni cal experts.SiliconMicrostructures,Inc.doesnot conveyany license underitspatent rightsnorthe rightsofothers.Sil icon Microstructures,Inc.makesno representationthatthe cir cuitsare free ofpatentinfringement.SiliconMicrostruct ures, Inc. products are not designed, intended,orauthorized foruse ascomponents in systemsintended forsurgicalimplant into the body,orother applications intendedto support or sustain life, or for any other application in which the failure of the Silicon Microstructures, Inc. product could create asituation where personal injury or death may occur. Should Buyer purchase or use Silicon Microstructures, Inc. products for any such unintended or unauthorized application, Buyer shall indemnify and hold Silicon Microstructures, Inc. and its officers, employees, subsidiaries, affiliates,and distributors harmless against all claims, costs, damages,and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even ifsuchclaimallegesthatSiliconMicrostructures,Inc.wa snegligentregardingthedesignormanufactureofthepart. Silicon Microstructures, Inc. warrants goods of its manufacture as being free of defective materials and faulty workmanship. Silicon Microstructures, Inc. standard product warranty applies unless agreed to otherwise by Silicon Microstructures, Inc. in writing; please refer to your order acknowledgement or contact Silicon Microstructures, Inc. directly for specific warranty details. If warranted goodsare returned to Silicon Microstructures, Inc. during the period of coverage, Silicon Microstructures, Inc. will repair or replace, at its option, without charge those items it finds defective. The foregoing is buyer’s sole remedy and is in lieu of all warranties, expressed or implied, including those of merchantability and fitness for a particular purpose. In noevent shall Silicon Microstructures, Inc. be liable for consequential,special,orindirectdamages. While Silicon Microstructures, Inc. provides applicationassistance personally, through its literature and the Silicon Microstructures, Inc. website, it is up to the customer to determine the suitability of the product for its specific application. The information supplied by Silicon Microstructures, Inc. is believed to be accurate and reliable as of this printing. However, Silicon Microstructures, Inc. assumesno responsibility for its use. Silicon Microstructures, Inc. assumes no responsibility for any inaccuracies and/or errors in this publication and reserves the right to make changes withoutfurthernoticetoanyproductsorspecificationshe rein SiliconMicrostructures,Inc.TM andthe SiliconMicrostru ctures, Inc.logo are trademarksofSiliconMicrostructures,Inc. Allotherserviceorproductnamesarethepropertyoftheirr espectiveowners. ©SiliconMicrostructures,Inc.2001-2016.Allrightsrese rved. www.si-micro.com SM5G-GG Series Page 7