SFC6000D-20SLM

SFM6000D SENSIRION | Alldatasheet

Document overview

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Technical content

www.sensirion.com/sfc6000 Jan 2023 – v. 0.1 1/12 Figure 1: CMOSens® flow sensor diagram. SFC6000D EK-F5x Evaluation Kit for SFC6xxxx, SFM6xxxx, SFC5xxx and SFM5xxx SFM6000D

CMOSens SFC6000D / SFM6000D Mass Flow Controller / Meter for Gases www.sensirion.com/sfc6000 Jan 2023 – v. 0.1 2/12 Combined with advanced control algorithms, SFC6000D offers greatly reduced settling times compared to conventional mass flow controllers. Furthermore, a special arrangement of the two temperature sensors, on-chip temperature compensation and the minimization of noise sources lead to unbeatable performance with regards to repeatability and accuracy over a large dynamic range. Thanks to the unique CMOSens technology, the SFC6000D mass flow controllers and SFM6000D mass flow meters show zero-drift performance and control true mass flow independently of the ambient temperature and pressure changes. Figure 2: Cross-section view of the gas channel.

CMOSens SFC6000D / SFM6000D Mass Flow Controller / Meter for Gases www.sensirion.com/sfc6000 Jan 2023 – v. 0.1 3/12

1 CMOSens SFC6000D and SFM6000D specifications

Specification Air & N2* O2 N2O Ar CO2* Calibrated gas number 1 (default) 0 3 4 2 Full scale flow [slm] SFX6000D-5slm 5 5 2 2 2 SFX6000D-20slm 20 20 10 10 10 SFX6000D-50slm 50 50 20 20 20 Accuracy whichever is greater Repeatability whichever is greater [% set point] 0.20 [% full scale] 0.02 Specification Flow range Unit 5 slm 20 slm 50 slm Typical setting time1 (SFC only) 100 ms Measurement frequency 1000 Hz Control / measurement range (SFC / SFM) 0.2% - 100% full scale (500:1) Operating temp. (ambient & gas) 5 – 50 / 41 – 122 °C / °F Warming up time2 1 (during the first 5 minutes the accuracy may be below specifications) s Maximum inlet overpressure 10 / 145 bar / psig Maximum differential pressure3 SFC6000D 7 / 102 5.5 / 80 4.0 / 58 bar / psig SFM6000D non applicable Supplied fittings Push-in: tube outer diameter 6 mm, Downmount (exchangeable with Festo QSP 18 mm interface) Interface Digital: RS 485 and I2C Flow units slm *Air/N2 and CO2 are used for physical calibration. The other gasses are modelled. The accuracy stated for the modelled gasses is “typical” and cannot be guaranteed 1 Step answer from 10% to 100% of full scale within 5% of set point error band. 2 to within 2 % of setpoint 3 Pressure between flow inlet and flow outlet. For availability of higher differential pressure option, please contact Sensirion Table 1: Overview of CMOSens SFC6000D Mass Flow Controller and SFM6000D Mass Flow Meter Specifications. X stands for C=controller, or M=Meter. All data, unless otherwise noted, apply for the following calibration conditions: Temperature 20°C, Air and horizontal mounting position. SFC is calibrated at 3.0 bar overpressure (inlet: 4.0 bar absolute) against atmosphere (outlet: 1.0 bar absolute). SFM – at atmospheric pressure.

CMOSens SFC6000D / SFM6000D Mass Flow Controller / Meter for Gases www.sensirion.com/sfc6000 Jan 2023 – v. 0.1 4/12 Figure 3: Accuracy and repeatability at different set points. s.p. = set point.

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1.5 Wide control and measurement range

Ultra-wide control range of the SFC6000 brings a decisive benefit in applications with a wide dynamic range of gas flows. Instead of two devices used for high flow and low flow ranges, a single SFC6000 device can efficiently cover a flow range of three orders of magnitude. Control and measurement range is defined as 0.2% - 100% full scale. This means that a mass flow controller with e.g. 50 slm full scale flow, can control flows lower than 0.1 slm. When relying on repeatability rather than absolute accuracy, even lower flows can be controlled.

1.6 Pressure drop

Mass flow controllers need pressurized gas sourced to operate. Pressure drop is generated, when gas passes through a mass flow controller. When evaluating a mass flow controller, it is important to verify that at maximum required flow rate, for a given gas, the pressure drop will be smaller than the inlet pressure – otherwise the desired maximum flow rate will not be possible to achieve. Mass flow meters have generally much lower pressure drop due to the absence of the valve and hence this is rarely a practical problem. Table 1 lists pressure drop at full scale flow of Air or N2. At the same setpoint, for gasses heavier than air, the pressure drop would generally be higher. For gasses lighter than air – it would be lower. Pressure drop scales approximately linearly with the density of the gas.

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2 Construction details

2.1 Fittings

SFC6000D and SFM6000D are factory-fitted with 6 mm push-in fittings (QSPK18-6). These fittings can be safely removed to reveal Festo QSP-type mounting slot. Any compatible QSP fittings can be installed without impacting the performance of the device. Please note that the supplied QSP push-in fittings are not compatible with O2-rich gasses due to the grease used. To use your device with O2-rich gasses, please replace factory-installed fittings on SFC6000D and SFM6000D with the downmount flange provided. When using third-party fittings, please make sure the substitute is compatible with the gas you want to use. For an example list of compatible fittings and the instructions on how to replace them, please see the application note at Technical download (sensirion.com/sfc6000). Other custom-made fittings are available from Sensirion for OEM projects.

2.2 Wetted materials & compatibility

Table 2 gives an overview of the materials wetted by the gas. For high volume OEM applications different specialized materials for the body, valve and sealing can be used with sister products, SFC6000 and SFM6000. Parameter Wetted materials Flow body and flow sensor PA12 (Grilamid LV-30H FWA Black 9225) Si, Si3N4, SiOx Epoxy (Epotek 301) Glass-filled epoxy Stainless steel FKM Valve Stainless steel FKM PTFE Push-in fittings PA NBR Grease (not O2-compatible) Downmount fittings PA12 (Grilamid LV-30H FWA Black 9225) FKM Flow channel is free of silicone and copper REACH, RoHS REACH and RoHS compliant

2.3 Safety instructions

2.3.1 Oxygen-rich gasses

Most push-in fittings are not compatible with O2-rich gasses (more than 21% O2) due to the grease used. This is also the case with the factory-provided QSP push-in fittings on SFC6000D and SFM6000D. At elevated pressures and temperatures, there is a risk of self-ignition of the grease. To use your device with O2- rich gasses, please use the downmount flanges included or install other O2-compatible fittings.

2.3.2 Toxic gases

Due to relatively high leakage rate of the push-in connectors, the sensors are not suitable for operation with toxic gasses. If the connectors are replaced, the whole gas assembly must be checked for leakage before applying toxic gas to the device.

2.3.3 Aggressive or corrosive gases

Please make sure that the gases used are compatible with the wetted materials listed in this chapter. In case of doubt, please contact Sensirion for further advice. Corrosive gasses can damage the sealing or the CMOSens® chip.

2.3.4 Flammable gases

SFC6000D and SFM6000D are not designed to be operated with flammable gasses. Please check SFC5xxx and SFM5xxx series to use such gasses.

2.4 Physical dimensions and mounting

Physical dimensions and mounting information are shown below. The flexible cable between the valve and the green housing can add around 4-6 mm to the total height of SFC6000D. It is recommended to fix the sensor during measurement. This will avoid movement of the device and flow disturbances. The sensor can be mounted from below with PT screws: size K30, max. depth inside housing: 6mm. Alternatively, it can be mounted from the side, using the through-holes. Finally, SFC6000D has two M2.5 mounting slots below the valve – these can be used to fix the sensor from above. Downmount fittings available with SFC6000D and SFM6000D offer additional mounting holes. Table 2: Overview of wetted materials.

CMOSens SFC6000D / SFM6000D Mass Flow Controller / Meter for Gases www.sensirion.com/sfc6000 Jan 2023 – v. 0.1 9/12 Pin # Name Description Figure 9 Pinout of M8 connector fitted on SFC6000D and SFM6000D with RS485 interface. Figure 10: Pinout of 6-pin connector used for I2C communication. Table 3: Electrical characteristics.

CMOSens SFC6000D / SFM6000D Mass Flow Controller / Meter for Gases www.sensirion.com/sfc6000 Jan 2023 – v. 0.1 10/12 instance a 24 V valve starts to open only if the valve voltage is higher than several volts. The customer has the possibility to change this value. Setting a higher InitStep will result in a faster controller but may lead to overshoots. A lower value will result in a smoother opening behavior but may lead to a slower response. The ideal InitStep depends on input pressure and temperature.

3.5.2 Controller gain

The Controller gain refers to a normalized gain parameter, which is set to 1 by default. This gain factor will be multiplied to the control deviation, which is the difference between desired setpoint and measured value, and a correction of the valve control voltage will be applied depending on this control deviation value. If the customer gain factor is increased, this results in a larger change in the output for a given change in the control deviation. A too low Controller gain value results in a smaller output response to a large input control deviation and therefore to a less responsive / slower controller. On the other hand, if the Controller gain is too high, the system can become unstable: show oscillations and overshoots. As the valve characteristics depend for instance on pressure, the control action may be too strong when responding to system disturbances at high pressures. Therefore, a smaller gain factor may be advisable at higher pressures and the customer has the possibility to tune this parameter according to his conditions and requirements. Please note, that it is also possible to set Controller gain values smaller than

CMOSens SFC6000D / SFM6000D Mass Flow Controller / Meter for Gases www.sensirion.com/sfc6000 Jan 2023 – v. 0.1 11/12

4 Flow units

SFC6000D and SFM6000D are calibrated in “standard units” – namely slm (standard liter per minute). Table 4 lists other common units used for measuring gas flow and a relationship between them. If your device appears to show c.a. 7% error vs your reference, it is possible the reference is displaying flow in “norm” units. Flow unit Reference condition Gas Temperature Gas Pressure slm (standard liter per minute) sccm (standard centimeter cube per minute) 20 °C / 68° F 1013 mbar / 14.69 psi ln/min (norm liter per minute) mln / min (norm mililiter per minute) 0 °C / 32° F Example: 10 slm (20°C / 68°F, 1013 mbar) = 9.32 ln/min ln/min (0°C, 1013 mbar)

5 OEM options

SFC6000D and SFM6000D mass flow controllers / meters are all special versions of Sensirion’s SFC6000 and SFM6000 platform. SFC6000D and SFM6000D were designed as distribution products to meet a wide range of needs. In case SFC6000D or SFM6000D does not meet exactly the requirements for a given application, Sensirion recommends looking at SFC6000 and SFM6000 mass flow controllers / meters, which are available with a variety of configurations (fittings, flow ranges, calibrations, interfaces) and are generally built on order. SFC6000 and SFM6000 also allow for OEM product development in the context of high-volume projects. Below, a few OEM options are listed. Please do not hesitate to contact Sensirion AG to discuss your requirements. Example OEM options for hardware:  Analog voltage. Profibus and other available on request  Downmount / threaded fittings. Plastic and metal available  Metal body  Alternative sealing materials (e.g. EPDM / FFKM) OEM options for calibration:  Multi-gas calibration (allows switching between a set of gas calibrations saved in the device memory)  New gas calibrations

6 Ordering codes

Article Description Article number SFC6000D-5slm Digital mass flow controller 5 – 0.01 slm flow range 3.000.900 SFC6000D-20slm Digital mass flow controller 20 - 0.04 slm flow range 3.000.901 SFC6000D-50slm Digital mass flow controller 50 - 0.1 slm flow range 3.000.902 SFM6000D-5slm Digital mass flow meter 5 – 0.01 slm flow range 3.000.897 SFM6000D-20slm Digital mass flow meter 20 - 0.04 slm flow range 3.000.898 SFM6000D-50slm Digital mass flow meter 50 - 0.1 slm flow range 3.000.899 EK-F5x Plug-and-play evaluation kit (without mass flow meter / controller) 3.000.912 Table 4: Common units used to express gas flow rates. Table 5: Products in SFC6000D and SFM6000D series and a compatible evaluation kit.

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