SFM4200 SENSIRION | Alldatasheet
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www.sensirion.com Version 1.1 – Oct. 2017 1 / 13 Preliminary datasheet SFM4200 Digital Flow Meter for Air and Oxygen Flow range: 0…160 slm Operating pressure up to 8 bar Very fast update time (0.5ms) Product Summary The SFM4200 sensor is Sensirion’s digital flow meter designed for high-volume applications. It measures the flow rate of air, oxygen and other non -aggressive gases with high accuracy. The SFM4200 is designed for flows up to 160 slm and can be operated at pressures up to 8 bar and is resistant against burst pressure up to 13 bar. The SFM4200 operates from a 5 Volt supply voltage and features a digital 2-wire I2C interface. The measurement results are internally linearized and temperature compensated. The outstanding performance of this sensor is based on Sensirion’s patented CMOSens® sensor technology, which combines the sensor element, signal processing and digital calibration on a single microchip. The flow rate of the gas is measured by a thermal sensor element which assures very fast signal processing time and bidirectional measurement with best -in-class accuracy. The well-proven CMOS technology is perfectly suited for high-quality mass production and is the ideal choice for demanding and cost - sensitive OEM applications.
Applications
Medical Process automation Spectroscopy Environment monitoring Laboratory
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1 Sensor Performance
1.1 Physical specifications1
Specification Condition Value Unit Flow Range Air/O2 0 … 160 slm2 Accuracy3,4 span < 80 slm 2.5 % m.v.5 span > 80 slm 5 % m.v.5 offset 0.04 slm Noise Level6 offset, typical 0.02 slm span < 80 slm, typical 0.5 % m.v. span > 80 slm, typical 1.2 % m.v. Repeatability 10-100% FS 0.5 % m.v. <10% FS 0.02 % FS Temperature Sensor7 Calibrated range 0 … 60 °C Accuracy +/- 2 °C Accuracy Shift Due to Temperature Variation8 span offset 0.1 0.004 %m.v./°C slm / °C Pressure Coefficient span < 80 slm, typical 0.3 % m.v. / bar span > 80 slm, typical 0.6 Typical Pressure Drop @ 60 slm @100 slm @160 slm <2000 <4000 <9000 Pa
1.2 Ambient Conditions
Parameter Condition Value Unit Calibrated Temperature range T(environment)=T(gas); 15% rel.hum. 0 … +50 °C Operating Temperature Range 10-95% rel. hum. (non cond.) 0 …+50 °C Storage Temperature Max partial water pressure 50hPa (non- condensing) -20 … +70 °C Operating Pressure Range absolute 8 bar Burst Pressure gauge 13 bar Orientation sensitivity Use flow horizontally, electronic connector up 1 Unless otherwise noted, all sensor specifications are valid at: 23°C ±2°C, 966 mbar absolute pressure, with Vdd = 5V, calibration gas air, horizontal mounting position 2 slm: mass flow measured in standard liters per minute using reference conditions of T= 20°C, p=1013 mbar
3 Including Offset, Non-Linearity, Hysteresis
4Total accuracy/noise level/resolution is a sum of offset and span accuracy/noise level/resolution. 5 In % of measured value (m.v.) = of rate = of reading 6 Noise level defined as standard deviation of individual sensor readings, measured at full sampling rate (typical: average of noise level) 7 The measured temperature is the temperature of the bulk silicon in the sensor. This temperature value is not only depending on the gas temperature, but also on the sensor’s surroundings. Using the signal to measure solely the gas temperature will need spe cial precautions, such as isolating the sensor from external temperature influences. 8 these effects need to be added to the initial values if applicable
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1.3 Media compatibility
Media Compatibility Air (non-condensing), N2, O2, other non-aggressive gases Wetted Materials Si, Si3N4, SiOx, Gold, Viton®, Epoxy, Glob Top, Polycarbonate, Stainless steel, Aluminum RoHS and REACH ROHS and REACH
2 Electrical Specifications
2.1 Electrical characteristics
Electrical properties Condition Value Unit Interface I2C Default Sensor Address 64 (0x40) Update Time 14 bit 0.5 ms Supply Voltage 5V +/-5% Vdc Communication Level High Low Min Max 2.5 GND VDD 1.1 V Power Consumption max 50 mW Output signal resolution 14 bit Scale factor flow 256 1/slm Offset flow 0 Max. I2C bus frequency 100 kHz
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2.2 Pin Layout
Pinout: Pin Function
1 SCK
2 VCC
3 GND
4 SDA
5 Reset Pin
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2.3 Reset Pin (/RES)
Active-low reset pin. Needs to be driven at both low and high levels (push/pull-output on customer’s side). Simplified block diagram: Input equivalent circuit: Levels: High-level (normal operation): 0.8V (min) to VDD (max) Low-level (reset state): 0V (min) to 0.35V (max) Timing to trigger reset (condition: VDD supplied): To ensure that the power to the SF05 flow chip is correctly interrupted during the reset, also pull down the SDA and SCL lines at the same time as pulling down the /RES line.
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2.4 Startup Behavior
The start-up behavior after a reset is identical to the start-up behavior after normal power up: After the rising edge on U /RES (condition: VDD supplied) or VDD (condition: /RES in high state) respectively, the I2C interface will be ready for communication after 2ms. Through a measurement command issued by the customer system, the sensor heater will be turned on. From then, it will take max. 100ms until the first measurement will be ready. Subsequently, measureme nt results may be read out via I 2C with the maximum sampling frequency according to specification (100kHz).
2.5 Voltage Specification I2C
I2C External Circuit Elements Both bus lines, SDA and SCL, are bi-directional and therefore require an external pull-up resistor. Communication between a master and the SF05 sensor system runs via the digital I2C-interface. For detailed specifications of the I 2C protocol, please refer to the document "The I 2C-Bus Specification, Version 2.1, January 2000" from NXP (http://www.nxp.com/products/interface_control/i2c). Bi-directional bus lines are implemented by the devices (master and slave) using open -drain output stages and a pull-up resistor Rp connected to the supply voltage VDD. The recommended pull -up resistor value Rp depends on the system setup (capacity of the circuit/cable, bus clock frequency). Rp must be >1kΩ. In most cases, Rp=10 kΩ is a reasonable choice. Optionally, the pull-up resistors may be connected to the master’s supply line. Acceptable levels are 3.3Vdc to 5Vdc. VDD SDA SCL /RES GND Rp Rp SFM4200 (slave) Customer System (master)
www.sensirion.com Version 1.1 – Oct. 2017 7 / 13 The capacitive loads on SDA and SCL line have to be the same. It is important to avoid asymmetric capacitive loads.
3 Mechanical Specifications
3.1 Housing
The CMOSens SFM4200 Mass Flow Meter is mounted in chemically inert polycarbonate housing. The rugged package has been designed to withstand pressures of up to 8bar. Figure 1: SFM4200. All units are in [mm].
3.2 Dimensions
Parameter Condition Value Unit Length 13.1 cm Width 4.4 cm Height 8.18 cm Weight 95 g Leak-Integrity @ 2 bar gauge < 1 sccm
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4 Instructions for use
4.1 Calibration orientation
The sensors are calibrated horizontally with connector facing upwards.
4.2 ESD
The electronics of the SFM3000 sensor consist of a single automotive qualified chip. It comp lies with the following ESD norms: - AEC Q 100 002 (4kV HBM) - AEC Q 100 003 (200V MM) Although the sensor complies with these norms, it does not mean the sensor is immune against ESD. The sensor is shipped in an antistatic tray to prevent electrostatic discharge. To avoid damage to the sensor, ground yourself using a grounding strap or by touching a grounded object before touching the sensor. Furthermore, store the parts in an antistatic package when not in use.
4.3 Safety Restrictions
The packaging method of the CMOSens chip together with the inert housing and the sealing materials ensure a tight and highly resistant sealing of the device. Please be aware that aggressive and corrosive gases can influence the sensor element and may even destroy the Viton sealing or the polycarbonate body. Please also be careful with the use of explosive or toxic gases. A ny leakage even outside the controller can be dangerous. For the above reasons, Sensirion guarantees the safe use of the CMOSens SFM4200 Mass Flow Meter for inert, in- explosive and non-toxic gases only.
4.4 Correction Formula for Oxygen Flow Measurement
Description of the correction formula for measuring oxygen flow with the SFM4200: 𝑄𝑂2 𝑆𝐹𝑀 Flow indicated by air-calibrated SFM4200 in slm when O2 is flowing through the SFM 𝑄𝑂2 Real O2 flow in slm Δ𝑄 Correction function 𝑄𝑂2 = 𝑄𝑂2 𝑆𝐹𝑀 −Δ𝑄 The correction ΔQ was measured by flowing O2 through the air-calibrated SFM4200. From this measurement the following correction function was determined: Δ𝑄 = 1.3×10−2 ×𝑄𝑂2 𝑆𝐹𝑀 +1.2×10−4 ×(𝑄𝑂2 𝑆𝐹𝑀) When a correction for FiO2 other than 100% is needed, the correction ΔQ can be scaled proportional to the FiO2. I.e. the correction formula for arbitrary FiO2 is 𝑄𝑂2 = 𝑄𝑂2 𝑆𝐹𝑀 −𝐹𝑖𝑂2−21% 79% ×Δ𝑄
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5 I2C Interface Description
5.1 Bidirectional I2C Interface1
The I2C protocol can be used to implement a bidirectional interface for SF05A register access. The I2C measurements use a fully standard I2C bus (refer to "The I2C -Bus Specification, Version 2.1, January 2000"). The I2C device address is set to h40 (=64) by default. The following table describes the address pointers for the supported measurement registers: Address Pointer [16 bit] Type Width [Byte] Content / Command Comment h1000 RO 2 flow register h1001 RO 2 temperature register h1010 RO 2 status register error flags h7700 RO 2 ID register silicon/revision ID RO: Read Only Register All registers are two bytes long. I 2C measurements are started by setting the address pointer into the measurement space of the on-chip memory (addresses h1000 to h1FFF). The highest significant byte is set first; the lowest significant byte is set last. The measurement results are stored in the measurement registers. Measurement result registers are continuously updated until measurement is stopped by setting the address pointer outside of the measurement space. The highest significant byte is transmitted first; the lowest significant byte is transmitted last. Measurement results are set to invalid after being read and only set to valid again when a new measurement result is available. If a result register is not valid, the chip does not acknowledge a read to it. I2C start measurement by setting the address pointer into the measurement space S I2CAdr ACKW ACK ACKAdrPtr AdrPtr I2C read measurement results S I2CAdr ACKR ACK ACKData Data ACKCRC The CRC byte is calculated using the generator polynomial G(x) = x8 + x5 + x4 + 1 (hex 0x31). The initial value is 0.
5.2 Serial Product Number, Scale Factors
Adress #Bits Description/Coding 0x31AE – 0x31AF 2 x <15:0> Serial Product Number 0x31AE: Most significant word 0x31AF: Less significant word 0x30DE <15:0> Scale Factor Flow 0x30DF <15:0> Offset Flow 0x31AC <15:0> Scale Factor Temperature 0x31AD <15:0> Offset Temperature 1 I2C is an onboard protocol. It is not intended for usage with cables. If customer is using the sensor connected via cables it is recommended to check the system carefully for electromagnetic disturbances.
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5.3 Measurement Result Registers
Measurement results are stored in the measurement result registers which can be read via I2C bus. If a measurement is started the registers contain the latest measurement result. Bit 15 is always the most significant bit (MSB) and bit 0 is always the least significant bit (LSB). The following maps give more details on the content of the different registers:
5.3.1 Flow Register
Bit #Bits Description/Coding Boot State default 15:0 16 flow path measurement 0
5.3.2 Temperature Register
Bit #Bits Description/Coding Boot State default 15:0 16 temperature path measurement 0
5.3.3 Status Register
Bit #Bits Description/Coding Boot State default 15:14 2 unused 0 13:0 14 measurement error occurred 00 0000 0000 0000: no error occurred else: error occurred
5.3.4 ID Register**
Bit #Bits Description/Coding Boot State default 15:12 4 unused 0 11:0 12 revision ID revision ID ** Please note that the revision ID register value will change in case of future chip revisions. In order to obtain the measured flow in the predefined unit, the measured value read from the result register needs to be converted according to the following formula: flow in predefined unit = (measured value – offset flow)/(scale factor flow) Offset Flow: 0 LSB Scale Factor Flow: 256 LSB / slm In case the sensor is also calibrated for temperature measurement, the value read out from the temperature result register needs to be converted according to the following formula: temperature in °C = (measured value – offset temperature)/(scale factor temperature) Offset Temperature: 20’000 LSB Scale Factor Temperature: 100 LSB / °C Please note that the first measurement performed directly after chip initialization is not valid.
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5.4 Control Register (Read/Write)
Various parts of the SF05 measurement process can be configured. One important parameter is the flow measurement resolution. The SF05 can be configured to measure in either 14-bit or 12-bit mode. IMPORTANT: After every reset of the sensor the flow resolution is set to 14 bit. Bit 15 is always the most significant bit (MSB) and bit 0 is always the least significant bit (LSB). The following map gives more details on the content of the control register:
6 Ordering Information
Use the part names and product numbers shown in the table below when ordering SFM4200 sensors. For the latest product information and local distributors, visit Sensirion’s website on http://www.sensirion.com SENSOR NAME ARTICLE NUMBER SFM4200 1-101651-01 Packaging units: 45 sensors Every sensor is traceable by a unique Serial Number.
Revision History
Date Version Author Changes 09.06.2017 1.0 SAW, DAT First Version, Updated parameters; Layout changed towards standard layout 04.10.2017 1.1 DAT Corrected errors, updated mechanical drawing
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7 Important Notices
Warning, personal injury Do not use this product as safety or emergency stop devices or in any other applicat ion where failure of the product could result in personal injury (including death). Do not use this product for applications other than its intended and authorized use. Before installing, handling, using or servicing this product, please consult the datasheet and application notes. Failure to comply with these instructions could result in death or serious injury. If the Buyer shall purchase or use SENSIRION products for any unintended or unauthorized application, Buyer shall defend, indemnify and hold harmless SENSIRION and its officers, employees, subsidiaries, affiliates and distributors against all claims, costs, damages and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if SENSIRION shall be allegedly negligent with respect to the design or the manufacture of the product. ESD Precautions The inherent design of this component causes it to be sensitive to electrostatic discharge (ESD). To prevent ESD -induced damage and/or degradation, take customary and statutory ESD precautions when handling this product. Warranty SENSIRION warrants solely to the original purchaser of this product for a period of 12 months (one year) from the date of delivery that this product shall be of the quality, material and workmanship defined in SENSIRION’s published specifications of the product. Within such period, if proven to be defective, SENSIRION shall repair and/or replace this product, in SENSIRION’ s discretion, free of charge to the Buyer, provided that: notice in writing describing the defects shall be given to SENSIRION within fourteen (14) days after their appearance; such defects shall be found, to SENSIRION’s reasonable satisfaction, to have a risen from SENSIRION’s faulty design, material, or workmanship; the defective product shall be returned to SENSIRION’s factory at the Buyer’s expense; and the warranty period for any repaired or replaced product shall be limited to the unexpired portion of the original period. This warranty does not apply to any equipment which has not been installed and used within the specifications recommended by SENSIRION for the intended and proper use of the equipment. EXCEPT FOR THE WARRANTIES EXPRESSLY SET FORTH HE REIN, SENSIRION MAKES NO WARRANTIES, EITHER EXPRESS OR IMPLIED, WITH RESPECT TO THE PRODUCT. ANY AND ALL WARRANTIES, INCLUDING WITHOUT LIMITATION, WARRANTIES OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE, ARE EXPRESSLY EXCLUDED AND DECLINED. SENSIRION is only liable for defects of this product arising under the conditions of operation provided for in the datasheet and proper use of the goods. SENSIRION explicitly disclaims all warranties, express or implied, for any period during which the goods are operated or stored not in accordance with the technical specifications. SENSIRION does not assume any liability arising out of any application or use of any product or circuit and specifically disclaims any and all liability, including without limitation consequential or incidental damages. All operating parameters, including without limitation recommended parameters, must be validated for each customer’s applications by customer’s technical experts. Recommended parameters can and do vary in different applications. SENSIRION reserves the right, without further notice, (i) to change the product specifications and/or the information in this document and (ii) to improve reliability, functions and design of this product. Copyright © 2001-2014, SENSIRION. CMOSens® is a trademark of Sensirion All rights reserved REACH and RoHS Statement The SFM 4200 sensor complies with requirements of the following directives: EU Directive 1907/2006/EC concerning Registration, Evaluation, Authorization and Restriction of Chemicals (REACH) EU Directive 2002/65/EC on the restriction of certain hazardous substances in electric and electronic equipment (RoHS), OJ01.01.2011
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