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WWW.MKSINST.COM Process Sense TFS Sensor HIgHly REpEatablE EndpoInt SEnSoR fo R CH a M b ER C l E an p Ro CESSES The Process Sense™ TFS™ Sensor is an improvement in the traditional endpoint technique of non-dispersive infrared (NDIR). Tunable Filter Spectroscopy (TFS) is a spectroscopic technique capable of generating a “mini-scan,” producing a slice of spectra in the infrared band. The scan provides absorption peaks used to select compounds and provide concentration values. What differentiates the Process Sense TFS Sensor from NDIR-based sensors is its ability to subtract out interferent gases absorbing in the same regions of the infrared; making the Process Sense TFS Sensor more accurate when focusing on a target gas. This subtraction capability supports the simultaneous reporting of multi-components. For example, the presence of SiF 4 and/or CO2 can be reported within a single scan. The Process Sense TFS Sensor is a versatile analyzer platform that can be factory configured to detect other gases that are IR active by simply changing or adding filters. Benefits

  • Chamber clean endpoint f or SiF4 — Sensitivity to SiF4 down to 2 ppm
  • Analysis of gases such as NF3 and CO2

Applications

Process & Environmental Analysis Solutions

  • Reduce chamber clean times and cost Minimize par ticle e vents
  • Reduce NF3 usage
  • Reduce po wer consumption Increase w afer throughput of CVD tool Accurate deter mination of chamber clean endpoint

Process Sense TFS Sensor- 10/18 © 2018 MKS Instr uments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice. mksinst ™ and Process Sense™ are trademarks of MKS Instruments, Inc., Andover, MA. Please contact your local MKS office for price and availability information. Dimensional Drawing — Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). MKS Instruments, Inc. Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 T el: 800.227.8766 (in USA) Web: www.mksinst.com MKS Instruments, Inc. Process & Environmental Analysis Solutions

651 Lowell Street

Methuen, MA 01844 T el: 978.645.5500 Measurement Ranges SiF4 1 – 200 ppm (at 760 Torr) Detection Limit 2 ppm SiF4 Response Time 1 second repor t rate Calibr ation Accuracy ±10% Repeatability <1% Full Scale , consecutive measurements Electrical Connector DB15 Input P ower 120 VAC, 230 VAC, or 24 VDC (2 amp) Size Sensor Dimensions 17.2 x 5.9 x 5.5 in (437 x 150 x 140 mm) Control Bo x Dimensions 12.6 x 10.0 x 3.1 in (320 x 254 x 78 mm) Weight 3.2 kg (7 lbs) Main Interface Analog 1 (A O1) 0 – 10 V (user configurable) Analog 2 (A O2) 0 – 10 V (user configurable) Digital 1 F ault status signal Digital Ser vice Port Diagnostic codes Sample Conditions Pressure 0.5 – 760 Torr Temperature 20 – 60°C Sample Fittings NW25 (other siz es available upon request) Compliance CE