PRO560LM AEROTECH | Alldatasheet

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KEY FEATURES: ‹ ULTRA HEAVY-DUTY LOAD CAPACITY with premium geometric performance ‹ Ironless, cogless linear motor delivers SMOOTH, ULTRA-PRECISE MOTION ‹ EXCELLENT POSITIONING & DYNAMIC CAPABILITIES in a cost-effective package ‹ BEST-IN-CLASS GEOMETRIC PERFORMANCE ensures superior workpoint accuracy ‹ Rugged, reliable construction is ideal for VERSATILE INDUSTRIAL USE ‹ Hardcover & side seals offer PROTECTION AGAINST CONTAMINATION & PARTICULATES ‹ ThermoComp® option automatically COMPENSATES FOR THERMAL DISTURBANCES ‹ VACUUM- & CLEANROOM-COMPATIBLE versions available Precise, Reliable & Adaptable The PRO560LM is a wide-body industrial stage with an exceptional payload-carrying capacity. Compared to PRO280LM, PRO560LM offers improved angular and geometric performance thanks to its wider bearing separation, making it an excellent base axis for a multi-axis stage assembly. Combining superior craftsmanship and the highest quality components, PRO560LM stages consistently and reliably deliver best-in-class positioning performance. Key Applications PRO560LM mechanical bearing, direct-drive linear stages are extremely versatile, trusted and proven in medium- and high- performance applications, such as: ‹ Laser material processing ‹ Precision metrology, inspection & microscopy ‹ Electronics & circuit board manufacturing & inspection ‹ Display processing ‹ Synchrotron & light source experiments ‹ Medical device manufacturing ‹ Semiconductor fabrication ‹ Fiber optics & silicon photonics processing ‹ Additive manufacturing & precision assembly Mechanical Bearing, Direct-Drive Linear Stage PRO560LM

aerotech.com PRO560LM SPECIFICATIONS Electrical Specifications Drive System Brushless Linear Servomotor Feedback Non-contact Linear Encoder -E1: 1 Vpp, 20 µm signal period -E2: Digital RS422, 0.1 µm electrical resolution Maximum Bus Voltage 340 VDC Limit Switches 5 V, Normally-Closed Home Switch Near Center Notes: 1. Certified with -PL1/-PL2 option. 2. Requires the selection of an appropriate amplifier with sufficient voltage and current. 3. Axis-orientation for on-axis loading is listed. 4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Contact factory for multi-axis applications. Mechanical Specifications PRO560LM Travel 300 400 500 600 800 1000 Accuracy(1) Standard ±10 µm ±12 µm ±14 µm ±15.5 µm ±17 µm ±18 µm Calibrated ±1 µm ±1 µm ±1 µm ±1 µm ±1.5 µm ±1.5 µm Resolution (Min. Incremental Motion) 5 nm (-E1 Encoder) Horizontal Straightness(1) ±3 µm ±4 µm ±5 µm ±6 µm ±7 µm ±8 µm Vertical Straightness(1) ±3 µm ±4 µm ±5 µm ±6 µm ±7 µm ±8 µm Pitch 49 µrad 60 µrad 70 µrad 78 µrad 90 µrad 110 µrad Roll 39 µrad 44 µrad 53 µrad 58 µrad 73 µrad 87 µrad Yaw 49 µrad 60 µrad 70 µrad 78 µrad 90 µrad 110 µrad Maximum Speed(2) 2 m/s Maximum Acceleration(2) 3 g Maximum Force, Continuous 532.4 N – Standard

792.6 N – With Air Cooling (20 psig)

Capacity(3) Horizontal 150 kg Side 150 kg Moving Mass 25.0 kg Material Anodized Aluminum MTBF (Mean Time Between Failure) 20,000 Hours

aerotech.com PRO560LM ORDERING OPTIONS Travel (Required) -0300 300 mm travel stage -0400 400 mm travel stage -0500 500 mm travel stage -0600 600 mm travel stage -0800 800 mm travel stage -1000 1000 mm travel stage Other travel options are available upon request. Contact Aerotech for more information. Tabletop (Required) -TT1 Tabletop with metric dimension mounting NOTE: -TT1 option required for lower axis of XY. Other tabletop options are available upon request. Contact Aerotech for more information. Feedback (Required) -E1 Incremental linear encoder, 1 Vpp -E2 Incremental linear encoder, 0.1 μm digital TTL output Other feedback options are available upon request. Contact Aerotech for more information. Cable Management (Required) -CMS0 No external CMS, motor/feedback connector bracket on carriage -CMS1 External CMS for single axis -CMS2 External CMS for lower-axis of two-axis PRO (XY) assembly -CMS3 External CMS for lower-axis of two-axis (XZ or XT) assembly -CMS6 External CMS for lower-axis of three-axis (XYZ or XYT) assembly -CMS7 External CMS for lower-axis of three-axis (XZT) assembly -CMS9 External CMS for lower-axis of four-axis (XYZT) assembly Lifting Hardware (Optional) -LF Lifting hardware NOTE: Lifting option available on all travels. ThermoComp (Optional) -TCMP ThermoComp integrated thermal compensation, single or lower axis Metrology (Required) -PL0 No metrology performance plots -PL1 Metrology, uncalibrated with performance plots -PL2 Metrology, calibrated (HALAR) with performance pl ots

aerotech.com PRO560LM ORDERING OPTIONS Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required or if you desire custom integration support with your system. -TAS Integration - Test as system Testing, integration and documentation of a group of components as a complete system that will be used together (ex: drive, controller and stage). This includes parameter file generation, system tuning and documentation of the system configuration. -TAC Integration - Test as components Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system. Accessories (To Be Ordered As Separate Line Item) ALIGN-NPA Non-precision XY assembly ALIGN-NPAZ Non-precision XZ or YZ assembly ALIGN-PA10 XY assembly; 10 arc sec orthogonality. Alignment to within 7 microns orthogonality for short travel stages. ALIGN-PA10Z XZ or YZ assembly with L-bracket; 10 arc second orthogonality. Alignment to within 10 microns orthogonality for short travel stages. ALIGN-PA5 XY assembly; 5 arc sec orthogonality. Alignment to within 3 microns orthogonality for short travel stages.

aerotech.com PRO560LM SPECIFICATIONS Measurement data showing successful compensation of thermal related positioning errors at several temperatures using the ThermoComp feature. Results are typical of stage performance with and without ThermoComp. Cantilevered load capability of the PRO560LM.

aerotech.com PRO560LM DIMENSIONS 150 200 250 300 350 400 560

8 PLACES

M8X1.25 13 100

25 TYP

45X M6X1.0 295 525 560 107.4 120 18 19 "B" "A" STAGE LENGTH

8.8 THRU

533.4 ENGLISH MOUNTING MOUNTING SPACING "C" METRIC "D" ENGLISH

107.4 CMS6 THRU CMS9

STAGE MOTOR & FEEDBACK CABLES

1 M LENGTH FROM CABLE TRAY

1 M LENGTH FROM

MOTOR COOLING LINE , 6 MMM OD 1M LENGTH FROM CABLE TRAY 1. NOTES: 1. M5X0.8 FOR CUSTOMER-INSTALLED AIR PURGE FITTING. 2. DIMENSIONS: MILLIMETERS TABLETOP METRIC (-TT1) REVISIONS MCN REV. DESCRIPTION DATE APPROVED MCN17096 A PRO SERIES UPDATE. PRO560LM-II-CAT REPLACES PRO560LM- CAT 13-JAN-16 CKOVACH ECO0001731 B MECH LIMIT TRAVEL SHORTENED BY 6MM FOR ALL LENGTHS 29-MAY-19 JSTAHR ECO0004810 C RATIONALIZATION UPDATE: -TT2, -TT3 NOW SEE PG. 2 24-FEB-23 JMAGLOSKY BASIC MODEL NOMINAL TRAVEL ELEC LIMIT TRAVEL MECH LIMIT TRAVEL A B C D PRO560LM-0300 300 302-308 334.4 737 368 250, 500-525 254 PRO560LM-0400 400 402-408 434.4 837 418 250, 500-525, 750 254, 762 PRO560LM-0500 500 502-508 534.4 937 468 250, 500-525, 750 254, 762 PRO560LM-0600 600 602-608 634.4 1037 518 250, 500-525, 750 254, 762 PRO560LM-0800 800 802-808 834.4 1237 618 250, 500-525, 750 254, 762 PRO560LM-1000 1000 1002-1008 1034.4 1437 718 250, 500-525, 750, 1250 254, 762, 1193.8 PRO560LM-1200 1200 1202-1208 1234.4 1637 818 250, 500-525, 750, 1250 254, 762, 1193.8 PRO560LM-1500 1500 1502-1508 1534.4 1937 968 250, 500-525, 750, 1250, 1750 254, 762, 1193.8, 1625.6 MODEL BY: MODEL FILENAME: PRO560LM-II C PRO560LM PART CODE: PRO560LM-II-CAT PART NAME: DWG. NO. REV CATALOG DRAWING PRO560LM-II SHEET 1 OF 2 05-JAN-16 DATE BMIKLANCIE DRAW CKOVACH CKOVACH NAME CHECK APPR. 07-JAN-16 23-DEC-15 PLACE DRAWING VIEWS BELOW CKOVACH MODEL BY: MODEL FILENAME: C PART CODE: PRO560LM-II-CAT PART NAME: DWG. NO. REV SHEET 1 OF 2 05-JAN-16 DATE BMIKLANCIE DRAW CKOVACH CKOVACH NAME CHECK APPR. 07-JAN-16 23-DEC-15 PLACE DRAWING VIEWS BELOW 150 200 250 300 350 400 560 M8X1.25 13 100 45X M6X1.0 295 525 560 107.4 120 18 19 "B" "A" STAGE LENGTH 533.4 ENGLISH MOUNTING MOUNTING SPACING "C" METRIC "D" ENGLISH STAGE MOTOR & FEEDBACK CABLES MOTOR COOLING LINE , 6 MMM OD 1M LENGTH FROM CABLE TRAY 1. NOTES: 1. M5X0.8 FOR CUSTOMER-INSTALLED AIR PURGE FITTING. 2. DIMENSIONS: MILLIMETERS TABLETOP METRIC (-TT1) REVISIONS MCN REV. DESCRIPTION DATE APPROVED MCN17096 A PRO SERIES UPDATE. PRO560LM-II-CAT REPLACES PRO560LM- CAT 13-JAN-16 CKOVACH ECO0001731 B MECH LIMIT TRAVEL SHORTENED BY 6MM FOR ALL LENGTHS 29-MAY-19 JSTAHR ECO0004810 C RATIONALIZATION UPDATE: -TT2, -TT3 NOW SEE PG. 2 24-FEB-23 JMAGLOSKY BASIC MODEL NOMINAL TRAVEL ELEC LIMIT TRAVEL MECH LIMIT TRAVEL A B C D PRO560LM-0300 300 302-308 334.4 737 368 250, 500-525 254 PRO560LM-0400 400 402-408 434.4 837 418 250, 500-525, 750 254, 762 PRO560LM-0500 500 502-508 534.4 937 468 250, 500-525, 750 254, 762 PRO560LM-0600 600 602-608 634.4 1037 518 250, 500-525, 750 254, 762 PRO560LM-0800 800 802-808 834.4 1237 618 250, 500-525, 750 254, 762 PRO560LM-1000 1000 1002-1008 1034.4 1437 718 250, 500-525, 750, 1250 254, 762, 1193.8 PRO560LM-1200 1200 1202-1208 1234.4 1637 818 250, 500-525, 750, 1250 254, 762, 1193.8 PRO560LM-1500 1500 1502-1508 1534.4 1937 968 250, 500-525, 750, 1250, 1750 254, 762, 1193.8, 1625.6 MODEL BY: MODEL FILENAME: PRO560LM-II C PRO560LM PART CODE: PRO560LM-II-CAT PART NAME: DWG. NO. REV CATALOG DRAWING PRO560LM-II SHEET 1 OF 2 05-JAN-16 DATE BMIKLANCIE DRAW CKOVACH CKOVACH NAME CHECK APPR. 07-JAN-16 23-DEC-15 PLACE DRAWING VIEWS BELOW CKOVACH MODEL BY: MODEL FILENAME: C PART CODE: PRO560LM-II-CAT PART NAME: DWG. NO. REV SHEET 1 OF 2 05-JAN-16 DATE BMIKLANCIE DRAW CKOVACH CKOVACH NAME CHECK APPR. 07-JAN-16 23-DEC-15 PLACE DRAWING VIEWS BELOW

aerotech.com PRO560LM SERIES CABLE MANAGEMENT (-CMS0) DIMENSIONS 91.5 CONNECTOR INTERFACE MOTOR POWER MOTOR/ENCODER FEEDBACK 107 CONNECTOR INTERFACE

6 MM AIR LINE

PRO225LM/PRO280LM/PRO560LM -CMS0 DIMENSIONS: MILLIMETERS REVISIONS MCN REV. DESCRIPTION DATE APPROVED KSCHOCH MODEL BY: MODEL FILENAME: PRO115LM-CARR-ASSY PRO190LM-CARR-ASSY PRO225LM-II-CARR-ASSY PART CODE: PRO-LM-CMS0-CAT PART NAME: DWG. NO. REV PRO-LM-CMS0 SHEET 1 OF 1 11-AUG-16 DATE BMIKLANCIE DRAW KSCHOCH KSCHOCH NAME CHECK APPR. 11-AUG-16 11-AUG-16