PRO165SV-020 AEROTECH | Alldatasheet

Document overview

  • Manufacturer or author: Provided By alldatasheet.com(free datasheet download site)
  • PDF pages: 7

Technical content

Superior Precision, Long Travel, Low-Profile With a minimum step size of 10 nm, our PRO-SV stages are the most precise screw-driven lift stages available—plus they offer the longest travel range available at the shortest height. They’re also the only long-travel lift stages that can move up to 100 kg of mass while providing excellent payload accessibility and geometric performance. Key Applications PRO-SV stages are ideal for height-restricted applications or situations when multiple positioning stages are stacked, including: ‹ Synchrotron & beamline sample manipulation ‹ Wafer inspection ‹ Surface metrology ‹ Laser microprocessing ‹ Precision manufacturing KEY FEATURES: Long-Travel Lift Stages PRO-SV ‹ Supports 100 kg LOAD CAPACITY, with up to 50 mm TRAVEL and 20 mm/s MAXIMUM SPEED ‹ Delivers EXCELLENT STRAIGHTNESS & ANGULAR PERFORMANCE thanks to high-precision crossed-roller bearings ‹ Achieves 10 nm STEP SIZE by combining precision-ground ball-screw, slotless torque motor & low-expansion linear encoder ‹ Provides long service life thanks to HIGH- RELIABILITY DRIVE MECHANISM ‹ INTEGRATES SEAMLESSLY with PRO-SL and PRO-LM linear stages ‹ Offers ThermoComp® for CONSISTENT PERFORMANCE in changing environments

aerotech.com PRO-SV SPECIFICATIONS 1. Certified with -PL1/-PL2 options. 2. With 1 Vpp amplified sine rotary encoder (-E1 feedback option). 3. With 1 Vpp amplified sine linear encoder (-E3, -E4 feedback options). 4. Requires the selection of an appropriate amplifier with sufficient voltage and current. 5. Axis orientation for on-axis loading is listed. 6. A holding brake (-BK option) is recommended when the payload exceeds 75% of the load capacity (for PRO165SV and PRO190SV), or 45 kg (for PRO225SV), as a precaution in the event that power to the stage is unexpectedly lost. 7. Excludes tabletop and brake options. 8. With linear amplifier. 9. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems depends on payload and workpoint. Consult factory for details. Specifications PRO165SV-020 PRO190SV-035 PRO225SV-050 Travel 20 mm 35 mm 50 mm Accuracy(1) Standard ±4 µm ±5 µm ±6 µm Calibrated ±0.75 µm Calibrated, with Linear Encoder ±0.5 µm Resolution (Min. Incremental Motion) With Rotary Encoder(2)(8) 0.025 µm With Linear and Rotary Encoder(3)(8) 0.010 µm Bidirectional Repeatability(1) With Rotary Encoder(2) ±0.5 µm With Linear and Rotary Encoder(3) ±0.15 µm Straightness(1) ±3 µm ±4 µm ±5 µm Pitch 50 µrad (10 arc sec) 58 µrad (12 arc sec) 73 µrad (15 arc sec) Roll 50 µrad (10 arc sec) 58 µrad (12 arc sec) 73 µrad (15 arc sec) Yaw 50 µrad (10 arc sec) 58 µrad (12 arc sec) 73 µrad (15 arc sec) Maximum Speed(4) 10 mm/s 20 mm/s Load Capacity(5) (6) 20 kg 40 kg 100 kg Stage Mass(7) 5.4 kg 10.2 kg 17.8 kg Material Anodized aluminum Drive System Brushless torque motor Feedback Rotary Incremental encoder, 1 Vpp Digital encoder, RS422 10,052 lines/rev (PRO165SV, PRO190SV) or 14,452 lines/rev (PRO225SV) Linear Incremental encoder, 1 Vpp with 20 µm scale Digital encoder, RS422 with 0.25 µm resolution Absolute encoder, EnDat 2.2 with 0.001 µm resolution Maximum Bus Voltage 340 VDC Limit Switches 5 V, normally-closed

aerotech.com PRO-SV ORDERING OPTIONS PRO-SV Long-Travel Lift Stage PRO165SV-020 PRO165SV mechanical-bearing, ball-screw lift stage, 20 mm travel PRO190SV-035 PRO190SV mechanical-bearing, ball-screw lift stage, 35 mm travel PRO225SV-050 PRO225SV mechanical-bearing, ball-screw lift stage, 50 mm travel Feedback (Required) -E1 Rotary incremental encoder, 1 Vpp -E2 Rotary incremental encoder, digital RS-422 -E3 Direct linear encoder, 1 Vpp + rotary encoder, 1 Vpp (dual-loop) -E4 Direct linear encoder, 1 Vpp + rotary encoder, digital RS-422 (dual-loop) -E7 Absolute linear encoder + rotary encoder, 1 Vpp (dual-loop) Tabletop (Optional) -TT3 Accessory tabletop with mounting for select rotary stages Brake (Optional) -BK Holding brake Note: The holding brake option is recommended when the payload exceeds 75% of the load capacity as a precaution in the event that power to the stage is unexpectedly lost. ThermoComp (Optional) -TCMP ThermoComp integrated thermal compensation Lifting Hardware (Optional) -LF Hoist rings Note: Only available with PRO190SV and PRO225SV. Metrology (Required) -PL0 No metrology performance plots -PL1 Metrology, uncalibrated with performance plots -PL2 Metrology, calibrated (HALAR) with performance plots Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required or if you desire custom integration support with your system. -TAS Integration - Test as system Testing, integration and documentation of a group of components as a complete system that will be used together (ex: drive, controller and stage). This includes parameter file generation, system tuning and documentation of the system configuration. -TAC Integration - Test as components Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system.

aerotech.com PRO-SV SPECIFICATIONS Cantilevered load capability of PRO165SV-020. Cantilevered load capability of PRO190SV-035. Cantilevered load capability of PRO225SV-050.

aerotech.com PRO-SV DIMENSIONS PRO165SV-020

aerotech.com PRO-SV DIMENSIONS PRO190SV-035

aerotech.com PRO-SV DIMENSIONS PRO225SV-050