PRO190LM

PRO190LM AEROTECH | Alldatasheet

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Technical content

KEY FEATURES: ‹ Offers an OPTIMAL BALANCE OF POSITIONING PERFORMANCE, LOAD CAPACITY & SIZE ‹ Ironless, cogless linear motor delivers SMOOTH, ULTRA-PRECISE MOTION ‹ EXCELLENT POSITIONING & DYNAMIC CAPABILITIES in a cost-effective package ‹ BEST-IN-CLASS GEOMETRIC PERFORMANCE ensures superior workpoint accuracy ‹ Rugged, reliable construction is ideal for VERSATILE INDUSTRIAL USE ‹ Hardcover & side seals offer PROTECTION AGAINST CONTAMINATION & PARTICULATES ‹ ThermoComp® option automatically COMPENSATES FOR THERMAL DISTURBANCES ‹ VACUUM- & CLEANROOM-COMPATIBLE versions available Precise, Reliable & Adaptable The PRO190LM provides an optimal balance of positioning performance, payload capacity and size. Equipped with larger, stiffer bearings, PRO190LM delivers considerable load-carrying improvements and enhanced geometric performance compared to PRO165LM. Plus, PRO190LM features a smaller footprint and lower mass than the larger PRO225LM. Combining superior craftsmanship and the highest quality components, PRO190LM stages consistently and reliably deliver best-in-class positioning performance. Key Applications PRO190LM mechanical bearing, direct-drive linear stages are extremely versatile, trusted and proven in medium- and high- performance applications, such as: ‹ Laser material processing ‹ Precision metrology, inspection & microscopy ‹ Electronics & circuit board manufacturing & inspection ‹ Display processing ‹ Synchrotron & light source experiments ‹ Medical device manufacturing ‹ Semiconductor fabrication ‹ Fiber optics & silicon photonics processing ‹ Additive manufacturing & precision assembly Mechanical Bearing, Direct-Drive Linear Stage PRO190LM

aerotech.com PRO190LM SPECIFICATIONS Electrical Specifications Drive System Brushless Linear Servomotor Feedback Non-contact Linear Encoder -E1: 1 Vpp, 20 µm signal period -E2: Digital RS422, 0.1 µm electrical resolution Maximum Bus Voltage 340 VDC Limit Switches 5 V, Normally-Closed Home Switch Near Center Notes: 1. Certified with -PL1/-PL2 option. 2. Requires the selection of an appropriate amplifier with sufficient voltage and current. 3. Axis-orientation for on-axis loading is listed. 4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Contact factory for multi-axis applications. Mechanical Specifications PRO190LM Travel 100 150 200 300 400 500 600 Accuracy(1) Standard ±4 µm ±6 µm ±8 µm ±10 µm ±12 µm ±14 µm ±15.5 µm Calibrated ±1 µm Resolution (Min. Incremental Motion) 5 nm (-E1 Encoder) Bidirectional Pitch 27 µrad 29 µrad 40 µrad 50 µrad 60 µrad 70 µrad 80 µrad Roll 27 µrad 29 µrad 40 µrad 50 µrad 60 µrad 70 µrad 80 µrad Yaw 27 µrad 29 µrad 40 µrad 50 µrad 60 µrad 70 µrad 80 µrad Maximum Speed(2) 2 m/s Maximum Acceleration(2) 3 g Maximum Force, Continuous

106.7 N – Standard

154.7 – With Air Cooling (20 psig) Load Capacity(3) Horizontal 60 kg Side 60 kg Moving Mass 4.5 kg Material Anodized Aluminum MTBF (Mean Time Between Failure) 20,000 Hours

aerotech.com PRO190LM ORDERING OPTIONS Travel (Required) -0100 100 mm travel stage -0150 150 mm travel stage -0200 200 mm travel stage -0300 300 mm travel stage -0400 400 mm travel stage -0500 500 mm travel stage -0600 600 mm travel stage Other travel options are available upon request. Contact Aerotech for more information. Tabletop (Required) -TT1 Tabletop with metric dimension mounting NOTE: -TT1 option required for lower axis of XY. Other tabletop options are available upon request. Contact Aerotech for more information. Feedback (Required) -E1 Incremental linear encoder, 1 Vpp -E2 Incremental linear encoder, 0.1 μm digital TTL output Other feedback options are available upon request. Contact Aerotech for more information. Cable Management (Required) -CMS0 No external CMS, motor/feedback connector bracket on carriage -CMS1 External CMS for single axis -CMS2 External CMS for lower-axis of two-axis PRO (XY) assembly -CMS3 External CMS for lower-axis of two-axis (XZ or XT) assembly -CMS4 External CMS for upper-axis of two-axis PRO (XY) assembly -CMS5 External CMS for upper-axis of two-axis (YZ or YT) assembly -CMS6 External CMS for lower-axis of three-axis (XYZ or XYT) assembly -CMS7 External CMS for lower-axis of three-axis (XZT) assembly -CMS10 External CMS for upper-axis of two-axis PRO225LM XY assembly -CMS11 External CMS for upper-axis of three-axis PRO225LM XYZ/T assembly -CMS12 External CMS for upper-axis of four-axis PRO225LM XYZT assembly Lifting Hardware (Optional) -LF Lifting hardware NOTE: Lifting option only available on travels 400 mm and greater. Lifting should never be ordered on the upper-axis of an XY set (only order on lower-axis). ThermoComp (Optional) -TCMP ThermoComp integrated thermal compensation, single or lower axis

aerotech.com PRO190LM ORDERING OPTIONS Metrology (Required) -PL0 No metrology performance plots -PL1 Metrology, uncalibrated with performance plots -PL2 Metrology, calibrated (HALAR) with performance pl ots Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required or if you desire custom integration support with your system. -TAS Integration - Test as system Testing, integration and documentation of a group of components as a complete system that will be used together (ex: drive, controller and stage). This includes parameter file generation, system tuning and documentation of the system configuration. -TAC Integration - Test as components Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system. Accessories (To Be Ordered As Separate Line Item) ALIGN-NPA Non-precision XY assembly ALIGN-NPAZ Non-precision XZ or YZ assembly ALIGN-PA10 XY assembly; 10 arc sec orthogonality. Alignment to within 7 microns orthogonality for short travel stages. ALIGN-PA10Z XZ or YZ assembly with L-bracket; 10 arc second orthogonality. Alignment to within 10 microns orthogonality for short travel stages. ALIGN-PA5 XY assembly; 5 arc sec orthogonality. Alignment to within 3 microns orthogonality for short travel stages. ALIGN-PA5Z XZ or YZ assembly with L-bracket; 5 arc second orthogonality. Alignment to within 5 microns orthogonality for short travel stages.

aerotech.com PRO190LM SPECIFICATIONS Measurement data showing successful compensation of thermal related positioning errors at several temperatures using the ThermoComp feature. Results are typical of stage performance with and without ThermoComp. Cantilevered load capability of the PRO190LM.

aerotech.com PRO190LM DIMENSIONS 175 METRIC MOUNTING 177.8 ENGLISH MOUNTING MOUNTING SPACING "C" METRIC "D" ENGLISH 87 (CMS2, CMS3, CMS5, CMS11) 161 (CMS6, CMS7, CMS12) SAFETY GROUND 1M LENGTH FROM CABLE TRAY STAGE MOTOR & FEEDBACK CABLES MOTOR COOLING LINE - 6MM OD TUBE 1M LENGTH FROM CABLE TRAY ADDITIONAL CABLE TRAY FOR MULTI-AXIS CABLE MANAGEMENT STAGE TABLETOP "A" STAGE LENGTH 195 "B" 16.5 16.5

6.6 THRU METRIC

6.8 THRU ENGLISH

12.7 METRIC

10.5 ENGLISH

NOTES: 1. M5X0.8 FOR CUSTOMER-INSTALLED AIR PURGE FITTING. 2. DIMENSIONS: MILLIMETERS. 190 87 (CMS1 THRU CMS7) 99 (CMS10 THRU CMS12) 190 195 175 150 100

25 TYP

METRIC (-TT1) 33X M6X1.0 HELICOIL 9.5 REVISIONS MCN REV. DESCRIPTION DATE APPROVED - - UPDATED TRAVEL INFORMATION REMOVED PRELIMINARY NOTE 16-DEC-15 BMIKLANCIE - - UPDATED SHEET FORMAT FOR THIRD ANGLE LOGO 13-JAN-16 BMIKLANCIE ECO0004810 A RATIONALIZATION UPDATE: -TT2, -TT3 SEE PG. 2 22-FEB-23 JMAGLOSKY BASIC MODEL NOMINAL TRAVEL ELEC LIMIT TRAVEL MECH LIMIT TRAVEL A B C D PRO190LM-0100 100 105 125 390 195 175, 275 177.8 PRO190LM-0150 150 155 175 440 220 175, 275 177.8 PRO190LM-0200 200 205 225 490 245 175, 275 177.8 PRO190LM-0250 250 255 275 540 270 175, 375 177.8 PRO190LM-0300 300 305 325 590 295 175, 375 177.8, 431.8 PRO190LM-0400 400 405 425 690 345 175, 375, 575 177.8, 533.4 PRO190LM-0500 500 505 525 790 395 175, 375, 575 177.8, 533.4 PRO190LM-0600 600 605 625 890 445 175, 375, 575, 775 177.8, 533.4 PRO190LM-0800 800 805 825 1090 545 175, 375, 575, 775, 975 177.8, 533.4, 838.2 PRO190LM-1000 1000 1005 1025 1290 645 175, 375, 575, 775, 975, 1175 1143 BMIKLANCIE MODEL BY: MODEL FILENAME: PRO190LM A PRO190LM PART CODE: PRO190LM PRO190LM-CAT PART NAME: DWG. NO. REV CATALOG DRAWING SHEET 1 OF 2 19-NOV-15 DATE EGLASER DRAW BMIKLANCIE BMIKLANCIE NAME CHECK APPR. 19-NOV-15 19-NOV-15 PLACE DRAWING VIEWS BELOW 175 METRIC MOUNTING 177.8 ENGLISH MOUNTING MOUNTING SPACING "C" METRIC "D" ENGLISH 87 (CMS2, CMS3, CMS5, CMS11) 161 (CMS6, CMS7, CMS12) SAFETY GROUND 1M LENGTH FROM CABLE TRAY STAGE MOTOR & FEEDBACK CABLES MOTOR COOLING LINE - 6MM OD TUBE 1M LENGTH FROM CABLE TRAY ADDITIONAL CABLE TRAY FOR MULTI-AXIS CABLE MANAGEMENT STAGE TABLETOP "A" STAGE LENGTH 195 "B" 16.5 16.5 NOTES: 1. M5X0.8 FOR CUSTOMER-INSTALLED AIR PURGE FITTING. 2. DIMENSIONS: MILLIMETERS. 190 87 (CMS1 THRU CMS7) 99 (CMS10 THRU CMS12) 190 195 175 150 100 METRIC (-TT1) 33X M6X1.0 HELICOIL 9.5 REVISIONS MCN REV. DESCRIPTION DATE APPROVED - - UPDATED TRAVEL INFORMATION REMOVED PRELIMINARY NOTE 16-DEC-15 BMIKLANCIE - - UPDATED SHEET FORMAT FOR THIRD ANGLE LOGO 13-JAN-16 BMIKLANCIE ECO0004810 A RATIONALIZATION UPDATE: -TT2, -TT3 SEE PG. 2 22-FEB-23 JMAGLOSKY BASIC MODEL NOMINAL TRAVEL ELEC LIMIT TRAVEL MECH LIMIT TRAVEL A B C D PRO190LM-0100 100 105 125 390 195 175, 275 177.8 PRO190LM-0150 150 155 175 440 220 175, 275 177.8 PRO190LM-0200 200 205 225 490 245 175, 275 177.8 PRO190LM-0250 250 255 275 540 270 175, 375 177.8 PRO190LM-0300 300 305 325 590 295 175, 375 177.8, 431.8 PRO190LM-0400 400 405 425 690 345 175, 375, 575 177.8, 533.4 PRO190LM-0500 500 505 525 790 395 175, 375, 575 177.8, 533.4 PRO190LM-0600 600 605 625 890 445 175, 375, 575, 775 177.8, 533.4 PRO190LM-0800 800 805 825 1090 545 175, 375, 575, 775, 975 177.8, 533.4, 838.2 PRO190LM-1000 1000 1005 1025 1290 645 175, 375, 575, 775, 975, 1175 1143 BMIKLANCIE MODEL BY: MODEL FILENAME: PRO190LM A PRO190LM PART CODE: PRO190LM PRO190LM-CAT PART NAME: DWG. NO. REV CATALOG DRAWING SHEET 1 OF 2 19-NOV-15 DATE EGLASER DRAW BMIKLANCIE BMIKLANCIE NAME CHECK APPR. 19-NOV-15 19-NOV-15 PLACE DRAWING VIEWS BELOW 175 METRIC MOUNTING 177.8 ENGLISH MOUNTING MOUNTING SPACING "C" METRIC "D" ENGLISH 87 (CMS2, CMS3, CMS5, CMS11) 161 (CMS6, CMS7, CMS12) SAFETY GROUND 1M LENGTH FROM CABLE TRAY STAGE MOTOR & FEEDBACK CABLES MOTOR COOLING LINE - 6MM OD TUBE 1M LENGTH FROM CABLE TRAY ADDITIONAL CABLE TRAY FOR MULTI-AXIS CABLE MANAGEMENT STAGE TABLETOP "A" STAGE LENGTH 195 "B" 16.5 16.5 NOTES: 1. M5X0.8 FOR CUSTOMER-INSTALLED AIR PURGE FITTING. 2. DIMENSIONS: MILLIMETERS. 190 87 (CMS1 THRU CMS7) 99 (CMS10 THRU CMS12) 190 195 175 150 100 METRIC (-TT1) 33X M6X1.0 HELICOIL 9.5 REVISIONS MCN REV. DESCRIPTION DATE APPROVED - - UPDATED TRAVEL INFORMATION REMOVED PRELIMINARY NOTE 16-DEC-15 BMIKLANCIE - - UPDATED SHEET FORMAT FOR THIRD ANGLE LOGO 13-JAN-16 BMIKLANCIE ECO0004810 A RATIONALIZATION UPDATE: -TT2, -TT3 SEE PG. 2 22-FEB-23 JMAGLOSKY BASIC MODEL NOMINAL TRAVEL ELEC LIMIT TRAVEL MECH LIMIT TRAVEL A B C D PRO190LM-0100 100 105 125 390 195 175, 275 177.8 PRO190LM-0150 150 155 175 440 220 175, 275 177.8 PRO190LM-0200 200 205 225 490 245 175, 275 177.8 PRO190LM-0250 250 255 275 540 270 175, 375 177.8 PRO190LM-0300 300 305 325 590 295 175, 375 177.8, 431.8 PRO190LM-0400 400 405 425 690 345 175, 375, 575 177.8, 533.4 PRO190LM-0500 500 505 525 790 395 175, 375, 575 177.8, 533.4 PRO190LM-0600 600 605 625 890 445 175, 375, 575, 775 177.8, 533.4 PRO190LM-0800 800 805 825 1090 545 175, 375, 575, 775, 975 177.8, 533.4, 838.2 PRO190LM-1000 1000 1005 1025 1290 645 175, 375, 575, 775, 975, 1175 1143 BMIKLANCIE MODEL BY: MODEL FILENAME: PRO190LM A PRO190LM PART CODE: PRO190LM PRO190LM-CAT PART NAME: DWG. NO. REV CATALOG DRAWING SHEET 1 OF 2 19-NOV-15 DATE EGLASER DRAW BMIKLANCIE BMIKLANCIE NAME CHECK APPR. 19-NOV-15 19-NOV-15 PLACE DRAWING VIEWS BELOW 175 METRIC MOUNTING 177.8 ENGLISH MOUNTING MOUNTING SPACING "C" METRIC "D" ENGLISH 87 (CMS2, CMS3, CMS5, CMS11) 161 (CMS6, CMS7, CMS12) SAFETY GROUND 1M LENGTH FROM CABLE TRAY STAGE MOTOR & FEEDBACK CABLES MOTOR COOLING LINE - 6MM OD TUBE 1M LENGTH FROM CABLE TRAY ADDITIONAL CABLE TRAY FOR MULTI-AXIS CABLE MANAGEMENT STAGE TABLETOP "A" STAGE LENGTH 195 "B" 16.5 16.5 NOTES: 1. M5X0.8 FOR CUSTOMER-INSTALLED AIR PURGE FITTING. 2. DIMENSIONS: MILLIMETERS. 190 87 (CMS1 THRU CMS7) 99 (CMS10 THRU CMS12) 190 195 175 150 100 METRIC (-TT1) 33X M6X1.0 HELICOIL 9.5 REVISIONS MCN REV. DESCRIPTION DATE APPROVED - - UPDATED TRAVEL INFORMATION REMOVED PRELIMINARY NOTE 16-DEC-15 BMIKLANCIE - - UPDATED SHEET FORMAT FOR THIRD ANGLE LOGO 13-JAN-16 BMIKLANCIE ECO0004810 A RATIONALIZATION UPDATE: -TT2, -TT3 SEE PG. 2 22-FEB-23 JMAGLOSKY BASIC MODEL NOMINAL TRAVEL ELEC LIMIT TRAVEL MECH LIMIT TRAVEL A B C D PRO190LM-0100 100 105 125 390 195 175, 275 177.8 PRO190LM-0150 150 155 175 440 220 175, 275 177.8 PRO190LM-0200 200 205 225 490 245 175, 275 177.8 PRO190LM-0250 250 255 275 540 270 175, 375 177.8 PRO190LM-0300 300 305 325 590 295 175, 375 177.8, 431.8 PRO190LM-0400 400 405 425 690 345 175, 375, 575 177.8, 533.4 PRO190LM-0500 500 505 525 790 395 175, 375, 575 177.8, 533.4 PRO190LM-0600 600 605 625 890 445 175, 375, 575, 775 177.8, 533.4 PRO190LM-0800 800 805 825 1090 545 175, 375, 575, 775, 975 177.8, 533.4, 838.2 PRO190LM-1000 1000 1005 1025 1290 645 175, 375, 575, 775, 975, 1175 1143 BMIKLANCIE MODEL BY: MODEL FILENAME: PRO190LM A PRO190LM PART CODE: PRO190LM PRO190LM-CAT PART NAME: DWG. NO. REV CATALOG DRAWING SHEET 1 OF 2 19-NOV-15 DATE EGLASER DRAW BMIKLANCIE BMIKLANCIE NAME CHECK APPR. 19-NOV-15 19-NOV-15 PLACE DRAWING VIEWS BELOW 175 METRIC MOUNTING 177.8 ENGLISH MOUNTING MOUNTING SPACING "C" METRIC "D" ENGLISH 87 (CMS2, CMS3, CMS5, CMS11) 161 (CMS6, CMS7, CMS12) SAFETY GROUND 1M LENGTH FROM CABLE TRAY STAGE MOTOR & FEEDBACK CABLES MOTOR COOLING LINE - 6MM OD TUBE 1M LENGTH FROM CABLE TRAY ADDITIONAL CABLE TRAY FOR MULTI-AXIS CABLE MANAGEMENT STAGE TABLETOP "A" STAGE LENGTH 195 "B" 16.5 16.5 NOTES: 1. M5X0.8 FOR CUSTOMER-INSTALLED AIR PURGE FITTING. 2. DIMENSIONS: MILLIMETERS. 190 87 (CMS1 THRU CMS7) 99 (CMS10 THRU CMS12) 190 195 175 150 100 METRIC (-TT1) 33X M6X1.0 HELICOIL 9.5 REVISIONS MCN REV. DESCRIPTION DATE APPROVED - - UPDATED TRAVEL INFORMATION REMOVED PRELIMINARY NOTE 16-DEC-15 BMIKLANCIE - - UPDATED SHEET FORMAT FOR THIRD ANGLE LOGO 13-JAN-16 BMIKLANCIE ECO0004810 A RATIONALIZATION UPDATE: -TT2, -TT3 SEE PG. 2 22-FEB-23 JMAGLOSKY BASIC MODEL NOMINAL TRAVEL ELEC LIMIT TRAVEL MECH LIMIT TRAVEL A B C D PRO190LM-0100 100 105 125 390 195 175, 275 177.8 PRO190LM-0150 150 155 175 440 220 175, 275 177.8 PRO190LM-0200 200 205 225 490 245 175, 275 177.8 PRO190LM-0250 250 255 275 540 270 175, 375 177.8 PRO190LM-0300 300 305 325 590 295 175, 375 177.8, 431.8 PRO190LM-0400 400 405 425 690 345 175, 375, 575 177.8, 533.4 PRO190LM-0500 500 505 525 790 395 175, 375, 575 177.8, 533.4 PRO190LM-0600 600 605 625 890 445 175, 375, 575, 775 177.8, 533.4 PRO190LM-0800 800 805 825 1090 545 175, 375, 575, 775, 975 177.8, 533.4, 838.2 PRO190LM-1000 1000 1005 1025 1290 645 175, 375, 575, 775, 975, 1175 1143 BMIKLANCIE MODEL BY: MODEL FILENAME: PRO190LM A PRO190LM PART CODE: PRO190LM PRO190LM-CAT PART NAME: DWG. NO. REV CATALOG DRAWING SHEET 1 OF 2 19-NOV-15 DATE EGLASER DRAW BMIKLANCIE BMIKLANCIE NAME CHECK APPR. 19-NOV-15 19-NOV-15 PLACE DRAWING VIEWS BELOW

aerotech.com PRO190LM SERIES CABLE MANAGEMENT (-CMS0) DIMENSIONS 91.5 CONNECTOR INTERFACE MOTOR POWER MOTOR/ENCODER FEEDBACK 107 CONNECTOR INTERFACE

6 MM AIR LINE

PRO225LM/PRO280LM/PRO560LM -CMS0 DIMENSIONS: MILLIMETERS REVISIONS MCN REV. DESCRIPTION DATE APPROVED KSCHOCH MODEL BY: MODEL FILENAME: PRO115LM-CARR-ASSY PRO190LM-CARR-ASSY PRO225LM-II-CARR-ASSY PART CODE: PRO-LM-CMS0-CAT PART NAME: DWG. NO. REV PRO-LM-CMS0 SHEET 1 OF 1 11-AUG-16 DATE BMIKLANCIE DRAW KSCHOCH KSCHOCH NAME CHECK APPR. 11-AUG-16 11-AUG-16