PRO165LM

PRO165LM AEROTECH | Alldatasheet

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Technical content

Precise, Reliable & Adaptable The PRO165LM offers a desirable balance of compact form factor and high load-carrying capability, making it ideal to use in medium- and high performance industrial applications. Combining superior craftsmanship and the highest quality components, PRO165LM stages consistently and reliably deliver best-in-class positioning performance. Thoughtfully engineered features and options, coupled with competitive pricing, make PRO165LM stages the ideal choice for streamlined integration into a wide variety of precision systems. Key Applications PRO165LM mechanical bearing, direct-drive linear stages are extremely versatile, trusted and proven in medium- and high- performance applications, such as: ‹ Laser material processing ‹ Precision metrology, inspection & microscopy ‹ Electronics & circuit board manufacturing & inspection ‹ Display processing ‹ Synchrotron & light source experiments ‹ Medical device manufacturing ‹ Semiconductor fabrication ‹ Fiber optics & silicon photonics processing ‹ Additive manufacturing & precision assembly Mechanical Bearing, Direct-Drive Linear Stage PRO165LM KEY FEATURES: ‹ SUPERIOR PAYLOAD CAPACITY in a compact form-factor provides maximum utility ‹ Ironless, cogless linear motor delivers SMOOTH, ULTRA-PRECISE MOTION ‹ EXCELLENT POSITIONING & DYNAMIC CAPABILITIES in a cost-effective package ‹ BEST-IN-CLASS GEOMETRIC PERFORMANCE ensures superior workpoint accuracy ‹ Rugged, reliable construction is ideal for VERSATILE INDUSTRIAL USE ‹ Hardcover & side seals offer PROTECTION AGAINST CONTAMINATION & PARTICULATES ‹ ThermoComp® option automatically COMPENSATES FOR THERMAL DISTURBANCES ‹ VACUUM- & CLEANROOM-COMPATIBLE versions available

aerotech.com PRO165LM SPECIFICATIONS Electrical Specifications Drive System Brushless Linear Servomotor Feedback Non-contact Linear Encoder -E1: 1 Vpp, 20 µm signal period -E2: Digital RS422, 0.1 µm electrical resolution Maximum Bus Voltage 340 VDC Limit Switches 5 V, Normally-Closed Home Switch Near Center Notes: 1. Certified with -PL1/-PL2 option. 2. Requires the selection of an appropriate amplifier with sufficient voltage and current. 3. Axis-orientation for on-axis loading is listed. 4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Contact factory for multi-axis applications. Mechanical Specifications PRO165LM Travel 100 150 200 300 400 500 600 Accuracy(1) Standard ±4 µm ±6 µm ±8 µm ±10 µm ±12 µm ±14 µm ±15.5 µm Calibrated ±1 µm ±1 µm ±1.5 µm ±1.5 µm ±1.5 µm ±2 µm ±2 µm Resolution (Min. Incremental Motion) 5 nm (-E1 Encoder) Bidirectional Horizontal Straightness(1) ±2.5 µm ±3 µm ±4 µm ±6 µm ±8 µm ±9 µm ±10 µm Vertical Straightness(1) ±2.5 µm ±3 µm ±4 µm ±6 µm ±8 µm ±9 µm ±10 µm Pitch 29 µrad 29 µrad 40 µrad 58 µrad 70 µrad 80 µrad 90 µrad Roll 29 µrad 29 µrad 40 µrad 58 µrad 70 µrad 80 µrad 90 µrad Yaw 29 µrad 29 µrad 40 µrad 58 µrad 70 µrad 80 µrad 90 µrad Maximum Speed(2) 2 m/s Maximum Acceleration(2) 3 g Maximum Force, Continuous 77.7 N Load Capacity(3) Horizontal 45 kg Side 45 kg Moving Mass 2.6 kg Material Anodized Aluminum MTBF (Mean Time Between Failure) 20,000 Hours

aerotech.com PRO165LM ORDERING OPTIONS Travel (Required) -0100 100 mm travel stage -0150 150 mm travel stage -0200 200 mm travel stage -0300 300 mm travel stage -0400 400 mm travel stage -0500 500 mm travel stage -0600 600 mm travel stage Other travel options are available upon request. Contact Aerotech for more information. Tabletop (Required) -TT1 Tabletop with metric dimension mounting NOTE: -TT1 option required for lower axis of XY. Other tabletop options are available upon request. Contact Aerotech for more information. Feedback (Required) -E1 Incremental linear encoder, 1 Vpp -E2 Incremental linear encoder, digital RS422, 0.1 µm electrical resolution Other feedback options are available upon request. Contact Aerotech for more information. Cable Management (Required) -CMS0 No external CMS, motor/feedback connector bracket on carriage -CMS1 External CMS for single axis -CMS2 External CMS for lower-axis of two-axis PRO (XY) assembly -CMS3 External CMS for lower-axis of two-axis (XZ or XT) assembly -CMS4 External CMS for upper-axis of two-axis PRO (XY) assembly -CMS5 External CMS for upper-axis of two-axis (YZ or YT) assembly -CMS6 External CMS for lower-axis of three-axis (XYZ or XYT) assembly -CMS7 External CMS for lower-axis of three-axis (XZT) assembly Lifting Hardware (Optional) -LF Lifting hardware NOTE: Lifting option only available on travels 400 mm and greater. Lifting should never be ordered on the upper-axis of an XY set (only order on lower-axis). ThermoComp (Optional) -TCMP ThermoComp integrated thermal compensation, single or lower axis Metrology (Required) -PL0 No metrology performance plots -PL1 Metrology, uncalibrated with performance plots -PL2 Metrology, calibrated (HALAR) with performance pl ots

aerotech.com PRO165LM ORDERING OPTIONS Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required or if you desire custom integration support with your system. -TAS Integration - Test as system Testing, integration and documentation of a group of components as a complete system that will be used together (ex: drive, controller and stage). This includes parameter file generation, system tuning and documentation of the system configuration. -TAC Integration - Test as components Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system. Accessories (To Be Ordered As Separate Line Item) ALIGN-NPA Non-precision XY assembly ALIGN-NPAZ Non-precision XZ or YZ assembly ALIGN-PA10 XY assembly; 10 arc sec orthogonality. Alignment to within 7 microns orthogonality for short travel stages. ALIGN-PA10Z XZ or YZ assembly with L-bracket; 10 arc second orthogonality. Alignment to within 10 microns orthogonality for short travel stages. ALIGN-PA5 XY assembly; 5 arc sec orthogonality. Alignment to within 3 microns orthogonality for short travel stages.

aerotech.com PRO165LM SPECIFICATIONS Cantilevered load capability of the PRO165LM. Measurement data showing successful compensation of thermal related positioning errors at several temperatures using the ThermoComp feature. Results are typical of stage performance with and without ThermoComp.

aerotech.com PRO165LM DIMENSIONS 150 METRIC MOUNTING 152.4 ENGLISH MOUNTING MOUNTING SPACING "C" METRIC "D" ENGLISH 91.5 (CMS2, CMS3, CMS5) 145.5 (CMS6, CMS7) SAFETY GROUND

1 M LENGTH FROM CABLE TRAY

STAGE MOTOR & FEEDBACK CABLES FOR MULTI-AXIS CABLE MANAGEMENT STAGE TABLETOP "A" STAGE LENGTH 15 15 "B" METRIC 12.7 ENGLISH 10.5 THRU 6.8 165 91.5 162 150 100 165 24X M6X1.0 HELICOIL 7.0 TABLETOP METRIC (-TT1) NOTES: 1. M5X0.8 FOR CUSTOMER-INSTALLED AIR PURGE FITTING. 2. DIMENSIONS: MILLIMETERS. REVISIONS MCN REV. DESCRIPTION DATE APPROVED - - UPDATED OPTION CODES, MOUNTING DIMS REMOVED PRELIMINARY NOTE 09-DEC-15 KSCHOCH

17102 A PRO SERIES UPDATE: PRO165LM-II-CAT REPLACES PRO165LM-CAT 13-JAN-16 BMIKLANCIE

ECO0004810 B RATIONALIZATION UPDATE: -TT2, -TT3 NOW SEE PG. 2 22-FEB-23 JMAGLOSKY BASIC MODEL NOMINAL TRAVEL ELEC LIMIT TRAVEL MECH LIMIT TRAVEL A B C D PRO165LM-0100 100 102-108 116 330 165 150 152.4 PRO165LM-0150 150 152-158 166 380 190 150 152.4 PRO165LM-0200 200 202-208 216 430 215 150, 350 152.4 PRO165LM-0250 250 252-258 266 480 240 150, 350 152.4 PRO165LM-0300 300 302-308 316 530 265 150, 350 152.4, 406.4 PRO165LM-0400 400 402-408 416 630 315 150, 350, 550 152.4, 406.4 PRO165LM-0500 500 502-508 516 730 365 150, 350, 550 152.4, 406.4 PRO165LM-0600 600 602-608 616 830 415 150, 350, 550, 750 152.4, 406.4, 660.4 PRO165LM-0800 800 802-808 816 1030 515 150, 350, 550, 750, 950 152.4, 406.4, 711.2 PRO165LM-1000 1000 1002-1008 1016 1230 615 150, 350, 550, 750, 950, 1150 1016 B. MIKLANCIE MODEL BY: MODEL FILENAME: PRO165LM-II B PRO165LM PART CODE: PRO165LM PRO165LM-II-CAT PART NAME: DWG. NO. REV CATALOG DRAWING SHEET 1 OF 2 20-JUL-15 DATE BMIKLANCIE DRAW KSCHOCH KSCHOCH NAME CHECK APPR. 29-JUL-15 25-JUN-15 PLACE DRAWING VIEWS BELOW 150 METRIC MOUNTING 152.4 ENGLISH MOUNTING MOUNTING SPACING "C" METRIC "D" ENGLISH 91.5 (CMS2, CMS3, CMS5) 145.5 (CMS6, CMS7) SAFETY GROUND STAGE MOTOR & FEEDBACK CABLES FOR MULTI-AXIS CABLE MANAGEMENT STAGE TABLETOP "A" STAGE LENGTH 15 15 "B" METRIC 12.7 ENGLISH 10.5 THRU 6.8 165 91.5 162 150 100 165 24X M6X1.0 HELICOIL 7.0 TABLETOP METRIC (-TT1) NOTES: 1. M5X0.8 FOR CUSTOMER-INSTALLED AIR PURGE FITTING. 2. DIMENSIONS: MILLIMETERS. REVISIONS MCN REV. DESCRIPTION DATE APPROVED - - UPDATED OPTION CODES, MOUNTING DIMS REMOVED PRELIMINARY NOTE 09-DEC-15 KSCHOCH ECO0004810 B RATIONALIZATION UPDATE: -TT2, -TT3 NOW SEE PG. 2 22-FEB-23 JMAGLOSKY BASIC MODEL NOMINAL TRAVEL ELEC LIMIT TRAVEL MECH LIMIT TRAVEL A B C D PRO165LM-0100 100 102-108 116 330 165 150 152.4 PRO165LM-0150 150 152-158 166 380 190 150 152.4 PRO165LM-0200 200 202-208 216 430 215 150, 350 152.4 PRO165LM-0250 250 252-258 266 480 240 150, 350 152.4 PRO165LM-0300 300 302-308 316 530 265 150, 350 152.4, 406.4 PRO165LM-0400 400 402-408 416 630 315 150, 350, 550 152.4, 406.4 PRO165LM-0500 500 502-508 516 730 365 150, 350, 550 152.4, 406.4 PRO165LM-0600 600 602-608 616 830 415 150, 350, 550, 750 152.4, 406.4, 660.4 PRO165LM-0800 800 802-808 816 1030 515 150, 350, 550, 750, 950 152.4, 406.4, 711.2 PRO165LM-1000 1000 1002-1008 1016 1230 615 150, 350, 550, 750, 950, 1150 1016 B. MIKLANCIE MODEL BY: MODEL FILENAME: PRO165LM-II B PRO165LM PART CODE: PRO165LM PRO165LM-II-CAT PART NAME: DWG. NO. REV CATALOG DRAWING SHEET 1 OF 2 20-JUL-15 DATE BMIKLANCIE DRAW KSCHOCH KSCHOCH NAME CHECK APPR. 29-JUL-15 25-JUN-15 PLACE DRAWING VIEWS BELOW 150 METRIC MOUNTING 152.4 ENGLISH MOUNTING MOUNTING SPACING "C" METRIC "D" ENGLISH 91.5 (CMS2, CMS3, CMS5) 145.5 (CMS6, CMS7) SAFETY GROUND STAGE MOTOR & FEEDBACK CABLES FOR MULTI-AXIS CABLE MANAGEMENT STAGE TABLETOP "A" STAGE LENGTH 15 15 "B" METRIC 12.7 ENGLISH 10.5 THRU 6.8 165 91.5 162 150 100 165 24X M6X1.0 HELICOIL 7.0 TABLETOP METRIC (-TT1) NOTES: 1. M5X0.8 FOR CUSTOMER-INSTALLED AIR PURGE FITTING. 2. DIMENSIONS: MILLIMETERS. REVISIONS MCN REV. DESCRIPTION DATE APPROVED - - UPDATED OPTION CODES, MOUNTING DIMS REMOVED PRELIMINARY NOTE 09-DEC-15 KSCHOCH ECO0004810 B RATIONALIZATION UPDATE: -TT2, -TT3 NOW SEE PG. 2 22-FEB-23 JMAGLOSKY BASIC MODEL NOMINAL TRAVEL ELEC LIMIT TRAVEL MECH LIMIT TRAVEL A B C D PRO165LM-0100 100 102-108 116 330 165 150 152.4 PRO165LM-0150 150 152-158 166 380 190 150 152.4 PRO165LM-0200 200 202-208 216 430 215 150, 350 152.4 PRO165LM-0250 250 252-258 266 480 240 150, 350 152.4 PRO165LM-0300 300 302-308 316 530 265 150, 350 152.4, 406.4 PRO165LM-0400 400 402-408 416 630 315 150, 350, 550 152.4, 406.4 PRO165LM-0500 500 502-508 516 730 365 150, 350, 550 152.4, 406.4 PRO165LM-0600 600 602-608 616 830 415 150, 350, 550, 750 152.4, 406.4, 660.4 PRO165LM-0800 800 802-808 816 1030 515 150, 350, 550, 750, 950 152.4, 406.4, 711.2 PRO165LM-1000 1000 1002-1008 1016 1230 615 150, 350, 550, 750, 950, 1150 1016 B. MIKLANCIE MODEL BY: MODEL FILENAME: PRO165LM-II B PRO165LM PART CODE: PRO165LM PRO165LM-II-CAT PART NAME: DWG. NO. REV CATALOG DRAWING SHEET 1 OF 2 20-JUL-15 DATE BMIKLANCIE DRAW KSCHOCH KSCHOCH NAME CHECK APPR. 29-JUL-15 25-JUN-15 PLACE DRAWING VIEWS BELOW 150 METRIC MOUNTING 152.4 ENGLISH MOUNTING MOUNTING SPACING "C" METRIC "D" ENGLISH 91.5 (CMS2, CMS3, CMS5) 145.5 (CMS6, CMS7) SAFETY GROUND STAGE MOTOR & FEEDBACK CABLES FOR MULTI-AXIS CABLE MANAGEMENT STAGE TABLETOP "A" STAGE LENGTH 15 15 "B" METRIC 12.7 ENGLISH 10.5 THRU 6.8 165 91.5 162 150 100 165 24X M6X1.0 HELICOIL 7.0 TABLETOP METRIC (-TT1) NOTES: 1. M5X0.8 FOR CUSTOMER-INSTALLED AIR PURGE FITTING. 2. DIMENSIONS: MILLIMETERS. REVISIONS MCN REV. DESCRIPTION DATE APPROVED - - UPDATED OPTION CODES, MOUNTING DIMS REMOVED PRELIMINARY NOTE 09-DEC-15 KSCHOCH ECO0004810 B RATIONALIZATION UPDATE: -TT2, -TT3 NOW SEE PG. 2 22-FEB-23 JMAGLOSKY BASIC MODEL NOMINAL TRAVEL ELEC LIMIT TRAVEL MECH LIMIT TRAVEL A B C D PRO165LM-0100 100 102-108 116 330 165 150 152.4 PRO165LM-0150 150 152-158 166 380 190 150 152.4 PRO165LM-0200 200 202-208 216 430 215 150, 350 152.4 PRO165LM-0250 250 252-258 266 480 240 150, 350 152.4 PRO165LM-0300 300 302-308 316 530 265 150, 350 152.4, 406.4 PRO165LM-0400 400 402-408 416 630 315 150, 350, 550 152.4, 406.4 PRO165LM-0500 500 502-508 516 730 365 150, 350, 550 152.4, 406.4 PRO165LM-0600 600 602-608 616 830 415 150, 350, 550, 750 152.4, 406.4, 660.4 PRO165LM-0800 800 802-808 816 1030 515 150, 350, 550, 750, 950 152.4, 406.4, 711.2 PRO165LM-1000 1000 1002-1008 1016 1230 615 150, 350, 550, 750, 950, 1150 1016 B. MIKLANCIE MODEL BY: MODEL FILENAME: PRO165LM-II B PRO165LM PART CODE: PRO165LM PRO165LM-II-CAT PART NAME: DWG. NO. REV CATALOG DRAWING SHEET 1 OF 2 20-JUL-15 DATE BMIKLANCIE DRAW KSCHOCH KSCHOCH NAME CHECK APPR. 29-JUL-15 25-JUN-15 PLACE DRAWING VIEWS BELOW 150 METRIC MOUNTING 152.4 ENGLISH MOUNTING MOUNTING SPACING "C" METRIC "D" ENGLISH 91.5 (CMS2, CMS3, CMS5) 145.5 (CMS6, CMS7) SAFETY GROUND STAGE MOTOR & FEEDBACK CABLES FOR MULTI-AXIS CABLE MANAGEMENT STAGE TABLETOP "A" STAGE LENGTH 15 15 "B" METRIC 12.7 ENGLISH 10.5 THRU 6.8 165 91.5 162 150 100 165 24X M6X1.0 HELICOIL 7.0 TABLETOP METRIC (-TT1) NOTES: 1. M5X0.8 FOR CUSTOMER-INSTALLED AIR PURGE FITTING. 2. DIMENSIONS: MILLIMETERS. REVISIONS MCN REV. DESCRIPTION DATE APPROVED - - UPDATED OPTION CODES, MOUNTING DIMS REMOVED PRELIMINARY NOTE 09-DEC-15 KSCHOCH ECO0004810 B RATIONALIZATION UPDATE: -TT2, -TT3 NOW SEE PG. 2 22-FEB-23 JMAGLOSKY BASIC MODEL NOMINAL TRAVEL ELEC LIMIT TRAVEL MECH LIMIT TRAVEL A B C D PRO165LM-0100 100 102-108 116 330 165 150 152.4 PRO165LM-0150 150 152-158 166 380 190 150 152.4 PRO165LM-0200 200 202-208 216 430 215 150, 350 152.4 PRO165LM-0250 250 252-258 266 480 240 150, 350 152.4 PRO165LM-0300 300 302-308 316 530 265 150, 350 152.4, 406.4 PRO165LM-0400 400 402-408 416 630 315 150, 350, 550 152.4, 406.4 PRO165LM-0500 500 502-508 516 730 365 150, 350, 550 152.4, 406.4 PRO165LM-0600 600 602-608 616 830 415 150, 350, 550, 750 152.4, 406.4, 660.4 PRO165LM-0800 800 802-808 816 1030 515 150, 350, 550, 750, 950 152.4, 406.4, 711.2 PRO165LM-1000 1000 1002-1008 1016 1230 615 150, 350, 550, 750, 950, 1150 1016 B. MIKLANCIE MODEL BY: MODEL FILENAME: PRO165LM-II B PRO165LM PART CODE: PRO165LM PRO165LM-II-CAT PART NAME: DWG. NO. REV CATALOG DRAWING SHEET 1 OF 2 20-JUL-15 DATE BMIKLANCIE DRAW KSCHOCH KSCHOCH NAME CHECK APPR. 29-JUL-15 25-JUN-15 PLACE DRAWING VIEWS BELOW

aerotech.com PRO165LM SERIES CABLE MANAGEMENT (-CMS0) DIMENSIONS 91.5 CONNECTOR INTERFACE MOTOR POWER MOTOR/ENCODER FEEDBACK 107 CONNECTOR INTERFACE

6 MM AIR LINE

PRO225LM/PRO280LM/PRO560LM -CMS0 DIMENSIONS: MILLIMETERS REVISIONS MCN REV. DESCRIPTION DATE APPROVED KSCHOCH MODEL BY: MODEL FILENAME: PRO115LM-CARR-ASSY PRO190LM-CARR-ASSY PRO225LM-II-CARR-ASSY PART CODE: PRO-LM-CMS0-CAT PART NAME: DWG. NO. REV PRO-LM-CMS0 SHEET 1 OF 1 11-AUG-16 DATE BMIKLANCIE DRAW KSCHOCH KSCHOCH NAME CHECK APPR. 11-AUG-16 11-AUG-16