PRO115LM

PRO115LM AEROTECH | Alldatasheet

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Technical content

Precise, Reliable & Adaptable The PRO115LM is a compact linear motor stage that excels in medium- and high-performance industrial applications. Combining superior craftsmanship and the highest quality components, PRO115LM stages consistently and reliably deliver best-in-class positioning performance. Thoughtfully engineered features and options, coupled with competitive pricing, make PRO115LM stages the ideal choice for streamlined integration into a wide variety of precision systems, machines and processes. Key Applications PRO115LM mechanical bearing, direct-drive linear stages are extremely versatile, trusted and proven in medium- and high- performance applications, such as: ‹ Laser material processing ‹ Precision metrology, inspection & microscopy ‹ Electronics & circuit board manufacturing & inspection ‹ Display processing ‹ Synchrotron & light source experiments ‹ Medical device manufacturing ‹ Semiconductor fabrication ‹ Fiber optics & silicon photonics processing ‹ Additive manufacturing & precision assembly Mechanical Bearing, Direct-Drive Linear Stage PRO115LM KEY FEATURES: ‹ Compact design SIMPLIFIES INTEGRATION IN SPACE-CONSTRAINED APPLICATIONS ‹ Ironless, cogless linear motor delivers SMOOTH, ULTRA-PRECISE MOTION ‹ EXCELLENT POSITIONING & DYNAMIC CAPABILITIES in a cost-effective package ‹ BEST-IN-CLASS GEOMETRIC PERFORMANCE ensures superior workpoint accuracy ‹ Rugged, reliable construction is ideal for VERSATILE INDUSTRIAL USE ‹ Hardcover & side seals offer PROTECTION AGAINST CONTAMINATION & PARTICULATES ‹ ThermoComp® option automatically COMPENSATES FOR THERMAL DISTURBANCES ‹ VACUUM- & CLEANROOM-COMPATIBLE versions available

aerotech.com PRO115LM SPECIFICATIONS Electrical Specifications Drive System Brushless Linear Servomotor Feedback Non-contact Linear Encoder -E1: 1 Vpp, 20 µm signal period -E2: Digital RS422, 0.1 µm electrical resolution Maximum Bus Voltage 340 VDC Limit Switches 5 V, Normally-Closed Home Switch Near Center Notes: 1. Certified with -PL1/-PL2 option. 2. Requires the selection of an appropriate amplifier with sufficient voltage and current. 3. Axis-orientation for on-axis loading is listed. 4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Contact factory for multi-axis applications. Mechanical Specifications PRO115LM Travel 50 100 150 200 300 400 Accuracy(1) Standard ±3 µm ±4 µm ±6 µm ±8 µm ±10 µm ±12 µm Calibrated ±0.75 µm ±1 µm ±1 µm ±1.5 µm ±1.5 µm ±1.5 µm Resolution (Min. Incremental Motion) 5 nm (-E1 Encoder) Horizontal Straightness(1) ±1.5 µm ±2.5 µm ±3 µm ±4 µm ±6 µm ±8 µm Vertical Straightness(1) ±1.5 µm ±2.5 µm ±3 µm ±4 µm ±6 µm ±8 µm Pitch 19 µrad 29 µrad 29 µrad 39 µrad 58 µrad 78 µrad Roll 19 µrad 29 µrad 29 µrad 39 µrad 58 µrad 78 µrad Yaw 19 µrad 29 µrad 29 µrad 39 µrad 58 µrad 78 µrad Maximum Speed(2) 2 m/s Maximum Acceleration(2) 3 g Maximum Force, Continuous 20.8 N Load Capacity(3) Horizontal 40 kg Side 40 kg Moving Mass 1.9 kg Material Anodized Aluminum MTBF (Mean Time Between Failure) 20,000 Hours

aerotech.com PRO115LM ORDERING OPTIONS Travel (Required) -050 50 mm travel stage -100 100 mm travel stage -150 150 mm travel stage -200 200 mm travel stage -300 300 mm travel stage -400 400 mm travel stage Other travel options are available upon request. Contact Aerotech for more information. Tabletop (Required) -TT1 Tabletop with metric dimension mounting NOTE: -TT1 option required for lower axis of XY. Other tabletop options are available upon request. Contact Aerotech for more information. Feedback (Required) -E1 Incremental linear encoder, 1 Vpp -E2 Incremental linear encoder, digital RS422, 0.1 µm electrical resolution Cable Management (Required) -CMS0 No external CMS, motor/feedback connector bracket on carriage -CMS1 External CMS for single axis -CMS2 External CMS for lower-axis of two-axis PRO (XY) assembly -CMS3 External CMS for lower-axis of two-axis (XZ or XT) assembly -CMS4 External CMS for upper-axis of two-axis PRO (XY) assembly -CMS5 External CMS for upper-axis of two-axis (YZ or YT) assembly -CMS6 External CMS for lower-axis of three-axis (XYZ or XYT) assembly -CMS7 External CMS for lower-axis of three-axis (XZT) assembly -CMS11 External CMS for upper-axis of three-axis PRO165LM XYZ/T assembly ThermoComp (Optional) -TCMP ThermoComp integrated thermal compensation, single or lower axis Metrology (Required) -PL0 No metrology performance plots -PL1 Metrology, uncalibrated with performance plots -PL2 Metrology, calibrated (HALAR) with performance pl ots

aerotech.com PRO115LM ORDERING OPTIONS Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required or if you desire custom integration support with your system. -TAS Integration - Test as system Testing, integration and documentation of a group of components as a complete system that will be used together (ex: drive, controller and stage). This includes parameter file generation, system tuning and documentation of the system configuration. -TAC Integration - Test as components Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system. Accessories (To Be Ordered As Separate Line Item) ALIGN-NPA Non-precision XY assembly ALIGN-NPAZ Non-precision XZ or YZ assembly ALIGN-PA10 XY assembly; 10 arc sec orthogonality. Alignment to within 7 microns orthogonality for short travel stages. ALIGN-PA10Z XZ or YZ assembly with L-bracket; 10 arc second orthogonality. Alignment to within 10 microns orthogonality for short travel stages. ALIGN-PA5 XY assembly; 5 arc sec orthogonality. Alignment to within 3 microns orthogonality for short travel stages. ALIGN-PA5Z XZ or YZ assembly with L-bracket; 5 arc second orthogonality. Alignment to within 5 microns orthogonality for short travel stages.

aerotech.com PRO115LM SPECIFICATIONS Cantilevered load capability of the PRO115LM. www.aerotech.com Measurement data showing successful compensation of thermal related positioning errors at several temperatures using the ThermoComp feature. Results are typical of stage performance with and without ThermoComp.

aerotech.com PRO115LM DIMENSIONS 115 137 50 75 100 20X M6x1.0 HELICOIL 7.0 TABLETOP METRIC (-TT1) "A" STAGE LENGTH 15 15 THRU 6.8 METRIC 12.7 ENGLISH 10.5 "B" 100 METRIC MOUNTING 101.6 ENGLISH MOUTNING MOUNTING SPACING "C" METRIC "D" ENGLISH 91.5 (CMS2, CMS3, CMS5) 145.5 (CMS6, CMS7) STAGE TABLETOP STAGE MOTOR & FEEDBACK CABLES

1 M LENGTH FROM CABLE TRAY

FOR MULTI-AXIS CABLE MANAGEMENT 115 91.5 NOTES: 1. M5X0.8 FOR CUSTOMER-INSTALLED AIR PURGE FITTING 2. DIMENSIONS: MILLIMETERS. REVISIONS MCN REV. DESCRIPTION DATE APPROVED - - UPADTED SHEET FORMAT FOR THIRD ANGLE LOGO 13-JAN-16 BMIKLANCIE ECO0004810 A RATIONALIZATION UPDATE: -TT2, -TT3 NOW SEE PG. 2 22-FEB-23 JMAGLOSKY BASIC MODEL NOMINAL TRAVEL ELEC LIMIT TRAVEL MECH LIMIT TRAVEL A B C D PRO115LM-050 50 57-63 75 280 140 100 101.6 PRO115LM-100 100 107-113 125 330 165 100, 200 101.6 PRO115LM-150 150 157-163 175 380 190 100, 200 101.6 PRO115LM-200 200 207-213 225 430 215 100, 200, 300 101.6 PRO115LM-250 250 257-263 275 480 240 100, 200, 300 101.6, 355.6 PRO115LM-300 300 307-313 325 530 265 100, 200, 300, 400 101.6, 355.6 PRO115LM-400 400 407-413 425 630 315 100, 200, 300, 400, 500 101.6, 457.2 PRO115LM-500 500 507-513 525 730 365 100, 200, 300, 400, 500, 600 101.6, 457.2 PRO115LM-600 600 607-613 625 830 415 100, 200, 300, 400, 500, 600, 700 101.6, 457.2, 660.4 GMATHEWS MODEL BY: MODEL FILENAME: MPH02502 A PRO115LM PART CODE: PRO115LM PRO115LM-CAT PART NAME: DWG. NO. REV CATALOG DRAWING SHEET 1 OF 2 16-DEC-15 DATE KSCHOCH DRAW GMATHEWS GMATHEWS NAME CHECK APPR. 16-DEC-15 14-DEC-15 PLACE DRAWING VIEWS BELOW 115 137 50 75 100 20X M6x1.0 HELICOIL 7.0 TABLETOP METRIC (-TT1) "A" STAGE LENGTH 15 15 THRU 6.8 METRIC 12.7 ENGLISH 10.5 "B" 100 METRIC MOUNTING 101.6 ENGLISH MOUTNING MOUNTING SPACING "C" METRIC "D" ENGLISH 91.5 (CMS2, CMS3, CMS5) 145.5 (CMS6, CMS7) STAGE TABLETOP STAGE MOTOR & FEEDBACK CABLES FOR MULTI-AXIS CABLE MANAGEMENT 115 91.5 NOTES: 1. M5X0.8 FOR CUSTOMER-INSTALLED AIR PURGE FITTING 2. DIMENSIONS: MILLIMETERS. REVISIONS MCN REV. DESCRIPTION DATE APPROVED - - UPADTED SHEET FORMAT FOR THIRD ANGLE LOGO 13-JAN-16 BMIKLANCIE ECO0004810 A RATIONALIZATION UPDATE: -TT2, -TT3 NOW SEE PG. 2 22-FEB-23 JMAGLOSKY BASIC MODEL NOMINAL TRAVEL ELEC LIMIT TRAVEL MECH LIMIT TRAVEL A B C D PRO115LM-050 50 57-63 75 280 140 100 101.6 PRO115LM-100 100 107-113 125 330 165 100, 200 101.6 PRO115LM-150 150 157-163 175 380 190 100, 200 101.6 PRO115LM-200 200 207-213 225 430 215 100, 200, 300 101.6 PRO115LM-250 250 257-263 275 480 240 100, 200, 300 101.6, 355.6 PRO115LM-300 300 307-313 325 530 265 100, 200, 300, 400 101.6, 355.6 PRO115LM-400 400 407-413 425 630 315 100, 200, 300, 400, 500 101.6, 457.2 PRO115LM-500 500 507-513 525 730 365 100, 200, 300, 400, 500, 600 101.6, 457.2 PRO115LM-600 600 607-613 625 830 415 100, 200, 300, 400, 500, 600, 700 101.6, 457.2, 660.4 GMATHEWS MODEL BY: MODEL FILENAME: MPH02502 A PRO115LM PART CODE: PRO115LM PRO115LM-CAT PART NAME: DWG. NO. REV CATALOG DRAWING SHEET 1 OF 2 16-DEC-15 DATE KSCHOCH DRAW GMATHEWS GMATHEWS NAME CHECK APPR. 16-DEC-15 14-DEC-15 PLACE DRAWING VIEWS BELOW 115 137 50 75 100 20X M6x1.0 HELICOIL 7.0 TABLETOP METRIC (-TT1) "A" STAGE LENGTH 15 15 THRU 6.8 METRIC 12.7 ENGLISH 10.5 "B" 100 METRIC MOUNTING 101.6 ENGLISH MOUTNING MOUNTING SPACING "C" METRIC "D" ENGLISH 91.5 (CMS2, CMS3, CMS5) 145.5 (CMS6, CMS7) STAGE TABLETOP STAGE MOTOR & FEEDBACK CABLES FOR MULTI-AXIS CABLE MANAGEMENT 115 91.5 NOTES: 1. M5X0.8 FOR CUSTOMER-INSTALLED AIR PURGE FITTING 2. DIMENSIONS: MILLIMETERS. REVISIONS MCN REV. DESCRIPTION DATE APPROVED - - UPADTED SHEET FORMAT FOR THIRD ANGLE LOGO 13-JAN-16 BMIKLANCIE ECO0004810 A RATIONALIZATION UPDATE: -TT2, -TT3 NOW SEE PG. 2 22-FEB-23 JMAGLOSKY BASIC MODEL NOMINAL TRAVEL ELEC LIMIT TRAVEL MECH LIMIT TRAVEL A B C D PRO115LM-050 50 57-63 75 280 140 100 101.6 PRO115LM-100 100 107-113 125 330 165 100, 200 101.6 PRO115LM-150 150 157-163 175 380 190 100, 200 101.6 PRO115LM-200 200 207-213 225 430 215 100, 200, 300 101.6 PRO115LM-250 250 257-263 275 480 240 100, 200, 300 101.6, 355.6 PRO115LM-300 300 307-313 325 530 265 100, 200, 300, 400 101.6, 355.6 PRO115LM-400 400 407-413 425 630 315 100, 200, 300, 400, 500 101.6, 457.2 PRO115LM-500 500 507-513 525 730 365 100, 200, 300, 400, 500, 600 101.6, 457.2 PRO115LM-600 600 607-613 625 830 415 100, 200, 300, 400, 500, 600, 700 101.6, 457.2, 660.4 GMATHEWS MODEL BY: MODEL FILENAME: MPH02502 A PRO115LM PART CODE: PRO115LM PRO115LM-CAT PART NAME: DWG. NO. REV CATALOG DRAWING SHEET 1 OF 2 16-DEC-15 DATE KSCHOCH DRAW GMATHEWS GMATHEWS NAME CHECK APPR. 16-DEC-15 14-DEC-15 PLACE DRAWING VIEWS BELOW 115 137 50 75 100 20X M6x1.0 HELICOIL 7.0 TABLETOP METRIC (-TT1) "A" STAGE LENGTH 15 15 THRU 6.8 METRIC 12.7 ENGLISH 10.5 "B" 100 METRIC MOUNTING 101.6 ENGLISH MOUTNING MOUNTING SPACING "C" METRIC "D" ENGLISH 91.5 (CMS2, CMS3, CMS5) 145.5 (CMS6, CMS7) STAGE TABLETOP STAGE MOTOR & FEEDBACK CABLES FOR MULTI-AXIS CABLE MANAGEMENT 115 91.5 NOTES: 1. M5X0.8 FOR CUSTOMER-INSTALLED AIR PURGE FITTING 2. DIMENSIONS: MILLIMETERS. REVISIONS MCN REV. DESCRIPTION DATE APPROVED - - UPADTED SHEET FORMAT FOR THIRD ANGLE LOGO 13-JAN-16 BMIKLANCIE ECO0004810 A RATIONALIZATION UPDATE: -TT2, -TT3 NOW SEE PG. 2 22-FEB-23 JMAGLOSKY BASIC MODEL NOMINAL TRAVEL ELEC LIMIT TRAVEL MECH LIMIT TRAVEL A B C D PRO115LM-050 50 57-63 75 280 140 100 101.6 PRO115LM-100 100 107-113 125 330 165 100, 200 101.6 PRO115LM-150 150 157-163 175 380 190 100, 200 101.6 PRO115LM-200 200 207-213 225 430 215 100, 200, 300 101.6 PRO115LM-250 250 257-263 275 480 240 100, 200, 300 101.6, 355.6 PRO115LM-300 300 307-313 325 530 265 100, 200, 300, 400 101.6, 355.6 PRO115LM-400 400 407-413 425 630 315 100, 200, 300, 400, 500 101.6, 457.2 PRO115LM-500 500 507-513 525 730 365 100, 200, 300, 400, 500, 600 101.6, 457.2 PRO115LM-600 600 607-613 625 830 415 100, 200, 300, 400, 500, 600, 700 101.6, 457.2, 660.4 GMATHEWS MODEL BY: MODEL FILENAME: MPH02502 A PRO115LM PART CODE: PRO115LM PRO115LM-CAT PART NAME: DWG. NO. REV CATALOG DRAWING SHEET 1 OF 2 16-DEC-15 DATE KSCHOCH DRAW GMATHEWS GMATHEWS NAME CHECK APPR. 16-DEC-15 14-DEC-15 PLACE DRAWING VIEWS BELOW 115 137 50 75 100 20X M6x1.0 HELICOIL 7.0 TABLETOP METRIC (-TT1) "A" STAGE LENGTH 15 15 THRU 6.8 METRIC 12.7 ENGLISH 10.5 "B" 100 METRIC MOUNTING 101.6 ENGLISH MOUTNING MOUNTING SPACING "C" METRIC "D" ENGLISH 91.5 (CMS2, CMS3, CMS5) 145.5 (CMS6, CMS7) STAGE TABLETOP STAGE MOTOR & FEEDBACK CABLES FOR MULTI-AXIS CABLE MANAGEMENT 115 91.5 NOTES: 1. M5X0.8 FOR CUSTOMER-INSTALLED AIR PURGE FITTING 2. DIMENSIONS: MILLIMETERS. REVISIONS MCN REV. DESCRIPTION DATE APPROVED - - UPADTED SHEET FORMAT FOR THIRD ANGLE LOGO 13-JAN-16 BMIKLANCIE ECO0004810 A RATIONALIZATION UPDATE: -TT2, -TT3 NOW SEE PG. 2 22-FEB-23 JMAGLOSKY BASIC MODEL NOMINAL TRAVEL ELEC LIMIT TRAVEL MECH LIMIT TRAVEL A B C D PRO115LM-050 50 57-63 75 280 140 100 101.6 PRO115LM-100 100 107-113 125 330 165 100, 200 101.6 PRO115LM-150 150 157-163 175 380 190 100, 200 101.6 PRO115LM-200 200 207-213 225 430 215 100, 200, 300 101.6 PRO115LM-250 250 257-263 275 480 240 100, 200, 300 101.6, 355.6 PRO115LM-300 300 307-313 325 530 265 100, 200, 300, 400 101.6, 355.6 PRO115LM-400 400 407-413 425 630 315 100, 200, 300, 400, 500 101.6, 457.2 PRO115LM-500 500 507-513 525 730 365 100, 200, 300, 400, 500, 600 101.6, 457.2 PRO115LM-600 600 607-613 625 830 415 100, 200, 300, 400, 500, 600, 700 101.6, 457.2, 660.4 GMATHEWS MODEL BY: MODEL FILENAME: MPH02502 A PRO115LM PART CODE: PRO115LM PRO115LM-CAT PART NAME: DWG. NO. REV CATALOG DRAWING SHEET 1 OF 2 16-DEC-15 DATE KSCHOCH DRAW GMATHEWS GMATHEWS NAME CHECK APPR. 16-DEC-15 14-DEC-15 PLACE DRAWING VIEWS BELOW

aerotech.com 91.5 CONNECTOR INTERFACE MOTOR POWER MOTOR/ENCODER FEEDBACK 107 CONNECTOR INTERFACE

6 MM AIR LINE

PRO225LM/PRO280LM/PRO560LM -CMS0 DIMENSIONS: MILLIMETERS REVISIONS MCN REV. DESCRIPTION DATE APPROVED KSCHOCH MODEL BY: MODEL FILENAME: PRO115LM-CARR-ASSY PRO190LM-CARR-ASSY PRO225LM-II-CARR-ASSY PART CODE: PRO-LM-CMS0-CAT PART NAME: DWG. NO. REV PRO-LM-CMS0 SHEET 1 OF 1 11-AUG-16 DATE BMIKLANCIE DRAW KSCHOCH KSCHOCH NAME CHECK APPR. 11-AUG-16 11-AUG-16 PRO115LM SERIES CABLE MANAGEMENT (-CMS0) DIMENSIONS