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WWW.MKSINST.COM P4B MUlT i- G a S /M U lT i- R an GE Ma SS Fl Ow C O n TRO ll ER FOR Fa ST and aCCUR aTE C O n TRO l OF C R i T i C al P ROCESS Ga SES The MKS, model P4B MFC, is the next generation of MKS multi-gas/multi-range MFC for critical process gas flow control. The device uses the latest in electronics and valve components enabling it to meet the most critical of process gas flow control requirements. The performance capabilities of the P4B are quickly apparent where short process steps are required given the sub 750 millisecond control times and accuracy to within 1% of set point. This performance extends over the range of process gases, whether “light” gases such as helium or “heavy” gases like SF6. The P4B is a true multi-range/multi-gas MFC that enables the user to have confidence in this device’s capability and minimize MFC inventory requirements. Utilization of the multi-gas/multi-range capability is made simple through the device’s embedded software and standard Ethernet interface that requires no special software, only a standard web browser and a PC. Already stored on the device are critical gas parameters for most of the gases in use today by the semiconductor industry. It is a simple matter of selecting the gas and specifying the range to configure the device. Through this interface the user can also perform device monitoring diagnostics while the device is operating. Features & Benefits Superior Perf ormance

  • Fast response to set point reduces flo w stabilization time f or short process steps and process control Tightly controlled flo w accur acy of process gas enab les improved chamber process matching R educes Overall Costs
  • Reduces MFC in ventory through its m ulti-gas/multi-range capability
  • Accurate flo w control o ver a wide dynamic r ange, even when down ranged, reduces need f or an additional low r ange MFC Easy to Integrate and Operate
  • Embedded configur ation and diagnostics softw are that allows the user to check MFC functionality without de vice removal from the tool Uses a standard w eb bro wser; no special softw are required
  • Easy vie wing of flo w r ate, gas type and Full Scale flo w with its bright, self or ienting LED display WWW.MKSINST.COM Flow Solutions

Full Scale Flow Ranges (N2 equivalent) 5 - 50000 sccm (consult f actory for available flow ranges) Maximum i nlet Pressure 150 psig (can not e xceed pressure differential requirement across MFC) n ormal Operating Pressure d ifferential (N2 F .S.) 5 to 5000 sccm; 10 to 40 psid (with atmospher ic pressure at the MFC outlet) 10000 to 20000 sccm; 15 to psid 30000 to 50000 sccm; 25 to psid Pr oof Pressure 1000 psig Bur st Pressure 1500 psig Contr ol Range 2% to 100% of F .S. (range on mech.) Typical a ccuracy ± 1% of set point f or 20 to 100% F .S. ± 0.2% of F .S. for 2 to 20% F .S. Repeatability ± 0.3% of Reading Resolution 0.1% of Full Scale T emperature Coefficients Zero < 0.05% of F .S./°C Span < 0.08% of Rdg./°C i nlet Pressure Coefficient < 0.02% of Rdg./psi T ypical Controller Settling Time < 750 msec., typical abo ve 5% F .S. (per SEMI Guideline E-17-0600) warm-up Time < 30 min (to within 0.2% of F .S. of steady state performance) Operating Temperature Range ( a mbient) 10°C to 50°C Stora ge Humidity 0 to 95% relativ e humidity, non-condensing Storage Temperature T emperature d isplay 0 to 100°C T emperature Readout Units T emperature a ccuracy ± 2°C T emperature Resolution 0.1°C Mechanical Fittings (compatible with) Sw agelok® 4 VCR®, 1-1/8” surface mount (C-seal, W-seal), 1½” W-seal d isplay 4 digits f or value, 4 characters for unit l eak i ntegrity Exter nal (scc/sec He) < 1 x 10-10 Through closed v alve < 1.0% of F .S. at 25 psig inlet to atmosphere (range on mech.) o assure no flow-through, a separate positive shut-off valve is required.) wetted Materials Standard 316L S .S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S .S., Elgiloy, KM-45 V alve Seat PTFE (T eflon) Surface Finish 10µ inch a verage Ra weight less than 3 lbs (1.4kg) Electrical analog i/O input Power Required +15 to +24 VDC @ 350mA max Flow i nput/Output Signal 0 to 5 VDC Output i mpedance < 1 Ω Connector 15-pin Type “D” Male, 9 pin Type “D” Male Compliance CE

Dimensional Drawing — Analog 9 Pin D, 15-Pin D, RS-485 and DeviceNet ™ Note: Unless specified, dimensions are nominal values in inches (mm referenced). Dimensions shown are for normally closed valve configuration. F or normally open valve configuration dimensions, contact MKS. Dimensional Drawing digital i/O digital i/O d evice n et™ RS-485 i nput Power Required +11 to +25 VDC per +15 to +24 VDC @ 350mA max De viceNet specification (@ <3.5 watts) Connector 5 pin microconnnector (De viceNet) 9 pin Type D male d ata Rate Switch 4 positions: 125, 250, 500K (Default), 3 positions: 9.6, 19.2, 38.4K (Default) PGM (prog rammable over the network) d ata Rate/ n etwork l ength Data r ate (user selectable) Data r ate (user selectable)

125 Kbps

, 500 meters (1,640 feet)

9.6 Kbps

, 1200 meters (4,000 feet)

250 Kbps

, 250 meters (820 feet)

19.2 Kbps

, 1200 meters (4,000 feet)

500 Kbps

, 100 meters (328 feet)

38.4 Kbps

, 1200 meters (4,000 feet) M aC id Switches s witches, positions; 0,0 to 6,3 are s witches, positions; 0,0 to 9,9. hardware ID n umbers; 7,0 to 9,9 are A vailable MA C ID’ s are 3,2 to 9,9. software ID n umbers; (6,4 to 6,9 are un used and, if selected will default to hardw are ID number 6,3) n etwork Size Up to 64 nodes Up to 32 nodes n etwork Topology Linear (tr unkline/dropline) power and signal Master/sla ve on same netw ork cable Visual Communication i ndicators LED netw ork status (green/red) LED netw ork status (green/red) LED module status (g reen/red) LED module status (g reen/red) Scrolling LED displa ys (MFC Type, Scrolling LED displa ys (MFC Type, Flo w Full Scale, Gas Type, IP address, Flo w Full Scale, Gas Type, IP address, Instance Number (1 to 31) Instance Number (1 to 31) Compliance CE CE

© 2012-2018 MKS Instruments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice. mksinst™ is a trademark of MKS Instruments, Inc., Andover, MA. Swagelok® and VCR® are registered trademarks of Swagelok Marketing Co., Solon, OH. Inconel® and Incoloy® are registered trademarks of Inco Alloys, Huntington, WV. Teflon® is a registered trademark of E.I. Dupont, Wilmington, DE. DeviceNet™ is a trademark of the Open DeviceNet Vendor Association, Coral Springs, FL. 013 T 502 C P4B * The Full Scale flow rate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate separ ated by a decimal point. The third digit is the exponent of the power of ten. Example flo w rate code: 254 is 2.5 x 104 or 25000 sccm 153 is 1.5 x 103 or 1500 sccm 601 is 6.0 x 101 or 60 sccm Ordering Inf ormation Ordering Code Example: P4B013502C6T030 Code Configuration MFC Mass Flo w Controller (multigas, multi-range) P4B P4B Gas (P er Semi Standard E52-0703) F or example: 013 = Nitrogen = N2 013 029 = Ammonia = NH3 029 110 = Sulfur He xafluoride = SF6 110 Flow Range Full Scale* 5 sccm 500 10 sccm 101 20 sccm 201 50 sccm 501 100 sccm 102 200 sccm 202 500 sccm 502 1000 sccm 103 2000 sccm 203 5000 sccm 503 10000 sccm 104 20000 sccm 204 30000 sccm 304 50000 sccm 504 Fittings (compatible with) Sw agelok 4 VCR R C-seal (1.125”) C W -seal (1.125”) H Connector DeviceNet RS485 (uses 9 pin connector) 15 pin D (Analog I/O) B 9 pin D (Analog I/O) A V alve Nor mally Closed, Teflon®:: (10 sccm - 50 slm N2 equivalent) T Nor mally Open, Teflon: (10 sccm to 50 slm N2 equivalent) P No V alve (MFM) Reser ved for MKS Future Use Standard Firmware Unless otherwise specified, MKS will ship fir mware revision current to date MKS Instruments, Inc. Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 T el: 800.227.8766 (in U .S.A.) Web: www.mksinst.com MKS Instruments, Inc. Flow Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350