DATASHEET SEARCH SITE | WWW.ALLDATASHEET.COM

Document overview

  • Manufacturer or author: Provided By ALLDATASHEET.COM(FREE DATASHEET DOWNLOAD SITE)
  • PDF pages: 4

Technical content

WWW.MKSINST.COM P250A MUlTI - GAS /M U lTI - RANGE M ASS Fl Ow C ONTRO ll ER FOR Fl Ow R ATES U P T O 250 S l M The MFC, model P250A, is a metal-sealed, multi-gas/multi-range MFC that is capable of being ranged from 100 to 250 slm Nitrogen Full Scale flow with a single device. Enabling this capability is the device’s unique control valve design that provides for rapid set point response while maintaining closed conductance leak rates well below other typical high flo w MFCs. The P250A’s performance capabilities of fast settling time (less than 2 seconds) and one (1) percent of set point accuracy exceed those of other typical high flow MFCs. Control capability extends down to 2% of the device’s configured Full Scale. These capabilities combined with the devices multi-gas/multi-range capability extend the users ability to minimize required high flow MFC inventory for MOCVD, silicon epitaxy, RTP and diffusion/ oxidation applications. Utilization of the multi-gas/multi-range capability is made simple through the device’s embedded software and standard Ethernet interface that requires no special software or hardware to operate, only a standard web browser and a PC. Already stored on the device are critical gas parameters for typical high flow rate gases in use. It’s simply a matter of selecting the gas and specifying the Full Scale flow range to configure the device. This interface also allows the user to perform device diagnostics, plot flow and store data for offline analysis. Improved Perf ormance

  • Fast response to set point reduces flo w stabilization time f or short process steps enhancing process throughput Tightly controlled flo w accur acy of process gas enab les improved chamber process matching Reduced inlet pressure (pressure drop) requirement which can simplify gas supply regulation from a single source R educes Overall Costs
  • Reduces MFC in ventory through its m ulti-gas/multi-range capability
  • Accurate flo w control o ver a wide dynamic r ange, even when down ranged, reduces need f or an additional low r ange MFC Easy to Integrate and Operate
  • Device configur ation and diagnostics made simple through standard Ether net interface Uses a standard w eb bro wser with no special softw are required
  • Easy vie wing of flo w r ate, gas type and Full Scale flo w with its bright LED display Patents Pending Features & Benefits WWW.MKSINST.COM Flow Solutions

Full Scale Flow Ranges (N2 equivalent) 100 to 250 slm Maxim um Inlet Pressure 150 psig (can not e xceed pressure differential requirement across MFC) Normal Operating Pressure Differential 25 to 45 psid (with atmospher ic pressure at the MFC outlet) Pr oof Pressure 1000 psig Bur st Pressure 1500 psig Contr ol Range 2% to 100% of F .S. (range on mech.) Typical Accuracy ± 1% of set point f or > 20% to 100% F .S. ± 0.2% of F .S. for 2% to 20% F .S. Repeatability ± 0.3% of Reading Resolution 0.1% of Reading T emperature Coefficients Zero < 0.05% of F .S./°C Span < 0.08% of Rdg./°C Inlet Pressure Coefficient < 0.02% of Rdg./psi T ypical Controller Settling Time < 3 sec typical abo ve 10% F .S. @ 50 psi (per SEMI Guideline E-17-0600) warm-up Time < 30 min (to within 0.2% of F .S. of steady state performance) Operating Temperature Range (Ambient) 10°C to 50°C Stora ge Humidity 0 to 95% relativ e humidity, non-condensing Storage Temperature T emperature Display 0 to 85°C T emperature Readout Units T emperature Accuracy ± 2°C T emperature Resolution 0.1°C Mechanical Fittings (compatible with) Sw agelok® 8 VCR® Display 4 digits f or value, 4 characters for unit l eak Integrity Exter nal (scc/sec He) < 1 x 10-10 Through closed v alve < 1.0% of configured F .S. at 40 psia to vac (<500 mTorr) o assure no flow-through, a separate positive shut-off valve is required.) wetted Materials Standard 316L S .S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S .S., Elgiloy, 430FR, Buna-N, Nickel, Polyimide Surface Finish 10 µinch a verage Ra weight less than 3 lbs (1.4kg)

Specifications (cont’d) Dimensional Drawing — DeviceNet™ Note: Unless specified, dimensions are nominal values in inches (mm referenced). Dimensional Drawing Digital I/O Digital I/O De viceNet™ Input P ower Required +11 to +25 VDC per DeviceNet specification (@ < 9 watts) Connector 5 pin microconnnector (De viceNet) Data Rate Switc h 4 positions: 125, 250, 500K (Default), GM (programmable over the network) Data Rate/Network l ength Data r ate (user selectable)

125 Kbps

, 500 meters (1,640 feet)

250 Kbps

, 250 meters (820 feet)

500 Kbps

, 100 meters (328 feet) MA C ID Switches 2 s witches, 10 positions; 0,0 to 6,3 are hardware ID numbers; 7,0 to 9,9 are software ID n umbers; (6,4 to 6,9 are unused and, if selected will default to hardware ID number 6,3) Network Size Up to 64 nodes Netw ork Topology Linear (tr unkline/dropline) power and signal on same network cable Visual Communication Indicators LED netw ork status (green/red) LED module status (g reen/red) Scrolling LED displa ys (MFC Type, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31))

© 2012-2018 MKS Instruments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice. mksinst ™ is a trademark of MKS Instruments, Inc., Andover, MA. Swagelok® and VCR® are registered trademarks of Swagelok Marketing Co., Solon, OH. Inconel® and Incoloy® are registered trademarks of Inco Alloys, Huntington, WV. DeviceNet™ is a trademark of the Open DeviceNet Vendor Association, Coral Springs, FL. 013 M 255 T P250A * For gases not listed in the standard products gas table, please contact the MKS applications depar tment for assistance. ** The Full Scale flow rate is designated by a 3 digit number. The first two digits represent the significant digits of the FS flo w rate separated by a decimal point. The third digit is the exponent of the power of ten. Example flo w rate code: 255 is 2.5 x 105 sccm or 250 slm 105 is 1.0 x 105 sccm or 100 slm Ordering Inf ormation Ordering Code Example: P250A013255T6M010 Code Configuration MFC High Flo w Mass Flow Controller (multigas, multi-range) P250A Gas* F or example: 001 = Helium = He 001 004 = Argon = Ar 004 007 = Hydrogen = H2 007 013 = Nitrogen = N2 013 Flow Range Full Scale** 100 slm (100,000 sccm) 105 150 slm (150,000 sccm) 155 200 slm (200,000 sccm) 205 250 slm (250,000 sccm) 255 Fittings (compatible with) Sw agelok 8 VCR T Connector (P ower & Control I/O) DeviceNet 15 pin D (Analog I/O) B V alve Nor mally Closed M Reser ved for MKS Future Use Standard Firmware Unless otherwise specified, MKS will ship fir mware revision current to date (De viceNet only) Alpha char acters designates prerelease product versions Gas Table 1.5 Gas Name Semi Gas Code Gas Form ula Min - Max FS (slm) Helium 001 He 140-350 Neon 002 Ne 138-345 Argon 004 Ar 090-222 Hydrogen 007 H2 100-250 Nitrogen 013 N2 100-250 Arsine 035 AsH 3 032-080 Germane 043 GeH 4 033-083 Tetrafluoromethane 063 CF4 031-077 Sulfer Hexafluoride 110 SF6 016-040 Octafluorocyclobutane (R-c318) 129 C 4F8 009-023 MKS Instruments, Inc. Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 T el: 800.227.8766 (in U .S.A.) Web: www.mksinst.com MKS Instruments, Inc. Flow Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350