MS7907 INTERSEMA | Alldatasheet

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Technical content

DA7907_002.doc March 16, 2009 1/5 000079071388 ECN 1186 MS7907 PRESSURE SENSOR DIE (0-7 BAR)

  • 0 to 700 kPa range (7 bar or 102 PSI)
  • Absolute/differential pressure sensors
  • High linearity, small size
  • RoHS-compatible & Pb-free 1

DESCRIPTION

The sensor element of the MS7907 consists of a sili con micro-machined membrane. Implanted resistors ma ke use of the piezo-resistive effect to sense the memb rane deflection and transform it in an electrical s ignal. This sensor, which has outstanding linearity and span va lues, is available in various configurations. The a bsolute pressure sensor employs a sealed vacuum reference c avity underneath the membrane. The Pyrex glass wafe r gauge versions available: one with a drilled Pyrex glass (MS7907-D) and the other without Pyrex glass (MS7907-S).

FEATURES

  • Uncompensated pressure sensor die • Linearity 0.05% (typical)
  • Output Span 150mV @ 5V • Small Die Size 1.72 x 1.58mm (MS7907-A)
  • Temperature Range -40° …+125° C • Low Cost, High reliability APPLICATION
  • For absolute or differential pressure sensor syste ms
  • Engine controls
  • Dive computers ELECTRICAL CONNECTIONS Positive output for pressure applied topside 1 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment) bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or poly brominated diphenyl ethers (PBDE). Vs+ : Supply voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out- : Negative output Out+ : Positive output GND1 : Ground GND2 : Ground Vs+ GND2 GND1 Out + EPI Out -

DA7907_002.doc March 16, 2009 2/5 000079071388 ECN 1186 BOND PAD CONFIGURATION MS7912 Vs+ Out- Epi Out+ GND1 GND2 Important remarks: As the sensing elements are diffused resistances, t he voltage applied on the ground pads (GND1 and GND2) has to b e lower than the voltage applied on supply voltage pad (Vs+). The epitaxial layer is connected to the Vs+ pin on the die. Gold ball bonding or aluminium wedge bonding can be used to wire-bond the sensor. The quality of the wire-bonding is equipment and process dependant. For this reason, it is stron gly recommended that a thorough wire-bonding qualificat ion is made by the end user if the sensor is going to be operat ed over an extended temperature range. LAYOUT (Absolute sensors) MS7907-A_0.2 MS7907-A_0.5 Pad opening in passivation is 100 µµ µµ m

DA7907_002.doc March 16, 2009 3/5 000079071388 ECN 1186 LAYOUT (Gauge sensors) MS7907-D MS7907-S Pad opening in passivation is 100 µµ µµ m FULL SCALE PRESSURE kPa bar mbar PSI atm mm Hg m H 2O Inches H 2O 700 7 7000 102 6.9 5250 71 2810 ABSOLUTE MAXIMUM RATINGS Parameter Symbol Conditions Min Max Unit Supply voltage VS+ Ta = 25 o C 20 V Storage temperature T S -40 +150 oC Pressure overload 21 Bar

DA7907_002.doc March 16, 2009 4/5 000079071388 ECN 1186

ELECTRICAL CHARACTERISTICS

(Reference conditions: Supply Voltage VS+ = 5 Vdc; Ambient Temperature Ta = 25° C ) Parameter Min Typ Max Unit Notes Operating Pressure Range 0 7 Bar Operating Temperature Range -40 125 ° C Bridge Resistance 3.0 3.4 3.8 kΩ Full-scale span (FS) 120 150 180 mV Zero Pressure Offset -40 0 40 mV Linearity ± 0.05 ± 0.2 % FS 1 Temperature Coefficient of Resistance Span Offset + 2400 - 1500 - 80 + 2800 - 1900 + 3300 - 2300 + 80 ppm/° C ppm/° C µV/° C Pressure Hysteresis ± 0.05 ± 0.15 % FS 3 Repeatability ± 0.1 ± 0.2 % FS 4 Temperature Hysteresis 0.3 % FS 5 NOTES 1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range (0 to 7 bar). 2) Slope of the endpoint straight line from 25° C to 60° C. 3) Output deviation at any pressure within the spe cified range, when this pressure is cycled to and f rom the minimum or maximum rated pressure, at 25° C. 4) Same as 3) after 10 pressure cycles. 5) Maximum difference in offset after one thermal cycle from -40° C to +125° C. PICKING TOOLS The MS7907 sensors have a sensitive membrane size o f 0.5 x 0.5 mm and outer dimensions of 1.72 x 1.58 mm to be of a soft material such as rubber (Hardness 7 8-97 Shore A). Its external size must fit the senso r and the vacuum cavity must be as large as the membrane itse lf. Successful tests have been made with specific S PT tools, see SPT drawing and references below. Ensure that the ejection pins do not touch the membrane for gauge versions. SPT references RTR-A1-060x060 External dimension TL & TW: 0.06 inch /1.52 mm Internal dimensions ∅ H: 0.035 inch / 0.89 mm

DA7907_002.doc March 16, 2009 5/5 000079071388 ECN 1186

ORDERING INFORMATION

Product Code Type Product Art.-Nr. MS7907-A_0.2 Absolute 7 bar Pressure Sensors 0.2 mm Pyrex sawn on b/f 790725022 MS7907-A_0.5 Absolute 7 bar Pressure Sensors 0.5 mm Pyrex sawn on b/f 790725021 MS7907-D Differential 7 bar Pressure Sensors sawn o n b/f 790725121 MS7907-S Differential 7 bar Pressure Sensors no Pyr ex sawn on b/f 790725221 The MS7907 dice are supplied sawn on blue foil, mounted on plastic rings FACTORY CONTACTS Factory and European Sales office Intersema Sensoric SA Phone: +41 32 847 9550 Ch. Chapons-des-Prés 11 Fax: +41 32 847 9569 CH-2022 Bevaix e-mail: Switzerland Website: www.intersema.ch USA Measurement Specialties Inc. Phone: +1 800 555 155 1

1000 Lucas Way Fax: +1 757 766 4297

Hampton, VA 23666 e-mail: sales@meas-spec.com USA Website: www.meas-spec.com ASIA Measurement Specialties (China), Ltd. Phone: +86 75 5 8330 1004 F1.6-4D, Tian An Development Fax: +86 755 8330 6797 Compound e-mail: pfc.cs.asia@meas-spec.com Shenzhen, China 518048 Website: www.meas-spec.com NOTICE Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance and to supply the best possible products. Intersema assumes no responsibility for the use of any circu its shown in this data sheet, conveys no license under any patent or other rights unless otherwise specified in this data sheet, and makes n o claim that the circuits are free from patent infringement. Applications for any devices s hown in this data sheet are for illustration only a nd Intersema makes no claim or warranty that such applications will be suitable for the use specified without further testing or modification.