MS7901 INTERSEMA | Alldatasheet

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DA7901_005.doc January 23 rd , 2009 1/5 00007901872 ECN 1178 MS7901 PRESSURE SENSOR DIE (0-1 BAR)

  • 0 to 100 kPa range (1 bar or 14.5 PSI)
  • Absolute/differential pressure sensors
  • RoHS-compatible & Pb-free 1

DESCRIPTION

The sensor element of the MS7901 consists of a sili con micro-machined membrane. Implanted resistors ma ke use of the piezo-resistive effect to sense the memb rane deflection and transform it in an electrical s ignal. This sensor, which has outstanding linearity and span va lues, is available in various configurations. The a bsolute pressure sensor employs a sealed vacuum reference c avity underneath the membrane. The Pyrex glass wafe r gauge versions available: one with a drilled Pyrex glass (MS7901-D) and the other without Pyrex glass (MS7901-S).

FEATURES

  • Uncompensated pressure sensor die • Linearity 0.05% (typical)
  • Output span 150mV @ 5V • Very small die size 1.78 x 1.78 mm (MS7901-A)
  • Temperature range -40° …+125° C • Low cost, high reliability APPLICATION
  • Absolute pressure sensor systems • Barometers, altimeters
  • Differential/gauge pressure sensor systems • Variometers ELECTRICAL CONNECTIONS Positive output for pressure applied topside 1 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment) bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or poly brominated diphenyl ethers (PBDE). Vs+ : Supply voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out- : Negative output Out+ : Positive output GND1 : Ground GND2 : Ground R5+ : Reference Resistor 5: positive access R5- : Reference Resistor 5: negative access R6+ : Reference Resistor 6: positive access R6- : Reference Resistor 6: negative access Vs+ / EPI GND2 GND1 Out + Out - R5 + R5 - R6- R6+ R5 and R6 are placed on bulk

DA7901_005.doc January 23 rd , 2009 2/5 00007901872 ECN 1178 BOND PAD CONFIGURATION Vs+/Epi Out- Out+ GND1 GND2 MS7901 R5+ R5- R6+ R6- Important remarks: As the sensing elements are diffused resistances, t he voltage applied on the ground pads (GND1 and GND2) has to b e lower than the voltage applied on supply voltage pad (Vs+). The epitaxial layer is connected to the Vs+ pin under the pad. LAYOUT (Absolute sensors) MS7901-A_0.2 MS7901-A_0.5 Pad opening in passivation is 100 µµ µµ m

DA7901_005.doc January 23 rd , 2009 3/5 00007901872 ECN 1178 LAYOUT (Gauge sensors) MS7901-D MS7901-S Pad opening in passivation is 100 µµ µµ m FULL SCALE PRESSURE kPa bar mbar PSI atm mm Hg m H 2O Inches H 2O 100 1 1000 14.5 0.987 750 10.197 401 ABSOLUTE MAXIMUM RATINGS Parameter Symbol Conditions Min Max Unit Supply voltage VS+ Ta = 25 o C 20 V Storage temperature T S -40 +150 oC Pressure overload 5 Bar

DA7901_005.doc January 23 rd , 2009 4/5 00007901872 ECN 1178

ELECTRICAL CHARACTERISTICS

(Reference conditions: Supply Voltage VS+ = 5 Vdc; Ambient Temperature Ta = 25° C ) Parameter Min Typ Max Unit Notes Operating Pressure Range 0 1 Bar Operating Temperature Range -40 125 ° C Bridge Resistance 3.0 3.4 3.8 KΩ 1 Full-scale span (FS) 120 150 180 mV Zero Pressure Offset -40 0 40 mV Linearity ± 0.05 ± 0.2 % FS 2 Temperature Coefficient of Resistance Span Offset + 2400 - 1500 - 80 + 2800 - 1900 + 3300 - 2300 + 80 ppm/° C ppm/° C µV/° C 3, 1 Pressure Hysteresis ± 0.05 ± 0.15 % FS 4 Repeatability ± 0.05 ± 0.15 % FS 5 Temperature Hysteresis 0.3 % FS 6 NOTES 1) Reference Resistors R5 and R6 have the same specifications as the bridge resistances. 2) Deviation at one half full-scale pressure from the least squares best line fit over pressure range (0 to 1 bar). 3) Slope of the endpoint straight line from 25° C to 60° C. Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25° C. 5) Same as 3) after 10 pressure cycles 6) Maximum difference in offset after one thermal cycle from -40° C to +125° C. PICKING TOOLS The MS7901 sensors have a sensitive membrane size o f 0.74 x 0.74 mm and outer dimensions of place tool has to be of a soft material such as rub ber (Hardness 78-97 Shore A). Its external size mus t fit the sensor and the vacuum cavity must be as large as th e membrane itself. Successful tests have been made with specific SPT tools, see SPT drawing and references below. Ensure that the ejection pins do not touch the membrane for gauge versions. SPT references RTR-A1-060x060 External dimension TL & TW: 0.06 inch /1.52 mm Internal dimensions ∅ H: 0.035 inch / 0.89 mm

DA7901_005.doc January 23 rd , 2009 5/5 00007901872 ECN 1178

ORDERING INFORMATION

Product Code Type Product Art.-Nr. MS7901-A_0.2 Absolute 1 bar Pressure Sensors 0.2 mm Pyrex sawn on b/f 790125022 MS7901-A_0.5 Absolute 1 bar Pressure Sensors 0.5 mm Pyrex sawn on b/f 790125021 MS7901-D Differential 1 bar Pressure Sensors sawn o n b/f 790125121 MS7901-S Differential 1 bar Pressure Sensors no pyr ex sawn on b/f 790125221 The MS7901 dice are supplied sawn on blue foil, mounted on plastic rings. FACTORY CONTACTS Intersema Sensoric SA Ch. Chapons-des-Prés 11 CH-2022 BEVAIX SWITZERLAND Tel. 032 847 9550 Tel. Int. +41 32 847 9550 Telefax +41 32 847 9569 e-mail: http://www.intersema.ch NOTICE Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance and to supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys no license under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from patent infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or warranty that such applications will be suitable for the use specified without further testing or modification.