MS767_08 INTERSEMA | Alldatasheet

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Technical content

DA767_008.doc February 5th, 2008 1/4 00000767356 ECN 1043 MS767 PRESSURE SENSOR DIE (0-7 BAR)

  • 0 to 700 kPa range (7 bar or 102 PSI)
  • Absolute pressure sensors
  • RoHS-compatible & Pb-free 1

DESCRIPTION

The sensor element of the MS767 consists of a silic on micro-machined membrane with a Pyrex glass mount ed under vacuum. Implanted resistors make use of the p iezo-resistive effect. The MS767 is available as an absolute sensor (MS767A) where a sealed vacuum cavi ty underneath the membrane is used as reference pressure.

FEATURES

  • Uncompensated pressure sensor die • Linearity 0.15% (typical)
  • Output Span 392mV @ 5V • Die Size 1.72 x 1.58mm
  • Temperature Range -40° …+125° C • Low Cost, High reliability APPLICATION
  • For absolute pressure sensor systems
  • Tire pressure measurements
  • Electronic scales ELECTRICAL CONNECTIONS Positive output for pressure applied topside 1 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment) bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or poly brominated diphenyl ethers (PBDE). Vs+ : Supply voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out- : Negative output Out+ : Positive output GND1 : Ground GND2 : Ground Vs+ GND2 GND1 Out + EPI Out -

DA767_008.doc February 5th, 2008 2/4 00000767356 ECN 1043 PAD OUT MS767 Vs+ Out- Epi Out+ GND1 GND2 Important remarks: As the sensing elements are diffused resistances, t he voltage applied on the ground pads (GND1 and GND2) has to b e lower than the voltage applied on supply voltage pad (Vs+). The epitaxial layer is connected to the Vs+ pin on the die LAYOUT

DA767_008.doc February 5th, 2008 3/4 00000767356 ECN 1043 FULL SCALE PRESSURE kPa bar mbar PSI atm mm Hg m H 2O Inches H 2O 700 7 7000 102 6.9 5250 71 2810 ABSOLUTE MAXIMUM RATINGS Parameter Symbol Conditions Min Max Unit Supply voltage VS+ Ta = 25 o C 20 V Storage temperature T S -40 +150 oC Pressure overload 21 Bar

ELECTRICAL CHARACTERISTICS

(Reference conditions: Supply Voltage VS+ = 5 Vdc; Ambient Temperature Ta = 25° C ) Parameter Min Typ Max Unit Notes Operating Pressure Range 0 7 Bar Operating Temperature Range -40 125 ° C Bridge Resistance 3.0 3.4 3.8 kΩ Full-scale span (FS) 322 392 462 mV Zero Pressure Offset -40 0 40 mV Linearity ± 0.15 ± 0.4 % FS 1 Temperature Coefficient of Resistance + 2400 + 2800 + 3300 ppm/° C 2 Span - 1500 - 1900 - 2300 ppm/° C Offset - 80 + 80 µV/° C Pressure Hysteresis ± 0.05 ± 0.15 % FS 3 Repeatability ± 0.1 ± 0.2 % FS 4 Temperature Hysteresis 0.3 % FS 5 NOTES 1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range (0 to 7 bar). 2) Slope of the endpoint straight line from 25° C to 60° C. Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25° C. 4) Same as 3) after 10 pressure cycles 5) Maximum difference in offset after one thermal cycle from -40° C to +125° C.

DA767_008.doc February 5th, 2008 4/4 00000767356 ECN 1043 PICKING TOOLS The MS767 sensors have a sensitive membrane (0.5 x 0.5 mm) the sensor dice outer diameter is: 1.62 x 1.48 mm. The pick and place tool has to be o f a soft material as rubber (Hardness 78-97 Shore A ). Its external size must fit the sensor and the vacuum ca vity must be as large as the membrane itself. Successful test where done with some tools of SPT (see SPT drawing and references bellow). SPT references RTR-A1-060x060 External dimension TL & TW: 0.06 inch /1.52 mm Internal dimensions ∅ H: 0.035 inch / 0.89 mm

ORDERING INFORMATION

Product Code Product Art.-Nr. MS767A-0.5 700 kPa Absolute Pressure Sensor with Py rex™ 0.5 mm thick (standard) 76710025 MS767A-0.2 700 kPa Absolute Pressure Sensor with Py rex™ 0.2 mm thick 76710022 The MS767 dice are supplied sawn on blue foil, mounted on plastic rings FACTORY CONTACTS Intersema Sensoric SA Ch. Chapons-des-Prés 11 CH-2022 BEVAIX SWITZERLAND Tel. 032 847 9550 Tel. Int. +41 32 847 9550 Telefax +41 32 847 9569 e-mail: http://www.intersema.ch NOTICE Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance and to supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys no license under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from patent infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or warranty that such applications will be suitable for the use specified without further testing or modification.