MS7305D INTERSEMA | Alldatasheet

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Technical content

DA7305D_001.doc March 10, 2006 1/4 00007305749 ECN836 MS7305D LOW PRESSURE SENSOR DIE (0 to 5 kPa)

  • 0 to 5 kPa (50 mbar or 0.73 PSI)
  • Uncompensated differential pressure sensor die
  • Piezoresistive silicon micromachined sensor
  • High output signal 110mV
  • Small size
  • RoHS-compatible & Pb-free1

DESCRIPTION

The MS7305D pressure sensor die is designed for low pressure sensor systems with the highest demands on resolution and accuracy. Its sensor element consists of a silicon micro-machined membrane bonded on a Pyrex™ glass support. The sensor signal is proportional to the pressure difference between back and front side of the membrane. The pressure is sensed by four implanted piezoresistors, giving a large output signal.

FEATURES

  • Uncompensated differential pressure sensor die · Die size 2.45 mm x 2.45 mm
  • Output span 110 mV @ 5 V · Low cost, high reliability, low drift
  • Temperature range -40°C to +125 °C · High pressure burst capability (600 kPa)
  • Typical linearity 0.3% (5kPa) or 0.1% (1kPa) APPLICATION
  • Washing machines · Industrial controls
  • Level indicators · Leak detection ELECTRICAL CONNECTIONS Positive output for pressure applied topside 1 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment) bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers (PBDE). Vs+ : Supply voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out- : Negative output Out+ : Positive output GND1 : Ground GND2 : Ground Vs+ GND2GND1 Out+ EPI Out-

DA7305D_001.doc March 10, 2006 2/4 00007305749 ECN836 PAD OUT Important remarks: As the sensing elements are diffused resistances, the voltage applied on the ground pads (GND1 and GND2) has to be lower than the voltage applied on supply voltage pad (Vs+). The epitaxial layer is connected to the Vs+ pin on the die LAYOUT MS7305 Vs+ Out-Epi Out+ GND1 GND2

DA7305D_001.doc March 10, 2006 3/4 00007305749 ECN836 FULL SCALE PRESSURE kPa bar mbar PSI atm mm Hg mm H2O Inches H2O ABSOLUTE MAXIMUM RATINGS Parameter Symbol Conditions Min Max Unit Supply voltage VS+ Ta = 25 oC 12 V Storage temperature TS -40 +150 oC Pressure overload 600 kPa

ELECTRICAL CHARACTERISTICS

(Reference conditions: Supply Voltage VS+ = 5 Vdc; Ambient Temperature Ta = 25°C ) Parameter Min Typ Max Unit Notes Operating Pressure Range 0 - 5 kPa Operating Temperature Range -40 +125 oC Bridge Resistance 3000 3800 W Zero Pressure Offset -40 0 40 mV Span (Full scale range) 5 kPa 2 kPa 1 kPa 110 130 mV mV mV Linearity (Full scale range) 5 kPa 2 kPa 1 kPa ±0.3 ±0.2 ±0.1 ±0.5 ±0.3 ±0.2 %FS %FS %FS Temperature Coefficient of Resistance Span Offset + 2500 - 1600 -80 + 2900 - 1900 -40 + 3400 - 2200 ppm/°C ppm/°C µV/°C Pressure hysteresis -0.1 0.1 % FS 5 Repeatability -0.1 0.1 % FS 6 Temperature hysteresis -0.15 0.15 % FS 7 Position sensitivity 0 0.15 % FS 8 Response time 1.0 ms 9 Warm-up time 1 s 10 NOTES 1) Deviation at one half full-scale pressure from least squares best line fit over pressure range 0 to 5 kPa. 2) Deviation at 1 kPa from least squares best line fit over pressure range 0 to 2 kPa. 3) Deviation at 0.5 kPa from least squares best line fit over pressure range 0 to 1 kPa. 4) Slope of the endpoint straight line from 25°C to 60°C. 5) Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C. 6) Same as 5) after 10 pressure cycles. 7) Maximum difference in offset after one thermal cycle from -40°C to 125°C. 8) Maximum difference in output at any pressure within the specified pressure range between the sensor being in upright position and in upside-down position. 9) 10% to 90% signal rise time for a 0 to 5 kPa pressure step change. 10) Time to reach an offset accuracy of 0.2% after switching on a supply voltage of 5V.

DA7305D_001.doc March 10, 2006 4/4 00007305749 ECN836 PICKING TOOLS The MS7305D sensors have a sensitive membrane (1.5x1.5 mm) the sensor dice outer diameter is: 2.45x2.45 mm. The pick and place tool has to be of a soft material as rubber (Hardness 78-97 Shore A). Its external size must fit the sensor and the vacuum cavity must be as large as the membrane itself. Successful test where done with a tool of SPT (see SPT drawing and references bellow). SPT reference PCTR-A-100 External dimension ÆF: 0.1 inch / 2.54 mm Internal dimension ÆH: 0.08 inch / 2.04 mm

ORDERING INFORMATION

Product Code Product Art.-Nr. MS7305D 5 kPa Differential Low Pressure Sensor 730525121 The MS7305D dice are supplied sawn on blue foil, mounted on plastic rings FACTORY CONTACTS Intersema Sensoric SA Ch. Chapons-des-Prés 11 CH-2022 BEVAIX SWITZERLAND Tel. (032) 847 9550 Tel. Int. +41 32 847 9550 Telefax +41 32 847 9569 e-mail: http://www.intersema.ch NOTICE Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance and to supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys no license under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from patent infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or warranty that such applications will be suitable for the use specified without further testing or modification.