MS54XX_09 INTERSEMA | Alldatasheet

Document overview

  • Manufacturer or author: Provided By ALLDATASHEET.COM(FREE DATASHEET DOWNLOAD SITE)
  • PDF pages: 10

Technical content

DA54xx_014 June 15th, 2009 1 000054xx280 ECN 1243 MS54xx MINIATURE SMD PRESSURE SENSOR

  • 1, 7, 12, and 70 bar absolute pressure range
  • Uncompensated
  • Piezoresistive silicon micromachined sensor
  • Miniature surface mount
  • Ceramic or PCB carrier
  • Low noise, high sensitivity, high linearity
  • RoHS-compatible & Pb-free *

DESCRIPTION

The MS54xx SMD pressure sensor series is designed f or pressure sensor systems with highest demands on resolution and accuracy. The device consists of a s ilicon micromachined pressure sensor die mounted on a delivered in a high sensitivity version giving a ma ximal output voltage or in a high linearity version. Both versions provide an output voltage directly proportional to the applied pressure. High Sensitivity Versions High Linearity Versions Carrier Full Scale Pressure Product Code Full Scale Span / Linearity Product Code Full Scale Span / Linearity 1 bar MS5401-AM 240 mV / ±0.2% FS MS5401-BM 150 mV / ±0.05% FS 7 bar MS5407-AM 392 mV / ±0.2% FS 12 bar MS5412-BM 150 mV / ±0.05% FS Ceramic 70 bar MS5470-AM 310 mV / ±0.25% FS PCB 1 bar MS5401-APF 240 mV / ±0.2% FS MS5401-BPF 150 mV / ±0.05% FS

FEATURES

  • Low cost SMD package • -40° C to +125 ° C operation range
  • Small size • Gel protection against humidity and water
  • High reliability, low drift

APPLICATIONS

  • Brake systems • Engine management
  • High resolution altimeters, variometers • Water proof watches and diving computers
  • Barometers • Tire pressure monitoring systems (TPMS) * The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment) bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or poly brominated diphenyl ethers (PBDE).

DA54xx_014 June 15th, 2009 2 000054xx280 ECN 1243 PIN CONFIGURATION PIN DESCRIPTION Pin Name Pin No. Function OUT- 1 Negative output voltage of Wheatstone bridge GND 2 Ground VS+ 3 Supply voltage of Wheatstone bridge OUT+ 4 Positive output voltage of Wheatstone bridge ABSOLUTE MAXIMUM RATINGS Parameter Symbol Conditions Min Max Unit Notes Supply voltage VS+ Ta = 25 o C - 20 V Storage temperature T S -40 +125 oC Overpressure MS5401-AM MS5401-APF MS5401-BPF MS5401-BM MS5407-AM MS5412-BM MS5470-AM P Ta = 25 o C 180 bar (1) (2) NOTES 1) The MS5401-BM is qualified referring to ISO Standard 2281 and can withstand an absolute pressure of 11 bar in salt water or 100 m water respectively. 2) The MS5407-AM is qualified referring to ISO Stan dard 2281 and can withstand an absolute pressure of 21 bar in salt water or 200 m water respectively. 3: VS+ 1: OUT- 4: OUT+ 2: GND

DA54xx_014 June 15th, 2009 3 000054xx280 ECN 1243

ELECTRICAL CHARACTERISTICS

(VS+ = 5 V; Ta = 25° C ) Parameter Min Typ Max Unit Notes Operating pressure range 0 - 1 bar Full-scale span (FS) 190 240 290 mV Sensitivity 190 240 290 mV/bar MS5401-AM MS5401-APF Linearity - ±0.15 ±0.4 % FS 1, 6 Operating pressure range 0 - 7 bar Full-scale span (FS) 322 392 462 mV Sensitivity 46 56 66 mV/bar MS5407-AM Linearity - ±0.15 ±0.4 % FS 1, 6 Operating pressure range 0 - 70 bar Full-scale span (FS) 250 310 370 mV Sensitivity 3.6 4.4 5.3 mV/bar MS5470-AM Linearity - ±0.25 ±0.50 % FS 1, 6 Operating temperature range -40 - 125 ° C Zero pressure offset -40 0 40 mV Pressure hysteresis - - ±0.20 % FS 2, 6 Temperature hysteresis - 0.3 0.8 % FS 3, 6 Repeatability - - ±0.20 % FS 4, 6 Bridge resistance 3.0 3.4 3.8 kΩ All Ranges Temperature coefficient of resistance Temperature coefficient of span Temperature coefficient of offset +2 400 -1 500 -80 2 900 -1 900 +3 300 -2 300 +80 ppm/ °C ppm/ °C µV/ °C 5, 6 5, 6 5, 6 NOTES 1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range. 2) Maximum difference of output voltage after 1 pre ssure cycle at any pressure within the operating pressure range. 3) Maximum difference in offset after one thermal c ycle from -40° C to +125° C. 4) Same as 2) after 10 pressure cycles. 5) Slope of the end-point straight line from 25° C t o 60° C. 6) Not 100% tested.

DA54xx_014 June 15th, 2009 4 000054xx280 ECN 1243 ELECTRICAL CHARACTERISTICS (CONT.) HIGH LINEARITY VERSIONS (VS+ = 5 V; Ta = 25° C ) Parameter Min Type Max Unit Notes Operating pressure range 0 - 1 bar 8 Full-scale span (FS) 120 150 180 mV Sensitivity 120 150 180 mV/bar MS5401-BM MS5401-BPF Linearity - ±0.05 ±0.2 % FS 1, 6 Operating pressure range 0 - 12 bar 8 Full-scale span (FS) 120 150 180 mV Sensitivity 10 12.5 15 mV/bar MS5412-BM Linearity ±0.05 ±0.15 % FS 1, 6 Operating temperature range -40 - 125 ° C Zero pressure offset -40 0 40 mV Pressure hysteresis - - ±0.20 % FS 2, 6 Temperature hysteresis - 0.3 0.8 % FS 3, 6 Repeatability - - ±0.20 % FS 4, 6, 7 Bridge resistance 3.0 3.4 3.8 kΩ All Ranges Temperature coefficient of resistance Temperature coefficient of span Temperature coefficient of offset +2 400 -1 500 -80 2 900 -1 900 +3 300 -2 300 +80 ppm/ °C ppm/ °C µV/ °C 5, 6 5, 6 5, 6 NOTES 1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range. 2) Maximum difference of output voltage after 1 pre ssure cycle at any pressure within the operating pressure range. 3) Maximum difference in offset after one thermal c ycle from -40° C to +125° C. 4) Same as 2) after 10 pressure cycles. 5) Slope of the end-point straight line from 25° C t o 60° C. 6) Not 100% tested. 7) MS5412-BM: Max. 0.3% FS 8) This sensor family is optimised for the linearit y; it is suitable for applications with higher pressure where the linearity requirement is less critical.

DA54xx_014 June 15th, 2009 5 000054xx280 ECN 1243

APPLICATION INFORMATION

The MS54xx is a miniaturised absolute pressure sens or series which has been designed as a surface moun t device (SMD). Its main advantages are the high perf ormance of the semiconductor sensor and a design wh ich makes it suitable for applications requiring small dimensions and cost efficiency. The sensor element of the MS54xx consists of a micr omachined silicone membrane with Pyrex glass wafer-bonded under vacuum to the back side for refe rence pressure. Implanted resistors make use of the piezo- resistive effect to sense pressure applied to the m embrane. The sensor is mounted using a special proc ess allowing best offset stability making the device suitable for direct PCB assembly. Typical applications for this miniaturised pressure sensor MS54xx are altitude measurements and the measurement of atmospheric reference pressure in me dical and industrial equipment as well as in automo tive and household applications, consumer electronics an d pneumatics. Full Scale Pressure High Sensitivity Versions (MS54xx-Axx) High Linearity Versions (MS54xx-Bxx) 1 bar Variometer, Altimeter, Barometer High End Altimeter, Medical Instrumentation 7 bar Divers Watch, Tire Pressure, Electronic Scale High End Electronic Scale 12 bar Pneumatic Brake, Diving Computer 70 bar Engine Control, Diving Computer HUMIDITY, WATER PROTECTION MS54xx-xM with METAL CAP: The MS54xx-AM / -BM has an anticorrosive and antima gnetic metallic protection cap filled with silicone gel for enhanced protection against humidity. The propertie s of this gel ensure function of the sensor even wh en in direct water contact. This feature can be useful fo r waterproof watches or other applications, where d irect water contact cannot be avoided. Nevertheless the user sh ould avoid drying of hard materials like for exampl e salt particles on the silicone gel surface. In this case it is advisable to rinse with clean water afterwar ds. Special care has to be taken not to mechanically damage the gel. Damaged gel may lead to air entrapment and consequently to unstable sensor signal, especially if the damage is close to the sensor surface. The metal cap is fabricated of special anticorrosiv e alloy in order to avoid any galvanic effects with in the end product. The MS5401-BM is qualified referring to th e ISO Standard 2281 and can withstand a pressure of 11 bar in salt water. The concentration of the sea wat er used for the qualification is 41 g of sea salt p er 1 litre of DI water. The MS5407-AM satisfies salt-water testing with a pressure capability of 21 bar. For underwater operations as specified in ISO Stand ard 2281 it is important to seal the sensor with a rubber O- ring around the metal cap. Any salt water reaching the contact side (ceramic and pads) of the sensor c ould lead to permanent damage. Especially for "water-resistan t 100 m" watches and for diving computers, it is recommended to provide a stable mechanical pusher f rom the backside of the sensor; otherwise the overpressure may push the sensor backwards and even deform the electronic board on which the sensor is mounted. MS54xx-xPx with PLASTIC CAP: The sensor die of the MS54xx-xPx is protected by a drop of silicone gel. The properties of this gel en sure function of the sensor even in a humid environment.

DA54xx_014 June 15th, 2009 6 000054xx280 ECN 1243 LIGHT SENSITIVITY The MS54xx is sensitive to sunlight (visible and ne ar-infrared spectrum). This is due to the strong ph oto effect of silicon. As the effect is reversible there will be no damage, but the user has to take care that in th e final product the sensor cannot be exposed to direct light during operation as it effects the measurement. This can be achieved for instance by placing mechanical parts w ith holes in such that light cannot pass. CONNECTION TO PCB The package outline of the module enables the use o f a flexible PCB to connect it. This can be importa nt for applications in watches and other special devices, and will also reduce mechanical stress on the devic e. For applications subjected to mechanical shock, it is recommended to enhance the mechanical reliabilit y of the solder junctions by covering the rim or the corners of MS54xx ceramic substrate with glue or globtop-l ike material. SOLDERING Please refer to the application note AN808 for all soldering issues. CLEANING The MS54xx has been manufactured under clean-room c onditions. Each device is inspected for homogeneity and cleanness of the silicone gel. It is therefore recommended to assemble the sensor under class 10 0 00 or better conditions. Should this not be possible, it is recommended to protect the sensor opening during assembly from entering particles and dust. To avoid cleaning of the PCB, solder paste of type “no-clean” must b e used. Cleaning might damage the sensor. RECOMMENDED PAD LAYOUT Recommended pad layout for soldering of the MS54xx on a printed circuit board

DA54xx_014 June 15th, 2009 7 000054xx280 ECN 1243 PACKAGE OUTLINES VERSIONS WITH CERAMIC CARRIER AND METAL CAP Device package outlines of MS54xx-AM and MS54xx-BM (M = anticorrosive and antimagnetic stainless steel cap)

DA54xx_014 June 15th, 2009 8 000054xx280 ECN 1243 VERSIONS WITH PCB CARRIER AND PLASTIC CAP Device package outlines of MS54xx-APF and MS54xx-BPF

DA54xx_014 June 15th, 2009 9 000054xx280 ECN 1243 PACKING The MS54xx is packed in 51 cm (20-inch) antistatic plastic tubes with rubber end-plugs of different co lours: one green and one black. The dot on the carrier next to Pin 1 is facing the green end-plug. Each tube cont ains 80 sensors. The tubes are marked "ANTISTATIC" and have an information label. See the drawings below for more details. PACKING TUBE OUTLINES All measures in mm

ORDERING INFORMATION

MS5401-AM Miniature Pressure Sensor 1 bar, high se nsitivity, ceramic carrier MS5401-APF Miniature Pressure Sensor 1 bar, high sensitivity, PCB carrier MS5401-BM Miniature Pressure Sensor 1 bar, high li nearity, ceramic carrier MS5401-BPF Miniature Pressure Sensor 1 bar, high linearity, PCB carrier MS5407-AM Miniature Pressure Sensor 7 bar, high se nsitivity, ceramic carrier MS5412-BM Miniature Pressure Sensor 12 bar, high l inearity, ceramic carrier MS5470-AM Miniature Pressure Sensor 70 bar, high s ensitivity, ceramic carrier A x x = high sensitivity B x x = high linearity x M x = anticorrosive and antimagnetic metallic ca p x P x = plastic cap x x F = PCB carrier Art.-Nr. 325401001 Art.-Nr. 325401004 Art.-Nr. 325401000 Art.-Nr. 325401005 Art.-Nr. 325407000 Art.-Nr. 325412000 Art.-Nr. 325470000 510 4.4 8.2 Information label

DA54xx_014 June 15th, 2009 10 000054xx280 ECN 1243 CONTACTS Factory and European Sales office Intersema Sensoric SA Phone: +41 32 847 9550 Ch. Chapons-des-Prés 11 Fax: +41 32 847 9569 CH-2022 Bevaix e-mail: Switzerland Website: www.intersema.ch USA Measurement Specialties Inc. Phone: +1 800 55 5 1551

1000 Lucas Way Fax: +1 757 766 4297

Hampton, VA 23666 e-mail: sales@meas-spec.com USA Website: www.meas-spec.com ASIA Measurement Specialties (China), Ltd. Phone: +8 6 755 8330 1004 F1.6-4D, Tian An Development Fax: +86 755 8330 6797 Compound e-mail: pfc.cs.asia@meas-spec.com Shenzhen, China 518048 Website: www.meas-spec.com NOTICE Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance and to supply the best possible products. Intersema assumes no responsibility for the use of any circu its shown in this data sheet, conveys no license under any patent or other rights unless otherwise specified in this data sheet, and makes n o claim that the circuits are free from patent infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or warranty that such applications will be suitable for the use specified without further testing or modification.