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WWW.MKSINST.COM Automation Platf orm The MKS Automation Platform provides a modular, scalable and configurable solution to meet your automation and control requirements. Designed to provide a complete automation solution to improve operational and productivity efficiencies, the Automation Platform enables faster implementations, provides lowest total cost of ownership, and improves utilization of existing tools and assets. Additionally, the MKS Controls Workbench (CWB) software application is provided with the Automation Platform. The CWB software is a simple, customizable integrated solution for device configuration, process monitoring, data storage, system diagnostics and auto-tuning. The Automation Platform can be configured to meet the needs of any automation application, ranging from those requiring simple I/O distributed over EtherCAT ® or other control networks all the way up to applications requiring a fully programmable controller, supporting a standard IEC 61131-3 programming interface or a fieldbus master, running advanced data analytics. The platform can be customized providing an optimum automation solution in a number of different application areas, the most common categories and uses for the platform being: Fully Prog rammable A utomation Control Process Monitor ing Seamless Interf ace to MKS Instr umentation • Remote Process Control Multi-Zone T emperature Control • Remote or Distr ibuted I/O Features & Benefits

  • Lowest total cost of o wnership, compared to standard off-the-shelf PLCs and P ACs
  • Scalable and e xpandable; modular open architecture and suppor t for many fieldbuses and control networks
  • Broad por tfolio of I/O modules interf aces to all types of sensors and other I/O Leverages adv anced data analytics; impro ved process tuning, optimization, monitoring, troubleshooting and fault detection
  • Seamless interf ace to MKS subsystems and instr umentation, such as Mass Flow Controllers (MFCs), direct and indirect pressure gauges, etc., resulting in significantly faster time to market and ease of use
  • Support in Industr y 4.0 and Inter net of Things (IoT) environments, seamless connectivity between operations systems and IT/ERP systems, along with data analytics solutions maximizing value
  • Compatible Controls W orkbench (CWB) softw are included with the Platform: Access all MKS controllers simultaneously and from one central interface Remotely configure MKS A utomation devices Create vie ws and charts from multiple MKS devices P erform data logging, monitoring, and data exporting
  • MKS Integ ration Ser vices f or recipe and logic de velopment, integrated testing and training
  • Off-the-shelf a vailability shor tens deliv ery times Compact, high density design reduces the n umber of modules and/or controllers required, sa ving cost and tool real estate A COMPrehenSIve COntrO l S S O lut IO n Automation & Control Solutions

The Automation Platform consists of a number of building blocks that can be configured to provide specific functionality meeting the custom requirements of most markets or applications. An overview of the building blocks and modules is illustrated below. Programmable Automation Controllers (PACs) MKS Programmable Automation Controllers (PAC) solutions merge the features of a Programmable Logic Controller (PLC) and an Industrial Personal Computer (IPC) leveraging benefits such as industrial environments, open standards, system component networking, open software/programmability, flexibility and scalability, all in a modular, DIN rail mountable plastic enclosure. Compared to standard PLCs and IPCs, PACs provide a more compact, customizable, high performance, and cost effective programmable solution for your controls and automation tasks. MKS Power Supply Modules are a compact solution for supplying additional power to the Automation Platform. Each power module requires two 24 VDC power inputs rated at 5A for the core and rated at 12A current for the I/Os. The Power Supply Module is required to power the PAC 1000 and supplies additional power to the I/O modules connected to the PAC 100 and the Communication and Coupler Modules. Communication & Fieldbus Coupler Modules (CMs) MKS Communication and Fieldbus Coupler Modules (CM) provide a compact, customizable, and cost effective solution for standalone manual control, data logging, or distributed I/O. The CM can be implemented as a standalone unit, supporting manual, remote control capabilities with the Controls Workbench application, with built in data logging and process monitoring, or with Labview. Alternatively, it can be implemented over a variety of fieldbuses (EtherCAT and Modbus TCP/IP) to support distributed I/O applications, where the CMs are integrated with a PLC or PAC, such as the PAC 1000. Input/Output Modules The Automation Platform can be configured with a variety of MKS I/O modules, depending on the type of sensors, actuators, valves, and other devices that are integrated with the PAC or CM. The I/O modules communicate to the PAC or CM via the System Bus or EtherCAT, creating a scalable distributed I/O system, all from MKS. MKS Automation Platform Programmable Automation Controllers & Communication Modules Programmability

Features

100 MKS CM

Features, Capabilities & Services I/O Interface Modules Applications MKS PAC 1000 Quad core CPU , 1 GHz EtherCA T, Modbus TCP/IP Master Modb us TCP/IP Slave Run adv anced algorithms and logic OPC-U A enabled MKS PAC 100

100 MHz CPU

T, Modbus TCP/IP slave or standalone control Run standard logic and algor ithms MKS CM EtherCA T or Modbus TCP/IP slave Remote or Distr ibuted I/O Man ual control capabilities via the MKS Workbench Interf ace and control with Labview

Controls Workbench Software: This integrated, customizable software application is included with the MKS Automation Platform. The CWB is a central, powerful interface that provides users a simple, complete solution for device configuration along with the ability to view, data log, chart and export process data, perform manual process control, process troubleshooting, and advanced tuning of the MKS controllers (PAC 1000, PAC 100, Communications Module, MultiTherm 2000 and MultiTherm 1000). Advanced Data Analytics: The Automation Platform can be configured to support the MKS SenseLink™ QM application, for real-time Multivariate Analytics for prediction and containment of process defects. Design of e xperiments (Do e ) and Optimization tools: The platform also leverages experience in DoE through MODDE software and process optimization and applies it to controls and automation. Advanced Process Control Algorithms: Additionally, the platform also can be configured to support advanced control algorithms, supporting both MKS algorithms and third party algorithms. One example is the use of a Model Based Control (MBC) approach to provide significantly improved temperature control compared to common PID control. Seamless Integration with MKS Devices and Instruments: MKS has designed custom I/O modules for direct interface to various MKS instruments including Pressure Gauges, Mass Flow Controllers, Valves, and Gas Analysis solutions. As a result, the Automation Platform provides significant benefits including ease of use and faster time to market when implemented with other MKS subsystems and instruments. Additionally, the IEC61131-3 programming environment comes equipped with existing libraries and function blocks specifically developed for a variety of MKS devices. training and Systems Integration testing: MKS provides advanced remote and onsite training programs to support all aspects of integrating and implementing our Automation Platform. With 20 customer support centers and 15 manufacturing facilities, MKS has the knowledge and presence to support you on a global level. Additionally, MKS provides advanced integrated testing, which can be extremely valuable in applications where the solution combines sensors (MFCs, pressure gauges, valves, etc.), automation and controls, analytics, etc. Additional Capabilities & Services MultiTherm™ 2000 Modular Temperature Control Based on the MKS Automation Platform MKS CM Remote I/O on EtherCAT® or Modbus TCP/IP Supporting Standard Fieldbus Protocols, such as EtherCAT® MKS PAC 1000 Fully Programmable Controller MultiTherm 2000 Modular Temperature Control Based on the MKS Automation Platform MKS CM Remote I/O on EtherCAT or Modbus TCP/IP Supporting Standard Fieldbus Protocols, such as EtherCAT MKS PAC 1000 Fully Programmable Controller Compatible Controls Workbench Software Included with the Platf orm — Access all MKS controllers simultaneously and from one central interface Controls Workbench Specifications Operating System Windo ws 7 (32-bit or 64-bit) Processor 1 gHz or f aster x86- or x64-bit processor Memory 1 gigab yte (GB) RAM (32-bit); 2 GB RAM (64-bit) h ard Disk

3.0 GB of hard dr

aphics hardware acceleration requires a DirectX 10 graphics card Display 1024 x 576 or higher resolution monitor n et ver sion 3.5, 4.0 or 4.5 (optional) Other Need at least one netw ork interface card (NIC) on PC (one for connection to MultiTherm and second (optional) for external internet connection)

MKS Instruments, Inc. Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 T el: 800.227.8766 (in USA) Web: www.mksinst.com MKS Instruments, Inc. Automation & Contr ol Solutions

1321 Rutherford Lane, Suite 200

A ustin, TX 78753 Tel: 512.719.8000 MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice. mksinst™, MultiTherm™, and SenseLink™ are trademarks of MKS Instr uments, Inc., Andover, MA. EtherCAT® is a registered trademark of EtherCAT Technology Group, Nuremberg, Germany. MKS Automation Platform - 7/16 © 2016 MKS Instruments, Inc. All rights reserved. MKS Programmable Automation Controllers Part Number Description AS11850G-21 PAC 1000 EtherCAT Master AS11850G-22 PAC 1000 Modbus TCP/IP Master AS11870G-03 PAC 100 Modbus TCP/IP Slave AS11870G-05 PAC 100 EtherCAT Slave MKS Power Modules Part Number Description AS11840G-02 Power Supply Module MKS Communication & Fieldbus Coupler Modules Part Number Description AS11870G-02 CM Modbus TCP/IP Slave AS11870G-04 CM EtherCAT Slave AS11870G-10 EtherCAT Coupler Module MKS Input/Output Modules Part Number Description AS11893G-02 DIO (12 Digital Inputs/12 Digital Outputs) Source MKS System Bus AS11893G-11 DIO (12 Digital Inputs/12 Digital Outputs) Sink MKS System Bus AS11893G-21 DIO (12 Digital Inputs/12 Digital Outputs) Source EtherCAT Bus AS11893G-31 DIO (12 Digital Inputs/12 Digital Outputs) Sink EtherCAT Bus AS11880G-03 AIO (8 Analog Inputs/4 Analog Outputs) Voltage Inputs/Current Outputs EtherCAT Bus AS11880G-12 AIO (8 Analog Inputs/4 Analog Outputs) Voltage Inputs/Current Outputs MKS System Bus AS11880G-22 AIO (8 Analog Inputs/4 Analog Outputs) Current Inputs/Voltage Outputs EtherCAT Bus AS11880G-32 AIO (8 Analog Inputs/4 Analog Outputs) Current Inputs/Voltage Outputs MKS System Bus AS11890G-02 MFC Module 15 Pin D-Sub MKS System Bus AS11890G-11 MFC Module four 9 Pin D-Sub MKS System Bus AS11860G-40 Temperature Input - 8 TC or PT100 RTD Inputs AS11860G-50 Temperature Input - 8 TC or PT1000 RTD AS11860G-60 Temperature Input - 8 TC or PT100 RTD - Removable terminal block AS11860G-70 Temperature Input - 8 TC or PT1000 RTD - Removable terminal block AS11893G-41 PWM (12 Pulse Width Modulation Outputs/12 Digital Inputs) Module AS11899G-01 Serial Module MKS System Bus (Interface up to 4 RS232 or RS485 devices) AS11900G-03 Pressure Input Module Four 15 Pin D-sub MKS System Bus