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WWW.MKSINST.COM WWW.MKSINST.COM MF1 CompaC t, General purpo S e m FC The MF1 is a compact general purpose mass flow controller (MFC) with an all-metal sensor. The MF1 has multiple features and broad flexibility making it ideal for a wide range of applications. Full Scale ranges are available from 10 sccm up to 50 slm, providing fast, repeatable flow control to as low as 0.2 sccm. The MF1 is available in a number of process interfaces (Analog, EtherCAT ®, PROFIBUS®-DP , PROFINET®, Modbus/RS485, USB, etc.) which allow easy and simple compatibility with a wide range of control equipment. The USB setup interface provides not only a means for configuration and diagnostics, but also serves as a communication link in non-industrial applications, e.g. use in a laboratory. The small 2.8 x 1 inch (77 x 25 mm) footprint enables compact gas supply systems with improved performance compared to existing mass flow controllers. The MF1 employs the latest design in thermal sensors for mass flow measurement, with fast acting proportioning valve and control circuitry for fast settling time. The control valve is normally closed. Mass Flow Meter (MFM) versions of the MF1 are also available. The MF1 can be powered either with +24VDC or ±15VDC, and thus is compatible with MFC power supplies and displays electronics from MKS or most other manufacturers. Flow Solutions

  • Multigas / m ulti-range f or 16 gases reduces required MFC in ventory
  • Low inter nal leak r ate of <10-5 mbar l/sec (He) R obust, Reliable Design Minimal use of elastomer seals enab les use in demanding processes Compact 2.8’ ’ x ’ f ootprint (71.0mm x 25.4mm) without flanges Fast w arm-up time minimiz es e xpensive production do wntime
  • Compatible v ariants with ear lier MKS MFCs and po wer supply and readout modules Features & Benefits For Demanding Processes
  • Full Scale flo w r anges from sccm to 50 slm f or precise and repeatable flow measurement and control across a wide r ange of applications V arious process interf aces a vailable: Analog, USB , PROFIBUS-DP , Modbus/ RS485, Modb us TCP , EtherCAT, PR OFINET (other interfaces on request) f or easy compatibility with tool controllers USB setup interf ace allo ws easy configur ation and diagnostics with standard Microsoft® Windows tools (Windo ws Explorer, etc.) Multiple supply v oltages (+24 VDC and ±15 VDC) for easy interface and tool compatibility Percent of Reading accur acy giv es a broad dynamic r ange

(0.63”) (0.71”) (0.71”) Top View MF1 (Process Version, 4 VCR male) 12.7 (0.5”) 25.4 (1.0”) 14.3 (0.56”) Side Views MF1 (PROFIBUS, 4 VCR male, inlet and outlet side) Front View MF1 (4 VCR male) 118.73 (4.67”) Dimensional Drawing — Note: Unless otherwise specified, dimensions are nominal values in mm. Fitting (compatible to) Dimension L in mm 4VCR male 18.74 ± 1 4VCO male 10.6 ± 1 1/4” Swagelok* 107.6 ± 1 6 mm Swagelok* 107.6 ± 1 1/8'' Swagelok* 107.6 ± 1 DN 16 KF 18.74 ± 1 *without nuts and ferrules Dimensional Drawings Front View MF1 (DN 16 KF) 118.73 (4.67”) Top View MF1 (USB Version, 4 VCR male) Bottom View MF1 (4 VCR male) 118.73 (4.67”) Top View MF1 (EtherCAT Version, 4 VCR male) 118.73 (4.67”) 118.73 (4.67”) Top View MF1 (Modbus Process Version, 4 VCR male) Top View MF1 (Analog IF Version, 4 VCR male) 96.3 (3.79”) 91 (3.58”) 64.6 (2.54”) 25 (.98”) 12.7 (0.5”) 46.7 (1.83”) 3.4 (0.13”) 67.8 (2.67”)71 (2.79”) 23.87 (.94”) 94.87 (3.73”) 96 (3.78”) 91 (3.58”) 64.6 (2.54”) 25 (.98”) 12.7 (0.5”) 46.7 (1.83”) 3.4 (0.13”) 67.8 (2.67”)71 (2.79”) 23.87 (.94”) 94.87 (3.73”)

Full Scale ranges (n2 equivalent) 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000, 30000, 50000 sccm m aximum Inlet p ressure 10 bar (g) (both MFC and MFM) n ormal o perating p ressure Differential (N2, F .S., with atmospheric pressure at the MFC outlet) 10 to 5000 sccm 0.7 to 2.7 bar (d) 10000, 20000 sccm 1.0 to 2.7 bar (d) 30000, 50000 sccm 1.4 to 2.7 bar (d) p roof p ressure 10 bar Bur st p ressure 50 bar Contr ol r ange 2% to 100% of F .S. m easurement (Dynamic) r ange 1% to 100% of F .S. typical a ccuracy (with n2 calibration gas) ± (0.5% of Reading +0.2% of F .S.) (including non-linearity, hysteresis and repeatability referenced to 1013 mbar and 0°C) r epeatability ±0.2% of F .S. r esolution 0.1% of F .S. temperature Coefficients Zero <0.04% of F .S./°C Span <0.08% of Reading/°C p ressure Coefficient <0.02% of Reading psi Contr oller Settling t ime <800 msec (per SEMI Guideline E17-91) Warm-up t ime ~ 15 min utes n ormal o perating temperature r ange 0°C to 40°C Stora ge Humidity 0 to 95% relativ e humidity, non-condensing Storage temperature -20° to 80°C mechanical Fittings (compatible with) 4 VCR®, 1/4'' Swagelok®, 1/8'' Swagelok®, 4 VCO®, 6 mm Swagelok®, DN 16 KF , MKS Surf ace Mount l eak Integrity Exter nal (scc/sec He) <1 x 10-9 mbar l/sec (He) Through closed control v alve (MFC only) <1 x 10-5 mbar l/sec (He) at 1.7 bar (g) inlet to atmosphere o assure no flow-through, a separate positive shut-off valve is required) Wetted m aterials MFC , Standard 1.4301 S .S. (V2A, ANSI 304), FKM, Nickel MFC , Optional (seals and valve seal) NBR, FFKM Surface Finish 6.3µm Rz W eight ~ 0.7 kg (1.6 lbs) electrical (analog I/o) Input Voltage r equired ±15 VDC or +24 VDC (20.0 to 31.5 VDC) m aximum Supply Current 300mA @ +24VDC a nalog Set point Command Signal (Analog interf ace versions only) Configur able: Def ault: 0 to 5 VDC Zero: 0 to 2 VDC Full Scale: 5 to 10VDC a nalog o utput Signal (Analog interf ace versions only) Configur able: Def ault: 0 to 5 VDC Zero: 0 to 2 VDC Full Scale: 5 to 10 VDC Connector type po wer) Standard Industr ial Terminal, 3.81 mm pitch (Phoenix Contact MC-ser ies, 3.81 mm pitch) Connector type (Setup) USB Setup Interf ace micro-B Connector types (Signal) Analog 9-pin D-Sub pin Analog 15-pin D-Sub pin PR OFIBUS-DPV0/DPV1 9-pin D-Sub socket Modb us 9-pin D-Sub socket EtherCA T, PROFINET, Modbus TCP RJ45 USB Process Interf ace B Compliance CE

  • Only available for fitting types 4 VCR, 1/4'' Swagelok, and 6 mm Swagelok Not in conjunction with seal material FFKM *** Not for Full Scale ranges larger than 10000 sccm N2 equivalent ± 15 VDC Supply Pin

1 Valve Override

2 Flow Signal

4 Power Ground

6 Set Point Signal

7 Signal Ground

Pinout Analog 9 Pin Sub D — Interface Option ” A” for supply voltage analog Signal Connector: 9-pin D-Sub +24 VDC Supply Pin V alve Override Flow Signal +24V Signal Ground Power Ground Set Point Signal Signal Ground reserved reserved (no configuration necessary) ± 15 VDC Supply Pin reserved Flow Signal V alve Close V alve Open Power Ground -15V +15V Set Point Signal NC NC Signal Ground Signal Ground NC NC Chassis +24 VDC Supply Pin reserved Flow Signal V alve Close V alve Open Signal Ground Power Ground +24V Set Point Signal NC NC Signal Ground Signal Ground NC NC Chassis Pinout Analog 15 Pin Sub-D— Interface Option ” B” for supply voltage analog Signal Connector: 15-pin D-Sub Pin NC NC RXD/TXD -P CNTR-P DGND VP NC RXD/TXP-N NC Pinout PROFIBUS — Interface Option “4/P” PROFIBUS-DP Interface Connector: 9 -pin D-Sub socket MF1 MF1 V ariants Controller (standard MF1 length) with All-Metal Sensor C Controller (length compatib le to 1179A/B) K* (on request) Meter (standard MF1 length) with All-Metal Sensor M Meter (length compatib le to 179A/B) W* (on request) Gas To Be Calibrated For (SEMI Gas Code), other options on request N2 013 He 001 Ar 004 H2 007 Air 008 O2 015 Full Scale Range of Calibrated Gas with Flow Unit (maximum 50000 sccm / 50 slm N 2 equivalent) 10 sccm 11C 20 sccm 21C 50 sccm 51C 100 sccm 12C 200 sccm 22C 500 sccm 52C 1000 sccm 13C 2000 sccm 23C 5000 sccm 53C 10000 sccm 14C 20000 sccm 24C 30000 sccm 34C 50000 sccm 54C 10 slm (not f or analog versions) 11L 20 slm (not f or analog versions) 21L 30 slm (not f or analog versions) 31L 50 slm (not f or analog versions) 51L Fittings (compatib le with)

4 VCR

R 1/4’ ’ Swagelok S 1/8’ ’ Swagelok P VCO male G (on request) 6 mm Sw agelok M DN 16 KF D MKS Surf ace Mount on request Interf ace Analog, 9-pin D-Sub male A Analog, 15-pin D-Sub male B PR OFIBUS-DPV0, 9-pin D-Sub female PR OFIBUS-DPV1, 9-pin D-Sub female P Modb us, RS485, 9-pin D-Sub male M USB U EtherCA T T PR OFINET F Modb us TCP , RJ45 L Seal Mater ials FKM (Plug = 70 FKM 576, Sealing = FKM1170) V NBR (Plug = 70 NBR 150, Sealing = 70 NBR) B (on request) FFKM (Plug = 75 Simr iz 484, Sealing = FFPM/FFKM) K*** (on request) Extr as / Options Meaning of Extension Behind No Extr as Fir mware Revision Specials SSS Special Number Initial Configur ation File Supplied C Filename Optional Accessor ies 1-Channel P ower Supply and Readout Unit with RS232 PR4000B-S2V2 2-Channel P ower Supply and Readout Unit with RS232 PR4000B-F2V2 4-Channel P ower Supply and Readout Unit with RS232 647C4R1N 8-Channel P ower Supply and Readout Unit with RS232 647C8R1N Cab ling for MF1 T o connect MF1 with analog process interface to PR4000, 647, 247D, 246 CBE147-12-3M MKS Instruments, Inc. Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 Web: www.mksinst.com MKS Instruments, Inc. Flow Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350 MKS Instruments Deutschland GmbH Schatzbogen 43, D-81829 München Tel: +49 (0) 89 42 00 08 0 Fax: +49 (0) 89 42 41 06 MF1 - 1/2018 © 2013-2018 MKS Instruments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice . mksinst™ is a trademark of MKS Instruments, Inc., Andover, MA. Sw agelok®, VCR® and VCO® are registered trademarks of Swagelok Marketing Co., Solon, OH. EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany. PROFIBUS® and PROFINET® are registered tr ademarks of PROFIBUS and PROFINET International (PI), Karlsruhe, Germany. Windows® is a registered tr ademark of Microsoft Corporation, Redmond, WA.