ME63

8742 BURKERT | Alldatasheet

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Technical content

Visit product website  DATA SHEET Type 6013  Plunger valve 2/2-way direct-acting Type 6027  Direct-acting 2/2-way plunger valve Type 0330  Direct-acting 2/2 or 3/2-way pivoted armature valve Type ME43  Fieldbus gateway Type ME63  Industrial Ethernet gateway, IP65/ IP67/ IP69k Type BUPLUS  Standard | EU | en | 2024-02-15 | 22 Mass Flow Controller (MFC)/ Mass Flow Meter (MFM) for gases

• Nominal flow ranges from 0.010 l/min to 160 l/min Highest measuring accuracy and repeatability with very fast response times Long-term stability of the flow calibration Easy device exchange due to configuration memory Optional: ATEX II Cat. 3G/D or USP Class VI, FDA, EC 1935 conformity The Mass Flow Controller (MFC) / Mass Flow Meter (MFM) Type 8742 for gases is suitable for a wide range of applications, e.g. metal and glass manufacturing or processing, fermentation processes, test benches or filling systems and packaging machines. Type 8742 is available in two variants: The variant with several analogue or digital (communication) interfaces and the variant with only a CANopen-based interface. The latter is suitable for integration into existing CANopen networks or - in combination with the fieldbus gateway Type ME43 - for integration in all common industry standards for Industrial Ethernet or fieldbus. This variant is tailor-made for applications with many control loops. Up to 32 MFCs/ MFMs can be connected to one fieldbus gateway. Type ME43 transmits the internal CANopen-based commu- nication to Industrial Ethernet and fieldbus standards. The Mass Flow Controller / Mass Flow Meter can always be switched between büS and CANopen communi- cation. Type 8742 can be configured as required as an MFM or MFC. Optionally, up to four calibration curves can be stored in the device. The thermal MEMS sensor is located directly in the gas flow and achieves very fast response times and the high- est level of measuring accuracy, with long-term stable calibration. As the actuator, a Bürkert direct-acting proportional valve guarantees high response sensitivity. The integrated PI controller ensures excellent control characteristics of the MFC. Type 8742 is especially designed for use in harsh environments thanks to its high IP protection class and explosion protection. Product variants described in the data sheet may differ from the product presentation and description. Type description Can be combined with Type 8742 © Christian Bürkert GmbH & Co. KG, Subject to alteration

2 | 28Visit product website  Table of contents 1. General technical data 4 Approvals and conformities 2.2. Conformity ... 2.3. Standards .... 2.4. Explosion protection ... 2.5. North America (USA/Canada) ... 2.6. Foods and beverages/Hygiene ... 2.7. Oxygen 3. Materials 6 4. Dimensions 6 MFC/MFM for small nominal flow rates MFC/MFM for large nominal flow rates 4.2. Variant with büS/CANopen interface ... MFC with valve Type 2871 MFC with valve Type 2873 MFC with valve Type 2875 MFM variant 4.3. Variant with analogue or PROFIBUS-DP interface ... MFC with valve Type 2871 MFC with valve Type 2873 MFC with valve Type 2875 MFM variant 4.4. Variant with Industrial Ethernet interface ... 5. Device / Process connections 21 5.2. Analogue 5.3. Industrial Ethernet 5.4. PROFIBUS-DP 6. Performance specifications 23 6.2. Nominal flow range of typical gases .... 7. Product operation 24 8. Product design and assembly 24 9. Product accessories 25 9.2. Connecting Type 8742 with the Bürkert Communicator software .... 9.3. Configuration management for easy device replacement ... 9.4. Web server for Industrial Ethernet variant ....

3 | 28Visit product website  10. Ordering information 26 10.2. Recommendation regarding product selection.... 10.3. Bürkert product filter 10.4. Bürkert Product Enquiry Form ... 10.5. Ordering chart accessories ....

4 | 28Visit product website  1. General technical data Product properties Dimensions Further information can be found in chapter “4. Dimensions” on page 6. Materials Seal FKM or EPDM (depending on gas) Housing Aluminium die casting (coated) Base block Aluminium or stainless steel 1.4404/316L Total weight Approx. 950 g (stainless steel base block) Configuration management Further information can be found in chapter “9.3. Configuration management for easy device replacement” on page LED display 1.) RGB-LED according to NAMUR NE107 Performance data Nominal flow range (Qnom) 10 mlN/min…160 lN/min (N2) Maximum operating pressure (overpressure to atmospheric pressure) MFM: 10 bar For MFCs, the maximum operating pressure depends on the medium and nominal valve size Measuring accuracy 2.) ± 0.8 % of reading ± 0.3 % FS (under calibration conditions) Repeatability ± 0.1 FS Measuring span 1:50, optional 1:100 Settling time (MFC)/Response time (MFM) (t95 %) < 300 ms Control valve (proportional valve) Normally closed Valve orifice 0.05…8 mm KVS value range 0.00006…1.1 m3/h Electrical data Operating voltage 24 V DC Power consumption 3.) 1 W (as MFM) Max. 3…17.5 W (as MFC, depending on type of solenoid control valve) Residual ripple ± Voltage tolerance ± Electrical connection büS/CANopen variant M12 plug, 5-pin Analogue variant M12 plug, 5-pin, M12 socket, 5-pin Industrial Ethernet variant M12 plug, 5-pin, 2 x M8 socket, 4-pin PROFIBUS-DP variant M12 plug, 5-pin, M12 socket, 5-pin Medium data Operating medium Neutral, pure gases (others on request) Calibration medium Operating medium or air Medium temperature - °C…+ °C (- °C…+ °C with oxygen) Process/Port connection & communication Analogue interface 4…20 mA, 0…20 mA, 0…10 V or 0…5 V Input impedance > 20 kΩ (voltage) resp. < 300 Ω (current) Maximum current: 10 mA (voltage output) Maximum load: 600 Ω (current output) Digital communication interface büS/CANopen, EtherCAT®, EtherNet/IP, PROFIBUS-DP Port connection NPT ¼, G ¼, sub-base, compression fitting or vacuum fitting (others on request) Approvals and conformities Protection class IP65 Explosion protection Further information can be found in chapter “2.4. Explosion protection” on page 5. Zertifikat Material certificate 3.1 (option) North America (USA/Canada) Further information can be found in chapter “2.5. North America (USA/Canada)” on page 5 Foods and Beverages/Hygiene Further information can be found in chapter “2.6. Foods and beverages/Hygiene” on page 5 Oxygen Further information can be found in chapter “2.7. Oxygen” on page 6 Environment and installation Installation position Horizontal or vertical Ambient temperature - °C…+ °C (higher temperatures on request)

5 | 28Visit product website  Accessories Software-Tool Bürkert Communicator Further information can be found in chapter “9.1. Bürkert Communicator software” on page 25 1.) For a detailed description of LED colours see operating instructions Type 8742  2.) If the operating medium is different from the calibration medium, the actual measurement accuracy might vary from the indicated value. If the operating medium is natural gas, the measurement accuracy depends on the composition of the natural gas, which can vary depending on the origin and season. 3.) Information in relation to the typical power consumption (at + °C ambient temperature, nominal flow and 30 min closed-loop control mode). Information according to UL 61010 may vary (see operating instructions Type 8742 ). 2. Approvals and conformities 2.1. General notes

• The approvals and conformities listed below must be stated when making enquiries. This is the only way to ensure that the product complies with all required specifications. Not all available variants can be supplied with the below menti oned approvals or conformities. 2.2. Conformity In accordance with the Declaration of Conformity, the product is compliant with the EU Directives. 2.3. Standards The applied standards which are used to demonstrate compliance with the EU Directives are listed in the EU-Type Examination Certificate and/or the EU Declaration of Conformity. 2.4. Explosion protection Approval Description Optional: Explosion protection ATEX: EPS 22 ATEX 1 277 X II 3G Ex ec IIC T4 Gc II 3D Ex tc IIIC T135 °C Dc IECEx: IECEx EPS 22.0066X Ex ec IIC T4 Gc Ex tc IIIC T135 °C Dc 2.5. North America (USA/Canada) Approval Description Optional: UL Listed for the USA and Canada The products are UL Listed for the USA and Canada according to: UL 61010 1 (ELECTRICAL EQUIPMENT FOR MEASUREMENT, CONTROL, AND LABORATORY USE – Part 1: General Requirements) CAN/CSA-C22.2 No. 61010 2.6. Foods and beverages/Hygiene Conformity Description FDA FDA – Code of Federal Regulations (valid for variable code PL02, PL03) All wetted materials are compliant with the Code of Federal Regulations published by the FDA (Food and Drug Administration, USA) according to the manufacturer‘s declaration.

6 | 28Visit product website  USP United States Pharmacopeial Convention (USP) (valid for variable code PL04) All wetted materials are biocompatible according to the manufacturer‘s declaration. EC Regulation 1935/2004 of the European Parliament and of the Council (valid for variable code PL01, PL02) All wetted materials are compliant with EC Regulation 1935/2004/EC according to the manufacturer‘s declaration. 2.7. Oxygen Conformity Description Optional: Suitability for oxygen (valid for the variable code NL02) The products are suitable for use with gaseous oxygen, according to the manufacturer‘s declaration. 3. Materials 3.1. Bürkert resistApp Bürkert resistApp – Chemical Resistance Chart You want to ensure the reliability and durability of the materials in your individual application case? Verify your combination of media and materials on our website or in our resistApp. Start Chemical Resistance Check 4. Dimensions 4.1. Thread depths of base blocks MFC/MFM for small nominal flow rates Note: The following table applies to base blocks C0…C4. Thread (A) Thread depth [mm] G ¼ 12 NPT ¼ 12 G ⅛ 12 NPT ⅛ 12 MFC/MFM for large nominal flow rates Note: The following table applies to base block C5. Thread (A) Thread depth [mm] G ¼ 12 NPT ¼ 11 G ⅜ 12 NPT ⅜ 11 G ½ 15 NPT ½ 14 G ¾ 16 NPT ¾ 15

7 | 28Visit product website  4.2. Variant with büS/CANopen interface MFC with valve Type 2871 Variant with base block C0…C4 for small nominal flow rates Note: Dimensions in mm 70.2 84.5 86.5 A 12.5 107 2 x M4 6

8 | 28Visit product website  Sub-base variant Note: Dimensions in mm 70.2 84.5 17.75 17.75 58.5 107 58.5 432 x Ø 6 2 x Ø 8.8 35.5 35.5 4 x Ø 4.5 86.5 107 43

9 | 28Visit product website  MFC with valve Type 2873 Variant with base block C0…C4 for small nominal flow rates Note: Dimensions in mm 2x M4 6 155 A 12.5 105.8 with valve 2873 70.2 84.5 87.3 Contour compatible with VCR® 1/4 107 (15.7) Version EXTV screw connection with metal sealing disc 188

10 | 28Visit product website  Variant with base block C5 for large nominal flow rates Note: Dimensions in mm 206 ØA 100.7 67.5 79.5 4x M4 10 105 185 126.7 166.7 C5 with valve 2873 MFC with valve Type 2875 Variant with base block for large nominal flow rates Note: Dimensions in mm 19.5 224.5 ØA 115.7 C5 with valve 2875 67.5 79.5 94 96.8 4x M4 10 105 205

11 | 28Visit product website  MFM variant Variant with base block C0…C4 for small nominal flow rates Note: Dimensions in mm 70.2 84.5 86.5 A 12.5 107 2 x M4 6

12 | 28Visit product website  Sub-base variant Note: Dimensions in mm 70.2 84.5 17.75 17.75 58.5 107 58.5 432 x Ø 6 2 x Ø 8.8 35.5 35.5 4 x Ø 4.5 86.5 107 43 Variant with base block C5 for large nominal flow rates Note: Dimensions in mm Ø A Ø 19.5 Socket C5 38.5 67.5 79.5 4 x M4 10 18.4 105 126.7 145

13 | 28Visit product website  4.3. Variant with analogue or PROFIBUS-DP interface MFC with valve Type 2871 Variant with base block C0…C4 for small nominal flow rates Note: Dimensions in mm 16.8 111 12.5 A Socket 2x M4 6 107

14 | 28Visit product website  Sub-base variant Note: Dimensions in mm 107 16.8 2x M4 111 Sub-base 35.5 58.5 4x Ø 4.5 35.5 2x Ø 8.8 2x Ø 6 17.75 17.75 58.5 107

15 | 28Visit product website  MFC with valve Type 2873 Variant with base block C0…C4 for small nominal flow rates Note: Dimensions in mm 16.8 188 111 114.3 12.5 A with valve 2873 2x M4 6 155 (15.7) 186.4 Contour compatible with VCR® 1/4 Version EXTV screw connection with metal sealing disc

16 | 28Visit product website  Variant with base block C5 for large nominal flow rates Note: Dimensions in mm 38.5 92.5 120.5 58.5 A C5 with valve 2873 4x M4 10 105 185 206 MFC with valve Type 2875 Variant with base block for large nominal flow rates Note: Dimensions in mm 38.5 92.5 120.5 124 58.5 C5 with valve 2875 4x M4 10 105 205 A 19.5 224.5

17 | 28Visit product website  MFM variant Variant with base block C0…C4 for small nominal flow rates Note: Dimensions in mm 16.8 111 12.5 A Socket 2x M4 6 107

18 | 28Visit product website  Sub-base variant Note: Dimensions in mm 107 16.8 2x M4 111 Sub-base 35.5 58.5 4x Ø 4.5 35.5 2x Ø 8.8 2x Ø 6 17.75 17.75 58.5 107

19 | 28Visit product website  Variant with base block C5 for large nominal flow rates Note: Dimensions in mm 38.5 58.5 92.5 120.5 A Socket C5 4x M4 10 105 145

20 | 28Visit product website  4.4. Variant with Industrial Ethernet interface Note: Dimensions in mm 16.8 111 A 12.5 107

21 | 28Visit product website  5. Device / Process connections 5.1. büS/CANopen M12 plug, 5-pin (A-coded) Pin Assignment Coding

1 Shielding

V

3 DGND

4 CAN_H

5 CAN_L

5.2. Analogue M12 socket, 5-pin (A-coded) Pin Assignment Coding 5 1 Digital input GND

2 Digital input +

3 Relay, reference contact

4 Relay, normally closed contact

5 Relay, normally open contact

M12 plug, 5-pin (A-coded) Pin Assignment Coding

1 GND for the analogue output (for MFM) or

GND for the analogue output and the setpoint input (for MFC) 2 24 V

3 GND for supply voltage

4 Setpoint input (not connected for MFM)

5 Analogue output for the measured value

5.3. Industrial Ethernet 2 x M8 socket, 4-pin Pin Assignment 3 4 Coding CodingCoding

1 TX +

2 RX +

3 TX -

4 RX -

M12 plug, 5-pin (A-coded) Pin Assignment Coding GND for the analogue output and the setpoint input (for MFC) 2 24 V

22 | 28Visit product website  5.4. PROFIBUS-DP M12 socket, 5-pin (B-coded) Pin Assignment Coding 5 1 5 V

2 RxD / TxD (Line A)

4 RxD / TxD (Line B)

5 Not connected

M12 plug, 5-pin (A-coded) Pin Assignment Coding V

3 GND

4 Not connected

23 | 28Visit product website  6. Performance specifications 6.1. MFM pressure loss diagram The diagram shows an example of the pressure loss characteristics when air flows through. To determine the pressure loss of other gases, the corresponding air equivalent must first be calculated and the base block used for the other gas taken into account. 100 110 120 130 140 150 160 170 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 160 ΔP [mbar] Q [lN/min] G 3/4 Sub-base G 1/4 G 3/8 G 1/2 Sub-base 6.2. Nominal flow range of typical gases Note: All values refer to 1013.25 mbar abs and 273.15 K (0 °C) (Index N) Other gases and gas mixtures are possible on request. Gas Min. QNom Max. QNom [lN/min] [l N/min] Acetylene 0.01 65 Argon 0.01 160 Helium 0.01 1000 Carbon dioxide 0.02 80 Air 0.01 160 Methane 0.01 160 Propane 0.03 44 Oxygen 0.01 160 Nitrogen 0.01 160 Hydrogen 0.01 1000

24 | 28Visit product website  7. Product operation 7.1. Measuring principle Measurement takes place via bypass. A laminar flow element (LFE) in the main channel creates a low pressure drop. A part of the gas flow is thereby directed into a side channel. A sensor measures the mass flow as temperature difference. The measurement is performed in a specially shaped flow channel whose wall contains a Si chip with an etched membrane. A heating resistor and 2 temperature sensors, one upstream and one downstream, are placed on this membrane. If the heating resistor is fed with a constant voltage, the differential voltage of the temperature sensors indicate the gas flow over the chip. 8. Product design and assembly 8.1. Measures to comply with ATEX requirements Note: Devices with ATEX conformity meet protection class IP65. No. Description

1 The standard requirements for cable glands are fulfilled for

variants with external valve.

2 The M12 plug provides protection class IP65 regardless if

plugged in or not.

3 The die-cast housing provides IP protection even under high

mechanical stress.

4 The screws prevent loosening of the protection cap and

hence the M12 connection under tensile stress.

5 The protection cap prevents damage of the M12 plug and all

connected elements if mechanical stress is applied. No particular ATEX sockets are required.

25 | 28Visit product website  9. Product accessories 9.1. Bürkert Communicator software Note: The corresponding communication software can be downloaded from the website Type 8920 The Bürkert Communicator is the most important software component of the EDIP (Efficient Device Integration Platform). Various features of this universal tool simplify the configuration and parametrisation of devices equipped with a digital CANopen-based interface. With this tool, the user has a complete overview of cyclic process values as well as acyclic diagnostic data. The integrated graphical programming environment enables the creation of decentralised sub-system control functions. The connection to the PC is established with a USB büS interface set. The adapter is available as an accessory (see “10.5. Ordering chart accessories” on page 27 The Bürkert Communicator enables: Configuration, parametrisation and diagnosis of EDIP devices / networks Switching between defined gases Easy and comfortable mapping of cyclic values Graphic display, monitoring and storage of process values Firmware update of the connected EDIP devices Saving and restoring device configurations Zero-point adjustment in case of changed ambient conditions Guided re-calibration routine

26 | 28Visit product website  9.2. Connecting Type 8742 with the Bürkert Communicator software The Bürkert Communicator interface is based on CANopen. The appropriate bus termination is mandatory. For Type 8742 Analogue, Industrial Ethernet or PROFIBUS-DP, activate the termination resistor switch on the büS stick. For Type 8742 büS/CANopen, the termination resistor must not be activated in case the device is already integrated in a properly terminated bus network. For Type 8742 Analogue, Industrial Ethernet or PROFIBUS-DP, the connection is established via the device’s micro USB socket (USB büS interface set 2 contains the necessary accessories). For Type 8742 büS/CANopen, the connection is established via the 5-pin M12 plug (USB büS interface set 1 contains the necessary accessories). Please note: no external power supply must be connected to the micro USB socket. The device must be provided with power as described in chapter “5. Device / Process connections” on page 21 9.3. Configuration management for easy device replacement Depending on the electrical connection of the MFC, the following options for device replacement are available: If a device needs to be replaced, the memory card can be removed from the defective device and inserted into the new one. This transfers all data of the device to be replaced to the new device. The memory card is available as an accessory and must be ordered separately (see “10.5. Ordering chart accessories” on page 27) Option for Type 8742 büS/CANopen: The device is exchanged via the configuration provider of the higher-level gateway control (ME43 or ME63). In the gateway, a memory card is required. The memory card is available as an accessory and must be ordered separately (see “10.5. Ordering chart accessories” on page 27) In order to successfully exchange the device, it is necessary that both the new device and the device to be replaced possess the same device ID. 9.4. Web server for Industrial Ethernet variant The Industrial Ethernet-based devices (except for the EtherCAT® protocol) from software version A.13.00.00 dispose of an integrated web 10. Ordering information 10.1. Bürkert eShop Bürkert eShop – Easy ordering and quick delivery You want to find your desired Bürkert product or spare part quickly and order directly? Our online shop is available for you 24/7. Sign up and enjoy all the benefits. Order online now 10.2. Recommendation regarding product selection Note: Use the Product Enquiry Form (see “10.4. Bürkert Product Enquiry Form” on page 27 ) for the device details and send it to us once completed. For the proper choice of the actuator orifice within the MFC, you need to know not only the required maximum flow rate Qnom but also the pressure values directly before and after the MFC (p1, p2) at Qnom. In general, these pressures are not the same as the overall inlet and outlet pressures of the whole plant, because usually, additional flow resistors (tubing, additional shut-off valves, nozzles etc.) are present both before and after the MFC. Please use the Product Enquiry Form to indicate the pressures directly before and after the MFC. If these are unknown or not accessible to measurement, estimates are to be made by taking into account the approximate pressure drops over the flow resistors before and after the MFC, at Qnomflow rate. In addition, please quote the maximum inlet pressure p1 max to be encountered. This data is needed to make sure the actuator is able to provide a close-tight function within all the specified modes of operation.

27 | 28Visit product website  10.3. Bürkert product filter Bürkert product filter – Get quickly to the right product You want to select products comfortably based on your technical requirements? Use the Bürkert product filter and find suitable articles for your application quickly and easily. Try out our product filter 10.4. Bürkert Product Enquiry Form Bürkert Product Enquiry Form – Your enquiry quickly and compactly Would you like to make a specific product enquiry based on your technical requirements? Use our Product Enquiry Form for this purpose. There you will find all the relevant information for your Bürkert contact. This will enable us to provide you with the best possible advice. Fill out the form now 10.5. Ordering chart accessories Description Article no. General accessories USB büS interface set 1 (Type 8923) for connection to the Bürkert Communicator software: includes connection cable (M12 and micro USB), stick with integrated terminating resistor, power supply and software 772426 USB büS interface set 2 (Type 8923) for connection to the Bürkert Communicator software: including büS stick, connection cable to M12 plug, M12 connection cable on micro USB for the büS service interface and Y distributor, cable length: 0.7 m 772551 Power supply unit Phoenix Class2 (Type 1573), 85…240 V AC/24 V DC, 1.25 A, NEC Class 2 (UL 1310) 772438 Power supply unit for standard rail (Type 1573), 100…240 V AC/24 V DC, 1 A, NEC Class 2 (UL 1310) 772361 Power supply unit for standard rail (Type 1573), 100…240 V AC/24 V DC, 2 A, NEC Class 2 (UL 1310) 772362 Power supply unit for standard rail (Type 1573), 100…240 V AC/24 V DC, 4 A 772363 Memory card On request Device description files for software interfaces Download from www.burkert.com Bürkert Communicator software Download from www.burkert.com For Type 8742 büS/CANopen büS cable extension, M12, cable length: 0.1 m 772492 büS cable extension, M12, cable length: 0.2 m 772402 büS cable extension, M12, cable length: 0.5 m 772403 büS cable extension, M12, cable length: 1 m 772404 büS cable extension, M12, cable length: 1 m 772405 büS socket, M12, straight, A-coded 1.) 772416  büS plug, M12, straight, A-code 1.) 772417  büS socket, M12, angled, A-coded 1.) 772418  büS plug, M12, angled, A-coded 1.) 772419  büS Y plug 772420 büS Y plug for linking two separately supplied segments of a büS network 772421 büS plug, M12, terminating resistor 120 Ω 772424 büS plug, M12, terminating resistor 120 Ω 772425 LabVIEW device driver On request EDS file Download from www.burkert.com

28 | 28Visit product website  Description Article no. For Type

8742 Analogue

M12 plug with cable, on strand, A-coded, cable length: 5 m 566923 M12 plug with cable, on strand, A-coded, cable length: 10 m 571393 M12 socket with cable, on strand, A-coded, cable length: 5 m 560365 M12 plug shielded, 5-pin, cable length: 10 m 563108 For Type

8742 PROFIBUS-DP

M12 socket with cable, on strand, A-coded, cable length: 5 m 560365 M12 socket with cable, on strand, A-coded, cable length: 10 m 563108 büS socket, M12, straight, A-coded 1.) 772416  M12 plug, 5-pin, B-coded, straight 918198 M12 socket, 5-pin, straight (coupling) 918447 PROFIBUS-DP T distributor 918531 PROFIBUS-DP terminating resistor, M12 plug, B-coded 902553 1.) For space reasons, M12 individual cable plugs may not be suitable for simultaneous use on the same side as a Y distributor. Use a commercially available covered cable in this case.