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IP66 RATED, METAL S EALED, D IGITAL M ASS F LOw C O n TROLLER The IM50A is a general purpose, metal sealed MFC well suited for use in harsh environments where resistance to liquid or dust ingress are critical. The IM50A meets these requirements with its IP66 r ated enclosure design. The IM50A supports a wide variety of applications requiring flow control capability from 5 sccm to 50 slm Full Scale , N2 equivalent. The IM50A incorporates the latest in digital flow control electronics along with a well proven, patented thermal sensor and mechanical design. The IM50A is a digitally controlled MFC offered with analog (0 to 5 VDC or 4-20 mA) as well as digital Profibus ® I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Included is a digital calibration that yields 1% of set point accuracy on the calibration gas. The IM50A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range enabling its use without the need to modify existing gas line configurations. The IM50A metal sealed MFC with its electropolished internal surface finish is well suited for use in high purity process applications. The IM50A is also available in an MFM version (not electropolished). Features & Benefits

  • IP66 r ated enclosure pro vides protection against ing ress of water and dust present in harsh en vironments
  • Patented ther mal sensor design pro vides e xceptional zero stability
  • Percent of set point accur acy (calibr ation gas) enab les precise process control
  • 10µ inch electropolished 316L surf ace finish enab les MFC use in high purity

applications

  • Embedded user interf ace pro vides the ability to: Easily change de vice range and user gas reducing in ventory requirements Monitor de vice functionality and collect perf ormance data in-situ
  • Available in a wide v ariety of both analog and digital I/O interf aces to meet customer specific applications US Patent No 5461913. WWW.MKSINST.COM Flow Solutions

Full Scale Flow Ranges (N2 equivalent) 5 - 50000 sccm Maxim um Inlet Pressure 150 psig (cannot e xceed pressure differential requirement across MFC) n ormal Operating Pressure Differential (N2 Full Scale) 5 to 5000 sccm; 10 to 40 psid (with atmospher ic pressure at the MFC outlet) 10000 to 20000 sccm; 15 to 40 psid 30000 to 50000 sccm; 25 to 40 psid Proof Pressure 1000 psig Bur st Pressure 1500 psig Contr ol Range 2% to 100% of Full Scale (r ange on mech.) Typical Accuracy (with N2 calibration gas) ±1% of set point f or 20 to 100% Full Scale ±0.2% of Full Scale f or 2 to 20% Full Scale Repeatability ±0.3% of Reading Resolution 0.1% of Full Scale T emperature Coefficients Zero <0.05% of Full Scale/°C Span <0.08% of Reading/°C Inlet Pressure Coefficient <0.02% of Reading/psi T ypical Controller Settling Time <750 msec., typical abo ve 5% Full Scale (per SEMI Guideline E-17-0600) warm-up Time 30 min utes (to within 0.2% of Full Scale of steady state perf ormance) Operating Temperature Range (Ambient) 10°C to 50°C Stora ge Humidity 0 to 95% relativ e humidity, non-condensing Storage Temperature Mechanical Fittings (compatible with) Sw agelok® 4 VCR® male, 1/4'' Swagelok compression seal, Sw agelok 8 VCR male, 1/8'' Swagelok, 1/2'' Swagelok, 6 mm Sw agelok, 8 mm Swagelok, 10mm Swagelok, 12mm Swagelok, 3/8'' Sw agelok, Swagelok 2 VCR Male, KF-16, C-Seal, W-Seal Leak Integrity Exter nal (scc/sec He) <1 x 10-10 Through closed v alve <1.0% of Full Scale at 40 psig inlet to atmosphere o assure no flow-through, a separate positive shut-off valve is required.) wetted Materials Standard 316L S .S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S .S., Elgiloy®, Nickel V alve Seat (MFC only) T eflon® Surface Finish MFC 10µ inch a verage Ra (electropolished) MFM 16µ inch a verage Ra weight less than 3 lbs (1.4kg) Enc losure Rating IP66 Electrical Analog I/O Input Power Required +15 to +24 VDC @ (<4 watts) Flo w Input/Output Signal V oltage (0 to 5 VDC) 15 pin Type ''D'' male, 9 pin Type ''D'' male Current (4 to 20 mA) 15 pin Type ''D'' male Compliance CE

Digital I/O Pr ofibus® Input P ower Required +15 to +24 VDC (< 4 watts) Connector 9 pin Type D male (power) and 9 pin Type D female (comm.) Data Rate Switch/ Selection No switch Set data r ate via Profibus Data Rate Data r ate (user selectable)

9.6 Kbps to 12 Mbps

Station addresses 0,0 to 9,9 n etwork Size Up to 99 nodes n etwork Topology Master/sla ve Compliance CE Dimensional Drawing — Analog 15 pin D f or either 0 to 5 VDC or 4 to 20 mA I/O shown above with V CR fittings* *(See manual for additional I/O and fitting types) Note: Unless specified, dimensions are nominal values in inches (mm referenced). Dimensional Drawing

© 2013-2018 MKS Instr uments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice. mksinst™ is a trademark of MKS Instruments, Inc., Andover, MA. Swagelok® and VCR® are registered trademarks of Swagelok Marketing Co., Solon, OH. Teflon® is a registered trademark of E.I. Dupont, Wilmington, DE. Elgiloy® is a registered trademark of Elgiloy Limited Partnership, Elgin, IL. DeviceNet ™ is a tr ademark of the Open DeviceNet Vendor Association, Coral Springs, FL. Profibus® is a registered trademark of Profibus Inter national, Karlsruhe, Germany. B 013 502 R IM50A * The Full Scale flow rate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate separ ated by a decimal point. The third digit is the exponent of the power of ten. Example flo w rate code: 254 is 2.5 x 104 or 25000 sccm 153 is 1.5 x 103 or 1500 sccm 601 is 6.0 x 101 or 60 sccm MFC Mass Flo w Controller IM50A IM50A Gas (P er Semi Standard E52-0703) F or example: 013 = Nitrogen = N2 013 029 = Ammonia = NH3 029 110 = Sulfur He xafluoride = SF6 110 Flow Range Full Scale* 5 sccm 500 10 sccm 101 20 sccm 201 50 sccm 501 100 sccm 102 200 sccm 202 500 sccm 502 1000 sccm 103 2000 sccm 203 5000 sccm 503 10000 sccm 104 20000 sccm 204 30000 sccm 304 50000 sccm 504 Fittings (compatible with) Sw agelok 4 VCR male R 1/4'' Sw agelok S Sw agelok 8 VCR male T 1/8'' Sw agelok (for 1000 sccm N2 equivalent or below) A 1/2'' Sw agelok K 6 mm Sw agelok M 8 mm Sw agelok E 10mm Sw agelok P 12mm Sw agelok F 3/8'' Sw agelok J Sw agelok 2 VCR (for 1000 sccm N2 equivalent or below) B C-Seal C KF-16 U W -Seal H Connector Profibus (1480 Compatible) 4 Profibus (1179B Compatible) 3 Analog 0 to 5 VDC (15 pin D connector) B Analog 4 to 20 mA (15 pin D connector) H Analog 0 to 5 VDC (15 pin D Connector), Brooks (Consult Factory) E Analog 0 to 5 VDC (15 pin D Connector), Celerity (Consult Factory) U V alve/Device Type Nor mally Closed/ Mass Flow Controller, Teflon® M0 No Valve/Mass Flow Meter Nor mally Open/Mass Flow Controller, Teflon PT Firmware Unless otherwise specified, MKS will ship fir mware revision current to date MKS Instruments, Inc. Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 T el: 800.227.8766 (in U .S.A.) Web: www.mksinst.com MKS Instruments, Inc. Flow Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350