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WWW.MKSINST.COM IM100A IP66 RATED, M ETA l-S EA l ED, D IGITA l M ASS Fl Ow C O n TRO ll ER The IM100A, a general purpose metal-sealed MFC, is well suited for harsh environments where resistance to liquid or dust ingress is critical. The IM100A meets these requirements due to its IP66 enclosure design. The IM100A supports a wide variety of applications requiring flow control capability from 1 slm to 100 slm Full Scale , N2 equivalent. Along with a well-proven, patented thermal sensor and mechanical design, the IM100A features the latest in digital flow control electronics. The IM100A is a digitally controlled MFC with analog (0 to 5 VDC or 4-20 mA) and digital Profibus® I/O. The digital control electronics, using the latest in MKS control algorithms, provide fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. The included digital calibration yields 1% of set point accuracy on the calibration gas. The IM100A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range without the need to modify existing gas line configurations, and now operates with flow rates up to 100 slm, N 2 equivalent. The IM100A metal sealed MFC, with its electropolished surface finish, is well suited for use in high purity process applications and is available with a normally closed valve. An MFM version is also available (not electropolished).

  • IP66 r ated enclosure pro vides protection against ing ress of water and dust present in harsh en vironments
  • Patented ther mal sensor design pro vides e xceptional zero stability
  • Embedded user interf ace pro vides the ability to Easily change de vice range and user gas reducing in ventory requirements Monitor de vice functionality and collect perf ormance data in-situ Adjust flo w calibration for chamber-to- chamber and tool-to-tool process matching
  • 10µ inch electropolished 316L surf ace finish enab les MFC use for high purity

applications

(calibr ation gas) enab les precise process control Available in a wide v ariety of both analog and digital I/O interf aces to meet customer specific applications US Patent No 5461913. WWW.MKSINST.COM Flow Solutions Features & Benefits

Full Scale Flow Ranges (N2 equivalent) 50,000 - 100,000 sccm Maxim um Inlet Pressure 150 psig (can not e xceed pressure differential requirement across MFC) n ormal Operating Pressure Differential (N2 Full Scale) 50,000 - 100,000 sccm; 40 to 80 psid (with atmospher ic pressure at the MFC outlet) Pr oof Pressure 1000 psig Bur st Pressure 1500 psig Contr ol Range 2% to 100% of Full Scale (r ange on mech.) Typical Accuracy (with N2 calibration gas) ±1% of set point f or 20 to 100% Full Scale ±0.2% of Full Scale f or 2 to 20% Full Scale Repeatability ±0.3% of Reading Resolution 0.1% of Full Scale T emperature Coefficients Zero <0.05% of Full Scale/°C Span <0.08% of Reading/°C Inlet Pressure Coefficient <0.02% of Reading/psi T ypical Controller Settling Time <750 msec., typical abo ve 10% Full Scale (per SEMI Guideline E-17-0600) warm-up Time 30 min utes (to within 0.2% of Full Scale of steady state perf ormance) Operating Temperature Range (Ambient) 10°C to 50°C Stora ge Humidity 0 to 95% Relativ e Humidity, non-condensing Storage Temperature Mechanical Fittings (compatible with) Sw agelok® 4 VCR® high flow male, Swagelok 8 VCR male, 1/2'' Swagelok, 10mm Sw agelok, KF-16, 12 mm Swagelok, 3/8'' Swagelok, Sw agelok 8 VCO® male l eak Integrity Exter nal (scc/sec He) <1 x 10-10 Through closed v alve <1.0% of Full Scale at 40 psig inlet to atmosphere o assure no flow-through, a separate positive shut-off valve is required.) wetted Materials Standard 316L S .S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S .S., Elgiloy®, Nickel V alve Seat (MFC only) EPDM (Class VI), EPDM, Viton® (Class VI), Viton, Buna, or Neoprene Surface Finish MFC 10µ inch a verage Ra (electropolished) MFM 16µ inch a verage Ra weight <3 lbs (1.4kg) Electrical Analog I/O Input Power Required +15 to +24 VDC @ (<4 watts) Flo w Input/Output Signal V oltage (0 to 5 VDC) 15 pin Type ''D'' male Current (4 to 20 mA) 15 pin Type ''D'' male Compliance CE

Digital I/O Pr ofibus® Input P ower Required +15 to +24 VDC (< 4 watts) Connector 9 pin Type D male (power) 9 pin Type D female (comm.) Data Rate Switch/Selection No switch Set Data Rate via Profib us Data Rate Data Rate (User Selectab le)

9.6 Kbps to 12 Mbps

witches, 10 positions n etwork Size Up to 99 nodes n etwork Topology Master/sla ve Visual Comm unication Indicators LED Comm (g reen/red) LED Error (g reen/red) Compliance CE Dimensional Drawing — Note: Unless specified, dimensions are nominal values in inches (mm referenced).

© 2017-2018 MKS Instruments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice . mksinst™ is a trademark of MKS Instruments, Inc., Andover, MA. Swagelok®, VCR® and VCO® are registered trademarks of Swagelok Marketing Co., Solon, OH. Viton® is a registered tr ademark of E.I. Dupont, Wilmington, DE. Elgiloy® is a registered trademark of Elgiloy Limited Partnership, Elgin, IL. Profib us® is a registered trademark of Profibus International, Karlsruhe, Germany. H 008 E 654 K IM100A Ordering Inf ormation * The Full Scale flo w rate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate separated b y a decimal point. The third digit is the exponent of the power of ten. Example flo w rate code: 254 is 2.5 x 104 or 25000 sccm 153 is 1.5 x 103 or 1500 sccm 605 is 6.0 x 105 or 60000 sccm ** The user should consult with their gas supplier on the appropriate elastomer which is compatible with the selected gas. MKS Instruments, Inc. Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 Web: www.mksinst.com MKS Instruments, Inc. Flow Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350 M MFC Mass Flo w Controller IM100A IM100A Gas (P er Semi Standard E52-0703) F or example: 008 = Air 008 013 = Nitrogen = N2 013 029 = Ammonia = NH3 029 Flo w Range Full Scale* 50000 sccm 504 65000 sccm 654 75000 sccm 754 100000 sccm 105 Fittings (compatible with) 10mm Sw agelok P 12mm Sw agelok F 1/2'' Sw agelok K 3/8'' Sw agelok J Sw agelok 4 VCR male (high flow) R Sw agelok 8 VCR male T Sw agelok 8 VCO male (Consult Factory) D KF-16 (Consult F actory) U Connector Profib us (1480 Compatible) Profib us (1179B Compatible) Analog 0 to 5 VDC (15 pin D connector) B Analog 4 to 20 mA (15 pin D connector) H Analog 0 to 5 VDC (15 pin D Connector), Brooks (Consult Factory) E Analog 0 to 5 VDC (15 pin D Connector), Celerity (Consult Factory) U V alve/Device Type Nor mally Closed M Mass Flo w Meter Seal Materials** EPDM (FD A Compliant) (Consult Factory) R EPDM Valve Plug E Viton (FD A Compliant) (Consult Factory) W Buna Valve Plug B Neoprene Valve Plug N Viton Valve Plug V No Valve (MFM Option) Reser ved Reser ved Firmware (unless otherwise specified) MKS will ship fir mware revision current to date.