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WWW.MKSINST.COM IE250A IP66 RATED, ELASTOMER SEALED, DIGITAL MASS FLO W CONTROLLER, FLOW RATES UP TO 250 SLM The IE250A is a general purpose, elastomer sealed MFC well suited for use in harsh environments where resistance to liquid or dust ingress are critical. The IE250A meets these requirements with its IP66 rated enclosure design.The IE250A incorporates the latest in digital flow control electronics along with a well proven, patented thermal sensor and mechanical design for Full Scale flow rates from 100 to 250 slm, N 2 equivalent. This MFC is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms provide fast and repeatable response to set point. Settling times of 1 to 2 seconds and set point accuracies below 1% of set point outperform those of other typical high flow MFCs. Precise control is maintained down to 2% of the IE250A configured Full Scale flow range. The multi-gas/multi-range capability, along with tight performance specifications for accuracy, control range, and transient response allow users to minimize inventory of high flow MFC part numbers. The multi-gas/multi-range feature (along with other custom controls) is accessed through the MFCs embedded diagnostic interface, which requires no special software or hardware to operate. A standard Ethernet cable and JAVA-enabled HTML browser, widely available, are all the tools needed. The critical gas parameters for typical high flow rate gases are already stored on the device. Configuring the device is simply a matter of selecting the gas from a drop down menu and specifying the desired Full Scale flow range. The diagnostic interface also allows the user to perform routine device health checks, plot flow response, and store operating data for offline analysis. Features & Benefits Improved Perf ormance

  • F ast response to set point change reduces flo w stabilization time for short process steps , enhancing process throughput
  • Tightly controlled flow accuracy of process gas enab les improved process matching
  • Reduced inlet pressure (pressure drop) requirement simplifies gas supply regulation from a single source R educes Overall Costs Reduces MFC inventory through its m ulti-gas/multi-range capability
  • Accur ate flow control over a wide dynamic r ange, even when down ranged, reduces need f or an additional low range MFC Easy to Integrate and Operate De vice configuration and diagnostics made simple through standard Ether net interface
  • Uses a standard web browser with no special softw are required WWW.MKSINST.COM Flow Solutions

Full Scale Flow Ranges (N2 equivalent) 100 to 250 slm Maxim um Inlet Pressure 150 psig (cannot e xceed pressure differential requirement across MFC) Normal Operating Pressure Differential 30 to 55 psid (dependent on fitting type) (with atmospher ic pressure at the MFC outlet) Burst Pressure 1500 psig Contr ol Range 2% to 100% of Full Scale (r ange on mech.) Typical Accuracy ± 1% of set point f or > 20% to 100% Full Scale ± 0.25% of Full Scale f or 5% to 20% Full Scale Repeatability ± 0.5% of Reading Resolution 0.1% of Reading T emperature Coefficients Zero < 0.05% of Full Scale/°C Span < 0.08% of Reading/°C Inlet Pressure Coefficient < 0.03% of Reading/psi or less T ypical Controller Settling Time 1 to 2 seconds typical abo ve 10% Full Scale @ 50 psi W arm-up Time one (1) hour Operating T emperature Range (Ambient) 10°C to 50°C Stora ge Humidity 0 to 95% relativ e humidity, non-condensing Storage Temperature Mechanical Fittings (compatible with) 8 VCO® male, ½'' NPT female, ½'' Compression, 8 VCR® male, 12 mm Sw agelok, 3/8'' Swagelok, W-seal, ½'' Compression Long, VCR Male Long, 8 VCO Male Long Leak Integrity Exter nal (scc/sec He) < 1 x 10-9 Through closed v alve < 1.0% Full Scale at 40 psia to v ac (<500 mTorr) o assure no flow-through, a separate positive shut-off valve is required.) Wetted Materials Standard 316 S .S., 17-7 S.S., Elgiloy®, 430FR Seal Options Viton® (Class VI), EPDM (Class VI) Surface Finish 16 µinch a verage Ra Weight less than 4.5 lbs . (2.05 kg) Enc losure Rating IP66 Electrical Analog I/O Input Power Required +15 to +24 VDC @ (< 4 watts) Flow Input/Output Signal V oltage (0 to 5 VDC) 15-pin Type “D” male Current (4 to 20 mA) 15-pin T ype “D” male Compliance CE

Note: Unless specified, dimensions are nominal values in inches (mm referenced). *(See man ual for additional I/O and fitting types) Fitting Code Fitting Name Overall Length D 8 VCO Male 6.78'' M ½'' NPT Female 7.36'' S ½'' Compression 6.35'' T 8 VCR Male 7.20'' H 9/16-18 UNF 6.22'' W ½'' Compression Long 8.25'' L 8 VCR Male Long 8.63'' J 3/8'' Compression 6.34'' F 12mm Compression 6.34'' Q 8 VCO Male Long 8.31''

© 2015-2018 MKS Instr uments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice. mksinst™ is a trademark of MKS Instruments, Inc., Andover, MA. Swagelok®, VCR® and VCO® are registered trademarks of Swagelok Marketing Co., Solon, OH. Viton® is a registered trademark of E.I. Dupont Company, Wilmington, DE. Elgiloy® is a registered trademark of Elgiloy Specialty Metals, Elgin, IL. Profibus® is a registered trademark of Profibus International, Karlsruhe, Germany. Ordering Inf ormation 013 R 255 T IE250A * F or gases not listed in the standard products gas table, please contact the MKS applications department for assistance. Gas Table Gas Name* Semi Gas Code Gas Formula Min - Max Full Scale (slm) Helium 001 He 140 to 350 Argon 004 Ar 140 to 250 Hydrogen 007 H2 100 to 250 Air 008 Air 100 to 250 Nitrogen 013 N2 100 to 250 ** The Full Scale flo w rate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate separ ated by a decimal point. The third digit is the exponent of the power of ten. Example flo w rate code: 255 is 2.5 x 105 sccm or 250 slm 105 is 1.0 x 105 sccm or 100 slm MKS Instruments, Inc. Global Headquarters

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Andover, MA 01810 Tel: 978.645.5500 T el: 800.227.8766 (in U .S.A.) Web: www.mksinst.com MKS Instruments, Inc. Flow Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350 MFC High Flo w Mass Flow Controller (multi-gas, multi-range) IE250A Gas* For example: 001 = Helium = He 001 004 = Argon = Ar 004 007 = Hydrogen = H2 007 013 = Nitrogen = N2 013 Flow Range Full Scale** 250 slm (250,000 sccm) 255 Fittings (compatible with) 12 mm Sw agelok F 3/8'' Swagelok J ½'' tube compression S ½'' Compression Long W ½'' NPT f emale M VCR Male T VCO Male D VCR Male Long L VCO Male Long Q W -Seal H Connector (P ower & Control I/O) Profibus® (1480 Compatible) 4 Profibus (1179B Compatible) 3 15 pin D (Analog 0 to 5 VDC I/O) B 15 pin D (4 to 20 mA I/O) H Analog 0 to 5 VDC (15 pin D Connector), Brooks (Consult Factory) E Analog 0 to 5 VDC (15 pin D Connector), Celerity (Consult Factory) U Seal Materials EPDM (FD A Compliant) R Viton (FD A Compliant) W V alve/Device Type Nor mally Closed Mass Flo w Meter Reser ved for MKS Future Use Standard Firmware Unless otherwise specified, MKS will ship fir mware revision current to date