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WWW.MKSINST.COM IE500A/IE1000A INDUSTRIAL MASS FLOW CONTROLLER, FLOW RATES UP TO 1000 SLM, IP66 RATED, MULTI-GAS/MULTI-RANGE The IE500A and IE1000A mass flow controllers are elastomer-sealed, multi-gas/multi-range MFCs designed for use in harsh environments where resistance to liquid and dust ingress are essential. Applications include those where “hose down” may be required, such as industrial glass production where moisture and particulates are present. With its IP66 rated enclosure, the IE500A and IE1000A meet the stringent requirements of these aggressive environments. The IE500A is capable of being ranged from 250 slm to 500 slm (N 2 equivalent) while the IE1000A is capable of being ranged from 501 to 1000 slm (N 2 equivalent). The broad flow range is enabled by the MFC’s unique control valve design, which responds rapidly to set point changes while maintaining closed conductance leak rates that are well below competitive high flow MFCs. Settling times of 2 to 3 seconds and set point accuracies below 1% of set point exceed those of other typical high flow MFCs. Precise control is maintained down to 2% of the IE500A and IE1000A’s configured Full Scale flow range. The multi-gas/multi-range capability, along with tight performance specifications for accuracy, control range, and transient response allow users to minimize inventory of high flow MFC part numbers. The multi-gas/multi-range feature (along with other custom controls) is accessed through the MFCs embedded diagnostic interface, which requires no special software or hardware to operate. A standard Ethernet cable and JAVA-enabled HTML browser, widely available, are all the tools needed. The critical gas parameters for typical high flow rate gases are already stored on the device. Configuring the device is simply a matter of selecting the gas from a drop down menu and specifying the desired Full Scale flow range. The diagnostic interface also allows the user to perform routine device health checks, plot flow response, and store operating data for offline analysis. Features & Benefits Improved Perf ormance IP66 r ated enclosure provides protection against ing ress of water and dust present in harsh en vironments F ast response to set point change reduces flow stabilization time for short process steps, enhancing process throughput Tightly controlled flo w accuracy of process gas enab les improved process matching Reduced inlet pressure (pressure drop) requirement simplifies gas supply regulation from a single source R educes Overall Costs Reduces MFC in ventory through its m ulti-gas/multi-range capability Accur ate flow control over a wide dynamic r ange, even when down ranged, reduces need f or an additional low range MFC Easy to Integrate and Operate De vice configuration and diagnostics made simple through standard Ether net interface Uses a standard w eb browser with no special softw are required WWW.MKSINST.COM Flow Solutions

Full Scale Flow Ranges (N2 equivalent) IE500A 250 - 500 slm IE1000A 501 - 1000 slm Maxim um Inlet Pressure 150 psig (cannot e xceed pressure differential requirement across MFC) Normal Operating Pressure Differential 40 to 50 psid (dependent on fitting type) (with atmospher ic pressure at the MFC outlet Bur st Pressure 1500 psig Contr ol Range 2% to 100% of Full Scale (r ange on mech.) Typical Accuracy ±1% of set point f or > 20% to 100% Full Scale ±0.25% of Full Scale f or 5% to 20% Full Scale Repeatability ±0.5% of Reading Resolution 0.1% of Full Scale T emperature Coefficients Zero <0.05% of Full Scale/°C Span <0.08% of Reading/°C Inlet Pressure Coefficient <0.03% of Reading/psi T ypical Controller Settling Time <3 sec typical abo ve 10% Full Scale @ 50 psi W arm-up Time One (1) hour Operating T emperature Range (Ambient) 10°C to 50°C Stora ge Humidity 0 to 95% relativ e humidity, non-condensing Storage Temperature Mechanical Fittings (compatible with) Sw agelok® 8 VCR® male, 8 VCO® male, ½'' tube compression, 12 mm compression, ¾'' tube compression, ½'' NPT f emale, ¾'' NPT female Consult f actory for availability for Swagelok 12 VCR male and 12 VCO male Leak Integrity Exter nal (scc/sec He) <1 x 10-9 Through closed v alve <1.0% Full Scale at 40 psia to v ac (<500 mTorr) o assure no flow-through, a separate positive shut-off valve is required.) Wetted Materials Standard 316 S .S., Elgiloy®, 430FR, PTFE Seal Options Viton, Viton (USP Class VI), EPDM (USP Class VI) Surface Finish 20 µinch a verage Ra Weight less than 12.7 lbs . (5.8 kg) Enclosure Rating IP66 Electrical Analog I/O Input Power Required +15 to +24 VDC @ (< 8 watts) Flow Input/Output Signal V oltage (0 to 5 VDC) 15-pin Type “D” male Current (4 to 20 mA) 15-pin Type “D” male Compliance CE

Note: Unless specified, dimensions are nominal values in inches (mm referenced). *(See manual for additional I/O and fitting types) x.xx = ±0.020 toler ance Fitting Code Fitting Name Overall Length D 8 VCO Male 6.78'' M ½'' NPT Female 7.36'' S ½'' Compression 6.35'' T 8 VCR Male 7.20'' H 9/16-18 UNF 6.22'' W ½'' Compression Long 8.25'' L 8 VCR Male Long 8.63'' J 3/8'' Compression 6.34'' F 12mm Compression 6.34'' Q 8 VCO Male Long 8.31''

© 2015-2018 MKS Instr uments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice. mksinst™ is a trademark of MKS Instruments, Inc., Andover, MA. Swagelok®, VCR® and VCO® are registered trademarks of Swagelok Marketing Co., Solon, OH. Viton® and Neoprene® are registered trademarks of E.I. Dupont Company, Wilmington, DE. Elgiloy® is a registered trademark of Elgiloy Specialty Metals, Elgin, IL. DeviceNet™ is a trademark of the Open DeviceNet Vendor Association, Coral Springs, FL. Profibus® is a registered trademark of Profibus International, Karlsruhe, Germany. Ordering Inf ormation 013 R 106 T IE1000A * F or gases not listed in the standard products gas table, please contact the MKS applications department for assistance. Gas Table Gas Name* Semi Gas Code Gas Formula Min - Max Full Scale (slm) Helium 001 He 700 to 1400 Argon 004 Ar 450 to 900 Hydrogen 007 H2 500 to 1000 Air 008 Air 500 to 1000 Nitrogen 013 N2 500 to 1000 ** The Full Scale flo w rate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate separ ated by a decimal point. The third digit is the exponent of the power of ten. Example flo w rate code: 255 is 2.5 x 105 sccm or 250 slm 105 is 1.0 x 105 sccm or 100 slm MKS Instruments, Inc. Global Headquarters

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Andover, MA 01810 Tel: 978.645.5500 T el: 800.227.8766 (in U .S.A.) Web: www.mksinst.com MKS Instruments, Inc. Flow Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350 MFC High Flo w Mass Flow Controller (multi-gas, multi-range) IE500A/IE1000A Gas* For example: 001 = Helium = He 001 004 = Argon = Ar 004 007 = Hydrogen = H2 007 013 = Nitrogen = N2 013 Flow Range Full Scale** 500 slm (500,000 sccm) 505 1000 slm (1,000,000 sccm) 106 Fittings (compatible with) 12 mm compression L ½'' tube compression S ¾'' tube compression Z ½'' NPT f emale M ¾'' NPT f emale N VCR male T VCO male D Connector (P ower & Control I/O) DeviceNet™ 6 RS485 (uses 9 pin connector) Profibus® 4 15 pin D (Analog 0 to 5 VDC I/O) B 15 pin D (4 to 20 mA I/O) G Seal Materials EPDM (FD A Compliant) R Viton V Viton (FD A Compliant) W Reser ved for MKS Future Use Standard MFM Firmware Unless otherwise specified, MKS will ship fir mware revision current to date