HSH1500CIEO PERKINELMER | Alldatasheet

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Technical content

www.perkinelmer.com/opto HSH1500CIEO Lamps for Photolithography DATASHEET Lighting Imaging Telecom Mercury Short Arc Lamps

Applications

  • Microlithography

Description

PerkinElmer Optoelectronics is a leading manufacturer of mercury short arc lamps ranging in output power from 1000 to 8000 watts. These lamps are used in the production of printed circuit boards, liquid crystal displays and semiconductors. The HSH Series lamps are used worldwide in microlithography systems manufactured by ASML, Canon, GCA, Nikon, Karl Suss, Ultratech Stepper, and SVG . With extremely high stability, uniform output distribution and extended lamp lifetimes, the HSH Series has become the lamp choice of many of the world’s leading semiconductor manufacturers. PerkinElmer has been a leading manufac- turer of high intensity arc lamps for more than 30 years and is a premier lamp sup- plier for solid state lasers, medical equip- ment, NASA space systems and microlithography. PerkinElmer has steadily advanced lamp performance from 1000 watts to 8000 watts. With the intro- duction of new materials and proprietary manufacturing processes, we have extend- ed lamp lifetimes form several hundred hours to more than two thousand hours. The HSH Series provides longer lifetimes, outstanding uniformity, and excellent spectral quality which results in increased throughput, reduced downtime and an overall reduction in the cost of ownership.

PerkinElmer welcomes inquiries about special lamps. We would be pleased to discuss the requirements of your application and th e feasibility of designing a lamp specifically suited to your needs. For more information e-mail us at opto@perkinelmer.com or visit our web site at www.perkinelmer.com/opto. All values are nominal; specifications subject to change without notice. © 2000 PerkinElmer inc. All rights reserved. www.perkinelmer.com/opto USA: PerkinElmer Optoelectronics 44370 Christy St. Fremont, CA 94538 Phone: (510) 979-6500 Fax: (510) 687-1140 Europe: PerkinElmer Optoelectronics GmbH Wenzel-Jaksch-Str. 31

65199 Wiesbaden

Phone: +49 611 492 0 Fax: +49 611 492 177 Asia: PerkinElmer Optoelectronics

47 Ayer Rajah Crescent #06-12

Phone: +65 775 2022 Fax: +65 775 1008 (at base) Lifetime Nominal 1500 watts 65.2 amps (DC) 23 volts (DC) 220ºC (max) 2500 hours Range 57.7-75.0 amps (DC) 20-26 volts (DC) Operational Specifications HSH1500CIEO Physical Specifications 4.0 mm (max) 27 mm Dia and Cable 27 mm Dia and Cable Typical Performance Graph Notes 1. Lamp must be operated with cathode end up and anode end down. Inclination of lamp axis to vertical must not exceed 10º. Dimensions Ø51 MAX 120 233 MAX Spectral Output ANODE (+) END DOWN CATHODE (-) END UP Part Number References Used In Replaces Hours of Operation Relative Intensity (%) Wavelength (nm) Relative Intensity (%) Canon FPA, 2000il, 2500i2, i3 SUV1501CIL HBO1500W/CIEL All dimensions are in millimeters. 100 250 300 350 400 450 500 550 600 650 700 750 100 0 500 1000 1500 2000 DS-182 Rev B 1101