DATASHEET SEARCH SITE | WWW.ALLDATASHEET.COM

Document overview

  • Manufacturer or author: Provided By ALLDATASHEET.COM(FREE DATASHEET DOWNLOAD SITE)
  • PDF pages: 4

Technical content

WWW.MKSINST.COM GM50A METAL SEALED, Di G i TAL M ASS F LOw C O n TROLLER The GM50A is a general purpose, metal sealed MFC well suited for a wide variety of applications requiring flow control capability from 5 sccm to 50 slm Full Scale, N 2 equivalent. The GM50A incorporates the latest in digital flow control electronics along with a well proven, patented thermal sensor and mechanical design. The GM50A digitally controlled MFC is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Included is a digital calibration that yields 1% of set point accuracy on the calibration gas. The GM50A’s analog and digital I/O can easily be used to replace those same I/O types of the 1479A MFCs. All GM50As include Modbus as an available secondary I/O (excludes PROFINET ® and EtherCAT®). The GM50A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range enabling its use without the need to modify existing gas line configurations. The GM50A metal sealed MFC with its electropolished surface finish is well suited for use in high purity process applications. The GM50A is available with either a normally closed or normally open valve. The GM50A is also available in an MFM version (not electropolished). Features & Benefits

  • Patented ther mal sensor design pro vides e xceptional zero stability
  • Percent of set point accur acy (calibr ation gas) enab les precise process control
  • Embedded user interf ace pro vides the ability to Easily change de vice range and user gas reducing in ventory requirements Monitor de vice functionality and collect perf ormance data in-situ
  • 10µ inch electropolished 316L surf ace finish enab les MFC use for high purity

applications

  • Wide choice of digital (EtherCA DeviceNet™, Profibus®, PROFINET and RS485) or analog (0 to 5 VDC or 4 to 20 mA) I/O US Patent No 5461913. WWW.MKSINST.COM Flow Solutions

Full Scale Flow Ranges (N2 equivalent) 5 - 50000 sccm Maxim um i nlet Pressure MFC 150 psig (cannot e xceed pressure differential requirement across MFC) MFM 500 psi n ormal Operating Pressure Differential (N2 Full Scale) 5 to 5000 sccm; 10 to 40 psid (with atmospher ic pressure at the MFC outlet) 10000 to 20000 sccm; 15 to 40 psid 30000 to 50000 sccm; 25 to 40 psid Proof Pressure 1000 psig Bur st Pressure 1500 psig Contr ol Range 2% to 100% of Full Scale (r ange on mech.) Typical Accuracy (with N2 calibration gas) ±1% of set point f or 20 to 100% Full Scale ±0.2% of Full Scale f or 2 to 20% Full Scale ±1% of Reading f or Meters Repeatability ±0.3% of Reading Resolution 0.1% of Full Scale T emperature Coefficients Zero <0.05% of Full Scale/°C Span <0.08% of Reading/°C i nlet Pressure Coefficient <0.02% of Reading/psi T ypical Controller Settling Time <750 msec., typical abo ve 5% Full Scale (per SEMI Guideline E-17-0600) warm-up Time 30 min utes (to within 0.2% of Full Scale of steady state perf ormance) Operating Temperature Range (Ambient) 10°C to 50°C Stora ge Humidity 0 to 95% relativ e humidity, non-condensing Storage Temperature Mechanical Fittings (compatible with) Sw agelok® 4 VCR® male, 1/4'' Swagelok compression seal, surface mount, Sw agelok 8 VCR male, 1/8'' Swagelok, 1/2'' Swagelok, 6 mm Sw agelok, 8 mm Swagelok, KF16, 3/8'' Swagelok, 12mm Swagelok,

2 VCR

i ntegrity Exter nal (scc/sec He) <1 x 10-10 Through closed v alve <1.0% of Full Scale at 40 psig inlet to atmosphere o assure no flow-through, a separate positive shut-off valve is required.) wetted Materials Standard 316L S .S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S .S., Elgiloy®, Nickel, KM45 V alve Seat (MFC only) T eflon® Surface Finish MFC 10µ inch a verage Ra (electropolished) MFM 16µ inch a verage Ra weight less than 3 lbs (1.4kg) Electrical Analog i/O input Power Required +15 to +24 VDC @ (<4 watts) Flo w i nput/Output Signal V oltage (0 to 5 VDC) 15 pin Type ''D'' male, 9 pin Type ''D'' male Current (4 to 20 mA) 15 pin Type ''D'' male Compliance CE

Dimensional Drawing — DeviceNet™ and RS485 with VCR fittings* *(See manual for additional I/O and fitting types) Note: Unless specified, dimensions are nominal values in inches (mm referenced). Dimensional Drawing Digital i/O Digital i/O De vice n et™ RS485 Profibus® EtherCAT® PROFinET® input Power Required +11 to +25 VDC per (< 4 watts) +15 to +24 VDC (< 4 watts) +15 to +24 VDC (< 4 watts) +24 VDC (< 5 watts) +24 VDC (< 5 watts) Connector 5 pin micro connector (power and comm.) 9 pin Type D male (power and comm.) 9 pin Type D male (power) 9 pin Type D female (comm.) 2 x RJ-45 (comm.) male, M8 male, 5 pin (power) 2 x RJ-45 (comm.) male, M8 male, 5 pin (power) Data Rate Switch/Selection 4 positions: 125, 250, 500K (Default), (programmable over network) No switch Set data rate via RS485 No switch Set data rate via Profibus No switch No switch Comm. Rate(s) 125 Kbps

250 Kbps

500 Kbps

9.6 Kbps

19.2 Kbps

38.4 Kbps

9.6 Kbps to 12 Mbps 100 Mbps 100 Mbps

i D Switches/Addresses 2 switches, 10 positions; 0,0 to 6,3 1 to 254 Set address over RS485 Station Addresses 0,0 to 9,9 2 switches, 10 positions 3 switches, 16 positions N/A n etwork Size Up to 64 nodes Up to 32 nodes Up to 99 nodes Up to 4095 nodes N/A Visual i ndicators LED Network (green/red) LED Module (green/red) LED Comm (yellow) LED Error (red) LED Comm (green/red) LED Error (green/red) LED Power (green) LED Run (green) LED Error (red) LED Comm (green) LED Maint (amber) LED BUS Fault (red) LED Ready (green) LED Sys Fault (red) Compliance CE CE CE CE CE

© 2012-2018 MKS Instruments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice . mksinst™ is a trademark of MKS Instruments, Inc., Andover, MA. Swagelok® and VCR® are registered trademarks of Swagelok Marketing Co., Solon, OH. Teflon® is a registered trademark of E.I. Dupont, Wilmington, DE. Elgiloy® is a registered trademark of Elgiloy Limited Partnership, Elgin, IL. DeviceNet ™ is a tr ademark of the Open DeviceNet Vendor Association, Coral Springs, FL. Profibus® and PROFINET® are registered trademarks of Profib us International, Karlsruhe, Germany. EtherCAT® is a registered trademark and patented technology, licensed by Bec khoff Automation GmbH, Germany. 013 502 R GM50A The Full Scale flo w rate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate separated by a decimal point. The third digit is the exponent of the power of ten. Example flow rate code: 254 is 2.5 x 104 or 25000 sccm 153 is 1.5 x 103 or 1500 sccm 601 is 6.0 x 101 or 60 sccm ** The user should consult with their gas supplier on the appropriate elastomer which is compatible with the selected gas. Ordering Inf ormation MKS Instruments, Inc. Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 Web: www.mksinst.com MKS Instruments, Inc. Flow Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350 MFC Mass Flo w Controller GM50A GM50A Gas (P er Semi Standard E52-0703) F or example: 013 = Nitrogen = N2 013 029 = Ammonia = NH3 029 110 = Sulfur He xafluoride = SF6 110 Flow Range Full Scale* 5 sccm 500 10 sccm 101 20 sccm 201 50 sccm 501 100 sccm 102 200 sccm 202 500 sccm 502 1000 sccm 103 2000 sccm 203 5000 sccm 503 10000 sccm 104 20000 sccm 204 30000 sccm 304 50000 sccm 504 Fittings (compatible with) 6 mm Sw agelok M 8 mm Sw agelok E 10 mm Sw agelok P 12 mm Sw agelok F 1/8’ ’ Swagelok (for 1000 sccm N2 equivalent or below) A 1/4’ ’ Swagelok S 1/2’ ’ Swagelok K 3/8’ ’ Swagelok J Sw agelok 4 VCR male R Sw agelok 8 VCR male T C-seal surf ace mount as per SEMI 2787.1 C W -seal surface mount as per SEMI 2787.3F H KF16 U Sw agelok 2 VCR (for 1000 sccm N2 equivalent or below) B Connector EtherCAT 8 DeviceNet RS485 (uses 9 pin connector) Profibus (1480 Compatible) 4 Profibus (1179B Compatible) 3 PR OFINET Analog 0 to 5 VDC (9 pin D connector) A Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds L Analog 0 to 5 VDC (15 pin D connector) B Analog 0 to 5 VDC (15 pin D connector), Tied Grounds M Analog 4 to 20 mA (15 pin D connector) H Analog 0 to 5VDC (15 Pin D Connector), Brooks E Analog 0 to 5VDC (15 Pin D Connector), Celer ity U V alve/Device Type Nor mally Closed/Mass Flow Controller, Teflon® M0 No Valve/Mass Flow Meter Nor mally Open/Mass Flow Controller, Teflon® PT Firmware (unless otherwise specified) MKS will ship fir mware revision current to date.