DATASHEET SEARCH SITE | WWW.ALLDATASHEET.COM

Document overview

  • Manufacturer or author: Provided By ALLDATASHEET.COM(FREE DATASHEET DOWNLOAD SITE)
  • PDF pages: 4

Technical content

WWW.MKSINST.COM GM100A METAL SEALED, Di G i TAL M ASS F LOw C O n TROLLER The GM100A is a general purpose, metal sealed MFC well suited for a wide variety of applications requiring flow control capability from 1 slm to 100 slm Full Scale, N 2 equivalent. The GM100A incorporates the latest in digital flow control electronics along with a well proven, patented thermal sensor and mechanical design. The GM100A digitally controlled MFC is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 750 milliseconds. Included is a digital calibration that yields 1% of set point accuracy on the calibration gas. All GM100As include Modbus as an available secondary I/O. The GM100A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range without the need to modify existing gas line configurations, and now operates with flow rates up to 100 slm, N 2 equivalent. The GM100A metal sealed MFC, with its electropolished surface finish, is well suited for use in high purity process applications and is available with a normally closed valve. An MFM version is also available (not electropolished).

  • Patented ther mal sensor design pro vides e xceptional zero stability
  • Percent of set point accur acy (calibr ation gas) enab les precise process control
  • Embedded user interf ace pro vides the ability to Easily change de vice range and user gas reducing in ventory requirements Monitor de vice functionality and collect perf ormance data in-situ Adjust flo w calibration for chamber-to- chamber and tool-to-tool process matching
  • 10µ inch electropolished 316L surf ace finish enab les MFC use for high purity

applications

  • Compact inch f ootprint with high flo w VCR fittings allows the user to increase system flo w rate without the need to modify gas lines US Patent No 5461913. WWW.MKSINST.COM Flow Solutions Features & Benefits

Full Scale Flow Ranges (N2 equivalent) 50,000 - 100,000 sccm Maxim um i nlet Pressure 150 psig (can not e xceed pressure differential requirement across MFC) n ormal Operating Pressure Differential (N2 Full Scale) 50,000 - 100,000 sccm; 40 to 80 psid (with atmospher ic pressure at the MFC outlet) Pr oof Pressure 1000 psig Bur st Pressure 1500 psig Contr ol Range 2% to 100% of Full Scale (r ange on mech.) Typical Accuracy (with N2 calibration gas) ±1% of set point f or 20 to 100% Full Scale ±0.2% of Full Scale f or 2 to 20% Full Scale Repeatability ±0.3% of Reading Resolution 0.1% of Full Scale T emperature Coefficients Zero <0.05% of Full Scale/°C Span <0.08% of Reading/°C i nlet Pressure Coefficient <0.02% of Reading/psi T ypical Controller Settling Time <750 msec., typical abo ve 10% Full Scale (per SEMI Guideline E-17-0600) warm-up Time 30 min utes (to within 0.2% of Full Scale of steady state perf ormance) Operating Temperature Range (Ambient) 10°C to 50°C Stora ge Humidity 0 to 95% Relativ e Humidity, non-condensing Storage Temperature Mechanical Fittings (compatible with) Sw agelok® 4 VCR® high flow male, Swagelok 8 VCR male, 1/2'' Swagelok, 10mm Sw agelok, KF-16 Leak i ntegrity Exter nal (scc/sec He) <1 x 10-10 Through closed v alve <1.0% of Full Scale at 40 psig inlet to atmosphere o assure no flow-through, a separate positive shut-off valve is required.) wetted Materials Standard 316L S .S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S .S., Elgiloy®, Nickel V alve Seat (MFC only) Viton®, Buna, EPDM or Neoprene Surface Finish MFC 10µ inch a verage Ra (electropolished) MFM 16µ inch a verage Ra weight <3 lbs (1.4kg) Electrical Analog i/O input Power Required +15 to +24 VDC @ (<4 watts) Flo w i nput/Output Signal V oltage (0 to 5 VDC) 15 pin Type ''D'' male, 9 pin Type ''D'' male Current (4 to 20 mA) 15 pin Type ''D'' male Compliance CE

Dimensional Drawing — DeviceNet™ and RS485 with VCR fittings* *(See manual for additional I/O and fitting types) Note: Unless specified, dimensions are nominal values in inches (mm referenced). Digital i/O De vice n et™ RS485 Profibus® EtherCAT® PROFinET® input Power Required +11 to +25 VDC per (<4 watts) +15 to +24 VDC (<4 watts) +15 to +24 VDC (<4 watts) +24 VDC (<5 watts) +24 VDC (<5 watts) Connector 5 pin micro connector (power and comm.) 9 pin Type D male (power and comm.) 9 pin Type D male (power) 9 pin Type D female (comm.) 2 x RJ-45 (comm.) male, M8 male, 5 pin (power) 2 x RJ-45 (comm.) male, M8 male, 5 pin (power) Data Rate Switch/Selection 4 positions: 125, 250, 500K (Default), (programmable over network) No switch Set data rate via RS485 No switch Set data rate via Profibus No switch No switch Comm. Rate(s) 125 Kbps

250 Kbps

500 Kbps

9.6 Kbps

19.2 Kbps

38.4 Kbps

9.6 Kbps to 12 Mbps 100 Mbps 100 Mbps

i D Switches/Addresses 2 switches, 10 positions; 0,0 to 6,3 1 to 254 Set address over RS485 Station Addresses 0,0 to 9,9 2 switches, 10 positions 3 switches, 16 positions N/A n etwork Size Up to 64 nodes Up to 32 nodes Up to 99 nodes Up to 4095 nodes N/A Visual i ndicators LED Network (green/red) LED Module (green/red) LED Comm (yellow) LED Error (red) LED Comm (green/red) LED Error (green/red) LED Power (green) LED Run (green) LED Error (red) LED Comm (green) LED Maint (amber) LED BUS Fault (red) LED Ready (green) LED Sys Fault (red) Compliance CE CE CE CE CE Digital i/O

© 2016-2018 MKS Instruments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice . mksinst™ is a trademark of MKS Instruments, Inc., Andover, MA. Swagelok® and VCR® are registered trademarks of Swagelok Marketing Co., Solon, OH. Viton® is a registered trademark E.I. Dupont, Wilmington, DE. Elgiloy® is a registered trademark of Elgiloy Limited Partnership, Elgin, IL. DeviceNet ™ is a tr ademark of the Open DeviceNet Vendor Association, Coral Springs, FL. Profibus® and PROFINET® are registered tr ademarks of Profibus International, Karlsruhe, Germany. EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany. 013 B 105 T GM100A Ordering Inf ormation * The Full Scale flo w rate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate separated b y a decimal point. The third digit is the exponent of the power of ten. Example flo w rate code: 254 is 2.5 x 104 or 25000 sccm 153 is 1.5 x 103 or 1500 sccm 605 is 6.0 x 105 or 60000 sccm ** The user should consult with their gas supplier on the appropriate elastomer which is compatible with the selected gas. MKS Instruments, Inc. Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810 Tel: 978.645.5500 Web: www.mksinst.com MKS Instruments, Inc. Flow Solutions Six Shattuck Road Andover, MA 01810 Tel: 978.975.2350 M MFC Mass Flo w Controller GM100A GM100A Gas (P er Semi Standard E52-0703) F or example: 013 = Nitrogen = N2 013 029 = Ammonia = NH3 029 110 = Sulfur He xafluoride = SF6 110 Flow Range Full Scale* 50000 sccm 504 75000 sccm 754 100000 sccm 105 Fittings (compatible with) 10mm Sw agelok P 12mm Sw agelok F 1/2'' Sw agelok K 3/8'' Sw agelok J Sw agelok 4 VCR male (high flow) R Sw agelok 8 VCR male T Sw agelok 8 VCO male (Consult Factory) D KF-16 U Connector EtherCA T De viceNet RS485 (uses 9 pin connector) Profib us (1480 Compatible) Profib us (1179B Compatible) PR OFINET Analog 0 to 5 VDC (9 pin D connector) A Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds L Analog 0 to 5 VDC (15 pin D connector) B Analog 0 to 5 VDC (15 pin D connector), Tied Grounds M Analog 0 to 5 VDC (15 pin D connector), 1179B 24 VDC Pinout (Consult Factory) K Analog 0 to 5 VDC (15 pin D Connector), Brooks E Analog 0 to 5 VDC (15 pin D Connector), Celerity U Analog 4 to 20 mA (15 pin D connector) H V alve/Device Type Nor mally Closed M Mass Flo w Meter Seal Materials** Buna Valve Plug B Neoprene Valve Plug N Viton Valve Plug V EPDM Valve Plug E No Valve (MFM Option) Reser ved Reser ved Firmware (unless otherwise specified) MKS will ship fir mware revision current to date.