FMOL001DB SENSORTECHNICS | Alldatasheet
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Technical content
www.sensortechnics.com FMO Series Mass flow sensors for gases
FEATURES
- Bidirectional sensing
- Actual mass flow sensing
- Ceramic flow tube
- Manifold mount/O-ring sealed
- Sensortechnics PRO services ELECTRICAL CONNECTIONSPECIFICATIONS Maximum ratings Supply voltage2 8 to 15 V typ. 10 ±0.01 V Power consumption max. 60 mW Temperature limits Operating -40 to 125°C Storage -40 to 125°C Mechanical shock 100 g (5 drops, 6 axes) 1 2 3 4 5 6 P 1 P 2 Note: 1 sccm denotes standard cubic centimeters per minute
2 Output voltage is ratiometric to supply voltage
To be used with dry gases only. The FMOM025HB is a special sensor for hydrogen (H 2) flow. The FMO series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor.
www.sensortechnics.com FMO Series Mass flow sensors for gases .ontraP egnarwolF )elacslluf( wolf.xaM egnahc 4 egatlovtuptuO tniopmirt@ BH520MOMFm ccs52±c es/l0.5m ccs52@Vm5.1±5.8 BD100LOMFm ccs0001±c es/l0.5m ccs0001@Vm7.3±7.45 PERFORMANCE CHARACTERISTICS FLOW SENSOR CHARACTERISTICS 3 scitsiretcarahC. niM. pyT. xaMt inU tesffooreZB H520MOMF0 .1-0 0 .1 Vm BD100LOMF5 .1-0 5 .1 siseretsyhdnaytilibataepeRB H520MOMF5 3.0± gnidaer% )denibmoc(B D100LOMF0 5.0± stceffeerutarepmeT 5 tesffOC °58ot52-0 2.0±V m napSC °52ot52-5 .2 gnidaer% C°58ot525 .2- emitesnopseR 0.10 .3s m edomnommoCe russerp 051i sp Notes: 3 A 5 micron filter is recommended for all devices. 4 Maximum allowable rate of flow change to prevent damage. 5 Shift is relative to 25 °C.
www.sensortechnics.com FMO Series Mass flow sensors for gases FLOW SPECIFICATIONS OUTPUT VS. FLOW CURVES FMOM025HB FMOL001DB BH520MOMFB D100LOMF .sserP )rabµ( wolF )mccs( 6 .moN )Vm( .loT )Vm±( .sserP )rabm( wolF )mccs( 6 .moN )Vm( .loT )Vm±( Note: 6 Devices are calibrated in mass flow. Tolerance values apply to calibration type only.
www.sensortechnics.com FMO Series Mass flow sensors for gases HEATER CONTROL CIRCUIT SENSING BRIDGE SUPPLY CIRCUIT DIFFERENTIAL INSTRUMENTATION AMPLIFIER CIRCUIT (optional) () OffsetO VVVR R R RRV +− += 12 122 RR RVV SOffsetwhere Note: These circuits are required for operation per specifications. Circuits are not on board the sensor.
www.sensortechnics.com FMO Series Mass flow sensors for gases mass: approx. 14 g dimensions in mm (inches) OUTLINE DRAWING 27.7 (1.09) 7.62 (0.30) 14.0 (0.55) 0.64 (0.025) 2.5 (0.10) 32.2 (1.19) 30.5 (1.20) 3.0 (0.12) 12.7 (0.50) 2.54 (0.10) 7.9 (0.31) Ø 3.0 (Ø 0.12) 1 2 3 4 5 6 10.9 (0.43) 17.3 (0.68) 34.0 (1.34) 4.8 (0.19) 8.4 (0.33) 6 5 4 3 2 1 P 1 P 2 Ø 3.51 (Ø 0.138) Ø 2.0 (Ø 0.08) Ø 6.2 (Ø 0.24) Note: Positiv flow direction is defined as proceeding from port 1 (P1) to port 2 (P2) and results in positive output (pin 6 > pin 2). Negative flow direction is defined conversely and results in negative output (pin 6 < pin 2). third angle projection
www.sensortechnics.com FMO Series Mass flow sensors for gases epytsaG) .xorppa(rotcafnoitcerroC )eH(muileH H(negordyH 2) )rA(nogrA N(negortiN 2) O(negyxO 2) riA )ON(edixocirtiN )OC(edixonomnobraC HC(enahteM 4) HN(ainommA 3) N(edixosuortiN 2 )O ON(edixoidnegortiN 2) OC(edixoidnobraC 2) 5.0 8 7.0 9,8 59.0 0.1 0.1 0.1 0.1 0.1 1.1 1.1 53.1 53.1 53.1 GAS CORRECTION FACTORS 7 Notes: 7 Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates. 8 When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage: Hydrogen typ. 12 V, Helium typ. 15 V 9 Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing hydrogen flow and are designated with an "H" at the end of the order number. egnarwolFs agyrDs agnegordyH 9 mccs52±- B H520MOMF mccs0001±B D100LOMF- Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. Sensortechnics PRO services:
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