FMAL001DU SENSORTECHNICS | Alldatasheet
Document overview
- Manufacturer or author: Provided By ALLDATASHEET.COM(FREE DATASHEET DOWNLOAD SITE)
- PDF pages: 5
Technical content
www.sensortechnics.com FMA Series Mass flow sensors for gases
FEATURES
- Actual mass flow sensing
- 1...5 V output
- Manifold mount/O-ring sealed
- Sensortechnics PRO services ELECTRICAL CONNECTIONSPECIFICATIONS Maximum ratings Supply voltage3 8 to 15 V typ. 10 ±0.01 V Power consumption FMAL001DU 60 mW FMAL006DU 75 mW Output load NPN (Sinking) 10 mA PNP (Sourcing) 20 mA Temperature limits Operating -25 to 85°C Storage -40 to 90°C Mechanical shock 100 g (5 drops, 6 axes) 1 2 3 P 1 P 2 Pin 1: Vout Pin 2: +Vs Pin 3: GND Note: 1 sccm denotes standard cubic centimeters per minute, 1000 sccm = 1 slpm 2 slpm denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C, 1 bar, 50% RH.
3 Output voltage is ratiometric to supply voltage
To be used with dry gases only The FMA series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor
www.sensortechnics.com FMA Series Mass flow sensors for gases .ontraP egnarwolF )elacslluf( wolf.xaM egnahc 5 egatlovtuptuO tniopmirt@ UD100LAMFm ccs0001 1 ces/l0.5m ccs0001@V51.0±5 1 UD600LAMFM PLS6 2 ces/l0.5M PLS6@V51.0±5 2 PERFORMANCE CHARACTERISTICS FLOW SENSOR CHARACTERISTICS 4 scitsiretcarahC. niM. pyT. xaMt inU tesffooreZ5 9.00 .15 0.1V siseretsyhdnaytilibataepeRU D100LAMF5 .0± gnidaer%)denibmoc(U D600LAMF0 .1± rorreyticirtemoitaR 3 3.0± stceffeerutarepmeT 6 tesffOC °58ot52-5 20.0±V napSC °52ot52-U D100LAMF0 .5- gnidaer% UD600LAMF0 .6- C°58ot52U D100LAMF0 .6 UD600LAMF0 .6 emitesnopseR 0.10 .3s m edomnommoCe russerpU D100LAMF0 51 isp UD600LAMF5 2 Notes: 1 sccm denotes standard cubic centimeters per minute, 1000 sccm = 1 slpm 2 SLPM denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C, 1 bar, 50% RH. 4 A 5 micron filter is recommended for all devices. 5 Maximum allowable rate of flow change to prevent damage. 6 Shift is relative to 25 °C.
www.sensortechnics.com FMA Series Mass flow sensors for gases FLOW SPECIFICATIONS OUTPUT VS. FLOW CURVES FMAL001DU FMAL006DU UD100LAMFU D600LAMF .sserP )rabm( wolF )mccs( 7 .moN V( CD ) .loT V±( CD ) .sserP )rabm( wolF )mpls( 7 .moN V( CD ) .loT V±( CD ) 33.0 003 67.39 1.0 91.0 002 32.37 1.0 80.0 001 94.24 1.0 00.0 0 00.15 0.0 Note: 7 Devices are calibrated in mass flow. Tolerance values apply to calibration type only.
www.sensortechnics.com FMA Series Mass flow sensors for gases mass: approx. 11 g dimensions in mm (inches) OUTLINE DRAWING Pin 1: Vout Pin 2: +Vs Pin 3: GND 27.7 (1.09) 7.62 (0.30) 14.0 (0.55) 0.64 (0.025) 2.5 (0.10) 32.2 (1.19) 30.5 (1.20) 3.0 (0.12) 12.7 (0.50) 2.54 (0.10) 7.9 (0.31) Ø 3.0 (Ø 0.12) 1 2 3 10.9 (0.43) 17.3 (0.68) 34.0 (1.34) 4.8 (0.19) 8.4 (0.33) 3 2 1 P 1 P 2 Ø 3.51 (Ø 0.138) Ø 2.0 (Ø 0.08) Ø 6.2 (Ø 0.24) Note: Positiv flow direction is defined as proceeding from port 1 (P1) to port 2 (P2) and results in positive output. third angle projection
www.sensortechnics.com FMA Series Mass flow sensors for gases Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. egnarwolFs agyrDs agnegordyH 01 mccs0001 UD100LAMFU H100LAMF MPLS6 UD600LAMF- -- epytsaG ).xorppa(rotcafnoitcerroC )eH(muileH H(negordyH 2) )rA(nogrA N(negortiN 2) O(negyxO 2) riA )ON(edixocirtiN )OC(edixonomnobraC HC(enahteM 4) HN(ainommA 3) N(edixosuortiN 2 )O ON(edixoidnegortiN 2) OC(edixoidnobraC 2) 5.0 9 7.0 01,9 59.0 0.1 0.1 0.1 0.1 0.1 1.1 1.1 53.1 53.1 53.1 GAS CORRECTION FACTORS 8 Notes: 8 Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates. 9 When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage: Hydrogen typ. 12 V, Helium typ. 15 V 10Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing hydrogen flow and are designated with an "H" at the end of the order number. ORDERING INFORMATION - AVAILABLE LISTINGS Note: Preferred listings are highlighted in grey Sensortechnics PRO services:
- Extended guarantee period of 2 years
- Improved performance characteristics
- Custom product modifications and adaptations even for small quantities
- Advanced logistics models for supply inventory and short delivery times
- Technical support through application engineers on the phone or at your site
- Fastest possible technical response for design and QA engineers ... plus other services on request