FBOM030DB SENSORTECHNICS | Alldatasheet

Document overview

  • Manufacturer or author: Provided By ALLDATASHEET.COM(FREE DATASHEET DOWNLOAD SITE)
  • PDF pages: 6

Technical content

www.sensortechnics.com FBO Series Mass flow sensors for gases

FEATURES

or -600...1000 sccm1

  • Bidirectional sensing
  • Actual mass flow sensing
  • Sensortechnics PRO services ELECTRICAL CONNECTIONSPECIFICATIONS Maximum ratings Supply voltage2 8 to 15 V typ. 10 ±0.01 V Power consumption max. 50 mW typ. 30 mW Temperature limits Operating -25 to 85°C Storage -40 to 90°C Mechanical shock 100 g (5 drops, 6 axes) Note: 1 sccm denotes standard cubic centimeters per minute

2 Output voltage is ratiometric to supply voltage

To be used with dry gases only The FBO series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor 1 2 3 4 5 6 P 1 P 2

www.sensortechnics.com FBO Series Mass flow sensors for gases .ontraP egnarwolF )elacslluf( egnahcwolf.xaM 4 egatlovtuptuO tniopmirt@ BD002MOBFm ccs002±c es/l0.5m ccs001@Vm03 BD030MOBFm ccs03±c es/l0.5m ccs52@Vm8.11 BD100LOBFm ccs0001±c es/l0.5m ccs056@Vm05 XBD100LOBFm ccs0001...006-c es/l0.5m ccs056@Vm05 FLOW SENSOR CHARACTERISTICS 3 PERFORMANCE CHARACTERISTICS scitsiretcarahC. niM. pyT. xaMt inU tesffooreZ0 .1-0 0 .1V m siseretsyhdnaytilibataepeR )denibmoc( BD100LOBF srehtolla 0.1± 53.0± gnidaer% stceffeerutarepmeT tesffO C°58ot52- 5 02.0±V m napSC °52ot52-B D002MOBF5 .2 gnidaer% BD030MOBF0 .5 BD100LOBF0 .5 XBD100LOBF0 .5 C°58ot52 BD002MOBF5 .2- BD030MOBF0 .5- BD100LOBF0 .5- XBD100LOBF0 .5- ecnatsiserrosneS )1niP-6niP,1niP-2niP( 5m hOk tnerrucrosneS )1niP-6niP,1niP-2niP( 6.0A m emitesnopseR 0.10 .3s m edomnommoCe russerp 52i sp Notes: 3 A 5 micron filter is recommended for all devices. 4 Maximum allowable rate of flow change to prevent damage. 5 Shift is relative to 25 °C.

www.sensortechnics.com FBO Series Mass flow sensors for gases FLOW SPECIFICATIONS OUTPUT VS. FLOW CURVES BD002MOBFB D030MOBFB D100LOBFX BD100LOBF .sserP )rabm( wolF )mccs( 6 .moN )Vm( .loT )Vm±( .sserP )rabµ( wolF )mccs( 6 .moN )Vm( .loT )Vm±( .sserP )rabm( wolF )mccs( 6 .moN )Vm( .loT )Vm±( .sserP )rabm( wolF )mccs( 6 .moN )Vm( .loT )Vm±( Note: 6 Devices are calibrated in mass flow. Tolerance values apply to calibration type only. FBOM200DB FBOM030DB FBOL001DB FBOL001DBX

www.sensortechnics.com FBO Series Mass flow sensors for gases Note: These circuits are required for operation per specifications. Circuits are not on board the sensor. HEATER CONTROL CIRCUIT SENSING BRIDGE SUPPLY CIRCUIT DIFFERENTIAL INSTRUMENTATION AMPLIFIER CIRCUIT (optional) () OffsetO VVVR R R RRV +−  += 12 122 RR RVV SOffsetwhere

www.sensortechnics.com FBO Series Mass flow sensors for gases mass: approx. 10.8 g dimensions in mm (inches) OUTLINE DRAWING Note: Positiv flow direction is defined as proceeding from port 1 (P1) to port 2 (P2) and results in positive output (pin 6 > pin 2). Negative flow direction is defined conversely and results in negative output (pin 6 < pin 2). third angle projection P 1 2.9 (0.114) 5.1 (0.20) 23.6 (0.93) 31.5 (1.24) 7.4 (0.29) 1.8 (0.07) 2.8 (0.11) 1.40 (0.055) 54.4 (2.14) 1.0 (0.04) 1.52 (0.06) 23.9 (0.94) 30.5 (1.20) 5.1 (0.20) 4.1 (0.16) 12.7 (0.50) 15.5 (0.61) 2.8 (0.11) P 2 2.5 (0.10)0.6 (0.025) 1 2 3 4 5 6 8.3 (0.325) 8.4 (0.33) 7.60 (0.30) 6.3 (0.25)

www.sensortechnics.com FBO Series Mass flow sensors for gases Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. egnarwolFs agyrDs agnegordyH 9 mccs03± BD030MOBF- -- mccs002± BD002MOBFB H002MOBF mccs0001± BD100LOBF BH100LOBF mccs0001...006-X BD100LOBF- -- epytsaG ).xorppa(rotcafnoitcerroC )eH(muileH H(negordyH 2) )rA(nogrA N(negortiN 2) O(negyxO 2) riA )ON(edixocirtiN )OC(edixonomnobraC HC(enahteM 4) HN(ainommA 3) N(edixosuortiN 2 )O ON(edixoidnegortiN 2) OC(edixoidnobraC 2) 5.0 8 7.0 9,8 59.0 0.1 0.1 0.1 0.1 0.1 1.1 1.1 53.1 53.1 53.1 GAS CORRECTION FACTORS 7 Notes: 7 Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates. 8 When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage: Hydrogen typ. 12 V, Helium typ. 15 V 9 Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing hydrogen flow and are designated with an "H" at the end of the order number. Sensortechnics PRO services:

  • Extended guarantee period of 2 years
  • Improved performance characteristics
  • Custom product modifications and adaptations even for small quantities
  • Advanced logistics models for supply inventory and short delivery times
  • Technical support through application engineers on the phone or at your site
  • Fastest possible technical response for design and QA engineers ... plus other services on request ORDERING INFORMATION - AVAILABLE LISTINGS Note: Preferred listings are highlighted in grey