FBAM030DU SENSORTECHNICS | Alldatasheet

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www.sensortechnics.com FBA Series Mass flow sensors for gases

FEATURES

  • Actual mass flow sensing
  • Sensortechnics PRO services ELECTRICAL CONNECTIONSPECIFICATIONS Maximum ratings Supply voltage2 8 to 15 V typ. 10 ±0.01 V Power consumption FBAL001DB typ. 100 mW all others typ. 50 mW, max. 60 mW Temperature limits Operating -25 to 85°C Storage -40 to 90°C Mechanical shock 100 g (5 drops, 6 axes) Pin 1: Vout Pin 2: +Vs Pin 3: GND Note: 1 sccm denotes standard cubic centimeters per minute

2 Output voltage is ratiometric to supply voltage

To be used with dry gases only The FBA series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor

www.sensortechnics.com FBA Series Mass flow sensors for gases .ontraP egnarwolF )elacslluf( egnahcwolf.xaM 4 egatlovtuptuO tniopmirt@ UD002MABFm ccs002c es/l0.5m ccs002@V5 UD030MABFm ccs03c es/l0.5m ccs52@V4.3 UD100LABFm ccs0001c es/l0.5m ccs0001@V5 BD100LABFm ccs0001±c es/l0.5V 51.0±5 PERFORMANCE CHARACTERISTICS FLOW SENSOR CHARACTERISTICS 3 scitsiretcarahC. niM. pyT. xaMt inU tesffooreZU D002MABF5 9.00 .15 0.1 V UD030MABF0 9.00 .10 1.1 UD100LABF0 9.00 .10 1.1 BD100LABF5 9.20 .35 0.3 siseretsyhdnaytilibataepeRU D002MABF5 .0± gnidaer% )denibmoc(s rehtolla0 .1± tceffeerutarepmeTs t esffOC °58ot52- 5 UD030MABF0 01± VmBD100LABF0 5± srehtolla5 2± napSC °52ot52-U D002MABF0 .4- gnidaer% UD030MABF0 .5± ...100LABF0 .5- C°58ot52U D002MABF0 .4 UD030MABF0 .5± ...100LABF0 .5 emitesnopseR 6 0.10 .3s m edomnommoCe russerp 52i sp Notes: 3 A 5 micron filter is recommended for all devices. 4 Maximum allowable rate of flow change to prevent damage. 5 Shift is relative to 25 °C. 6 Initial warm-up time for signal conditioned circuitry is 1 minute max.

www.sensortechnics.com FBA Series Mass flow sensors for gases FLOW SPECIFICATIONS OUTPUT VS. FLOW CURVES UD002MABFU D030MABFU D100LABFB D100LABF .sserP )rabm( wolF )mccs( 7 .moN V( CD ) .loT V±( CD ) .sserP )rabm( wolF )mccs( 7 .moN V( CD ) .loT V±( CD ) .sserP )rabm( wolF )mccs( 7 .moN V( CD ) .loT V±( CD ) .sserP )rabm( wolF )mccs( 7 .moN V( CD ) .loT V±( CD ) 00.0 0 00.10 1.0 Note: 7 Devices are calibrated in mass flow. Tolerance values apply to calibration type only. FBAM200DU FBAM030DU FBAL001DU FBAL001DB

www.sensortechnics.com FBA Series Mass flow sensors for gases mass: approx. 10.8 g dimensions in mm (inches) OUTLINE DRAWING third angle projection Note: Positiv flow direction is defined as proceeding from port 1 (P1) to port 2 (P2) and results in positive output. P 1 2.9 (0.114) 5.1 (0.20) 23.6 (0.93) 31.5 (1.24) 7.4 (0.29) 1.8 (0.07) 2.8 (0.11) 1.40 (0.055) 54.4 (2.14) 1.0 (0.04) 1.52 (0.06) 23.9 (0.94) 30.5 (1.20) 5.1 (0.20) 4.1 (0.16) 12.7 (0.50) 15.5 (0.61) 2.8 (0.11) 1 2 3 P 2 2.5 (0.10)0.6 (0.025) 8.3 (0.325) 8.4 (0.33) 7.60 (0.30) 6.3 (0.25)

www.sensortechnics.com FBA Series Mass flow sensors for gases Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. egnarwolFs agyrD mccs03...0 UD030MABF mccs002...0 UD002MABF mccs0001...0 UD100LABF mccs0001±...0 BD100LABF Notes: 8 Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates. 9 When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage: Hydrogen typ. 12 V, Helium typ. 15 V 10Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing hydrogen flow and are designated with an "H" at the end of the order number. epytsaG) .xorppa(rotcafnoitcerroC )eH(muileH H(negordyH 2) )rA(nogrA N(negortiN 2) O(negyxO 2) riA )ON(edixocirtiN )OC(edixonomnobraC HC(enahteM 4) HN(ainommA 3) N(edixosuortiN 2 )O ON(edixoidnegortiN 2) OC(edixoidnobraC 2) 5.0 9 7.0 01,9 59.0 0.1 0.1 0.1 0.1 0.1 1.1 1.1 53.1 53.1 53.1 GAS CORRECTION FACTORS 8 Sensortechnics PRO services:

  • Extended guarantee period of 2 years
  • Improved performance characteristics
  • Custom product modifications and adaptations even for small quantities
  • Advanced logistics models for supply inventory and short delivery times
  • Technical support through application engineers on the phone or at your site
  • Fastest possible technical response for design and QA engineers ... plus other services on request ORDERING INFORMATION - AVAILABLE LISTINGS Note: Preferred listings are highlighted in grey